Superconducting transition edge sensor(TES)bolometers require superconducting films to have controllable transition temperatures T_(c)in different practical applications.The value of T_(c)strongly affects thermal cond...Superconducting transition edge sensor(TES)bolometers require superconducting films to have controllable transition temperatures T_(c)in different practical applications.The value of T_(c)strongly affects thermal conductivity and thermal noise performance of TES detectors.Al films doped with Mn(Al-Mn)of different concentrations can accomplish tunable T_(c)A magnetron sputtering machine is used to deposit the Al-Mn films in this study.Fabrication parameters including sputtering pressure and annealing process are studied and their influences on T_(c)and superconducting transition widthΔT_(c)are optimized.The Al-Mn films withΔT_(c)below 1.0 mK for T_(c)in a range of 520 mK-580 mK are successfully fabricated.展开更多
The superconducting quantum interference device（SQUID） amplifier is widely used in the field of weak signal detection for its low input impedance, low noise, and low power consumption. In this paper, the SQUIDs with...The superconducting quantum interference device（SQUID） amplifier is widely used in the field of weak signal detection for its low input impedance, low noise, and low power consumption. In this paper, the SQUIDs with identical junctions and the series SQUIDs with different junctions were successfully fabricated. The Nb/Al-AlOx/Nb trilayer and input Nb coils were prepared by asputtering equipment. The SQUID devices were prepared by a sputtering and the lift-off method.Investigations by AFM, OM and SEM revealed the morphology and roughness of the Nb films and Nb/Al-AlOx/Nb trilayer.In addition, the current–voltage characteristics of the SQUID devices with identical junction and different junction areas were measured at 2.5 K in the He^3 refrigerator. The results show that the SQUID modulation depth is obviously affected by the junction area. The modulation depth obviously increases with the increase of the junction area in a certain range. It is found that the series SQUID with identical junction area has a transimpedance gain of 58 Ω approximately.展开更多
基金the National Natural Science Foundation of China(Grant Nos.11653001 and 11653004)。
文摘Superconducting transition edge sensor(TES)bolometers require superconducting films to have controllable transition temperatures T_(c)in different practical applications.The value of T_(c)strongly affects thermal conductivity and thermal noise performance of TES detectors.Al films doped with Mn(Al-Mn)of different concentrations can accomplish tunable T_(c)A magnetron sputtering machine is used to deposit the Al-Mn films in this study.Fabrication parameters including sputtering pressure and annealing process are studied and their influences on T_(c)and superconducting transition widthΔT_(c)are optimized.The Al-Mn films withΔT_(c)below 1.0 mK for T_(c)in a range of 520 mK-580 mK are successfully fabricated.
基金Project supported by the National Natural Science Foundation of China(Grant No.11653001)the National Basic Research Program of China(Grant No.2011CBA00304)Tsinghua University Initiative Scientific Research Program,China(Grant No.20131089314)
文摘The superconducting quantum interference device（SQUID） amplifier is widely used in the field of weak signal detection for its low input impedance, low noise, and low power consumption. In this paper, the SQUIDs with identical junctions and the series SQUIDs with different junctions were successfully fabricated. The Nb/Al-AlOx/Nb trilayer and input Nb coils were prepared by asputtering equipment. The SQUID devices were prepared by a sputtering and the lift-off method.Investigations by AFM, OM and SEM revealed the morphology and roughness of the Nb films and Nb/Al-AlOx/Nb trilayer.In addition, the current–voltage characteristics of the SQUID devices with identical junction and different junction areas were measured at 2.5 K in the He^3 refrigerator. The results show that the SQUID modulation depth is obviously affected by the junction area. The modulation depth obviously increases with the increase of the junction area in a certain range. It is found that the series SQUID with identical junction area has a transimpedance gain of 58 Ω approximately.
