Phase-change material(PCM)is generating widespread interest as a new candidate for artificial synapses in bioinspired computer systems.However,the amorphization process of PCM devices tends to be abrupt,unlike contin...Phase-change material(PCM)is generating widespread interest as a new candidate for artificial synapses in bioinspired computer systems.However,the amorphization process of PCM devices tends to be abrupt,unlike continuous synaptic depression.The relatively large power consumption and poor analog behavior of PCM devices greatly limit their applications.Here,we fabricate a GeTe/Sb2Te3 superlattice-like PCM device which allows a progressive RESET process.Our devices feature low-power consumption operation and potential high-density integration,which can effectively simulate biological synaptic characteristics.The programming energy can be further reduced by properly selecting the resistance range and operating method.The fabricated devices are implemented in both artificial neural networks(ANN)and convolutional neural network(CNN)simulations,demonstrating high accuracy in brain-like pattern recognition.展开更多
After compositing with SiO_2 layers, it is shown that superlattice-like Sb/SiO_2 thin films have higher crystallization temperature（~240°C）, larger crystallization activation energy（6.22 e V）, and better data...After compositing with SiO_2 layers, it is shown that superlattice-like Sb/SiO_2 thin films have higher crystallization temperature（~240°C）, larger crystallization activation energy（6.22 e V）, and better data retention ability（189°C for 10 y）. The crystallization of Sb in superlattice-like Sb/SiO_2 thin films is restrained by the multilayer interfaces. The reversible resistance transition can be achieved by an electric pulse as short as 8 ns for the Sb（3 nm）/SiO_2（7 nm）-based phase change memory cell. A lower operation power consumption of 0.09 m W and a good endurance of 3.0 × 10~6 cycles are achieved. In addition, the superlattice-like Sb（3 nm）/SiO_2（7 nm） thin film shows a low thermal conductivity of 0.13 W/（m·K）.展开更多
基金Project supported by the National Science and Technology Major Project of China(Grant No.2017ZX02301007-002)the National Key R&D Plan of China(Grant No.2017YFB0701701)the National Natural Science Foundation of China(Grant Nos.61774068 and 51772113).The authors acknowledge the support from Hubei Key Laboratory of Advanced Memories&Hubei Engineering Research Center on Microelectronics.
文摘Phase-change material(PCM)is generating widespread interest as a new candidate for artificial synapses in bioinspired computer systems.However,the amorphization process of PCM devices tends to be abrupt,unlike continuous synaptic depression.The relatively large power consumption and poor analog behavior of PCM devices greatly limit their applications.Here,we fabricate a GeTe/Sb2Te3 superlattice-like PCM device which allows a progressive RESET process.Our devices feature low-power consumption operation and potential high-density integration,which can effectively simulate biological synaptic characteristics.The programming energy can be further reduced by properly selecting the resistance range and operating method.The fabricated devices are implemented in both artificial neural networks(ANN)and convolutional neural network(CNN)simulations,demonstrating high accuracy in brain-like pattern recognition.
基金Supported by the National Natural Science Foundation of China under Grant No 11774438the Natural Science Foundation of Jiangsu Province under Grant No BK20151172+2 种基金the Changzhou Science and Technology Bureau under Grant No CJ20160028the Qing Lan Project,the Opening Project of State Key Laboratory of Silicon Materials under Grant No SKL2017-04the Opening Project of Key Laboratory of Microelectronic Devices and Integrated Technology of Institute of Microelectronics of Chinese Academy of Sciences
文摘After compositing with SiO_2 layers, it is shown that superlattice-like Sb/SiO_2 thin films have higher crystallization temperature（~240°C）, larger crystallization activation energy（6.22 e V）, and better data retention ability（189°C for 10 y）. The crystallization of Sb in superlattice-like Sb/SiO_2 thin films is restrained by the multilayer interfaces. The reversible resistance transition can be achieved by an electric pulse as short as 8 ns for the Sb（3 nm）/SiO_2（7 nm）-based phase change memory cell. A lower operation power consumption of 0.09 m W and a good endurance of 3.0 × 10~6 cycles are achieved. In addition, the superlattice-like Sb（3 nm）/SiO_2（7 nm） thin film shows a low thermal conductivity of 0.13 W/（m·K）.
