Characteristics and realization of the second generation surface acoustic wave’s wavelet device

To overcome the bulk acoustic wave （BAW）, the triple transit signals and the discontinuous frequency band in the first generation surface acoustic wave＇s （FGSAW＇ s） wavelet device, the full transfer multistrip coupler （MSC） is applied to implement wavelet device, and a novel structure of the second generation surface acoustic wave＇s （SGSAW＇s） wavelet device is proposed. In the SGSAW＇ s wavelet device, the BAW is separated and eliminated in different acoustic propagating tracks, and the triple transit signal is suppressed. For arbitrary wavelet scale device, the center frequency is three times the radius of frequency band, which ensures that the frequency band of the SGSAW＇s wavelet device is continuous, and avoids losing signals caused by the discontinuation of frequency band. Experimental result confirms that the BAW suppression, ripples in band, receiving loss and insertion loss of the SGSAW＇ s wavelet device are remarkably improved compared with those of the FGSAW＇ s wavelet device.

Improved electromigration reliability of surface acoustic wave devices using Ti/Al-Mo/Ti/Al-Mo electrodes

In order to obtain both high electromigration （EM） reliability and free-dimensional control in high-frequency surface acoustic wave （SAW） devices, 4-layered Ti/Al-Mo/Ti/Al-Mo electrode films were investigated on 128° Y-X LiNbO3 substrates by sputtering deposition. The resuits indicated that the 4-layered films had an improved EM reliability compared to conventional Al-0.5wt.%Cu films. Their lifetime is approximately three times longer than that of the Al-0.5wt.%Cu films tested at a current density of 5 x 107 A/cm^2 and a temperature of 200℃. Moreover, the 4-layered films were easily etched in reactive ion etching and fine-dimensional control was realized during the pattern replication for high-frequency SAW devices. For the 4-layered films, an optimum Mo quantity and sputtering parameters were very significant for high EM reliability.

Standing surface acoustic wave-assisted fabrication of patterned microstructures for enhancing cell migration

Microfluidic device with patterned microstructures on the substrate surface was used to regulate cell adhesion,morphology,and functions in tissue engineering.We developed a microfluidic device which employing microscale patterned microstructures to achieve enhanced cell adhesion and migration.Biocompatible hydrogel substrates with micro-wavy and lattice-patterned microstructures were fabricated using standing surface acoustic waves and ultraviolet solidification.After seeding the L929 mouse fibroblast cells onto the patterned substrate of the microfluidic device,we determined that the viability and proliferation rate of cell migration can be greatly enhanced.Furthermore,L929 cells showed two types of gathering modes after 48 h of culturing.Cell growth was guided by the patterned substrate used in the microfluidic device and showed differences in the location distribution.Therefore,the developed microfluidic device with patterned microstructures can extend the application of in vitro cell culturing for future drug development and disease diagnosis.

A novel type of transverse surface wave propagating in a layered structure consisting of a piezoelectric layer attached to an elastic half-space

The existence and propagation of transverse surface waves in piezoelectric coupled solids is investigated, in which perfect bonding between a metal/dielectric substrate and a piezoelectric layer of finite-thickness is assumed. Dis- persion equations relating phase velocity to material con- stants for the existence of various modes are obtained in a simple mathematical form for a piezoelectric material of class 6mm. It is discovered and proved by numerical examples in this paper that a novel Bleustein-Gulyaev （B-G） type of transverse surface wave can exist in such piezoelectric cou- pled solid media when the bulk-shear-wave velocity in the substrate is less than that in the piezoelectric layer but greater than the corresponding B-G wave velocity in the same pie- zoelectric material with an electroded surface. Such a wave does not exist in such layered structures in the absence of pie- zoelectricity. The mode shapes for displacement and electric potential in the piezoelectric layer are obtained and discussed theoretically. The study extends the regime of transverse sur- face waves and may lead to potential applications to surface acoustic wave devices.

Precise simulation of surface acoustic wave devices using frequency-dependent coupling-of-modes parameters

Herein we extract all the frequency-dependent coupling-of-modes （COM） parameters, which will be used to the rapid simulation and optimal design of surface acoustic wave （SAW） devices. FEM/BEM is used to calculate the exact field distributions of forward and backward surface acoustic waves within a finite-length periodic grating at every frequency. The middle compo- nent of the grating, regarded as a periodic structure, is selected to be investigated which can satisfy the presupposition of the COM model. From these field distributions, the values of P-matrix elements of one cell are calculated. The COM parameters taken as functions of frequency are accurately obtained. Specifically, the frequency-dependent relationships of reflection coefficient and propagation velocity are obtained independently. Using the resultant COM parameters, a one-port resonator on the substrate of 128°YX-LiNbO3 is simulated and the admittance curve shows good agreement with the simulating results using FEM/BEM. These results verify the validity and accuracy of this method.

Test method of frequency response based on diamond surface acoustic wave devices

In order to reduce the noises affixed to the signals when testing high frequency devices,a single-port test mode(S11) is used to test frequency response of high frequency(GHz) and dual-port surface acoustic wave devices(SAWDs) in this paper.The feasibility of the test is proved by simulating the Fabry-perot model.The frequency response of the high-frequency dual-port resonant-type diamond SAWD is measured by S11 and the dual-port test mode(S21),respectively.The results show that the quality factor of the device is 51.29 and the 3 dB bandwidth is 27.8 MHz by S11-mode measurement,which is better than the S21 mode,and is consistent with the frequency response curve by simulation.

Preparation of free-standing diamond films for high frequency SAW devices

Free-standing diamond films were prepared by hot filament chemical vapor deposition (HFCVD) method under different conditions. Inter-digital transducers (IDTs) were formed on the nucleation sides of free-standing diamond films by photolithography technique. Then piezoelectric ZnO films were deposited by radio-frequency(RF) reactive magnetron sputtering to obtain the ZnO/diamond film structures. Surface morphologies of the nucleation sides and the IDTs were characterized by means of scanning electron microscopy (SEM), atomic force microscope (AFM) and optical microscopy. The results indicate that the surfaces of nucleation sides are very smooth and the IDTs are of high quality without discontinuity and short circuit phenomenon. Raman spectra show the sharp diamond feature peak at about 1 334 cm?1 and the small amount of non-diamond carbon in the nucleation side. X-ray diffraction (XRD) patterns of the structure of ZnO/diamond films show a strong diffraction peak of ZnO (002), which indicates that as-sputtered ZnO films are highly c-axis oriented.

Investigation of surface acoustic waves in laser shock peened metals

Laser shock peening is a well-known method for extending the fatigue life of metal components by introducing near-surface compressive residual stress. The surface acoustic waves （SAWs） are dispersive when the near-surface properties of materials are changed. So the near-surface properties （such as the thickness of hardened layers, elastic properties, residual stresses, etc.） can be analyzed by the phase velocity dispersion. To study the propagation of SAWs in metal samples after peening, a more reasonable experimental method of broadband excitation and reception is introduced. The ultrasonic signals are excited by laser and received by polyvinylindene fluoride （PVDF） transducer. The SAW signals in aluminum alloy materials with different impact times by laser shock peening are detected. Signal spectrum and phase velocity dispersion curves of SAWs are analyzed. Moreover, reasons for dispersion are discussed.

Amplitude measurement of weak sinusoidal water surface acoustic wave using laser interferometer

To determine the amplitude of weak sinusoidal water surface acoustic wave （WSAW）, a method based on the spectrum analysis of the phase-modulated interference signal is developed. Calculated from the amplitude spec- trum of the detection signal, a characteristic ratio indicates that the phase-modulation depth of a WSAW is suggested by determining the amplitude of a WSAW according to their functional relationship. Experimental investigations for a 4 kHz WSAW evaluate the measurement＇s precision with an amplitude measurement stan- dard deviation of 0.12 nm. The measurement accuracy also is demonstrated by the experimental investigations. The theory of this method is briefly described, and the experimental setup is presented.

声表面波-自旋波耦合及磁声非互易性器件

声表面波是激发和控制自旋波的一种新兴手段,不仅激励效率高,而且传输长度可以达到毫米量级,通过引入磁声耦合还可以打破时空反演对称性,实现声表面波的非互易传播.本文对不同类型的磁声耦合的物理机制进行了梳理,对比了磁弹性耦合、自旋-涡度耦合(包括非磁性层注入交变自旋流和磁性材料自身的Barnett效应),以及磁-旋转耦合在不同模式的声表面波激发下的等效驱动磁场,讨论了这些等效驱动场的角度依赖性,以及相应功率吸收的频率依赖性.这为在实际应用中区分和利用各种磁声耦合机制提供了理论支持.此外,本文还介绍了利用磁声耦合实现声表面波非互易性传输的两种主流手段,包括利用手性失配效应和引入具有非互易性自旋波色散关系的磁结构,对比并讨论了它们各自的物理机制和优劣势,希望为设计和发展基于磁声耦合的固态声学隔离器、环形器提供参考.

叉指电极结构传感器的研究及应用进展

叉指电极传感器以其结构简单、灵敏度高、稳定性好等独特优点成为众多领域的研究热点。本文详细论述了叉指电极的工作原理、指标参数、检测原理、制备工艺和分布结构等,探讨了近几年叉指电极结构传感器在医学、环境、生物等行业的应用现状,重点分析在监测环境因素、人体运动状态和声表面波(SAW)技术等方面的最新研究技术,最后对其发展前景、趋势和挑战进行了分析和展望。

Impact of cooling condition on the crystal structure and surface quality of preferred c-axis-oriented AlN films for SAW devices

AlN films with preferred c-axis orientation are deposited on Si substrates using the radio frequency(RF) magnetron sputtering method.The post-processing is carried out under the cooling conditions including high vacuum,low vacuum under deposition gas ambient and low vacuum under dynamic N2 ambient.Structures and morphologies of the films are analyzed by X-ray diffraction(XRD) and atomic force microscopy(AFM).The hardness and Young's modulus are investigated by the nanoindenter.The experimental results indicate that the(100) and(110) peak intensities decrease in the XRD spectra and the root-mean-square of roughness(Rrms) of the film decreases gradually with the increase of the cooling rate.The maximum values of the hardness and Young modulus are obtained by cooling in low vacuum under deposition gas ambient.The reason for orientation variation of the films is explained from the perspective of the Al-N bond formation.

基于165Y-75Y LiNbO_(3)的声表面波器件的声光互作用性能分析

该文从理论上仿真了切割方向为165°Y,传播方向为75°Y的LiNbO_(3)晶体(简称165Y LN)的表面波声光调制器的场分布及其重叠积分、驱动功率随波导厚度变化的关系,并与其他切割方向的仿真结果进行了比较。该方向位于材料退耦面内,且在该面具有最大的机电耦合系数,是潜在的高性能切割方向。测试表明,165Y LN的TE模和TM模在低频区均有较低的驱动功率和较大的重叠积分带宽,可被用于制作具有高性能且对偏振不敏感的表面波声光器件。

基于铌酸锂/BCB/聚酰亚胺结构的柔性声表面波器件的设计与仿真

该文采用有限元法对“铌酸锂/苯并环丁烯(BCB)/聚酰亚胺”结构的柔性声表面波器件进行了研究。结果表明,铌酸锂厚度为0.06λ~0.8λ(λ为周期)时,不能激发稳定的瑞利波,在此区间外可激发瑞利波。随着温度升高,器件的谐振频率降低,计算结果表明,声速随温度变化是谐振频率下降的主要原因,大于热膨胀引起的谐振频率变化。仿真结果为设计和制备柔性声表面波器件时合理选择压电薄膜厚度及衬底材料力学性能等参数提供了一定的理论依据。

Application of ultrasonic surface waves in the detection of microcracks using the scanning heating laser source technique

This letter reports the application of the scanning heating laser source technique to detect microcracks that may be undetected by conventional methods. In the proposed approach, we monitor changes in the transmitted surface acoustic waves （SAWs） as a heating source is scanned over the crack. The experimental system for microcrack detection by a scanning heating laser source is obtained by exploiting the strong dependence of the transmission efficiency of acoustic pulses on the state of the contacts, whether open or closed, between the crack faces. Microeracks can be detected successfully by confirming the heating position at the point of maximal improvement of the transmission efficiency of the SAWs.

用声表面波器件实现小波变换的方法

根据声表面波SAW (SurfaceAcousticWave)传播的非线性特性 ,将变换信号用的小波作为声表面波器件的脉冲响应 ,从而提出了一种用声表面波模拟硬件实现小波变换的方法 ,并成功地用特种模拟器件实现了连续二进小波的快速变换 .由于实现方法简单 ,避免了复杂的算法和昂贵的制作过程 ,对于开发小波变换的优越性和小波变换的应用有重要的价值 .同时 ,还给出了小波变换在检测信号和信号滤波方面的应用例子 。

利用光差分技术检测激光激发声表面波定征薄膜材料

利用激光激发声表面波及改进的光差分检测技术,研究沉积在基片表面的薄膜样品的特性和参量。根据实验获得的声色散曲线和基片已知参数,结合层状媒质中声表面波传播理论,拟合得到薄膜材料的弹性模量、密度和厚度等物理量。结合扫描电子显微镜和X光衍射结果分析,并与文献值比较,表明所采用的技术是定征薄膜材料的弹性模量和力学参量的有效方法。

用PLD法制备声表面波器件用ZnO薄膜

采用脉冲激光淀积 (PLD)法在单晶Si(10 0 )衬底上淀积了ZnO薄膜。XRD、TEM和AFM分析表明 ,淀积的ZnO薄膜具有良好的c轴取向性和表面平整度。通过改变淀积气氛或在纯氧中高温退火 ,ZnO薄膜的电阻率提高到 10 7Ω·cm。这些结果表明 ,用PLD法淀积的ZnO薄膜能够满足声表面波(SAW )器件的需要。

时间延迟型声表面波无源传感器的无线访问

介绍了一种基于无源声表面波（ＳＡＷ）器件的无线传感器．作为敏感器件的 ＳＡＷ器件由作为换能器的 ＩＤ－Ｔａｇ和一组反射栅组成．由访问系统发射出的电磁波通过 ＩＤ－Ｔａｇ在 ＳＡＷ器件上激励起声表面波，此声表面波在器件表面传播，被ＳＡＷ器件本身状态参数调制后，反射回波再通过ＩＤ－Ｔａｇ转变成电磁波向空间发射．因此对访问系统接收到的回波信号进行分析即可得到被测量。即实现了无线传感．由于以ＳＡＷ器件为敏感元件可以研制各种各样的物理量、化学量传感器，这种无线访问传感系统可在各种场合得到应用．

声表面波渡越时间法检测黏弹性介质表面凹痕深度的研究

研究声表面波渡越时间法检测黏弹性介质表面凹痕的深度。基于频域动力学平衡方程,采用有限元方法分别在有表面凹痕的弹性和黏弹性介质中,建立激光激发声表面波的数值模型。研究材料的黏性引起的声表面波波速和频散的变化,对表面凹痕检测的影响,在此基础上,根据反射和透射声表面波的传播路径及到达时间,利用渡越时间法检测黏弹性介质中的表面凹痕。结果表明:黏性引起的声表面波频散对表面凹痕检测的影响极小,采用渡越时间法检测得到的表面凹痕的位置及深度,与数值模型的设置值符合很好,从而为黏弹性介质表面凹痕的检测提供有效的理论方法。