Based on the theoretical and experimental investigation of a thin silicon layer（TSL） with linear variable doping（LVD） and further research on the TSL LVD with a multiple step field plate（MSFP）,a breakdown voltag...Based on the theoretical and experimental investigation of a thin silicon layer（TSL） with linear variable doping（LVD） and further research on the TSL LVD with a multiple step field plate（MSFP）,a breakdown voltage（BV） model is proposed and experimentally verified in this paper.With the two-dimensional Poisson equation of the silicon on insulator（SOI） device,the lateral electric field in drift region of the thin silicon layer is assumed to be constant.For the SOI device with LVD in the thin silicon layer,the dependence of the BV on impurity concentration under the drain is investigated by an enhanced dielectric layer field（ENDIF）,from which the reduced surface field（RESURF） condition is deduced.The drain in the centre of the device has a good self-isolation effect,but the problem of the high voltage interconnection（HVI） line will become serious.The two step field plates including the source field plate and gate field plate can be adopted to shield the HVI adverse effect on the device.Based on this model,the TSL LVD SOI n-channel lateral double-diffused MOSFET（nLDMOS） with MSFP is realized.The experimental breakdown voltage（BV） and specific on-resistance（R on,sp） of the TSL LVD SOI device are 694 V and 21.3 ·mm 2 with a drift region length of 60 μm,buried oxide layer of 3 μm,and silicon layer of 0.15 μm,respectively.展开更多
Differential equations of free forced vibrations of one -way rectangular stepped thin plated on Winkler 's foundation are established by using singular functions ,their general solutions are solved :exprssion of ...Differential equations of free forced vibrations of one -way rectangular stepped thin plated on Winkler 's foundation are established by using singular functions ,their general solutions are solved :exprssion of vibration mode function and frequency equations on usual supports are derived from W operator :forced responses of such plates under different -type loads are discussed with generalized functions .展开更多
Differential equations of free/forc ed vibrations of stepped rectangular thin plates on Winkler's foundation are estab lished by using singular functions, and their general solutions are also solved for expressi...Differential equations of free/forc ed vibrations of stepped rectangular thin plates on Winkler's foundation are estab lished by using singular functions, and their general solutions are also solved for expression of vibration mode function and frequency equations on usual suppo rts derived with W operator, as well as forced responses of such plates unde r different_type loads disc ussed with Fourier expansion of generalized functions.展开更多
基金Project supported partially by the National Natural Science Foundation of China (Grant Nos. 60906038 and 61076082)
文摘Based on the theoretical and experimental investigation of a thin silicon layer（TSL） with linear variable doping（LVD） and further research on the TSL LVD with a multiple step field plate（MSFP）,a breakdown voltage（BV） model is proposed and experimentally verified in this paper.With the two-dimensional Poisson equation of the silicon on insulator（SOI） device,the lateral electric field in drift region of the thin silicon layer is assumed to be constant.For the SOI device with LVD in the thin silicon layer,the dependence of the BV on impurity concentration under the drain is investigated by an enhanced dielectric layer field（ENDIF）,from which the reduced surface field（RESURF） condition is deduced.The drain in the centre of the device has a good self-isolation effect,but the problem of the high voltage interconnection（HVI） line will become serious.The two step field plates including the source field plate and gate field plate can be adopted to shield the HVI adverse effect on the device.Based on this model,the TSL LVD SOI n-channel lateral double-diffused MOSFET（nLDMOS） with MSFP is realized.The experimental breakdown voltage（BV） and specific on-resistance（R on,sp） of the TSL LVD SOI device are 694 V and 21.3 ·mm 2 with a drift region length of 60 μm,buried oxide layer of 3 μm,and silicon layer of 0.15 μm,respectively.
文摘Differential equations of free forced vibrations of one -way rectangular stepped thin plated on Winkler 's foundation are established by using singular functions ,their general solutions are solved :exprssion of vibration mode function and frequency equations on usual supports are derived from W operator :forced responses of such plates under different -type loads are discussed with generalized functions .
文摘Differential equations of free/forc ed vibrations of stepped rectangular thin plates on Winkler's foundation are estab lished by using singular functions, and their general solutions are also solved for expression of vibration mode function and frequency equations on usual suppo rts derived with W operator, as well as forced responses of such plates unde r different_type loads disc ussed with Fourier expansion of generalized functions.
