In the present work, we explore the solar-blind ultraviolet(UV) photodetectors(PDs) with enhanced photoresponse,fabricated on Ga/Ga2O3 nanocomposite films. Through pre-burying metal Ga layers and thermally post-an...In the present work, we explore the solar-blind ultraviolet(UV) photodetectors(PDs) with enhanced photoresponse,fabricated on Ga/Ga2O3 nanocomposite films. Through pre-burying metal Ga layers and thermally post-annealing the laminated Ga2 O3/Ga/Ga2O3 structures, Ga/Ga2O3 nanocomposite films incorporated with Ga nanospheres are obtained. For the prototype PD, it is found that the photocurrent and photoresponsivity will first increase and then decrease monotonically with the thickness of the pre-buried Ga layer increasing. Each of all PDs shows a spectrum response peak at 260 nm, demonstrating the ability to detect solar-blind UV light. Adjustable photoresponse enhancement factors are achieved by means of the surface plasmon in the nanocomposite films. The PD with a 20 nm thick Ga interlayer exhibits the best solar-blind UV photoresponse characteristics with an extremely low dark current of 8.52 p A at 10-V bias, a very high light-to-dark ratio of ~ 8 × 10~5, a large photoresponsivity of 2.85 A/W at 15-V bias, and a maximum enhancement factor of ~ 220. Our research provides a simple and practical route to high performance solar-blind UV PDs and potential applications in the field of optoelectronics.展开更多
Solar-blind ultraviolet(UV)photodetectors based on p-organic/n-Ga_(2)O_(3) hybrid heterojunctions have attracted extensive attention recently.Herein,the multifunctional solar-blind photodetector based on p-type poly[N...Solar-blind ultraviolet(UV)photodetectors based on p-organic/n-Ga_(2)O_(3) hybrid heterojunctions have attracted extensive attention recently.Herein,the multifunctional solar-blind photodetector based on p-type poly[N-90-heptadecanyl-2,7-carbazole-alt-5,5-(40,70-di-2-thienyl-20,10,30-benzothiadiazole)](PCDTBT)/n-type amorphous Ga_(2)O_(3)(a-Ga_(2)O_(3))is fabricated and investigated,which can work in the phototransistor mode coupling with self-powered mode.With the introduction of PCDTBT,the dark current of such the a-Ga_(2)O_(3)-based photodetector is decreased to 0.48 pA.Meanwhile,the photoresponse parameters of the a-Ga_(2)O_(3)-based photodetector in the phototransistor mode to solar-blind UV light are further increased,that is,responsivity(R),photo-detectivity(D*),and external quantum efficiency(EQE)enhanced to 187 A W^(-1),1.3×10^(16) Jones and 9.1×10^(4)% under the weak light intensity of 11μW cm^(-2),respectively.Thanks to the formation of the built-in field in the p-PCDTBT/n-Ga_(2)O_(3) type-Ⅱ heterojunction,the PCDTBT/Ga_(2)O_(3) multifunctional photodetector shows self-powered behavior.The responsivity of p-PCDTBT/n-Ga_(2)O_(3) multifunctional photodetector is 57.5 mA W^(-1) at zero bias.Such multifunctional p-n hybrid heterojunction-based photodetectors set the stage for realizing high-performance amorphous Ga_(2)O_(3) heterojunction-based photodetectors.展开更多
Liquid-phase exfoliation was employed to synthesize Sr_(2)Nb_(3)O_(10) perovskite nanosheets with thicknesses down to 1.76 nm.Transmission electron microscopy(TEM),atomic force microscope(AFM),X-ray photoelectron spec...Liquid-phase exfoliation was employed to synthesize Sr_(2)Nb_(3)O_(10) perovskite nanosheets with thicknesses down to 1.76 nm.Transmission electron microscopy(TEM),atomic force microscope(AFM),X-ray photoelectron spectrometer(XPS),and other characterization techniques were used to evaluate the atomic structure and chemical composition of the exfoliated nanosheets.A UV photodetector based on individual Sr_(2)Nb_(3)O_(10) nanosheets was prepared to demonstrate the application of an ultraviolet(UV) photodetector.The UV photodetector exhibited outstanding photocurrent and responsivity with a responsivity of 3×10^(5) A·W^(-1) at 5 V bias under 280 nm illumination,a photocurrent of 60 nA,and an on/off ratio of 3×10^(2).展开更多
In this work,a two-step metal organic chemical vapor deposition(MOCVD)method was applied for growingβ-Ga_(2)O_(3) film on c-plane sapphire.Optimized buffer layer growth temperature(T_(B))was found at 700℃ and theβ-...In this work,a two-step metal organic chemical vapor deposition(MOCVD)method was applied for growingβ-Ga_(2)O_(3) film on c-plane sapphire.Optimized buffer layer growth temperature(T_(B))was found at 700℃ and theβ-Ga_(2)O_(3) film with full width at half maximum(FWHM)of 0.66°was achieved.A metal−semiconductor−metal(MSM)solar-blind photodetector(PD)was fabricated based on theβ-Ga_(2)O_(3) film.Ultrahigh responsivity of 1422 A/W@254 nm and photo-to-dark current ratio(PDCR)of 10^(6) at 10 V bias were obtained.The detectivity of 2.5×10^(15) Jones proved that the photodetector has outstanding performance in detecting weak signals.Moreover,the photodetector exhibited superior wavelength selectivity with rejection ratio(R_(250 nm)/R_(400 nm))of 105.These results indicate that the two-step method is a promising approach for preparation of high-qualityβ-Ga_(2)O_(3)films for high-performance solar-blind photodetectors.展开更多
We successfully fabricate a high performanceβ-phase(In_(0.09)Ga_(0.91))_(2)O_(3)single-crystalline film deep ultraviolet(DUV)solar-blind photodetector.The 2-inches high crystalline quality film is hetero-grown on the...We successfully fabricate a high performanceβ-phase(In_(0.09)Ga_(0.91))_(2)O_(3)single-crystalline film deep ultraviolet(DUV)solar-blind photodetector.The 2-inches high crystalline quality film is hetero-grown on the sapphire substrates using the plasma-assisted molecular beam epitaxy(PA-MBE).The smooth InGaO single crystalline film is used to construct the solar-blind DUV detector,which utilized an interdigitated Ti/Au electrode with a metal-semiconductor-metal structure.The device exhibits a low dark current of 40 pA(0 V),while its UV photon responsivity exceeds 450 A/W(50 V)at the peak wavelength of 232 nm with illumination intensity of 0.21 m W/cm^(2)and the UV/VIS rejection ratio(R232 nm/R380 nm)exceeds 4×10^(4).Furthermore,the devices demonstrate ultrafast transient characteristics for DUV signals,with fast-rising and fast-falling times of 80 ns and 420 ns,respectively.This excellent temporal dynamic behavior can be attributed to indium doping can adjust the electronic structure of Ga_(2)O_(3)alloys to enhance the performance of InGaO solar-blind detectors.Additionally,a two-dimensional DUV scanning image is captured using the InGaO photodetector as a sensor in an imaging system.Our results pave the way for future applications of two-dimensional array DUV photodetectors based on the large-scale InGaO heteroepitaxially grown alloy wide bandgap semiconductor films.展开更多
Back-illuminated AlxGal-xN-based dual-band solar-blind ultraviolet (UV) photodetectors (PDs) are realized by a three-terminal n-i-p-i-n heterojunction structure which is grown on sapphire substrate by metal organi...Back-illuminated AlxGal-xN-based dual-band solar-blind ultraviolet (UV) photodetectors (PDs) are realized by a three-terminal n-i-p-i-n heterojunction structure which is grown on sapphire substrate by metal organic chemical vapor deposition (MOCVD). The two p-i-n junctions contained in the heterojunction structure can work separately and independently. Working in the photovoltaic mode, the PDs display peak responsivity of ~10.8 mA/W at 242 nm and ~5.0 mA/W at 257 nm, respectively. The two junctions with different size, whose diameters are 500 μm and 800 μm, exhibit almost the same leakage current of ~1.3× 10-9 A at a reverse bias of 10 V. Therefore, dark current densities of the two junctions are close to 6.6 × 10-7 A/cm2 and 2.6 × 10-7 A/cm2 at -10 V respectively.展开更多
Solar-blind photodetectors are of great interest to a wide range of industrial, civil, environmental, and biological applications. As one of the emerging ultrawide-bandgap semiconductors, gallium oxide(Ga_2O_3) exhibi...Solar-blind photodetectors are of great interest to a wide range of industrial, civil, environmental, and biological applications. As one of the emerging ultrawide-bandgap semiconductors, gallium oxide(Ga_2O_3) exhibits unique advantages over other wide-bandgap semiconductors, especially in developing high-performance solar-blind photodetectors. This paper comprehensively reviews the latest progresses of solar-blind photodetectors based on Ga_2O_3 materials in various forms of bulk single crystal, epitaxial films, nanostructures, and their ternary alloys.The basic working principles of photodetectors and the fundamental properties and synthesis of Ga_2O_3, as well as device processing developments, have been briefly summarized. A special focus is to address the physical mechanism for commonly observed huge photoconductive gains. Benefitting from the rapid development in material epitaxy and device processes, Ga_2O_3-based solar-blind detectors represent to date one of the most prospective solutions for UV detection technology towards versatile applications.展开更多
High-speed solar-blind short wavelength ultraviolet radiation detectors based onκ(ε)-Ga_(2)O_(3)layers with Pt contacts were demonstrated and their properties were studied in detail.Theκ(ε)-Ga_(2)O_(3)layers were ...High-speed solar-blind short wavelength ultraviolet radiation detectors based onκ(ε)-Ga_(2)O_(3)layers with Pt contacts were demonstrated and their properties were studied in detail.Theκ(ε)-Ga_(2)O_(3)layers were deposited by the halide vapor phase epitaxy on patterned GaN templates with sapphire substrates.The spectral dependencies of the photoelectric properties of struc-tures were analyzed in the wavelength interval 200-370 nm.The maximum photo to dark current ratio,responsivity,detectiv-ity and external quantum efficiency of structures were determined as:180.86 arb.un.,3.57 A/W,1.78×10^(12) Hz^(0.5)∙cm·W^(-1) and 2193.6%,respectively,at a wavelength of 200 nm and an applied voltage of 1 V.The enhancement of the photoresponse was caused by the decrease in the Schottky barrier at the Pt/κ(ε)-Ga_(2)O_(3)interface under ultraviolet exposure.The detectors demon-strated could functionalize in self-powered mode due to built-in electric field at the Pt/κ(ε)-Ga_(2)O_(3)interface.The responsivity and external quantum efficiency of the structures at a wavelength of 254 nm and zero applied voltage were 0.9 mA/W and 0.46%,respectively.The rise and decay times in self-powered mode did not exceed 100 ms.展开更多
Ultraviolet(UV) photodetectors have attracted more and more attention due to their great potential applications in missile tracking, flame detecting, pollution monitoring, ozone layer monitoring, and so on. Owing to t...Ultraviolet(UV) photodetectors have attracted more and more attention due to their great potential applications in missile tracking, flame detecting, pollution monitoring, ozone layer monitoring, and so on. Owing to the special characteristics of large bandgap, solution processable, low cost, environmentally friendly, etc., wide bandgap oxide semiconductor materials, such as ZnO, ZnMgO, Ga_2O_3, TiO_2, and Ni O, have gradually become a series of star materials in the field of semiconductor UV detection. In this paper, a review is presented on the development of UV photodetectors based on wide bandgap oxide semiconductor films.展开更多
Ultraviolet(UV) photodetectors(PDs) have drawn great attention in recent years due to their potential application in civil and military fields. Because of its ultrawide bandgap, low cost, strong radiation hardness, an...Ultraviolet(UV) photodetectors(PDs) have drawn great attention in recent years due to their potential application in civil and military fields. Because of its ultrawide bandgap, low cost, strong radiation hardness, and high thermal and chemical stability with high visible-light transparency, Ga_2O_3 is regarded as the most promising candidate for UV detection.Furthermore, the bandgap of Ga_2O_3 is as high as 4.7–4.9 eV, directly corresponding to the solar-blind UV detection band with wavelength less than 280 nm. There is no need of doping in Ga_2O_3 to tune its bandgap, compared to AlGaN, MgZnO,etc, thereby avoiding alloy composition fluctuations and phase separation. At present, solar-blind Ga_2O_3 photodetectors based on single crystal or amorphous Ga_2O_3 are mainly focused on metal–semiconductor–metal and Schottky photodiodes.In this work, the recent achievements of Ga_2O_3 photodetectors are systematically reviewed. The characteristics and performances of different photodetector structures based on single crystal Ga_2O_3 and amorphous Ga_2O_3 thin film are analyzed and compared. Finally, the prospects of Ga_2O_3 UV photodetectors are forecast.展开更多
High response organic ultraviolet photodetectors(UV-PDs) were demonstrated with 4,4',4”- tris[3-methyl-pheny(phenyl)amino]triphenylamine(m-MTDATA) and two Re(Ⅰ) complexes, (bathocuproine)- Re(CO)3CI(Re...High response organic ultraviolet photodetectors(UV-PDs) were demonstrated with 4,4',4”- tris[3-methyl-pheny(phenyl)amino]triphenylamine(m-MTDATA) and two Re(Ⅰ) complexes, (bathocuproine)- Re(CO)3CI(Re-BCP) and (bathophenanthroline)Re(CO)3Cl(Re-Bphen) to act as the electron donor and acceptor, re- spectively. UV-PDs have the configuration of indium tin oxide(ITO)/m-MTDATA(25 nm)/m-MTDATA:Re-complex (25-35 nm)/Re-complex(20 nm)/LiF(l nm)/Al(200 nm) with different blend layer thicknesses of 25, 30 and 35 nm. The optimized PD based on Re-Bphen offers a corrected-dark photocurrent up to 760μA/cm^2 at -10 V, corresponding to a response of 310 mA/W which is among the best values reported for organic UV-PDs. Excellent electron transport ability makes for such high photo-to-electron conversion.展开更多
A self-powered graphene-based photodetector with high performance is particularly useful for device miniaturization and to save energy.Here,we report a graphene/silicon carbide(SiC)-based self-powered ultraviolet ph...A self-powered graphene-based photodetector with high performance is particularly useful for device miniaturization and to save energy.Here,we report a graphene/silicon carbide(SiC)-based self-powered ultraviolet photodetector that exhibits a current responsivity of 7.4 m A/W with a response frequency of over a megahertz under 325-nm laser irradiation.The built-in photovoltage of the photodetector is about four orders of magnitude higher than previously reported results for similar devices.These favorable properties are ascribed to the ingenious device design using the combined advantages of graphene and SiC,two terminal electrodes,and asymmetric light irradiation on one of the electrodes.Importantly,the photon energy is larger than the band gap of SiC.This self-powered photodetector is compatible with modern semiconductor technology and shows potential for applications in ultraviolet imaging and graphene-based integrated circuits.展开更多
A solar-blind photodetector is fabricated on single crystal Ga_2O_3 based on vertical structure Schottky barrier diode. A Cu Schottky contact electrode is prepared in a honeycomb porous structure to increase the ultra...A solar-blind photodetector is fabricated on single crystal Ga_2O_3 based on vertical structure Schottky barrier diode. A Cu Schottky contact electrode is prepared in a honeycomb porous structure to increase the ultraviolet(UV) transmittance.The quantum efficiency is about 400% at 42 V. The Ga_2O_3 photodetector shows a sharp cutoff wavelength at 259 nm with high solar-blind/visible(= 3213) and solar-blind/UV(= 834) rejection ratio. Time-resolved photoresponse of the photodetector is investigated at 253-nm illumination from room temperature(RT) to 85.8℃. The photodetector maintains a high reversibility and response speed, even at high temperatures.展开更多
Gallium oxide(Ga_2O_3) thin films were deposited on a-Al2O3(1120) substrates by pulsed laser deposition(PLD) with different oxygen pressures at 650?C. By reducing the oxygen pressure, mixed-phase Ga_2O_3 films with α...Gallium oxide(Ga_2O_3) thin films were deposited on a-Al2O3(1120) substrates by pulsed laser deposition(PLD) with different oxygen pressures at 650?C. By reducing the oxygen pressure, mixed-phase Ga_2O_3 films with α and β phases can be obtained, and on the basis of this, mixed-phase Ga_2O_3 thin film solar-blind photodetectors(SBPDs) were prepared.Comparing the responsivities of the mixed-phase Ga_2O_3 SBPDs and the single β-Ga_2O_3 SBPDs at a bias voltage of 25 V,it is found that the former has a maximum responsivity of approximately 12 A/W, which is approximately two orders of magnitude larger than that of the latter. This result shows that the mixed-phase structure of Ga_2O_3 thin films can be used to prepare high-responsivity SBPDs. Moreover, the cause of this phenomenon was investigated, which will provide a feasible way to improve the responsivity of Ga_2O_3 thin film SBPDs.展开更多
Solar-blind ultraviolet photodetectors have many advantages, such as low false alarm rates, the ability to detect weak signals, and high signal-to-noise ratios. Among the various functional solar-blind ultraviolet pho...Solar-blind ultraviolet photodetectors have many advantages, such as low false alarm rates, the ability to detect weak signals, and high signal-to-noise ratios. Among the various functional solar-blind ultraviolet photodetectors, Ga-based alloys of AlGaN and Ga_2O_3 are the most commonly adopted channel semiconductor materials and have attracted extensive research attention in the past decades. This review presents an overview of the recent progress in Ga-based solar-blind photodetectors. In case of AlGaN-based solar-blind ultraviolet photodetectors, the response properties can be improved by optimizing the AlN nucleation layer and designing the avalanche structure. On the other hand, we also discuss the morphology and growth methods of Ga_2O_3 nanomaterials and their effect on the performance of the corresponding solarblind photodetectors. The mechanically exfoliated Ga_2O_3 flakes show good potential for ultraviolet detection. Also, Ga_2O_3 nanoflowers and nanowires reveal perfect response to ultraviolet light. Finally, the challenges and future development of Ga-based functional solar-blind ultraviolet photodetectors are summarized.展开更多
Due to the wide application of UV-A(320 nm–400 nm)and UV-C(200 nm–280 nm)photodetectors,dual-wavelength(UV-A/UV-C)photodetectors are promising for future markets.A dual-wavelength UV photodetector based on vertical(...Due to the wide application of UV-A(320 nm–400 nm)and UV-C(200 nm–280 nm)photodetectors,dual-wavelength(UV-A/UV-C)photodetectors are promising for future markets.A dual-wavelength UV photodetector based on vertical(Al,Ga)N nanowires and graphene has been demonstrated successfully,in which graphene is used as a transparent electrode.Both UV-A and UV-C responses can be clearly detected by the device,and the rejection ratio(R254 nm/R450 nm)exceeds35 times at an applied bias of-2 V.The short response time of the device is less than 20 ms.Furthermore,the underlying mechanism of double ultraviolet responses has also been analyzed systematically.The dual-wavelength detections could mainly result from the appropriate ratio of the thicknesses and the enough energy band difference of(Al,Ga)N and Ga N sections.展开更多
An AIGaN-based back-illuminated ultraviolet p-i-n detector is designed and its performance is analysed both simulately and experimentally. The width of p- and i-regions has been optimized to the best theoretic values....An AIGaN-based back-illuminated ultraviolet p-i-n detector is designed and its performance is analysed both simulately and experimentally. The width of p- and i-regions has been optimized to the best theoretic values. It is indicated that the changing of responsivity with increase of bias can not be attributed to the expansion of depletion layer as it is believed, but to two reasons: 1) the effect of GaN/AlGaN heterojunction barrier to block the electrons decreases with higher bias and 2) the recombination rate of excess carriers decreases due to the building up of an electric field in depletion region. At zero bias, the simulated responsivity reaches its maximum of 0.12 A/W with quantum efficiency of 55.1%. The measured peak responsivity is more than 0.09 A/W with quantum efficiency greater than 41.6%. The experimental data are almost consistent with the results of the simulation.展开更多
In this paper, we report a Schottky ultraviolet photodetector based on poly(3,4-ethylenedioxy-thiophene)poly(styrenesulfonate)(PEDOT:PSS) transparent electrode contacts to Mg0.1Zn0.9O. The I-V characteristic cu...In this paper, we report a Schottky ultraviolet photodetector based on poly(3,4-ethylenedioxy-thiophene)poly(styrenesulfonate)(PEDOT:PSS) transparent electrode contacts to Mg0.1Zn0.9O. The I-V characteristic curves of the device are measured in the dark condition and under the illumination of a 340-nm UV light. The device shows a typical rectifying behavior with a current rectification ratio of 103 at ±2 V, which exhibits a good Schottky behavior. The phototo-dark current ratio is high, which is 1×103at-4 V. A peak response of 0.156 A/W at 340 nm is observed. The device also exhibits a wide response from 250 nm to 340 nm, with a response larger than 0.1 A/W. It covers the UV-B region(280 nm-320 nm), which makes the device very suitable for the detection of UV-B light.展开更多
We choose 8-hydroxyquinoline derivative-metal complexes(Beq,Mgq,and Znq) as the acceptors(A) and 4,4',4”-tri-(2-methylphenyl phenylamino) triphenylaine(m-MTDATA) as the donor(D) respectively to study the e...We choose 8-hydroxyquinoline derivative-metal complexes(Beq,Mgq,and Znq) as the acceptors(A) and 4,4',4”-tri-(2-methylphenyl phenylamino) triphenylaine(m-MTDATA) as the donor(D) respectively to study the existing energy transfer process in the organic ultraviolet(UV) photodetector(PD),which has an important influence on the sensitivity of PDs.The energy transfer process from D to A without exciplex formation is discussed,differing from the working mechanism of previous PDs with Gaq[Zisheng Su,Wenlian Li,Bei Chu,Tianle Li,Jianzhuo Zhu,Guang Zhang,Fei Yan,Xiao Li,Yiren Chen and Chun-Sing Lee 2008 Appl.Phys.Lett.93 103309)]and REq[J.B.Wang,W.L.Li,B.Chu,L.L.Chen,G.Zhang,Z.S.Su,Y.R.Chen,D.F.Yang,J.Z.Zhu,S.H.Wu,F.Yan,H.H.Liu,C.S.Lee 2010 Org.Electron.111301]used as an A material.Under 365-nm UV irradiation with an intensity of 1.2 mW/cm^2,the m-MTDATA:Beq blend device with a weight ratio of 1:1 shows a response of 192 mAAV with a detectivity of 6.5 × 10^(11) Jones,which exceeds those of PDs based on Mgq(146 mA/W) and Znq(182 mA/W) due to better energy level alignment between m-MTDATA/Beq and lower radiative decay.More photophysics processes of the PDs involved are discussed in detail.展开更多
The slower response speed is the main problem in the application of ZnO quantum dots(QDs)photodetector,which has been commonly attributed to the presence of excess oxygen vacancy defects and oxygen adsorption/desorpti...The slower response speed is the main problem in the application of ZnO quantum dots(QDs)photodetector,which has been commonly attributed to the presence of excess oxygen vacancy defects and oxygen adsorption/desorption processes.However,the detailed mechanism is still not very clear.Herein,the properties of ZnO QDs and their photodetectors with different amounts of oxygen vacancy(VO)defects controlled by hydrogen peroxide(H_(2)O_(2))solution treatment have been investigated.After H_(2)O_(2) solution treatment,VO concentration of ZnO QDs decreased.The H_(2)O_(2) solution-treated device has a higher photocurrent and a lower dark current.Meanwhile,with the increase in VO concentration of ZnO QDs,the response speed of the device has been improved due to the increase of oxygen adsorption/desorption rate.More interestingly,the response speed of the device became less sensitive to temperature and oxygen concentration with the increase of VO defects.The findings in this work clarify that the surface VO defects of ZnO QDs could enhance the photoresponse speed,which is helpful for sensor designing.展开更多
基金supported by the National Natural Science Foundation of China(Grant Nos.11674405 and 11675280)the Fund from the Laboratory of Microfabrication in Institute of Physics,Chinese Academy of Sciences
文摘In the present work, we explore the solar-blind ultraviolet(UV) photodetectors(PDs) with enhanced photoresponse,fabricated on Ga/Ga2O3 nanocomposite films. Through pre-burying metal Ga layers and thermally post-annealing the laminated Ga2 O3/Ga/Ga2O3 structures, Ga/Ga2O3 nanocomposite films incorporated with Ga nanospheres are obtained. For the prototype PD, it is found that the photocurrent and photoresponsivity will first increase and then decrease monotonically with the thickness of the pre-buried Ga layer increasing. Each of all PDs shows a spectrum response peak at 260 nm, demonstrating the ability to detect solar-blind UV light. Adjustable photoresponse enhancement factors are achieved by means of the surface plasmon in the nanocomposite films. The PD with a 20 nm thick Ga interlayer exhibits the best solar-blind UV photoresponse characteristics with an extremely low dark current of 8.52 p A at 10-V bias, a very high light-to-dark ratio of ~ 8 × 10~5, a large photoresponsivity of 2.85 A/W at 15-V bias, and a maximum enhancement factor of ~ 220. Our research provides a simple and practical route to high performance solar-blind UV PDs and potential applications in the field of optoelectronics.
基金National Key Research and Development Program of China,Grant/Award Numbers:2021YFA0715600,2021YFA0717700National Natural Science Foundation of China,Grant/Award Numbers:52192610,62274127,62304163,62374128+5 种基金State Key Laboratory of Infrared Physics,Grant/Award Number:SITP-NLIST-ZD-2023-03Songshan Lake Materials Laboratory,Grant/Award Number:2023SLABFN02Wuhu and Xidian University special fund for industry-university-research cooperation,Grant/Award Number:XWYCXY-012021004China Postdoctoral Science Foundation,Grant/Award Number:2023TQ0255Fundamental Research Funds for the Central UniversitiesInnovation Fund of Xidian University。
文摘Solar-blind ultraviolet(UV)photodetectors based on p-organic/n-Ga_(2)O_(3) hybrid heterojunctions have attracted extensive attention recently.Herein,the multifunctional solar-blind photodetector based on p-type poly[N-90-heptadecanyl-2,7-carbazole-alt-5,5-(40,70-di-2-thienyl-20,10,30-benzothiadiazole)](PCDTBT)/n-type amorphous Ga_(2)O_(3)(a-Ga_(2)O_(3))is fabricated and investigated,which can work in the phototransistor mode coupling with self-powered mode.With the introduction of PCDTBT,the dark current of such the a-Ga_(2)O_(3)-based photodetector is decreased to 0.48 pA.Meanwhile,the photoresponse parameters of the a-Ga_(2)O_(3)-based photodetector in the phototransistor mode to solar-blind UV light are further increased,that is,responsivity(R),photo-detectivity(D*),and external quantum efficiency(EQE)enhanced to 187 A W^(-1),1.3×10^(16) Jones and 9.1×10^(4)% under the weak light intensity of 11μW cm^(-2),respectively.Thanks to the formation of the built-in field in the p-PCDTBT/n-Ga_(2)O_(3) type-Ⅱ heterojunction,the PCDTBT/Ga_(2)O_(3) multifunctional photodetector shows self-powered behavior.The responsivity of p-PCDTBT/n-Ga_(2)O_(3) multifunctional photodetector is 57.5 mA W^(-1) at zero bias.Such multifunctional p-n hybrid heterojunction-based photodetectors set the stage for realizing high-performance amorphous Ga_(2)O_(3) heterojunction-based photodetectors.
基金Funded by the National Natural Science Foundation of China(Nos.51872214 and 52172124)the Fundamental Research Funds for the Central Universities(WUT:2021Ⅲ019JC and 2018Ⅲ041GX)。
文摘Liquid-phase exfoliation was employed to synthesize Sr_(2)Nb_(3)O_(10) perovskite nanosheets with thicknesses down to 1.76 nm.Transmission electron microscopy(TEM),atomic force microscope(AFM),X-ray photoelectron spectrometer(XPS),and other characterization techniques were used to evaluate the atomic structure and chemical composition of the exfoliated nanosheets.A UV photodetector based on individual Sr_(2)Nb_(3)O_(10) nanosheets was prepared to demonstrate the application of an ultraviolet(UV) photodetector.The UV photodetector exhibited outstanding photocurrent and responsivity with a responsivity of 3×10^(5) A·W^(-1) at 5 V bias under 280 nm illumination,a photocurrent of 60 nA,and an on/off ratio of 3×10^(2).
基金This work was supported by the National Key Research and Development Program of China(Grant No.2020YFB2206103)。
文摘In this work,a two-step metal organic chemical vapor deposition(MOCVD)method was applied for growingβ-Ga_(2)O_(3) film on c-plane sapphire.Optimized buffer layer growth temperature(T_(B))was found at 700℃ and theβ-Ga_(2)O_(3) film with full width at half maximum(FWHM)of 0.66°was achieved.A metal−semiconductor−metal(MSM)solar-blind photodetector(PD)was fabricated based on theβ-Ga_(2)O_(3) film.Ultrahigh responsivity of 1422 A/W@254 nm and photo-to-dark current ratio(PDCR)of 10^(6) at 10 V bias were obtained.The detectivity of 2.5×10^(15) Jones proved that the photodetector has outstanding performance in detecting weak signals.Moreover,the photodetector exhibited superior wavelength selectivity with rejection ratio(R_(250 nm)/R_(400 nm))of 105.These results indicate that the two-step method is a promising approach for preparation of high-qualityβ-Ga_(2)O_(3)films for high-performance solar-blind photodetectors.
基金the National Natural Science Foundation of China(Grant Nos.U22A2073,11974433,91833301,and 11974122)。
文摘We successfully fabricate a high performanceβ-phase(In_(0.09)Ga_(0.91))_(2)O_(3)single-crystalline film deep ultraviolet(DUV)solar-blind photodetector.The 2-inches high crystalline quality film is hetero-grown on the sapphire substrates using the plasma-assisted molecular beam epitaxy(PA-MBE).The smooth InGaO single crystalline film is used to construct the solar-blind DUV detector,which utilized an interdigitated Ti/Au electrode with a metal-semiconductor-metal structure.The device exhibits a low dark current of 40 pA(0 V),while its UV photon responsivity exceeds 450 A/W(50 V)at the peak wavelength of 232 nm with illumination intensity of 0.21 m W/cm^(2)and the UV/VIS rejection ratio(R232 nm/R380 nm)exceeds 4×10^(4).Furthermore,the devices demonstrate ultrafast transient characteristics for DUV signals,with fast-rising and fast-falling times of 80 ns and 420 ns,respectively.This excellent temporal dynamic behavior can be attributed to indium doping can adjust the electronic structure of Ga_(2)O_(3)alloys to enhance the performance of InGaO solar-blind detectors.Additionally,a two-dimensional DUV scanning image is captured using the InGaO photodetector as a sensor in an imaging system.Our results pave the way for future applications of two-dimensional array DUV photodetectors based on the large-scale InGaO heteroepitaxially grown alloy wide bandgap semiconductor films.
文摘Back-illuminated AlxGal-xN-based dual-band solar-blind ultraviolet (UV) photodetectors (PDs) are realized by a three-terminal n-i-p-i-n heterojunction structure which is grown on sapphire substrate by metal organic chemical vapor deposition (MOCVD). The two p-i-n junctions contained in the heterojunction structure can work separately and independently. Working in the photovoltaic mode, the PDs display peak responsivity of ~10.8 mA/W at 242 nm and ~5.0 mA/W at 257 nm, respectively. The two junctions with different size, whose diameters are 500 μm and 800 μm, exhibit almost the same leakage current of ~1.3× 10-9 A at a reverse bias of 10 V. Therefore, dark current densities of the two junctions are close to 6.6 × 10-7 A/cm2 and 2.6 × 10-7 A/cm2 at -10 V respectively.
基金National Key Research and Development Project(2017YFB0403003,2018YFB0406502)National Natural Science Foundation of China(NSFC)(61322403,61774081)+4 种基金State Key Laboratory of Wide-Bandgap Semiconductor Power Electric Devices(2017KF001)Natural Science Foundation of Jiangsu Province(BK20161401)State Key R&D Project of Jiangsu(BE2018115)Fundamental Research Funds for the Central Universities(021014380085,021014380093)Postgraduate Research and Practice Innovation Program of Jiangsu Province
文摘Solar-blind photodetectors are of great interest to a wide range of industrial, civil, environmental, and biological applications. As one of the emerging ultrawide-bandgap semiconductors, gallium oxide(Ga_2O_3) exhibits unique advantages over other wide-bandgap semiconductors, especially in developing high-performance solar-blind photodetectors. This paper comprehensively reviews the latest progresses of solar-blind photodetectors based on Ga_2O_3 materials in various forms of bulk single crystal, epitaxial films, nanostructures, and their ternary alloys.The basic working principles of photodetectors and the fundamental properties and synthesis of Ga_2O_3, as well as device processing developments, have been briefly summarized. A special focus is to address the physical mechanism for commonly observed huge photoconductive gains. Benefitting from the rapid development in material epitaxy and device processes, Ga_2O_3-based solar-blind detectors represent to date one of the most prospective solutions for UV detection technology towards versatile applications.
基金Research of the photoelectric properties of theκ(ε)-Ga_(2)O_(3)films was supported by the Russian Science Foundation,grant number 20-79-10043-P.Fabrication of the ultraviolet detectors based on theκ(ε)-Ga_(2)O_(3)layers was supported by the grant under the Decree of the Government of the Rus-sian Federation No.220 of 09 April 2010(Agreement No.075-15-2022-1132 of 01 July 2022)Research of the structural prop-erties of theκ(ε)-Ga_(2)O_(3)was supported by the St.Petersburg State University,grant number 94034685.
文摘High-speed solar-blind short wavelength ultraviolet radiation detectors based onκ(ε)-Ga_(2)O_(3)layers with Pt contacts were demonstrated and their properties were studied in detail.Theκ(ε)-Ga_(2)O_(3)layers were deposited by the halide vapor phase epitaxy on patterned GaN templates with sapphire substrates.The spectral dependencies of the photoelectric properties of struc-tures were analyzed in the wavelength interval 200-370 nm.The maximum photo to dark current ratio,responsivity,detectiv-ity and external quantum efficiency of structures were determined as:180.86 arb.un.,3.57 A/W,1.78×10^(12) Hz^(0.5)∙cm·W^(-1) and 2193.6%,respectively,at a wavelength of 200 nm and an applied voltage of 1 V.The enhancement of the photoresponse was caused by the decrease in the Schottky barrier at the Pt/κ(ε)-Ga_(2)O_(3)interface under ultraviolet exposure.The detectors demon-strated could functionalize in self-powered mode due to built-in electric field at the Pt/κ(ε)-Ga_(2)O_(3)interface.The responsivity and external quantum efficiency of the structures at a wavelength of 254 nm and zero applied voltage were 0.9 mA/W and 0.46%,respectively.The rise and decay times in self-powered mode did not exceed 100 ms.
基金Project supported by the National Natural Science Foundation of China(Grant Nos.61475153 and 61605200)the Jilin Province Young and Middle-aged Science and Technology Innovation Leaders and Team Project,China(Grant No.20180519023JH)+1 种基金the 100 Talents Program of the Chinese Academy of Sciencesthe Science Fund for Excellent Young Scholars of Jilin Province,China(Grant No.20180520173JH)
文摘Ultraviolet(UV) photodetectors have attracted more and more attention due to their great potential applications in missile tracking, flame detecting, pollution monitoring, ozone layer monitoring, and so on. Owing to the special characteristics of large bandgap, solution processable, low cost, environmentally friendly, etc., wide bandgap oxide semiconductor materials, such as ZnO, ZnMgO, Ga_2O_3, TiO_2, and Ni O, have gradually become a series of star materials in the field of semiconductor UV detection. In this paper, a review is presented on the development of UV photodetectors based on wide bandgap oxide semiconductor films.
基金Project supported by the National Natural Science Foundation of China(Grant Nos.61521064,61522408,61574169,61334007,61474136,and 61574166)the Ministry of Science and Technology of China(Grant Nos.2018YFB0406504,2016YFA0201803,2016YFA0203800,and 2017YFB0405603)+1 种基金the Key Research Program of Frontier Sciences of Chinese Academy of Sciences(Grant Nos.QYZDB-SSW-JSC048 and QYZDY-SSW-JSC001)the Beijing Municipal Science and Technology Project,China(Grant No.Z171100002017011)
文摘Ultraviolet(UV) photodetectors(PDs) have drawn great attention in recent years due to their potential application in civil and military fields. Because of its ultrawide bandgap, low cost, strong radiation hardness, and high thermal and chemical stability with high visible-light transparency, Ga_2O_3 is regarded as the most promising candidate for UV detection.Furthermore, the bandgap of Ga_2O_3 is as high as 4.7–4.9 eV, directly corresponding to the solar-blind UV detection band with wavelength less than 280 nm. There is no need of doping in Ga_2O_3 to tune its bandgap, compared to AlGaN, MgZnO,etc, thereby avoiding alloy composition fluctuations and phase separation. At present, solar-blind Ga_2O_3 photodetectors based on single crystal or amorphous Ga_2O_3 are mainly focused on metal–semiconductor–metal and Schottky photodiodes.In this work, the recent achievements of Ga_2O_3 photodetectors are systematically reviewed. The characteristics and performances of different photodetector structures based on single crystal Ga_2O_3 and amorphous Ga_2O_3 thin film are analyzed and compared. Finally, the prospects of Ga_2O_3 UV photodetectors are forecast.
基金Supported by the National Natural Science Foundation of China(No.60978059)the Program for New Century Excellent Talents in Universities of China(No.NCET-10-0176)+1 种基金the Key Project of Ministry of Education of China(No.210053)the Natural Science Foundation of Jilin Province,China(Nos.20101543 and 20100549)
文摘High response organic ultraviolet photodetectors(UV-PDs) were demonstrated with 4,4',4”- tris[3-methyl-pheny(phenyl)amino]triphenylamine(m-MTDATA) and two Re(Ⅰ) complexes, (bathocuproine)- Re(CO)3CI(Re-BCP) and (bathophenanthroline)Re(CO)3Cl(Re-Bphen) to act as the electron donor and acceptor, re- spectively. UV-PDs have the configuration of indium tin oxide(ITO)/m-MTDATA(25 nm)/m-MTDATA:Re-complex (25-35 nm)/Re-complex(20 nm)/LiF(l nm)/Al(200 nm) with different blend layer thicknesses of 25, 30 and 35 nm. The optimized PD based on Re-Bphen offers a corrected-dark photocurrent up to 760μA/cm^2 at -10 V, corresponding to a response of 310 mA/W which is among the best values reported for organic UV-PDs. Excellent electron transport ability makes for such high photo-to-electron conversion.
基金Project supported by the National Key Basic Research Program of China(Grant Nos.2011CB932700 and 2013CBA01603)the National Natural Science Foundation of China(Grant Nos.51472265 and 51272279)
文摘A self-powered graphene-based photodetector with high performance is particularly useful for device miniaturization and to save energy.Here,we report a graphene/silicon carbide(SiC)-based self-powered ultraviolet photodetector that exhibits a current responsivity of 7.4 m A/W with a response frequency of over a megahertz under 325-nm laser irradiation.The built-in photovoltage of the photodetector is about four orders of magnitude higher than previously reported results for similar devices.These favorable properties are ascribed to the ingenious device design using the combined advantages of graphene and SiC,two terminal electrodes,and asymmetric light irradiation on one of the electrodes.Importantly,the photon energy is larger than the band gap of SiC.This self-powered photodetector is compatible with modern semiconductor technology and shows potential for applications in ultraviolet imaging and graphene-based integrated circuits.
基金Project supported by National Key Research and Development Plan of China(Grant Nos.2016YFB0400600 and 2016YFB0400601)the National Natural Science Foundation of China(Grant Nos.61574026,11675198,61774072,and 11405017)+2 种基金the Natural Science Foundation of Liaoning Province,China(Grant Nos.201602453 and 201602176)China Postdoctoral Science Foundation Funded Project(Grant No.2016M591434)the Dalian Science and Technology Innovation Fund(Grant No.2018J12GX060)
文摘A solar-blind photodetector is fabricated on single crystal Ga_2O_3 based on vertical structure Schottky barrier diode. A Cu Schottky contact electrode is prepared in a honeycomb porous structure to increase the ultraviolet(UV) transmittance.The quantum efficiency is about 400% at 42 V. The Ga_2O_3 photodetector shows a sharp cutoff wavelength at 259 nm with high solar-blind/visible(= 3213) and solar-blind/UV(= 834) rejection ratio. Time-resolved photoresponse of the photodetector is investigated at 253-nm illumination from room temperature(RT) to 85.8℃. The photodetector maintains a high reversibility and response speed, even at high temperatures.
基金Project supported by the National Natural Science Foundation of China(Grant Nos.51872187,51302174,11774241,and 61704111)the National Key Research and Development Program of China(Grant No.2017YFB0400304)+3 种基金the Natural Science Foundation of Guangdong Province,China(Grant Nos.2016A030313060 and 2017A030310524)the Project of Department of Education of Guangdong Province,China(Grant No.2014KTSCX110)the Fundamental Research Project of Shenzhen,China(Grant No.JCYJ20180206162132006)the Science and Technology Foundation of Shenzhen,China(Grant No.JCYJ2015-2018)
文摘Gallium oxide(Ga_2O_3) thin films were deposited on a-Al2O3(1120) substrates by pulsed laser deposition(PLD) with different oxygen pressures at 650?C. By reducing the oxygen pressure, mixed-phase Ga_2O_3 films with α and β phases can be obtained, and on the basis of this, mixed-phase Ga_2O_3 thin film solar-blind photodetectors(SBPDs) were prepared.Comparing the responsivities of the mixed-phase Ga_2O_3 SBPDs and the single β-Ga_2O_3 SBPDs at a bias voltage of 25 V,it is found that the former has a maximum responsivity of approximately 12 A/W, which is approximately two orders of magnitude larger than that of the latter. This result shows that the mixed-phase structure of Ga_2O_3 thin films can be used to prepare high-responsivity SBPDs. Moreover, the cause of this phenomenon was investigated, which will provide a feasible way to improve the responsivity of Ga_2O_3 thin film SBPDs.
基金Project supported by the National Key Reserch and Development Program of China(Grant No.2017YFA0305500)the Fund from Science Technology and Innovation Committee of Shenzhen Municipality,China(Grant No.JCYJ20170307093131123)+6 种基金the National Natural Science Foundation of China(Grant No.61504044)the Key Research and Development Program of Shandong Province,China(Grant Nos.2018GGX101027,2017GGX201002,2017CXGC0412,2016ZDJS09A05,and 2016GGX4101)Shandong Provincial Natural Science Foundation,China(Grant No.ZR2017MF037)"Qilu Young Scholar" Program of Shandong UniversityYantai "13th Five-Year" Marine Economic Innovation and Development Demonstration City Project,China(Grant No.YHCXZB-L-201703)the Union Funds of Guizhou Science and Technology Department and Guizhou Minzu University,China(Grant No.LH20157221)the Fundamental Research Funds of Shandong University,China(Grant Nos.2018WLJH87 and 2017TB0021)
文摘Solar-blind ultraviolet photodetectors have many advantages, such as low false alarm rates, the ability to detect weak signals, and high signal-to-noise ratios. Among the various functional solar-blind ultraviolet photodetectors, Ga-based alloys of AlGaN and Ga_2O_3 are the most commonly adopted channel semiconductor materials and have attracted extensive research attention in the past decades. This review presents an overview of the recent progress in Ga-based solar-blind photodetectors. In case of AlGaN-based solar-blind ultraviolet photodetectors, the response properties can be improved by optimizing the AlN nucleation layer and designing the avalanche structure. On the other hand, we also discuss the morphology and growth methods of Ga_2O_3 nanomaterials and their effect on the performance of the corresponding solarblind photodetectors. The mechanically exfoliated Ga_2O_3 flakes show good potential for ultraviolet detection. Also, Ga_2O_3 nanoflowers and nanowires reveal perfect response to ultraviolet light. Finally, the challenges and future development of Ga-based functional solar-blind ultraviolet photodetectors are summarized.
基金the National Key Research and Development Program of China(Grant No.2018YFB0406602)Natural Science Foundation of Jiangsu Province,China(Grant No.BK20180252)+6 种基金Key Research Program of Frontier Sciences,CAS(Grant No.ZDBS-LY-JSC034)the National Natural Science Foundation of China(Grant Nos.61804163,61875224,and 61827823)the Key Research and Development Program of Jiangsu Province,China(Grant No.BE2018005)Natural Science Foundation of Jiangxi Province,China(Grant No.20192BBEL50033)Research Program of Scientific Instrument,Equipment of CAS(Grant No.YJKYYQ20200073)SINANO(Grant Nos.Y8AAQ21001 and Y4JAQ21001)Vacuum Interconnected Nanotech Workstation(Grant Nos.Nano-X and B2006)。
文摘Due to the wide application of UV-A(320 nm–400 nm)and UV-C(200 nm–280 nm)photodetectors,dual-wavelength(UV-A/UV-C)photodetectors are promising for future markets.A dual-wavelength UV photodetector based on vertical(Al,Ga)N nanowires and graphene has been demonstrated successfully,in which graphene is used as a transparent electrode.Both UV-A and UV-C responses can be clearly detected by the device,and the rejection ratio(R254 nm/R450 nm)exceeds35 times at an applied bias of-2 V.The short response time of the device is less than 20 ms.Furthermore,the underlying mechanism of double ultraviolet responses has also been analyzed systematically.The dual-wavelength detections could mainly result from the appropriate ratio of the thicknesses and the enough energy band difference of(Al,Ga)N and Ga N sections.
文摘An AIGaN-based back-illuminated ultraviolet p-i-n detector is designed and its performance is analysed both simulately and experimentally. The width of p- and i-regions has been optimized to the best theoretic values. It is indicated that the changing of responsivity with increase of bias can not be attributed to the expansion of depletion layer as it is believed, but to two reasons: 1) the effect of GaN/AlGaN heterojunction barrier to block the electrons decreases with higher bias and 2) the recombination rate of excess carriers decreases due to the building up of an electric field in depletion region. At zero bias, the simulated responsivity reaches its maximum of 0.12 A/W with quantum efficiency of 55.1%. The measured peak responsivity is more than 0.09 A/W with quantum efficiency greater than 41.6%. The experimental data are almost consistent with the results of the simulation.
基金Project supported by the National Natural Science Foundation of China(Grant No.50972007)the National Basic Research Program of China(Grant No.2011CB932703)+1 种基金the National Natural Science Foundation for Distinguished Young Scholars of China(Grant No.60825407)the Opened Fund of the State Key Laboratory on Integrated Optoelectronics
文摘In this paper, we report a Schottky ultraviolet photodetector based on poly(3,4-ethylenedioxy-thiophene)poly(styrenesulfonate)(PEDOT:PSS) transparent electrode contacts to Mg0.1Zn0.9O. The I-V characteristic curves of the device are measured in the dark condition and under the illumination of a 340-nm UV light. The device shows a typical rectifying behavior with a current rectification ratio of 103 at ±2 V, which exhibits a good Schottky behavior. The phototo-dark current ratio is high, which is 1×103at-4 V. A peak response of 0.156 A/W at 340 nm is observed. The device also exhibits a wide response from 250 nm to 340 nm, with a response larger than 0.1 A/W. It covers the UV-B region(280 nm-320 nm), which makes the device very suitable for the detection of UV-B light.
基金supported by the National Natural Science Foundation of China(Grant Nos.61371046,61405026,61474016,and 61421002)China Postdoctoral Science Foundation(Grant No.2014M552330)
文摘We choose 8-hydroxyquinoline derivative-metal complexes(Beq,Mgq,and Znq) as the acceptors(A) and 4,4',4”-tri-(2-methylphenyl phenylamino) triphenylaine(m-MTDATA) as the donor(D) respectively to study the existing energy transfer process in the organic ultraviolet(UV) photodetector(PD),which has an important influence on the sensitivity of PDs.The energy transfer process from D to A without exciplex formation is discussed,differing from the working mechanism of previous PDs with Gaq[Zisheng Su,Wenlian Li,Bei Chu,Tianle Li,Jianzhuo Zhu,Guang Zhang,Fei Yan,Xiao Li,Yiren Chen and Chun-Sing Lee 2008 Appl.Phys.Lett.93 103309)]and REq[J.B.Wang,W.L.Li,B.Chu,L.L.Chen,G.Zhang,Z.S.Su,Y.R.Chen,D.F.Yang,J.Z.Zhu,S.H.Wu,F.Yan,H.H.Liu,C.S.Lee 2010 Org.Electron.111301]used as an A material.Under 365-nm UV irradiation with an intensity of 1.2 mW/cm^2,the m-MTDATA:Beq blend device with a weight ratio of 1:1 shows a response of 192 mAAV with a detectivity of 6.5 × 10^(11) Jones,which exceeds those of PDs based on Mgq(146 mA/W) and Znq(182 mA/W) due to better energy level alignment between m-MTDATA/Beq and lower radiative decay.More photophysics processes of the PDs involved are discussed in detail.
基金Project supported by the National Natural Science Foundation of China(Grant Nos.62074148,61875194,11727902,12074372,11774341,11974344,61975204,and 11804335)the Youth Innovation Promotion Association of the Chinese Academy of Sciences(Grant No.2020225)the Open Project of the State Key Laboratory of Luminescence and Applications(Grant Nos.SKLA-2020-02 and SKLA-2020-06).
文摘The slower response speed is the main problem in the application of ZnO quantum dots(QDs)photodetector,which has been commonly attributed to the presence of excess oxygen vacancy defects and oxygen adsorption/desorption processes.However,the detailed mechanism is still not very clear.Herein,the properties of ZnO QDs and their photodetectors with different amounts of oxygen vacancy(VO)defects controlled by hydrogen peroxide(H_(2)O_(2))solution treatment have been investigated.After H_(2)O_(2) solution treatment,VO concentration of ZnO QDs decreased.The H_(2)O_(2) solution-treated device has a higher photocurrent and a lower dark current.Meanwhile,with the increase in VO concentration of ZnO QDs,the response speed of the device has been improved due to the increase of oxygen adsorption/desorption rate.More interestingly,the response speed of the device became less sensitive to temperature and oxygen concentration with the increase of VO defects.The findings in this work clarify that the surface VO defects of ZnO QDs could enhance the photoresponse speed,which is helpful for sensor designing.