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Effect of polishing parameters on abrasive free chemical mechanical planarization of semi-polar(1122) aluminum nitride surface 被引量:3
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作者 Khushnuma Asghar D.Das 《Journal of Semiconductors》 EI CAS CSCD 2016年第3期115-121,共7页
An abrasive free chemical mechanical planarization(AFCMP) of semi-polar(1122) Al N surface has been demonstrated. The effect of slurry p H, polishing pressure, and platen velocity on the material removal rate(MRR... An abrasive free chemical mechanical planarization(AFCMP) of semi-polar(1122) Al N surface has been demonstrated. The effect of slurry p H, polishing pressure, and platen velocity on the material removal rate(MRR) and surface quality(RMS roughness) have been studied. The effect of polishing pressure on the AFCMP of the(1122) Al N surface has been compared with that of the(1122) Al Ga N surface. The maximum MRR has been found to be 562 nm/h for the semi-polar(1122) Al N surface, under the experimental conditions of 38 k Pa pressure,90 rpm platen velocity, 30 rpm carrier velocity, slurry p H 3 and 0.4 M oxidizer concentration. The best root mean square(RMS) surface roughness of 1.2 nm and 0.7 nm, over a large scanning area of 0.70×0.96 mm^2, has been achieved on AFCMP processed semi-polar(1122) AlN and(AlGaN) surfaces using optimized slurry chemistry and processing parameters. 展开更多
关键词 Al N AFCMP chemical mechanical planarization material removal rate surface roughness
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SOME APPLICATIONS OF PLANAR GRAPH IN KNOT THEORY
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作者 程志云 高红铸 《Acta Mathematica Scientia》 SCIE CSCD 2012年第2期663-671,共9页
The relationship between a link diagram and its corresponding planar graph is briefly reviewed. A necessary and sufficient condition is given to detect when a planar graph corresponds to a knot. The relationship betwe... The relationship between a link diagram and its corresponding planar graph is briefly reviewed. A necessary and sufficient condition is given to detect when a planar graph corresponds to a knot. The relationship between planar graph and almost planar Seifert surface is discussed. Using planar graph, we construct an alternating amphicheiral prime knot with crossing number n for any even number n 〉 4. This gives an affirmative answer to problem 1.66(B) on Kirby's problem list . 展开更多
关键词 Planar graph almost planar Seifert surface amphicheiral knot alternating knot
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Planar-busting Curves on the Boundary of a Handlebody
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作者 Sun Dong-qi Tang Jing-yan +1 位作者 Li Feng-ling Lei Feng-chun 《Communications in Mathematical Research》 CSCD 2013年第2期184-192,共9页
Let Hn be an orientable handlebody of genus n. It has been proved that for n not less than 2, there exists an annulus-busting curve in δHm. In the present paper, we prove that for n not less than 2, there exists an e... Let Hn be an orientable handlebody of genus n. It has been proved that for n not less than 2, there exists an annulus-busting curve in δHm. In the present paper, we prove that for n not less than 2, there exists an essential simple closed curve C in OHm which intersects each essential planar surface in Hn non-emptily. Furthermore, we show that for n not less than 3, a pants-busting curve must also be an annulus-busting curve. 展开更多
关键词 HANDLEBODY planar surface planar-busting curve pants-busting curve
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Effect of the back surface topography on the efficiency in silicon solar cells 被引量:1
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作者 郭爱娟 叶发敏 +2 位作者 郭里辉 纪冬 冯仕猛 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2009年第7期48-50,共3页
Different processes are used on the back surface of silicon wafers to form cells falling into three groups:textured, planar, and sawed-off pyramid back surface.The characteristic parameters of the cells, ISC, VOC, FF... Different processes are used on the back surface of silicon wafers to form cells falling into three groups:textured, planar, and sawed-off pyramid back surface.The characteristic parameters of the cells, ISC, VOC, FF, Pm, and Eff, are measured.All these parameters of the planar back surface cells are the best.The FF, Pm, and Eff of sawed-off pyramid back surface cells are superior to textured back surface cells, although ISC and VOC are lower.The parasitic resistance is analyzed to explain the higher FF of the sawed-off pyramid back surface cells.The cross-section scanning electron microscopy(SEM) pictures show the uniformity of the aluminum-silicon alloy, which has an important effect on the back surface recombination velocity and the ohmic contact.The measured value of the aluminum back surface field thickness in the SEM picture is in good agreement with the theoretical value deduced from the Al-Si phase diagram.It is shown in an external quantum efficiency(EQE) diagram that the planar back surface has the best response to a wavelength between 440 and 1000 nm and the sawed-off back surface has a better long wavelength response. 展开更多
关键词 planar back surface aluminum-silicon contact back surface field
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Characterization of planar photonic crystals using surface coupling techniques at large wavelengths 被引量:6
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作者 Y.Benachour N.Paraire 《Chinese Optics Letters》 SCIE EI CAS CSCD 2007年第9期501-503,共3页
We report a non-destructive characterization of planar two-dimensional (2D) photonic crystals (PhCs) made in silicon on insulator (SOI) wafers using ellipsometric or Fourier transformed infrared (FTIR) spectro... We report a non-destructive characterization of planar two-dimensional (2D) photonic crystals (PhCs) made in silicon on insulator (SOI) wafers using ellipsometric or Fourier transformed infrared (FTIR) spectroscope. At large wavelengths, devices behave as homogeneous isotropic materials defined by an effective filling factor. The experimental results related to the PhC limited dimensions confirm this characterization. 展开更多
关键词 Characterization of planar photonic crystals using surface coupling techniques at large wavelengths
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ReLoc:Indoor Visual Localization with Hierarchical Sitemap and View Synthesis 被引量:3
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作者 Hui-Xuan Wang Jing-Liang Peng +3 位作者 Shi-Yi Lu Xin Cao Xue-Ying Qin Chang-He Tu 《Journal of Computer Science & Technology》 SCIE EI CSCD 2021年第3期494-507,共14页
Indoor visual localization,i.e.,6 Degree-of-Freedom camera pose estimation for a query image with respect to a known scene,is gaining increased attention driven by rapid progress of applications such as robotics and a... Indoor visual localization,i.e.,6 Degree-of-Freedom camera pose estimation for a query image with respect to a known scene,is gaining increased attention driven by rapid progress of applications such as robotics and augmented reality.However,drastic visual discrepancies between an onsite query image and prerecorded indoor images cast a significant challenge for visual localization.In this paper,based on the key observation of the constant existence of planar surfaces such as floors or walls in indoor scenes,we propose a novel system incorporating geometric information to address issues using only pixelated images.Through the system implementation,we contribute a hierarchical structure consisting of pre-scanned images and point cloud,as well as a distilled representation of the planar-element layout extracted from the original dataset.A view synthesis procedure is designed to generate synthetic images as complementary to that of a sparsely sampled dataset.Moreover,a global image descriptor based on the image statistic modality,called block mean,variance,and color(BMVC),was employed to speed up the candidate pose identification incorporated with a traditional convolutional neural network(CNN)descriptor.Experimental results on a popular benchmark demonstrate that the proposed method outperforms the state-of-the-art approaches in terms of visual localization validity and accuracy. 展开更多
关键词 visual localization planar surface statistic information view synthesis
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