In this paper,a solidly mounted resonator(SMR)was designed with nanocrystalline diamond(NCD)as the high acoustic impedance material of Bragg reflector to improve the quality.We used Mathcad to investigate the effect o...In this paper,a solidly mounted resonator(SMR)was designed with nanocrystalline diamond(NCD)as the high acoustic impedance material of Bragg reflector to improve the quality.We used Mathcad to investigate the effect of the Bragg reflector on the performance of the SMR,as well as the influence of different materials and the number of layers of Bragg reflector on the quality factor Q.Results show that the Bragg reflector could reduce energy loss effectively,and the higher the impedance of the high acoustic impedance layer,the better the SMR.The parasitic factors of the SMR using two high acoustic impedance materials,tungsten(W)and NCD,were also simulated by an Advanced Design System(ADS)using the Mason model.It was found that the parasitic effect caused by metal would significantly decrease the Q factor of the SMR.In the frequency range below 6 GHz,within which the SMR works normally,NCD performed better than W.Therefore,NCD is a better choice of high acoustic impedance material in the design of the SMR,with improved quality at high frequency and low loss.The optimum number of layers of Bragg reflector is 6.展开更多
提出了一种针对于生物传感应用的薄膜体声波谐振(Thin film bulk acoustic resonator,FBAR)质量传感器。薄膜体声波谐振器谐振频率非常高(GHz数量级),同时具有很高的品质因数,因此基于这种器件的质量传感器具有非常高的质量灵敏度。提...提出了一种针对于生物传感应用的薄膜体声波谐振(Thin film bulk acoustic resonator,FBAR)质量传感器。薄膜体声波谐振器谐振频率非常高(GHz数量级),同时具有很高的品质因数,因此基于这种器件的质量传感器具有非常高的质量灵敏度。提出了三对全金属Al-W层作为布拉格声学反射层的FBAR,采用AlN作为压电层,制备出了固态装配型FBAR传感器。通过淀积不同厚度Al层顶电极,对器件的质量灵敏度进行了分析,得到质量传感器串联谐振频率在2.8GHz附近,质量响应度达到5×10-4ng/Hz/cm2,可以实现分子量级的质量传感。展开更多
本文研制了一种基于磁控溅射掺镁氧化锌(Mg_xZn_(1-x)O)压电薄膜的S波段固体装配型体声波谐振器(SMR-FBAR)。相比传统的氧化锌(ZnO)薄膜,Mg_xZn_(1-x)O具有高纵波声速,高电阻率优点,而且Mg原子以替位或填隙的方式进入晶格,没有改变ZnO...本文研制了一种基于磁控溅射掺镁氧化锌(Mg_xZn_(1-x)O)压电薄膜的S波段固体装配型体声波谐振器(SMR-FBAR)。相比传统的氧化锌(ZnO)薄膜,Mg_xZn_(1-x)O具有高纵波声速,高电阻率优点,而且Mg原子以替位或填隙的方式进入晶格,没有改变ZnO的铅锌矿结构。通过优化磁控溅射参数的方法,获得了c轴方向生长良好的Mg_xZn_(1-x)O薄膜,并成功制得了串联谐振频率以及并联谐振频率分别在2.416 GHz和2.456 GHz的谐振器,测得其有效机电耦合系数为4.081%,回波损耗(S11)为-23.89 d B。这种SMR机械强度高、可靠性高、尺寸小,具有可立体集成到CMOS芯片表面的优势。展开更多
介绍了一种针对于生物传感应用的薄膜体声波谐振(thin film bulk acoustic resonator,FBAR)质量传感器。薄膜体声波谐振器谐振频率非常高(能够达到几兆赫兹),同时具有较大的品质因数,基于这种器件的质量传感器具有非常高的质量灵敏度。...介绍了一种针对于生物传感应用的薄膜体声波谐振(thin film bulk acoustic resonator,FBAR)质量传感器。薄膜体声波谐振器谐振频率非常高(能够达到几兆赫兹),同时具有较大的品质因数,基于这种器件的质量传感器具有非常高的质量灵敏度。首次提出了三对全金属的Al-W层作为布拉格声学反射层的FBAR,制备出了固态装配型的FBAR传感器。通过淀积不同厚度Al层顶电极分析了器件的质量灵敏度,仿真得到的质量传感器串联谐振频率在2.8 GHz附近,质量响应度达到5×10-4ng/Hz/cm2,可以实现分子量级的质量传感。展开更多
基金Sponsored by the National Science Fund for Distinguished Young Scholars(Grant No.51625201)the National Natural Science Foundation of China(Grant No.51702066).
文摘In this paper,a solidly mounted resonator(SMR)was designed with nanocrystalline diamond(NCD)as the high acoustic impedance material of Bragg reflector to improve the quality.We used Mathcad to investigate the effect of the Bragg reflector on the performance of the SMR,as well as the influence of different materials and the number of layers of Bragg reflector on the quality factor Q.Results show that the Bragg reflector could reduce energy loss effectively,and the higher the impedance of the high acoustic impedance layer,the better the SMR.The parasitic factors of the SMR using two high acoustic impedance materials,tungsten(W)and NCD,were also simulated by an Advanced Design System(ADS)using the Mason model.It was found that the parasitic effect caused by metal would significantly decrease the Q factor of the SMR.In the frequency range below 6 GHz,within which the SMR works normally,NCD performed better than W.Therefore,NCD is a better choice of high acoustic impedance material in the design of the SMR,with improved quality at high frequency and low loss.The optimum number of layers of Bragg reflector is 6.
文摘提出了一种针对于生物传感应用的薄膜体声波谐振(Thin film bulk acoustic resonator,FBAR)质量传感器。薄膜体声波谐振器谐振频率非常高(GHz数量级),同时具有很高的品质因数,因此基于这种器件的质量传感器具有非常高的质量灵敏度。提出了三对全金属Al-W层作为布拉格声学反射层的FBAR,采用AlN作为压电层,制备出了固态装配型FBAR传感器。通过淀积不同厚度Al层顶电极,对器件的质量灵敏度进行了分析,得到质量传感器串联谐振频率在2.8GHz附近,质量响应度达到5×10-4ng/Hz/cm2,可以实现分子量级的质量传感。
文摘本文研制了一种基于磁控溅射掺镁氧化锌(Mg_xZn_(1-x)O)压电薄膜的S波段固体装配型体声波谐振器(SMR-FBAR)。相比传统的氧化锌(ZnO)薄膜,Mg_xZn_(1-x)O具有高纵波声速,高电阻率优点,而且Mg原子以替位或填隙的方式进入晶格,没有改变ZnO的铅锌矿结构。通过优化磁控溅射参数的方法,获得了c轴方向生长良好的Mg_xZn_(1-x)O薄膜,并成功制得了串联谐振频率以及并联谐振频率分别在2.416 GHz和2.456 GHz的谐振器,测得其有效机电耦合系数为4.081%,回波损耗(S11)为-23.89 d B。这种SMR机械强度高、可靠性高、尺寸小,具有可立体集成到CMOS芯片表面的优势。
