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Spatial phase-shifting interferometry with compensation of geometric errors based on genetic algorithm(Invited Paper) 被引量:2
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作者 Joonku Hahn Hwi Kim +2 位作者 Yongjun Lim Eun-Hee Kim Byoungho Lee 《Chinese Optics Letters》 SCIE EI CAS CSCD 2009年第12期1113-1116,共4页
We propose a novel spatial phase-shifting interferometry that exploits a genetic algorithm to compensate for geometric errors. Spatial phase-shifting interferometry is more suitable for measuring objects with properti... We propose a novel spatial phase-shifting interferometry that exploits a genetic algorithm to compensate for geometric errors. Spatial phase-shifting interferometry is more suitable for measuring objects with properties that change rapidly in time than the temporal phase-shifting interferometry. However, it is more susceptible to the geometric errors since the positions at which interferograms are collected are different. In this letter, we propose a spatial phase-shifting interferometry with separate paths for object and reference waves. Also, the object wave estimate is parameterized in terms of geometric errors, and the error is compensated by using a genetic algorithm. 展开更多
关键词 spatial phase-shifting interferometry with compensation of geometric errors based on genetic algorithm
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