光学自由曲面超精密加工方法综述

介绍了几种典型的光学自由曲面,如离轴非球面、环曲面、Zernike曲面、微结构光学曲面、样条曲面和双对称曲面。评述了目前光学自由曲面超精密加工的方法,包括复制成型、CNC磨削/抛光、飞切加工、慢速溜板伺服和快速刀具伺服等,同时分析对比了上述方法的优点和不足之处,并展望了光学自由曲面的加工方法的发展方向。

微透镜阵列单点金刚石车削补偿技术

为了提高微透镜阵列单点金刚石车削的加工精度与一致性,提出了加工误差的理论模型,并针对其补偿方法进行了理论分析和实验研究。将微透镜阵列加工等效为自由曲面加工,通过建立单点金刚石慢刀伺服切削模型,计算了理论曲面在每一个切削点处沿切削方向的曲率半径;结合刀具等效倾斜角模型和机床加工时延模型,进一步得到了慢刀伺服切削微透镜阵列误差面形的理论预测值。然后,使用原位测量设备测量处理得到实际加工误差,将面形误差理论值与实际加工误差测量值比较,并将面形误差理论值预补偿到加工程序中。实验结果表明,面形误差理论值与实际加工误差测量值具有一致性,两者偏差在[-0.7μm,0.3μm];补偿加工后微透镜阵列的PV值从5.4μm降低到0.6μm。所提出的微透镜阵列的单点金刚石车削加工与补偿方法能够预测误差面形,显著提升面形精度与一致性。

Profile Compensation for Single-Point Diamond Turning of Microlens Array

To improve the efficiency and consistency of machined microlens array using single-point diamond turning technology,a theoretical model of surface form error is proposed in this paper.Then,a compensation method for this model is studied.In the proposed tool equivalent tilt angle model,the microlens array is regarded as a freeform surface.The corresponding curvature radius of the surface at each cutting point along the cutting direction is calculated by establishing a slow slide servo cutting model.In the spatial form error model,the assumption is that surface form error has a linear relationship with z-axis maximum speed vz.An empirical linear equation is obtained and verified,with a maximum deviation of 0.4μm.Then,after machining,the surface form error is measured and processed using on-machine measurement.The theoretical and measured surface form errors are consistent.The surface form error is compensated in the machining program.The peak-to-valley value is reduced from 5.4 to 0.6μm after compensation.Findings show that the single-point diamond turning and compensation method for the microlens array presented in this paper can predict the surface form error and significantly improve machining accuracy and consistency.