Surface acoustic wave （SAW） resonators are a type of ultraviolet （UV） light sensors with high sensitivity, and they have been extensively studied. Transparent SAW devices are very useful and can be developed into ...Surface acoustic wave （SAW） resonators are a type of ultraviolet （UV） light sensors with high sensitivity, and they have been extensively studied. Transparent SAW devices are very useful and can be developed into various sensors and microfluidics for sensing/monitoring and lab-on-chip applications. We report the fabrication of high sensitivity SAW UV sensors based on piezoelectric （PE） ZnO thin films deposited on glass substrates. The sensors were fabricated and their performances against the post-deposition annealing condition were investigated. It was found that the UV-light sensitivity is improved by more than one order of magnitude after annealing. The frequency response increases significantly and the response becomes much faster. The optimized devices also show a small temperature coefficient of frequency and excellent repeatability and stability, demonstrating its potential for UV-light sensing application.展开更多
ZnO films on R-sapphire substrates are prepared and characterized by x-ray diffraction and scanning electron microscopy, which indicate that the thin films are well crystallized with （1120） texture. Love wave and Ra...ZnO films on R-sapphire substrates are prepared and characterized by x-ray diffraction and scanning electron microscopy, which indicate that the thin films are well crystallized with （1120） texture. Love wave and Rayleigh wave are used for fabrications of humidity sensors, which are excited in [1100] and [0001] directions of the （1120） ZnO piezoelectric films, respectively. The experimental results show that both kinds of sensors have good humidity response and repeatability, and the performances of the Love wave sensors are better than those of the Rayleigh wave sensors at room temperature. Moreover, the theoretical calculations of the mass sensitivity of the sensors are a/so carried out and the calculated results are in good agreement with the experimental measurements.展开更多
A shear-lag theory was developed to investigate the strain transfer from the metal substrate to the surface acoustic wave （SAW） resonator through a bonding layer. A three-layer model of host structure-adhesive layer...A shear-lag theory was developed to investigate the strain transfer from the metal substrate to the surface acoustic wave （SAW） resonator through a bonding layer. A three-layer model of host structure-adhesive layer-resonator layer was established. The strain transfer was theoretically analyzed, and the main factors impacting the SAW sensor measurement were studied. The relationship between the sensor response and the individual effect of all these factors under static loads was discussed. Results showed that better accuracy could be achieved with increase in the adhesive stiffness or resonator length, or decrease in the adhesive thickness. The values of the strain transfer rate calculated from the analytical model agreed well with that from the available experiment data.展开更多
Summary: A new kind of biosensor for immunology was developed by ultrasonic technique and LB membrane. A double delay-line resonator was made by using ST-cut quartz crystal with working frequency of 149. 7 MHz. Then a...Summary: A new kind of biosensor for immunology was developed by ultrasonic technique and LB membrane. A double delay-line resonator was made by using ST-cut quartz crystal with working frequency of 149. 7 MHz. Then a layer of LB membrane was covered on it. When anti-IgM anti- body of various concentrations was added to it, the sensor can be used to detect IgM antigen. The biosensor was highly sensitive, small and light. The experimental results showed that the working frequency change of the sensor was proportional to the concentration of antibody with its dilution ratio between 1: 10000 and 1: 100. It was also first observed that the frequency curve of the sen- sor resulting from the reaction of IgM antigen and antibody undulated in the experiment.展开更多
Langasite (LGS) is a novel piezoelectric crystal. The authors numerically analyses the temperature stability of surface acoustic waves (SAW) and the relation of SAW propagation with temperature on certain optimal cuts...Langasite (LGS) is a novel piezoelectric crystal. The authors numerically analyses the temperature stability of surface acoustic waves (SAW) and the relation of SAW propagation with temperature on certain optimal cuts on LGS in this paper. The results show that LGS has better temperature stability than traditional piezo crystals. The results also demonstrate that the velocity of SAW decrease with temperature, the electro-mechanical coupling constant (k2) and temperature coefficient of frequency increases parabolically and the power flow angle increases linearly on certain optimal cuts of LGS. The calculation result compared with the experimental and show good agreement.展开更多
Surface acoustic wave(SAW) devices have been utilized for the sensing of chemical and biological phenomena in microscale for the past few decades. In this study, SAW device was fabricated by electrospinning poly(vinyl...Surface acoustic wave(SAW) devices have been utilized for the sensing of chemical and biological phenomena in microscale for the past few decades. In this study, SAW device was fabricated by electrospinning poly(vinylidenefluoride-co-trifluoroethylene)(P(VDF-TrFE)) incorporated with zinc oxide(ZnO) nanoparticles over the delay line area of the SAW device. The morphology, composition, and crystallinity of P(VDF-TrFE)/ZnO nanocomposites were investigated. After measurement of SAW frequency response, it was found that the insertion loss of the SAW devices incorporated with ZnO nanoparticles was much less than that of the neat polymer-deposited device. The fabricated device was expected to be used in acoustic biosensors to detect and quantify the cell proliferation in cell culture systems.展开更多
Langatate( LGT) is a novel piezoelectric crystal; its structure is similar to quartz. A numerical analysis of the most important propagation characteristics of surface acoustic waves( SAW) on LGT and quartz is present...Langatate( LGT) is a novel piezoelectric crystal; its structure is similar to quartz. A numerical analysis of the most important propagation characteristics of surface acoustic waves( SAW) on LGT and quartz is presented in this paper. The results show that the phase velocity on LGT is slower than that on quartz.Similar to quartz,there are zero temperature cuts and pure module orientations on LGT. The electro-mechanical coupling constant( k2)of LGT is larger than that of quartz. The characteristics of SAW on LGT with different material constants are calculated and compared.The results show that there are somewhat deviations with different material constants. Especially, the temperature coefficient of frequency( TCF) shows a relatively high difference.展开更多
The surface acoustic wave （SAW） identification （ID）-tags have great potential for application in radio frequency identification （RFID） due to their characteristics of wireless sensing and passive operation. In t...The surface acoustic wave （SAW） identification （ID）-tags have great potential for application in radio frequency identification （RFID） due to their characteristics of wireless sensing and passive operation. In the measurements based on the frequency domain sampling （FDS）, to expand the range of detection and allow the system work in harsh environments, it is necessary to enhance the identification capability at low SNR. In addition, to identify the tags in real time, it is important to reduce identification time. Therefore, estimation of signal parameters based on the Procrustes rotations via the rotational invariance technique （PRO-ESPRIT） is adopted. Experimental results show that good identification capability is achieved with a relatively faster measurement speed.展开更多
One-port magnetic surface acoustic wave(MSAW) resonators are fabricated by stacking multilayered(FeCoSiB/SiO2)n films directly on top of interdigital electrodes. It is shown that the magneto-acoustic response of the M...One-port magnetic surface acoustic wave(MSAW) resonators are fabricated by stacking multilayered(FeCoSiB/SiO2)n films directly on top of interdigital electrodes. It is shown that the magneto-acoustic response of the MSAW resonators critically depends the hysteresis of △E effect. For the magnetic multilayer without induced magnetic anisotropy, the resonance frequency( fR) exhibits a butterfly-like dependence on the external field, therefore, enabling bipolar detection of magnetic field smaller than its coercive field. However, for the magnetic multilayers with induced magnetic anisotropy, butterfly-like or loop-like fR–H curves are measured along the interdigtial electrode fingers or the SAW propagation direction, which can be attributed to the competition between the magnetic field-induced anisotropy and the stress-induced or shape anisotropy.展开更多
A fluid sensor based on the surface transverse wave (STW) delay line on ST-cut quartz has been developed and tested in a large number of fluids with different viscosity and permittivity levels.Influence of fluid mech...A fluid sensor based on the surface transverse wave (STW) delay line on ST-cut quartz has been developed and tested in a large number of fluids with different viscosity and permittivity levels.Influence of fluid mechanical and electrical properties on the sensor's response has been determined and the sensor's performance has been compared with a bulk acoustic wave (BAW) viscosity sensor.The result shows that the viscosity sensitivity of the developed STW sensor represented by the signal to noise ratio is lower than that of a 5 MHz BAW sensor.Applications of the sensor in detecting the quality of industrial fluids are discussed.展开更多
Nanomaterials integrated surface acoustic wave(SAW)gas sensing technology has emerged as a promising candidate for realtime toxic gas sensing applications for environmental and human health safety.However,the developm...Nanomaterials integrated surface acoustic wave(SAW)gas sensing technology has emerged as a promising candidate for realtime toxic gas sensing applications for environmental and human health safety.However,the development of novel chemical interface based on two-dimensional(2D)sensing materials for SAW sensors for the rapid and sensitive detection of NH_(3)gas at room temperature(RT)still remains challenging.Herein,we report a highly selective RT NH_(3)gas sensor based on sulfur-doped graphitic carbon nitride quantum dots(S@g-C_(3)N_(4)QD)coated langasite(LGS)SAW sensor with enhanced sensitivity and recovery rate under ultraviolet(UV)illumination.Fascinatingly,the sensitivity of the S@g-C_(3)N_(4)QD/LGS SAW sensor to NH_(3)(500 ppb)at RT is dramatically enhanced by~4.5-fold with a low detection limit(~85 ppb),high selectivity,excellent reproducibility,fast response/recovery time(70 s/79 s)under UV activation(365 nm)as compared to dark condition.Additionally,the proposed sensor exhibited augmented NH_(3)detection capability across the broad range of relative humidity(20%–80%).Such remarkable gas sensing performances of the as-prepared sensor to NH_(3)are attributed to the high surface area,enhanced functional groups,sulfur defects,UV photogenerated charge carriers,facile charge transfer in the S@g-C_(3)N_(4)QD sensing layer,which further helps to improve the gas molecules adsorption that causes the increase in conductivity,resulting in larger frequency responses.The gas sensing mechanism of S@g-C_(3)N_(4)QD/LGS SAW sensor is ascribed to the enhanced electroacoustic effect,which is supported by the correlation of resistive type and COMSOL Multiphysics simulation studies.We envisage that the present work paves a promising strategy to develop the next generation 2D g-C_(3)N_(4)based high responsive RT SAW gas sensors.展开更多
Surface acoustic wave （SAW） devices have been widely used in different fields and will continue to be of great importance in the foreseeable future. These devices are compact, cost efficient, easy to fabricate, and ...Surface acoustic wave （SAW） devices have been widely used in different fields and will continue to be of great importance in the foreseeable future. These devices are compact, cost efficient, easy to fabricate, and have a high performance, among other advantages. SAW devices can work as filters, signal processing units, sensors and actuators. They can even work without batteries and operate under harsh environments. In this review, the operating principles of SAW sensors, including temperature sensors, pressure sensors, humidity sensors and biosensors, will be discussed. Several examples and related issues will be presented. Technological trends and future developments will also be discussed.展开更多
A new type of the surface acoustic wave (SAW) sensor system was delivered. Urease from several kinds of plant seeds was extracted with different extracting solvents. The urease activity, Michaelis constant and other k...A new type of the surface acoustic wave (SAW) sensor system was delivered. Urease from several kinds of plant seeds was extracted with different extracting solvents. The urease activity, Michaelis constant and other kinetic parameters were estimated for the first time by means of the new device-SAW sensor system. Some factors such as pH, temperature, activators and inhibitors are also discussed. The method can be applied to the determination of urea content in human urine and the experimental results consist with those reported.展开更多
Surface acoustic wave(SAW)resonator with outstanding quality factors of 4829/6775 at the resonant/anti-resonant frequencies has been demonstrated on C-doped semi-insulating bulk GaN.The impact of device parameters inc...Surface acoustic wave(SAW)resonator with outstanding quality factors of 4829/6775 at the resonant/anti-resonant frequencies has been demonstrated on C-doped semi-insulating bulk GaN.The impact of device parameters including aspect ratio of length to width of resonators,number of interdigital transducers,and acoustic propagation direction on resonator performance have been studied.For the first time,we demonstrate wireless temperature sensing from 21.6 to 120℃ with a stable temperature coefficient of frequency of–24.3 ppm/℃ on bulk GaN-based SAW resonators.展开更多
基金supported by the National Natural Science Foundation of China(Grant Nos.61274037 and 61301046)the Research Fund for the Doctoral Program of Higher Education of China(Grant Nos.20120101110031 and 20120101110054)
文摘Surface acoustic wave （SAW） resonators are a type of ultraviolet （UV） light sensors with high sensitivity, and they have been extensively studied. Transparent SAW devices are very useful and can be developed into various sensors and microfluidics for sensing/monitoring and lab-on-chip applications. We report the fabrication of high sensitivity SAW UV sensors based on piezoelectric （PE） ZnO thin films deposited on glass substrates. The sensors were fabricated and their performances against the post-deposition annealing condition were investigated. It was found that the UV-light sensitivity is improved by more than one order of magnitude after annealing. The frequency response increases significantly and the response becomes much faster. The optimized devices also show a small temperature coefficient of frequency and excellent repeatability and stability, demonstrating its potential for UV-light sensing application.
基金Supported by the National Natural Science Foundation of China under Grant Nos 11174142,11304160 and 11404147the National Basic Research Program of China under Grant No 2012CB921504+2 种基金the PAPD Projectthe Natural Science Foundation of Jiangsu Higher Education Institutions of China under Grant No 13KJB140008the Foundation of Nanjing University of Posts and Telecommunications under Grant No NY213018
文摘ZnO films on R-sapphire substrates are prepared and characterized by x-ray diffraction and scanning electron microscopy, which indicate that the thin films are well crystallized with （1120） texture. Love wave and Rayleigh wave are used for fabrications of humidity sensors, which are excited in [1100] and [0001] directions of the （1120） ZnO piezoelectric films, respectively. The experimental results show that both kinds of sensors have good humidity response and repeatability, and the performances of the Love wave sensors are better than those of the Rayleigh wave sensors at room temperature. Moreover, the theoretical calculations of the mass sensitivity of the sensors are a/so carried out and the calculated results are in good agreement with the experimental measurements.
文摘A shear-lag theory was developed to investigate the strain transfer from the metal substrate to the surface acoustic wave （SAW） resonator through a bonding layer. A three-layer model of host structure-adhesive layer-resonator layer was established. The strain transfer was theoretically analyzed, and the main factors impacting the SAW sensor measurement were studied. The relationship between the sensor response and the individual effect of all these factors under static loads was discussed. Results showed that better accuracy could be achieved with increase in the adhesive stiffness or resonator length, or decrease in the adhesive thickness. The values of the strain transfer rate calculated from the analytical model agreed well with that from the available experiment data.
基金This project was supported by a grant from Foundation of National Sensor Key Laboratory of China !(1994).
文摘Summary: A new kind of biosensor for immunology was developed by ultrasonic technique and LB membrane. A double delay-line resonator was made by using ST-cut quartz crystal with working frequency of 149. 7 MHz. Then a layer of LB membrane was covered on it. When anti-IgM anti- body of various concentrations was added to it, the sensor can be used to detect IgM antigen. The biosensor was highly sensitive, small and light. The experimental results showed that the working frequency change of the sensor was proportional to the concentration of antibody with its dilution ratio between 1: 10000 and 1: 100. It was also first observed that the frequency curve of the sen- sor resulting from the reaction of IgM antigen and antibody undulated in the experiment.
文摘Langasite (LGS) is a novel piezoelectric crystal. The authors numerically analyses the temperature stability of surface acoustic waves (SAW) and the relation of SAW propagation with temperature on certain optimal cuts on LGS in this paper. The results show that LGS has better temperature stability than traditional piezo crystals. The results also demonstrate that the velocity of SAW decrease with temperature, the electro-mechanical coupling constant (k2) and temperature coefficient of frequency increases parabolically and the power flow angle increases linearly on certain optimal cuts of LGS. The calculation result compared with the experimental and show good agreement.
基金the Agence Nationale de la Recherche for the financial support (ANR-12-BS09021)the Department of Biotechnology (DBT), Government of India, New Delhi, for the financial support through MSUB IPLSARE Program (BT/PR4800/INF/22/152/2012)
文摘Surface acoustic wave(SAW) devices have been utilized for the sensing of chemical and biological phenomena in microscale for the past few decades. In this study, SAW device was fabricated by electrospinning poly(vinylidenefluoride-co-trifluoroethylene)(P(VDF-TrFE)) incorporated with zinc oxide(ZnO) nanoparticles over the delay line area of the SAW device. The morphology, composition, and crystallinity of P(VDF-TrFE)/ZnO nanocomposites were investigated. After measurement of SAW frequency response, it was found that the insertion loss of the SAW devices incorporated with ZnO nanoparticles was much less than that of the neat polymer-deposited device. The fabricated device was expected to be used in acoustic biosensors to detect and quantify the cell proliferation in cell culture systems.
基金Leading Academic Discipline Project of Shanghai Municipal Education Commission,China(No.J513032)Innovation Program of Shanghai Municipal Education Commission,China(No.09YZ343)
文摘Langatate( LGT) is a novel piezoelectric crystal; its structure is similar to quartz. A numerical analysis of the most important propagation characteristics of surface acoustic waves( SAW) on LGT and quartz is presented in this paper. The results show that the phase velocity on LGT is slower than that on quartz.Similar to quartz,there are zero temperature cuts and pure module orientations on LGT. The electro-mechanical coupling constant( k2)of LGT is larger than that of quartz. The characteristics of SAW on LGT with different material constants are calculated and compared.The results show that there are somewhat deviations with different material constants. Especially, the temperature coefficient of frequency( TCF) shows a relatively high difference.
文摘The surface acoustic wave （SAW） identification （ID）-tags have great potential for application in radio frequency identification （RFID） due to their characteristics of wireless sensing and passive operation. In the measurements based on the frequency domain sampling （FDS）, to expand the range of detection and allow the system work in harsh environments, it is necessary to enhance the identification capability at low SNR. In addition, to identify the tags in real time, it is important to reduce identification time. Therefore, estimation of signal parameters based on the Procrustes rotations via the rotational invariance technique （PRO-ESPRIT） is adopted. Experimental results show that good identification capability is achieved with a relatively faster measurement speed.
基金National Natural Science Foundation of China(Grant No.61871081)the National Key Scientific Instrument and Equipment Development Project of China(Grant No.51827802).
文摘One-port magnetic surface acoustic wave(MSAW) resonators are fabricated by stacking multilayered(FeCoSiB/SiO2)n films directly on top of interdigital electrodes. It is shown that the magneto-acoustic response of the MSAW resonators critically depends the hysteresis of △E effect. For the magnetic multilayer without induced magnetic anisotropy, the resonance frequency( fR) exhibits a butterfly-like dependence on the external field, therefore, enabling bipolar detection of magnetic field smaller than its coercive field. However, for the magnetic multilayers with induced magnetic anisotropy, butterfly-like or loop-like fR–H curves are measured along the interdigtial electrode fingers or the SAW propagation direction, which can be attributed to the competition between the magnetic field-induced anisotropy and the stress-induced or shape anisotropy.
文摘A fluid sensor based on the surface transverse wave (STW) delay line on ST-cut quartz has been developed and tested in a large number of fluids with different viscosity and permittivity levels.Influence of fluid mechanical and electrical properties on the sensor's response has been determined and the sensor's performance has been compared with a bulk acoustic wave (BAW) viscosity sensor.The result shows that the viscosity sensitivity of the developed STW sensor represented by the signal to noise ratio is lower than that of a 5 MHz BAW sensor.Applications of the sensor in detecting the quality of industrial fluids are discussed.
基金the National Research Foundation of Korea(NRF)grant funded by the Korea government(MSIT)(No.2020R1A2C2013385)Basic Science Research Program through the National Research Foundation of Korea(NRF)funded by the Ministry of Education(No.NRF-2020R1A6A1A03047771)Korea Institute of Planning and Evaluation for Technology in Food,Agriculture and Forestry(IPET),Korea Smart Farm Research and Development Foundation(KosFarm)through Smart Farm Innovation Technology Development Program,funded by Ministry of Agriculture,Food,and Rural Affairs(MAFRA)and Ministry of Science and ICT(MSIT),Rural Development Administration(RDA)(No.421029-4).
文摘Nanomaterials integrated surface acoustic wave(SAW)gas sensing technology has emerged as a promising candidate for realtime toxic gas sensing applications for environmental and human health safety.However,the development of novel chemical interface based on two-dimensional(2D)sensing materials for SAW sensors for the rapid and sensitive detection of NH_(3)gas at room temperature(RT)still remains challenging.Herein,we report a highly selective RT NH_(3)gas sensor based on sulfur-doped graphitic carbon nitride quantum dots(S@g-C_(3)N_(4)QD)coated langasite(LGS)SAW sensor with enhanced sensitivity and recovery rate under ultraviolet(UV)illumination.Fascinatingly,the sensitivity of the S@g-C_(3)N_(4)QD/LGS SAW sensor to NH_(3)(500 ppb)at RT is dramatically enhanced by~4.5-fold with a low detection limit(~85 ppb),high selectivity,excellent reproducibility,fast response/recovery time(70 s/79 s)under UV activation(365 nm)as compared to dark condition.Additionally,the proposed sensor exhibited augmented NH_(3)detection capability across the broad range of relative humidity(20%–80%).Such remarkable gas sensing performances of the as-prepared sensor to NH_(3)are attributed to the high surface area,enhanced functional groups,sulfur defects,UV photogenerated charge carriers,facile charge transfer in the S@g-C_(3)N_(4)QD sensing layer,which further helps to improve the gas molecules adsorption that causes the increase in conductivity,resulting in larger frequency responses.The gas sensing mechanism of S@g-C_(3)N_(4)QD/LGS SAW sensor is ascribed to the enhanced electroacoustic effect,which is supported by the correlation of resistive type and COMSOL Multiphysics simulation studies.We envisage that the present work paves a promising strategy to develop the next generation 2D g-C_(3)N_(4)based high responsive RT SAW gas sensors.
基金supported by the National Natural Science Foundation of China(Nos.60936002,61025021,61434001,61574083)the State Key Development Program for Basic Research of China(No.2015CB352100)+2 种基金the National Key Project of Science and Technology(No.2011ZX02403-002)the Special Fund for Agroscientific Research in the Public Interest of China(No.201303107)additionally supported by the Postdoctoral Fellowship(PDF)program of the Natural Sciences and Engineering Research Council(NSERC)of Canada and the China Postdoctoral Science Foundation(CPSF)
文摘Surface acoustic wave （SAW） devices have been widely used in different fields and will continue to be of great importance in the foreseeable future. These devices are compact, cost efficient, easy to fabricate, and have a high performance, among other advantages. SAW devices can work as filters, signal processing units, sensors and actuators. They can even work without batteries and operate under harsh environments. In this review, the operating principles of SAW sensors, including temperature sensors, pressure sensors, humidity sensors and biosensors, will be discussed. Several examples and related issues will be presented. Technological trends and future developments will also be discussed.
基金Project supported by the National Natural Science Foundation of China and the Foundation ofNational Education Commission of China.
文摘A new type of the surface acoustic wave (SAW) sensor system was delivered. Urease from several kinds of plant seeds was extracted with different extracting solvents. The urease activity, Michaelis constant and other kinetic parameters were estimated for the first time by means of the new device-SAW sensor system. Some factors such as pH, temperature, activators and inhibitors are also discussed. The method can be applied to the determination of urea content in human urine and the experimental results consist with those reported.
基金The research is supported by the National Natural Sciences Foundation of China(Grant No.61974137)the One Hundred Person project of the Chinese Academy of Science.
文摘Surface acoustic wave(SAW)resonator with outstanding quality factors of 4829/6775 at the resonant/anti-resonant frequencies has been demonstrated on C-doped semi-insulating bulk GaN.The impact of device parameters including aspect ratio of length to width of resonators,number of interdigital transducers,and acoustic propagation direction on resonator performance have been studied.For the first time,we demonstrate wireless temperature sensing from 21.6 to 120℃ with a stable temperature coefficient of frequency of–24.3 ppm/℃ on bulk GaN-based SAW resonators.
