Three thicknesses of TiO2 films, 174, 195, and 229 nm, were deposited onto quartz substrates by sol–gel spin coating method. The as-deposited thin films were characterized by nano-crystallite with different sizes (19...Three thicknesses of TiO2 films, 174, 195, and 229 nm, were deposited onto quartz substrates by sol–gel spin coating method. The as-deposited thin films were characterized by nano-crystallite with different sizes (19–46 nm) and relatively high porous structure. Optical constants were determined and showed the lowest refractive index of 1.66 for the as-prepared films that ever reported till now. Obtained results were discussed through current theoretical ideas.展开更多
The polymer spin coating is critical in flexible electronic manufaction and micro-electro-mechanical system(MEMS)devices due to its simple operation, and uniformly coated layers. Some researchers focus on the effect...The polymer spin coating is critical in flexible electronic manufaction and micro-electro-mechanical system(MEMS)devices due to its simple operation, and uniformly coated layers. Some researchers focus on the effects of spin coating parameters such as wafer rotating speed, the viscosity of the coating liquid and solvent evaporation on final film thickness.In this work, the influence of substrate curvature on film thickness distribution is considered. A new parameter which represents the edge bead effect ratio(re) is proposed to investigate the influence factor of edge bead effect. Several operation parameters including the curvature of the substrate and the wafer-spin speed are taken into account to study the effects on the film thickness uniformity and edge-bead ratio. The morphologies and film thickness values of the spin-coated PDMS films under various substrate curvatures and coating speeds are measured with laser confocal microscopy. According to the results, both the convex and concave substrate will help to reduce the edge-bead effect significantly and thin film with better surface morphology can be obtained at high spin speed. Additionally, the relationship between the edge-bead ratio and the thin film thickness is like parabolic curve instead of linear dependence. This work may contribute to the mass production of flexible electronic devices.展开更多
This paper reports the synthesis and characterization of ZnO thin films prepared by sol-gel spin coating technique. The sol-gel was prepared from zinc acetate dehydrate as a precursor, 2-me- thoxyethanol as a solvent ...This paper reports the synthesis and characterization of ZnO thin films prepared by sol-gel spin coating technique. The sol-gel was prepared from zinc acetate dehydrate as a precursor, 2-me- thoxyethanol as a solvent and di-ethanolamine as a stabilizer, and then deposited on glass substrate using spin coater at the coating speed of 1000 rpm, 2000 rpm, 3000 rpm, 4000 rpm, 5000 rpm and 6000 rpm. After pre-heated at 150℃, the samples were post-heated at 250oC and also annealed at 400℃. X-ray diffraction (XRD) of the films showed polycrystalline hexagonal structure, with (002) orientation as most intense peak having a grain size of 28.1 nm. The absorbance of the film decreases with increasing wavelength and the transmittance was generally high between visible regions from 280 nm - 1200 nm. The ZnO films deposited at a spinning speed of 2000 rpm had highest transmittance of 88% in the visible region from 280 nm - 1200 nm. The energy band gap was found to be in the range of 3.23 - 3.40 eV. The thicknesses of the films decreased with increase in coating speed. Based on these results, ZnO thin films obtained could have useful application in transparent conducting oxide electrode in solar cells.展开更多
In this study, a new route to produce pure and composite ZnO-MgO thin films has been presented. In the process the pure ZnO thin films were the starting point, ending up with MgO by doping various percentages (from 0%...In this study, a new route to produce pure and composite ZnO-MgO thin films has been presented. In the process the pure ZnO thin films were the starting point, ending up with MgO by doping various percentages (from 0% to 100%) of Mg with the help of sol-gel spin coating technique. The crystal phases in all doping levels have been obtained when the samples annealed at 600℃ for a duration of 6 hours. The X-ray diffraction (XRD) spectra, the scanning electron microscopy (SEM) micrographs and UV-Vis absorption spectra have been performed to elucidate the composed film structures.展开更多
In this study,Tungsten Oxide(WO_3)thin films were prepared by Chemical Spray Pyrolysis(CSP)and Spin Coating(SC)techniques and it was investigated effects of technique and parameter on the films.WO_3 thin films were de...In this study,Tungsten Oxide(WO_3)thin films were prepared by Chemical Spray Pyrolysis(CSP)and Spin Coating(SC)techniques and it was investigated effects of technique and parameter on the films.WO_3 thin films were deposited on ITO(Indium Tin Oxide)coated glasses.The structural,optical and electrochromic properties of the WO_3 thin films were characterized by XRD,SEM,UV,and CV measurements.The sharpest(200)peak was observed in the XRD spectra and optical band gaps were calculated around 2.6~3.1 eVvia UV-Vis spectra for all of the samples.Micro fibrous reticulated surface(filamentous like)morphology for the films deposited by CSP technique and smooth surface morphology with high optical transmittance for the film deposited by SC Technique were obtained from SEM images.In addition to these results,it was revealed that all the samples exhibit good electrochromic performance.展开更多
Scintillation light from a liquid noble gas during a neutrino or dark matter experiment lies typically within the vacuum ultraviolet region and might be strongly absorbed by surrounding materials such as light guides ...Scintillation light from a liquid noble gas during a neutrino or dark matter experiment lies typically within the vacuum ultraviolet region and might be strongly absorbed by surrounding materials such as light guides or photomultipliers.Tetraphenyl butadiene(TPB)is a fluorescent material,acts as a wavelength shifter,and can turn UV light into visible light at a peak wavelength of approximately 425 nm,enabling the light signals to be easily detected during physics studies.Compared with a traditional TPB coating method using vapor deposition,we propose an alternative technique applying a spin-coating procedure to facilitate the development of neutrino and dark matter detectors.This article introduces a method to fabricate a TPB film on an acrylic substrate by using a spincoating method,reports the measurements of the sample film thickness and roughness,demonstrates the reemission spectrum,and quantifies the wavelength shifting efficiency.展开更多
ZnO thin films co-doped with A1 and Sb with different concentrations and a fixed molar ratio of AlCl3 to SbCl3 at 1:2, are prepared by a sol-gel spin-coating method on glass annealed at 550 ℃ for 2 h in air. The x-r...ZnO thin films co-doped with A1 and Sb with different concentrations and a fixed molar ratio of AlCl3 to SbCl3 at 1:2, are prepared by a sol-gel spin-coating method on glass annealed at 550 ℃ for 2 h in air. The x-ray diffraction results confirm that the ZnO thin films co-doped with Al distortion, and the biaxial stresses are 1.03× 10^8. 3.26× 10^8 and Sb are of wurtzite hexagonal ZnO with a very small 5.23 × 10^8, and 6.97× 10^8 Pa, corresponding to those of the ZnO thin films co-doped with Al and Sb in concentrations of 1.5, 3.0, 4.5, 6.0 at% respectively. The optical properties reveal that the ZnO thin films co-doped with Al and Sb have obviously enhanced transmittance in the visible region. The electrical properties show that ZnO thin film co-doped with Al and Sb in a concentration of 1.5 at% has a lowest resistivity of 2.5 Ω·cm.展开更多
This paper presented the preparation of TiO2 thin film on empty glass and Indium Tin Oxide (ITO) glass by spin coating method. Highly transparent titanium oxide thin films were obtained. The Optical absorption and tra...This paper presented the preparation of TiO2 thin film on empty glass and Indium Tin Oxide (ITO) glass by spin coating method. Highly transparent titanium oxide thin films were obtained. The Optical absorption and transmission of the film prepared from both the synthesized and the commercially available TiO2 were measured by the UV-Visible Spectrophotometer. A sharp absorption edge of the TiO2 film was observed. The estimated energy band gap for the film of the commercially available sample was larger than that of the synthesized one.展开更多
This work investigated the electrical properties of TiO2 thin film on empty glass and ITO glass by spin coating method. Highly transparent titanium oxide thin films were prepared on empty glass and Indium Tin Oxide (I...This work investigated the electrical properties of TiO2 thin film on empty glass and ITO glass by spin coating method. Highly transparent titanium oxide thin films were prepared on empty glass and Indium Tin Oxide (ITO) from a titanium (III) chloride precursor. The sheet resistance of the film prepared from both the synthesised and the commercially available TiO2 was measured by the Keithley four-point probe tester (KFPPT). A comparable sheet resistance of 10.69E + 00 Ω/sq was obtained on the ITO. The electrical conductivity of the TiO2 film on ITO glass substrate was found to be very high (3.46E + 05 Ω-1?cm-1) and comparable to that of the bare ITO glass.展开更多
This work focuses on the sol-gel spin coating technique of TiO2 nanostructure synthesis and its characterization. Though various methods have been used to fabricate TiO2 nanostructure, much effort has not been exerted...This work focuses on the sol-gel spin coating technique of TiO2 nanostructure synthesis and its characterization. Though various methods have been used to fabricate TiO2 nanostructure, much effort has not been exerted to achieve better photoresponsive and narrowly dispersed TiO2 nanostructure using the sol-gel spin coating method. Therefore, it is imperative to realize the synthesis of TiO2 nanostructures, and investigate their properties. In this work, TiO2 is synthesized by sol-gel spin coating technique using titanium tetraisopropoxide, isopropanol, acetic acid and deionized water as starting materials and deposited on borosilicate glass substrates. The effects of annealing temperatures (300˚C, 400˚C and 500˚C) on the structural and optical properties of the films were investigated by different techniques: Scanning Electron Microscopy (SEM), optical microscopy and UV-visible spectrophotometry. The optical characterization showed the direct band gap at 3.7 eV, 3.6 eV and 3.4 eV for 300˚C, 400˚C and 500˚C, respectively, and the optical transmittance and reflectance spectra showed a greater performance at 500˚C. The grain sizes obtained from SEM annealed at 300˚C, 400˚C and 500˚C are found to be about 6.0 nm, 5.0 nm and 4.0 nm respectively. The grain size of TiO2 nanostructure films decreased with increasing annealing temperatures. The results clearly indicated that the sol-gel spin coating synthesis of TiO2 nanostructure and post-thermal treatment at 500˚C cooled naturally at room temperature result in better photoresponsive and narrowly dispersed TiO2 nanostructure films with higher photoresponsive and good optical properties.展开更多
La0.9Sr0.1Ga0.8Mg0.2O3-δ(LSGM) and La0.7Sr0.3Cr0.5Mn0.5O3-δ(LSCM) powders were synthesized by glycine-nitrate process, and LSGM electrolyte thin film was successfully fabricated on porous anode substrate of LSCM...La0.9Sr0.1Ga0.8Mg0.2O3-δ(LSGM) and La0.7Sr0.3Cr0.5Mn0.5O3-δ(LSCM) powders were synthesized by glycine-nitrate process, and LSGM electrolyte thin film was successfully fabricated on porous anode substrate of LSCM by slurry spin coating technology. Some technical parameters for the preparation of LSGM thin films were systematically investigated, including ink composition,sintering temperature, and spin coating times. The electrolyte films with the best compactness and somewhat rough are obtained when the operating parameters are fixed as follows: the content of ethyl cellulose as binder is 5 wt%, the content of terpineol as modifier is 5 wt%, the optimum coating cycle number is 9 times, and the best post-deposition sintering temperature is 1,400 °C for 4 h.展开更多
Nanoparticles monolayer formation by spin coating is considered to be a simple, fast and inexpensive nanopatteming technique However, the parameters that govern the overall growth process in this technique are not com...Nanoparticles monolayer formation by spin coating is considered to be a simple, fast and inexpensive nanopatteming technique However, the parameters that govern the overall growth process in this technique are not completely quantified and techniques for the controlled and continuous growth of close packed monolayer particle arrays without defects need to be developed. In this paper, an ordered particle array formation process is analyzed theoretically, employing material flux balance and parti- cle-subjected forces balance, based on the film thickness model of spin coating and evaporation rate law. A series of experi- ments were conducted using silica particle suspensions with various particle volume fractions and different spin speeds. The results show that the spin speed should match the particle volume fraction to meet the requirements of material flux and particles movement in order to obtain a close packed monolayer film. The formation mechanism of fabrication defects involving particle agglomeration and uncontrollable voids were analyzed qualitatively based on crystal growth theory, and validation experiments were performed. The formation of highly uniform close-packed monolayer films was demonstrated and the condi- tion requirements for achieving monolayer nanoparticles array with good quality presented.展开更多
In the present study, niobium-doped indium oxide thin films were prepared by sol-gel spin coating technique. The effects of different Nb-doping contents on structural, morphological, optical, and electrical properties...In the present study, niobium-doped indium oxide thin films were prepared by sol-gel spin coating technique. The effects of different Nb-doping contents on structural, morphological, optical, and electrical properties of the films were characterized by means of X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM), atomic force microscopy (AFM), UV-Vis spectroscopy, and four point probe methods. XRD analysis confirmed the formation of cubic bixbyite structure of In203 with a small shift in major peak position toward lower angles with addition of Nb. FESEM micrographs show that grain size decreased with increasing the Nb-doping content. Optical and electrical studies revealed that optimum opto-electronic properties, including minimum electrical resistivity of 119.4 × 10^-3 Ω cm and an average optical transmittance of 85% in the visible region with a band gap of 3.37 eV were achieved for the films doped with Nb-doping content of 3 at.%. AFM studies show that addition of Nb at optimum content leads to the formation of compact films with smooth surface and less average roughness compared with the prepared ln2O3 films.展开更多
Low-k and high aspect ratio blind through-silicon-vias (TSVs) to be applied in "via-last/backside via" 3-D integration paradigm were fabricated with polyimide dielectric liners formed by vacuum-assisted spin coati...Low-k and high aspect ratio blind through-silicon-vias (TSVs) to be applied in "via-last/backside via" 3-D integration paradigm were fabricated with polyimide dielectric liners formed by vacuum-assisted spin coating technique. MIS trench capacitors with diameter of-6 μm and depth of-54 μm were successfully fabricated with polyimide insulator step coverage better than 30%. C-V characteristics and leakage current properties of the MIS trench capacitor were evaluated under thermal treat- ment. Experimental results show that, the minimum capacitance density is around 4.82 nF/cm2, and the leakage current density after 30 cycles of thermal chock tests becomes stable and it is around 30 nA/cm2 under bias voltage of 20 V. It also shows that, the polyimide dielectric liner is with an excellent capability in constraining copper ion diffusion and mobile charges even un- der test temperature as high as 125℃. Finite element analysis results show that TSVs with polyimide dielectric liner are with lower risks in SiO2 interlayer dielectric (ILD) fracture and interfacial delamination along dielectric-silicon interface, thus, higher thermo-mechanical reliability can be expected.展开更多
Recently, development of high technology has been required for the formation of thin uniform film in manufacturing processes of semiconductor as the semiconductor instruments become more sophisticated. Spin coating is...Recently, development of high technology has been required for the formation of thin uniform film in manufacturing processes of semiconductor as the semiconductor instruments become more sophisticated. Spin coating is usually used for spreading photoresist on a wafer surface. However, since rotating speed of the disk is very high in spin coating, the dropped photoresist scarers outward and reattaches on the film surface. A catch cup is set up outside the wafer in spin coating, and scattered photoresist mist is removed from the wafer edge by the exhaust flow generated at the gap between the wafer edge and the catch cup. In the dry process of a spin coating, it is a serious concern that the film thickness increases near the wafer edge in the case of low rotating speed. The purpose of this study is to make clear the effect of the catch cup geometry on the 3D boundary layer flow over the wafer surface and the drying rate of liquid film.展开更多
Recently, development of high technology has been required for the formation of thin uniform film in manufacturing processes of semiconductor as the semiconductor become more sophisticated. Spin coating is usually use...Recently, development of high technology has been required for the formation of thin uniform film in manufacturing processes of semiconductor as the semiconductor become more sophisticated. Spin coating is usually used for spreading photoresist on a wafer surface. However, since rotating speed of the disk is very high in spin coating, the dropped resist scatters outward and reattaches to the film surface. So, the scattered resist is removed by the exhaust flow generated at the gap between the wafer edge and the catch cup. It is seriously concerned that the stripes called Ekman spiral vortices appears on the disk in the case of high rotating speed and the film thickness increases near the wafer edge in the case of low rotating speed, because it prevent the formation of uniform film. The purpose of this study is to make clear the generation mechanism of Ekman spiral vortices and the influence of exhaust flow on it Moreover the influence of the catch cup geometry on the wafer surface boundary layer flow is investigated.展开更多
Thin films of iron(Fe)-doped titanium dioxide(Fe:TiO_(2))T were prepared by sol–gel spin coating technique and further calcined at 450℃.The structural and optical properties of Fe-doped TiO_(2) thin films were inves...Thin films of iron(Fe)-doped titanium dioxide(Fe:TiO_(2))T were prepared by sol–gel spin coating technique and further calcined at 450℃.The structural and optical properties of Fe-doped TiO_(2) thin films were investigated by X-ray diffraction(XRD),scanning electron microscopy(SEM),ultraviolet–visible spectroscopy(UV–vis)and atomic force microscopic(AFM)techniques.The XRD results confirm the nanostructured TiO_(2) thin films having crystalline nature with anatase phase.The characterization results show that the calcined thin films having high crystallinity and the effect of iron substitution lead to decreased crystallinity.The SEM investigations of Fe-doped TiO_(2) films also gave evidence that the films were continuous spherical shaped particles with a nanometric range of grain size and film was porous in nature.AFM analysis establishes that the uniformity of the TiO_(2) thin film with average roughness values.The optical measurements show that the films having high transparency in the visible region and the optical band gap energy of Fe-doped TiO_(2) film with iron(Fe)decrease with increase in iron content.These important requirements for the Fe:TiO_(2) films are to be used as window layers in solar cells.展开更多
The effects of the spin coating process parameters on the thickness of the SiOx layer of the BOPP/SiOx composite film were investigated. When the concentration of tetraethoxysilane (TEOS) increased from 12.5 vol% to...The effects of the spin coating process parameters on the thickness of the SiOx layer of the BOPP/SiOx composite film were investigated. When the concentration of tetraethoxysilane (TEOS) increased from 12.5 vol% to 55% vol%, the SiOx thickness increased from about 80 nm to 470 nm. In the sol time range of 1.5 h to 5 h the SiOx layer thickness reached a maximum at about 4 h and the change of the thickness roughly matched the change of the silica colloidal sphere sizes in sol. When the spin-coating speed of the dispensing stage increased from 450 r/min to 500 r/min, the SiOx layer thickness drastically decreased from about 1.67 gm to 400 nm. While the spin-coating speed of the thinning and drying stage went up to 1200 r/min, the SiOx layer thickness was in the range of 330 nm to 390 nm. It was also found that the SiOx layer thickness was almost increased linearly from about 500 nm to 1.02 gm with the ratio of the commercial silica colloidal to the TEOS from 0.2 to 1.0. The water contact angles decreased to about 23.0° for the BOPP/Si-Sol composite film with 1.67 μm SiOx layer and about 4.0° for the BOPP/mixing Si-Sol composite film with 1.02 μm SiOx layer. Compared to BOPP, the light transparency of the BOPP/Si-Sol composite films decreased by about 5.5% with the SiOx layer from about 80 nm to 1.67 μm and by 7.0% for the BOPP/mixing Si-Sol composite film with the SiOx layer from about 350 nm to 1.02 μm respectively.展开更多
A new hybrid organic-inorganic structure of FTO/TiO2/Se/HTL/Au based selenium solar cell has been fabricated through a low-cost spin-coating process in air. In this process, selenium is completely dissolved in hydrazi...A new hybrid organic-inorganic structure of FTO/TiO2/Se/HTL/Au based selenium solar cell has been fabricated through a low-cost spin-coating process in air. In this process, selenium is completely dissolved in hydrazine, to fk)rm a homogeneous precursor solution. After spin-coating the precursor solution on the TiO2 substrates, following by sintering at 200 ℃ for 5rain, a uniform selenium film with crystalline grains is formed. The selenium based solar cell exhibits an efficiency of 1.23% under AM1.5 illumination (100 mW.cm-2), short-circuit current density of 8 mA.cm 2, open-circuit voltage of 0.55 V, and fill factor of 0.37. Moreover, the device shows a stable ability with almost the same performance alter 60 days.展开更多
文摘Three thicknesses of TiO2 films, 174, 195, and 229 nm, were deposited onto quartz substrates by sol–gel spin coating method. The as-deposited thin films were characterized by nano-crystallite with different sizes (19–46 nm) and relatively high porous structure. Optical constants were determined and showed the lowest refractive index of 1.66 for the as-prepared films that ever reported till now. Obtained results were discussed through current theoretical ideas.
基金supported by the National Natural Science Foundation of China(Grant Nos.51605079 and 51475076)the Science Fund for Creative Research Groups of the National Natural Science Foundation of China(Grant No.51621064)the China Postdoctoral Science Foundation(Grant No.2016M591424)
文摘The polymer spin coating is critical in flexible electronic manufaction and micro-electro-mechanical system(MEMS)devices due to its simple operation, and uniformly coated layers. Some researchers focus on the effects of spin coating parameters such as wafer rotating speed, the viscosity of the coating liquid and solvent evaporation on final film thickness.In this work, the influence of substrate curvature on film thickness distribution is considered. A new parameter which represents the edge bead effect ratio(re) is proposed to investigate the influence factor of edge bead effect. Several operation parameters including the curvature of the substrate and the wafer-spin speed are taken into account to study the effects on the film thickness uniformity and edge-bead ratio. The morphologies and film thickness values of the spin-coated PDMS films under various substrate curvatures and coating speeds are measured with laser confocal microscopy. According to the results, both the convex and concave substrate will help to reduce the edge-bead effect significantly and thin film with better surface morphology can be obtained at high spin speed. Additionally, the relationship between the edge-bead ratio and the thin film thickness is like parabolic curve instead of linear dependence. This work may contribute to the mass production of flexible electronic devices.
文摘This paper reports the synthesis and characterization of ZnO thin films prepared by sol-gel spin coating technique. The sol-gel was prepared from zinc acetate dehydrate as a precursor, 2-me- thoxyethanol as a solvent and di-ethanolamine as a stabilizer, and then deposited on glass substrate using spin coater at the coating speed of 1000 rpm, 2000 rpm, 3000 rpm, 4000 rpm, 5000 rpm and 6000 rpm. After pre-heated at 150℃, the samples were post-heated at 250oC and also annealed at 400℃. X-ray diffraction (XRD) of the films showed polycrystalline hexagonal structure, with (002) orientation as most intense peak having a grain size of 28.1 nm. The absorbance of the film decreases with increasing wavelength and the transmittance was generally high between visible regions from 280 nm - 1200 nm. The ZnO films deposited at a spinning speed of 2000 rpm had highest transmittance of 88% in the visible region from 280 nm - 1200 nm. The energy band gap was found to be in the range of 3.23 - 3.40 eV. The thicknesses of the films decreased with increase in coating speed. Based on these results, ZnO thin films obtained could have useful application in transparent conducting oxide electrode in solar cells.
文摘In this study, a new route to produce pure and composite ZnO-MgO thin films has been presented. In the process the pure ZnO thin films were the starting point, ending up with MgO by doping various percentages (from 0% to 100%) of Mg with the help of sol-gel spin coating technique. The crystal phases in all doping levels have been obtained when the samples annealed at 600℃ for a duration of 6 hours. The X-ray diffraction (XRD) spectra, the scanning electron microscopy (SEM) micrographs and UV-Vis absorption spectra have been performed to elucidate the composed film structures.
基金supported by Erzincan University Scientific Research Project(Project No:09.02.01)and Tübitak-Bideb National Scholarship Program for PhD S tudent
文摘In this study,Tungsten Oxide(WO_3)thin films were prepared by Chemical Spray Pyrolysis(CSP)and Spin Coating(SC)techniques and it was investigated effects of technique and parameter on the films.WO_3 thin films were deposited on ITO(Indium Tin Oxide)coated glasses.The structural,optical and electrochromic properties of the WO_3 thin films were characterized by XRD,SEM,UV,and CV measurements.The sharpest(200)peak was observed in the XRD spectra and optical band gaps were calculated around 2.6~3.1 eVvia UV-Vis spectra for all of the samples.Micro fibrous reticulated surface(filamentous like)morphology for the films deposited by CSP technique and smooth surface morphology with high optical transmittance for the film deposited by SC Technique were obtained from SEM images.In addition to these results,it was revealed that all the samples exhibit good electrochromic performance.
基金supported in part by the Guangdong Basic and Applied Basic Research Foundation(No.2019A1515012216)the National Natural Science Foundation of China(No.11505301)the Innovation Training Program for bachelor students at the School of Physics in SYSU
文摘Scintillation light from a liquid noble gas during a neutrino or dark matter experiment lies typically within the vacuum ultraviolet region and might be strongly absorbed by surrounding materials such as light guides or photomultipliers.Tetraphenyl butadiene(TPB)is a fluorescent material,acts as a wavelength shifter,and can turn UV light into visible light at a peak wavelength of approximately 425 nm,enabling the light signals to be easily detected during physics studies.Compared with a traditional TPB coating method using vapor deposition,we propose an alternative technique applying a spin-coating procedure to facilitate the development of neutrino and dark matter detectors.This article introduces a method to fabricate a TPB film on an acrylic substrate by using a spincoating method,reports the measurements of the sample film thickness and roughness,demonstrates the reemission spectrum,and quantifies the wavelength shifting efficiency.
基金Project supported by the Innovation Foundation of Beijing University of Aeronautics and Astronautics for PhD Graduates, China (Grant No. 292122)the Equipment Research Foundation of China (Grant No. 373974)
文摘ZnO thin films co-doped with A1 and Sb with different concentrations and a fixed molar ratio of AlCl3 to SbCl3 at 1:2, are prepared by a sol-gel spin-coating method on glass annealed at 550 ℃ for 2 h in air. The x-ray diffraction results confirm that the ZnO thin films co-doped with Al distortion, and the biaxial stresses are 1.03× 10^8. 3.26× 10^8 and Sb are of wurtzite hexagonal ZnO with a very small 5.23 × 10^8, and 6.97× 10^8 Pa, corresponding to those of the ZnO thin films co-doped with Al and Sb in concentrations of 1.5, 3.0, 4.5, 6.0 at% respectively. The optical properties reveal that the ZnO thin films co-doped with Al and Sb have obviously enhanced transmittance in the visible region. The electrical properties show that ZnO thin film co-doped with Al and Sb in a concentration of 1.5 at% has a lowest resistivity of 2.5 Ω·cm.
文摘This paper presented the preparation of TiO2 thin film on empty glass and Indium Tin Oxide (ITO) glass by spin coating method. Highly transparent titanium oxide thin films were obtained. The Optical absorption and transmission of the film prepared from both the synthesized and the commercially available TiO2 were measured by the UV-Visible Spectrophotometer. A sharp absorption edge of the TiO2 film was observed. The estimated energy band gap for the film of the commercially available sample was larger than that of the synthesized one.
文摘This work investigated the electrical properties of TiO2 thin film on empty glass and ITO glass by spin coating method. Highly transparent titanium oxide thin films were prepared on empty glass and Indium Tin Oxide (ITO) from a titanium (III) chloride precursor. The sheet resistance of the film prepared from both the synthesised and the commercially available TiO2 was measured by the Keithley four-point probe tester (KFPPT). A comparable sheet resistance of 10.69E + 00 Ω/sq was obtained on the ITO. The electrical conductivity of the TiO2 film on ITO glass substrate was found to be very high (3.46E + 05 Ω-1?cm-1) and comparable to that of the bare ITO glass.
文摘This work focuses on the sol-gel spin coating technique of TiO2 nanostructure synthesis and its characterization. Though various methods have been used to fabricate TiO2 nanostructure, much effort has not been exerted to achieve better photoresponsive and narrowly dispersed TiO2 nanostructure using the sol-gel spin coating method. Therefore, it is imperative to realize the synthesis of TiO2 nanostructures, and investigate their properties. In this work, TiO2 is synthesized by sol-gel spin coating technique using titanium tetraisopropoxide, isopropanol, acetic acid and deionized water as starting materials and deposited on borosilicate glass substrates. The effects of annealing temperatures (300˚C, 400˚C and 500˚C) on the structural and optical properties of the films were investigated by different techniques: Scanning Electron Microscopy (SEM), optical microscopy and UV-visible spectrophotometry. The optical characterization showed the direct band gap at 3.7 eV, 3.6 eV and 3.4 eV for 300˚C, 400˚C and 500˚C, respectively, and the optical transmittance and reflectance spectra showed a greater performance at 500˚C. The grain sizes obtained from SEM annealed at 300˚C, 400˚C and 500˚C are found to be about 6.0 nm, 5.0 nm and 4.0 nm respectively. The grain size of TiO2 nanostructure films decreased with increasing annealing temperatures. The results clearly indicated that the sol-gel spin coating synthesis of TiO2 nanostructure and post-thermal treatment at 500˚C cooled naturally at room temperature result in better photoresponsive and narrowly dispersed TiO2 nanostructure films with higher photoresponsive and good optical properties.
基金financially supported by the National Natural Science Foundation of China (Nos. 51362011 and 51362012)the Chemistry Discipline Master’s Site Construction Open Foundation of Honghe University of Yunnan Province (No. HXZ1308)
文摘La0.9Sr0.1Ga0.8Mg0.2O3-δ(LSGM) and La0.7Sr0.3Cr0.5Mn0.5O3-δ(LSCM) powders were synthesized by glycine-nitrate process, and LSGM electrolyte thin film was successfully fabricated on porous anode substrate of LSCM by slurry spin coating technology. Some technical parameters for the preparation of LSGM thin films were systematically investigated, including ink composition,sintering temperature, and spin coating times. The electrolyte films with the best compactness and somewhat rough are obtained when the operating parameters are fixed as follows: the content of ethyl cellulose as binder is 5 wt%, the content of terpineol as modifier is 5 wt%, the optimum coating cycle number is 9 times, and the best post-deposition sintering temperature is 1,400 °C for 4 h.
基金supported by the National Natural Science Foundation of China(Grant Nos.51375381,51575427 and 51675422)the 2015 Overall Planning Innovation Project Foundation of Shaanxi Province(Grant No.2015KTCQ01-36)
文摘Nanoparticles monolayer formation by spin coating is considered to be a simple, fast and inexpensive nanopatteming technique However, the parameters that govern the overall growth process in this technique are not completely quantified and techniques for the controlled and continuous growth of close packed monolayer particle arrays without defects need to be developed. In this paper, an ordered particle array formation process is analyzed theoretically, employing material flux balance and parti- cle-subjected forces balance, based on the film thickness model of spin coating and evaporation rate law. A series of experi- ments were conducted using silica particle suspensions with various particle volume fractions and different spin speeds. The results show that the spin speed should match the particle volume fraction to meet the requirements of material flux and particles movement in order to obtain a close packed monolayer film. The formation mechanism of fabrication defects involving particle agglomeration and uncontrollable voids were analyzed qualitatively based on crystal growth theory, and validation experiments were performed. The formation of highly uniform close-packed monolayer films was demonstrated and the condi- tion requirements for achieving monolayer nanoparticles array with good quality presented.
基金Iran Initiative Nanotechnology Council for partially supporting this workMahar Fan Abzar Co.for AFM spectroscopy results
文摘In the present study, niobium-doped indium oxide thin films were prepared by sol-gel spin coating technique. The effects of different Nb-doping contents on structural, morphological, optical, and electrical properties of the films were characterized by means of X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM), atomic force microscopy (AFM), UV-Vis spectroscopy, and four point probe methods. XRD analysis confirmed the formation of cubic bixbyite structure of In203 with a small shift in major peak position toward lower angles with addition of Nb. FESEM micrographs show that grain size decreased with increasing the Nb-doping content. Optical and electrical studies revealed that optimum opto-electronic properties, including minimum electrical resistivity of 119.4 × 10^-3 Ω cm and an average optical transmittance of 85% in the visible region with a band gap of 3.37 eV were achieved for the films doped with Nb-doping content of 3 at.%. AFM studies show that addition of Nb at optimum content leads to the formation of compact films with smooth surface and less average roughness compared with the prepared ln2O3 films.
基金supported by the National Natural Science Foundation of China(Grant Nos.61404008&61574016)"111"Project of China(Grant No.B14010)
文摘Low-k and high aspect ratio blind through-silicon-vias (TSVs) to be applied in "via-last/backside via" 3-D integration paradigm were fabricated with polyimide dielectric liners formed by vacuum-assisted spin coating technique. MIS trench capacitors with diameter of-6 μm and depth of-54 μm were successfully fabricated with polyimide insulator step coverage better than 30%. C-V characteristics and leakage current properties of the MIS trench capacitor were evaluated under thermal treat- ment. Experimental results show that, the minimum capacitance density is around 4.82 nF/cm2, and the leakage current density after 30 cycles of thermal chock tests becomes stable and it is around 30 nA/cm2 under bias voltage of 20 V. It also shows that, the polyimide dielectric liner is with an excellent capability in constraining copper ion diffusion and mobile charges even un- der test temperature as high as 125℃. Finite element analysis results show that TSVs with polyimide dielectric liner are with lower risks in SiO2 interlayer dielectric (ILD) fracture and interfacial delamination along dielectric-silicon interface, thus, higher thermo-mechanical reliability can be expected.
基金the 21~(st)Century COE program of Pulse Power Science of Kumamoto University
文摘Recently, development of high technology has been required for the formation of thin uniform film in manufacturing processes of semiconductor as the semiconductor instruments become more sophisticated. Spin coating is usually used for spreading photoresist on a wafer surface. However, since rotating speed of the disk is very high in spin coating, the dropped photoresist scarers outward and reattaches on the film surface. A catch cup is set up outside the wafer in spin coating, and scattered photoresist mist is removed from the wafer edge by the exhaust flow generated at the gap between the wafer edge and the catch cup. In the dry process of a spin coating, it is a serious concern that the film thickness increases near the wafer edge in the case of low rotating speed. The purpose of this study is to make clear the effect of the catch cup geometry on the 3D boundary layer flow over the wafer surface and the drying rate of liquid film.
文摘Recently, development of high technology has been required for the formation of thin uniform film in manufacturing processes of semiconductor as the semiconductor become more sophisticated. Spin coating is usually used for spreading photoresist on a wafer surface. However, since rotating speed of the disk is very high in spin coating, the dropped resist scatters outward and reattaches to the film surface. So, the scattered resist is removed by the exhaust flow generated at the gap between the wafer edge and the catch cup. It is seriously concerned that the stripes called Ekman spiral vortices appears on the disk in the case of high rotating speed and the film thickness increases near the wafer edge in the case of low rotating speed, because it prevent the formation of uniform film. The purpose of this study is to make clear the generation mechanism of Ekman spiral vortices and the influence of exhaust flow on it Moreover the influence of the catch cup geometry on the wafer surface boundary layer flow is investigated.
文摘Thin films of iron(Fe)-doped titanium dioxide(Fe:TiO_(2))T were prepared by sol–gel spin coating technique and further calcined at 450℃.The structural and optical properties of Fe-doped TiO_(2) thin films were investigated by X-ray diffraction(XRD),scanning electron microscopy(SEM),ultraviolet–visible spectroscopy(UV–vis)and atomic force microscopic(AFM)techniques.The XRD results confirm the nanostructured TiO_(2) thin films having crystalline nature with anatase phase.The characterization results show that the calcined thin films having high crystallinity and the effect of iron substitution lead to decreased crystallinity.The SEM investigations of Fe-doped TiO_(2) films also gave evidence that the films were continuous spherical shaped particles with a nanometric range of grain size and film was porous in nature.AFM analysis establishes that the uniformity of the TiO_(2) thin film with average roughness values.The optical measurements show that the films having high transparency in the visible region and the optical band gap energy of Fe-doped TiO_(2) film with iron(Fe)decrease with increase in iron content.These important requirements for the Fe:TiO_(2) films are to be used as window layers in solar cells.
基金financially supported by the Chinese Universities Scientific Fund (ZD0902)
文摘The effects of the spin coating process parameters on the thickness of the SiOx layer of the BOPP/SiOx composite film were investigated. When the concentration of tetraethoxysilane (TEOS) increased from 12.5 vol% to 55% vol%, the SiOx thickness increased from about 80 nm to 470 nm. In the sol time range of 1.5 h to 5 h the SiOx layer thickness reached a maximum at about 4 h and the change of the thickness roughly matched the change of the silica colloidal sphere sizes in sol. When the spin-coating speed of the dispensing stage increased from 450 r/min to 500 r/min, the SiOx layer thickness drastically decreased from about 1.67 gm to 400 nm. While the spin-coating speed of the thinning and drying stage went up to 1200 r/min, the SiOx layer thickness was in the range of 330 nm to 390 nm. It was also found that the SiOx layer thickness was almost increased linearly from about 500 nm to 1.02 gm with the ratio of the commercial silica colloidal to the TEOS from 0.2 to 1.0. The water contact angles decreased to about 23.0° for the BOPP/Si-Sol composite film with 1.67 μm SiOx layer and about 4.0° for the BOPP/mixing Si-Sol composite film with 1.02 μm SiOx layer. Compared to BOPP, the light transparency of the BOPP/Si-Sol composite films decreased by about 5.5% with the SiOx layer from about 80 nm to 1.67 μm and by 7.0% for the BOPP/mixing Si-Sol composite film with the SiOx layer from about 350 nm to 1.02 μm respectively.
基金Project supported by the National Natural Science Foundation of China(Grant Nos.51579057,5177090655,and 51379052)the State Key Laboratory of Urban Water Resource and Environment,Harbin Institute of Technology,China(Grant No.2016DX07)
文摘A new hybrid organic-inorganic structure of FTO/TiO2/Se/HTL/Au based selenium solar cell has been fabricated through a low-cost spin-coating process in air. In this process, selenium is completely dissolved in hydrazine, to fk)rm a homogeneous precursor solution. After spin-coating the precursor solution on the TiO2 substrates, following by sintering at 200 ℃ for 5rain, a uniform selenium film with crystalline grains is formed. The selenium based solar cell exhibits an efficiency of 1.23% under AM1.5 illumination (100 mW.cm-2), short-circuit current density of 8 mA.cm 2, open-circuit voltage of 0.55 V, and fill factor of 0.37. Moreover, the device shows a stable ability with almost the same performance alter 60 days.