The viscous strip approach to simplify the calculation of the surface acoustic wave generated streaming

In recent decades,the importance of surface acoustic waves,as a biocompatible tool to integrate with microfluidics,has been proven in various medical and biological applications.The numerical modeling of acoustic streaming caused by surface acoustic waves in microchannels requires the effect of viscosity to be considered in the equations which complicates the solution.In this paper,it is shown that the major contribution of viscosity and the horizontal component of actuation is concentrated in a narrow region alongside the actuation boundary.Since the inviscid equations are considerably easier to solve,a division into the viscous and inviscid domains would alleviate the computational load significantly.The particles'traces calculated by this approximation are excellently alongside their counterparts from the completely viscous model.It is also shown that the optimum thickness for the viscous strip is about 9-fold the acoustic boundary layer thickness for various flow patterns and amplitudes of actuation.

基于软件无线电方案无线无源SAW温度阅读器设计

目前谐振型声表面波(SAW)阅读器射频电路大多采取分立器件设计,针对系统整体工作频段受限,硬件设计繁琐的问题,该文提出了一种软件无线电方案。软件无线电系统主体由ZYNQ和AD9361组成,射频收发端口添加LNA、PA进行信号功率放大,使用射频开关隔离收发。通过发射步进频率5 kHz、带宽1 MHz扫频信号,并对回波进行频谱分析求取最大值,最终得到谐振频率。针对SAW传感器回波持续时间较短而导致FFT计算分辨率的不足,使用重复采集增加数据长度,将阅读器的分辨率提高到468.75 Hz。实验结果表明,该阅读器能够正确探测传感器温度变化。

面内传播方向对SAW滤波器性能的影响研究

为了满足窄带声表面波滤波器对品质因数Q值和带外抑制日益增长的需求,提出了一种窄带滤波器设计方法。在基于新型POI结构谐振器的基础上,通过旋转谐振器达到改变波传播角度的目的,并利用二维全模型得到准确的实验数据,与原结构谐振器分别代入滤波器设计中进行比较。实验结果表明,该方法在一定程度上能够有效地增加带外抑制,对过渡带抑制能力有2~4 dB的提升,且具有设计简便,占用空间小等优点。

Temperature Characteristics of Surface Acoustic Waves Propagating on La_3Ga_5SiO_4 Substrates

Langasite (LGS) is a novel piezoelectric crystal. The authors numerically analyses the temperature stability of surface acoustic waves (SAW) and the relation of SAW propagation with temperature on certain optimal cuts on LGS in this paper. The results show that LGS has better temperature stability than traditional piezo crystals. The results also demonstrate that the velocity of SAW decrease with temperature, the electro-mechanical coupling constant (k2) and temperature coefficient of frequency increases parabolically and the power flow angle increases linearly on certain optimal cuts of LGS. The calculation result compared with the experimental and show good agreement.

PROPAGATION OF SURFACE ACOUSTIC WAVES IN PRESTRESSED ANISOTROPIC LAYERED PIEZOELECTRIC STRUCTURES

The propagation of surface acoustic waves in layered piezoelectric structureswith initial stresses is investigated. The phase velocity equations are obtained for electricallyfree and shorted cases, respectively. Effects of the initial stresses on the phase velocity and theelectromechanical coupling coefficient for the fundamental mode of the layered piezoelectricstructures are discussed. Numerical results for the c-axis oriented film of LiNbO_3 on a sapphiresubstrate are given. It is found that the fractional change in phase velocity is a linear functionwith the initial stresses, and the electromechanical coupling factor increases with an increase ofthe absolute values of the compressive initial stresses. The results are useful for the design ofsurface acoustic wave devices.

基于IDT/ZnO/AlN/Diamond结构的混合SAW/BAW压力敏感元件特性研究

利用有限元方法分析了基于IDT/ZnO/AlN/Diamond不同结构混合SAW/BAW器件的声学特性,包括层状薄膜结构、ZnO薄膜刻蚀结构和填充结构。结果表明,当h_(ZnO)/λ=0.3、h_(AlN)/λ=0.5,且ZnO被完全刻蚀(d/h_(ZnO)=1)时,刻蚀结构混合SAW/BAW(准西沙瓦波)的机电耦合系数(K^(2))取得最大值6.54%,比层状结构(d/h_(ZnO)=0)提升了近一倍。刻蚀结构中,SiO_(2)和Diamond填充物的引入不仅提高了准西沙瓦波的K_(2),而且改善了其压力传感特性。当d/h_(ZnO)=1时,SiO_(2)和Diamond填充结构准西沙瓦波的压力频移分别为81.2 kHz/MPa和207.4 kHz/MPa,比刻蚀结构分别提高了58.7%和300%;同时,Diamond填充物的引入使准西沙瓦波的频率压力系数(PCF)达到最大值297×10^(-6)/MPa,比d/h_(ZnO)=0时提高了约30%。由此可知,通过引入不同的填充物可以开发不同的功能传感器,在压力、温度和气敏等传感领域将具有极大的应用前景。

Nondestructive determination of film thickness with laser-induced surface acoustic waves

The application of surface acoustic waves（SAWs） for thickness measurement is presented. By studying the impact of film thickness h on the dispersion phenomenon of surface acoustic waves, a method for thickness determination based on theoretical dispersion curve v（ fh） and experimental dispersion curve v（ f） is developed. The method provides a series of thickness values at different frequencies f, and the mean value is considered as the final result of the measurement. The thicknesses of six interconnect films are determined by SAWs, and the results are compared with the manufacturer＇s data.The relative differences are in the range from 0.4% to 2.18%, which indicates that the surface acoustic wave technique is reliable and accurate in the nondestructive thickness determination for films. This method can be generally used for fast and direct determination of film thickness.

面向曲面应变监测的SAW应变传感单元的设计

高端装备的内部性能参数,如应变等的实时监测,对评估装备在各状态、各阶段的性能变化尤为重要。基于高端装备的应变无源无线监测需求,根据待测表面的曲面特性,设计了面向曲面应变传感的SAW传感芯片,并通过有限元方法对设计参数进行了仿真分析和优化设计,采用特殊结构设计以增加曲面应变监测效果及提升应变芯片灵敏度。采用MEMS加工方法制作了应变芯片样品,并使用矢量网络分析仪测量了芯片的工作频率。测试结果表明,所设计的应变传感芯片中心频率与仿真结果接近。最后搭建应变测试平台进行实验研究,结果表明,所设计的应变芯片灵敏度达到1500 Hz/με,并且在模拟曲面构建应用场景的实验装置中表现出良好的适用性,上述研究为SAW器件在曲面构件应变监测上的应用提供了参考。

Propagation Characteristics of Surface Acoustic Waves on LGT and Quartz Substrates

Langatate( LGT) is a novel piezoelectric crystal; its structure is similar to quartz. A numerical analysis of the most important propagation characteristics of surface acoustic waves( SAW) on LGT and quartz is presented in this paper. The results show that the phase velocity on LGT is slower than that on quartz.Similar to quartz,there are zero temperature cuts and pure module orientations on LGT. The electro-mechanical coupling constant( k2)of LGT is larger than that of quartz. The characteristics of SAW on LGT with different material constants are calculated and compared.The results show that there are somewhat deviations with different material constants. Especially, the temperature coefficient of frequency( TCF) shows a relatively high difference.

Influence of roughness on the detection of mechanical characteristics of low-k film by the surface acoustic waves

The surface acoustic wave （SAW） technique is a precise and nondestructive method to detect the mechanical charac- teristics of the thin low dielectric constant （low-k） film by matching the theoretical dispersion curve with the experimental dispersion curve. In this paper, the influence of sample roughness on the precision of SAW mechanical detection is inves- tigated in detail. Random roughness values at the surface of low-k film and at the interface between this low-k film and the substrate are obtained by the Monte Carlo method. The dispersive characteristic of SAW on the layered structure with rough surface and rough interface is modeled by numerical simulation of finite element method. The Young＇s moduli of the Black DiamondTM samples with different roughness values are determined by SAWs in the experiment. The results show that the influence of sample roughness is very small when the root-mean-square （RMS） of roughness is smaller than 50 nm and correlation length is smaller than 20 μm. This study indicates that the SAW technique is reliable and precise in the nondestructive mechanical detection for low-k films.

Topological charge pump by surface acoustic waves

Quantized electron pumping by the surface acoustic wave across barriers created by a sequence of split metal gates is interpreted from the viewpoint of topology.The surface acoustic wave serves as a one-dimensional periodical potential whose energy spectrum possesses the Bloch band structure.The time-dependent phase plays the role of an adiabatic parameter of the Hamiltonian which induces a geometrical phase.The pumping currents are related to the Chern numbers of the filled bands below the Fermi energy.Based on this understanding,we predict a novel effect of quantized but nonmonotonous current plateaus simultaneously pumped by two homodromous surface acoustic waves.

离子束刻蚀技术在SAW滤波器频率修整上的应用

随着声表面波(SAW)滤波器的应用向高频、窄带方向延伸,在制造过程中准确地控制其中心频率及一致性变得越来越困难,需要对SAW滤波器的频率进行微调。重点介绍了一种在SAW滤波器上可实现目标频率修整的离子束刻蚀修频工艺,通过实验发现刻蚀厚度不同对滤波器表面的影响程度不同,一次离子束刻蚀厚度为50 nm时,铝膜表面出现微结构变化。分析了对晶圆、器件进行离子刻蚀工艺引起热损伤的机理,表征了不同刻蚀厚度对SAW滤波器粘接芯片的剪切力和硅铝丝键合力的影响。根据实验现象及结果提出了分梯度多次刻蚀的优化方案,给出了不同刻蚀厚度的刻蚀精度,对实验结果进行拟合,得到中心频率与刻蚀厚度的关系方程,从频率、插入损耗和通带方面分析了离子束刻蚀工艺对SAW滤波器电学性能的影响。经离子束刻蚀修频后,滤波器中心频率提高2 MHz,中心频率标准差由0.4 MHz减少为0.15 MHz,中心频率的均一性由0.29%改善至0.11%,频率一致性变好。

Influence of Viscosity in Fluid Atomization with Surface Acoustic Waves

In this work, aqueous glycerol solutions are atomized to investigate the influence of the viscosity on the droplet size and the general atomization behavior in a setup using standing surface acoustic waves (sSAW) and a fluid supply at the boundary of the acoustic path. Depending on the fluid viscosity, the produced aerosols have a monomodal or polymodal size distribution. The mean droplet size in the dominant droplet fraction, however, decreases with increasing viscosity. Our results also indicate that the local wavefield conditions are crucial for the atomization process.

结构参数对SAW传感器的影响及电极失效分析

文中通过实验制备了一种以LiNbO_(3)为压电基底,Pt为电极,SiO_(2)为保护层的单端口谐振型声表面波传感器,探究了IDT与反射栅之间的距离Lg和电极宽度对SAW传感器的影响,揭示了不同温度下电极的微观变化规律,结果表明:当L_(g)=λ/2时,SAW传感器可以激发1个稳定的谐振峰,寄生峰对其影响较小;当L_(g)=3λ/8时,可以激发2个稳定的谐振峰;随着电极宽度的增加,声表面波传感器的波速和温度敏感性降低;700℃时,电极的部分结构开始变窄,随着温度的升高,电极和保护层凝聚收缩形成微小的孔洞,当温度达到950~1000℃时,电极熔化失效。

Fabrication and characterization of one-port surface acoustic wave resonators on semi-insulating GaN substrates

One-port surface acoustic wave resonators(SAWRs) are fabricated on semi-insulating high-quality bulk GaN and GaN film substrates, respectively. The semi-insulating GaN substrates are grown by hydride vapor phase epitaxy(HVPE)and doped with Fe. The anisotropy of Rayleigh propagation and the electromechanical coupling coefficient in Fe-doped GaN are investigated. The difference in resonance frequency between the SAWs between [1120] GaN and [1100] GaN is about 0.25% for the Rayleigh propagation mode, which is smaller than that of non-intentionally doped GaN film(~1%)reported in the literature. The electromechanical coupling coefficient of Fe-doped GaN is about 3.03%, which is higher than that of non-intentionally doped GaN film. The one-port SAWR fabricated on an 8-μm Fe-doped GaN/sapphire substrate has a quality factor of 2050, and that fabricated on Fe-doped bulk GaN has a quality factor as high as 3650. All of our results indicate that high-quality bulk GaN is a very promising material for application in SAW devices.

Imaging shallow structure with active-source surface wave signal recorded by distributed acoustic sensing arrays

Distributed acoustic sensing(DAS) is one recently developed seismic acquisition technique that is based on fiber-optic sensing. DAS provides dense spatial spacing that is useful to image shallow structure with surface waves.To test the feasibility of DAS in shallow structure imaging,the PoroTomo team conducted a DAS experiment with the vibroseis truck T-Rex in Brady’s Hot Springs, Nevada, USA.The Rayleigh waves excited by the vertical mode of the vibroseis truck were analyzed with the Multichannel Analysis of Surface Waves(MASW) method. Phase velocities between5 and 20 Hz were successfully extracted for one segment of cable and were employed to build a shear-wave velocity model for the top 50 meters. The dispersion curves obtained with DAS agree well with the ones extracted from co-located geophones data and from the passive source Noise Correlation Functions(NCF). Comparing to the co-located geophone array, the higher sensor density that DAS arrays provides help reducing aliasing in dispersion analysis, and separating different surface wave modes. This study demonstrates the feasibility and advantage of DAS in imaging shallow structure with surface waves.

Surface Acoustic Wave Device with Reduced Insertion Loss by Electrospinning P(VDF–TrFE)/ZnO Nanocomposites

Surface acoustic wave(SAW) devices have been utilized for the sensing of chemical and biological phenomena in microscale for the past few decades. In this study, SAW device was fabricated by electrospinning poly(vinylidenefluoride-co-trifluoroethylene)(P(VDF-TrFE)) incorporated with zinc oxide(ZnO) nanoparticles over the delay line area of the SAW device. The morphology, composition, and crystallinity of P(VDF-TrFE)/ZnO nanocomposites were investigated. After measurement of SAW frequency response, it was found that the insertion loss of the SAW devices incorporated with ZnO nanoparticles was much less than that of the neat polymer-deposited device. The fabricated device was expected to be used in acoustic biosensors to detect and quantify the cell proliferation in cell culture systems.

Transparent ZnO/glass surface acoustic wave based high performance ultraviolet light sensors

Surface acoustic wave （SAW） resonators are a type of ultraviolet （UV） light sensors with high sensitivity, and they have been extensively studied. Transparent SAW devices are very useful and can be developed into various sensors and microfluidics for sensing/monitoring and lab-on-chip applications. We report the fabrication of high sensitivity SAW UV sensors based on piezoelectric （PE） ZnO thin films deposited on glass substrates. The sensors were fabricated and their performances against the post-deposition annealing condition were investigated. It was found that the UV-light sensitivity is improved by more than one order of magnitude after annealing. The frequency response increases significantly and the response becomes much faster. The optimized devices also show a small temperature coefficient of frequency and excellent repeatability and stability, demonstrating its potential for UV-light sensing application.

Characteristics and realization of the second generation surface acoustic wave’s wavelet device

To overcome the bulk acoustic wave （BAW）, the triple transit signals and the discontinuous frequency band in the first generation surface acoustic wave＇s （FGSAW＇ s） wavelet device, the full transfer multistrip coupler （MSC） is applied to implement wavelet device, and a novel structure of the second generation surface acoustic wave＇s （SGSAW＇s） wavelet device is proposed. In the SGSAW＇ s wavelet device, the BAW is separated and eliminated in different acoustic propagating tracks, and the triple transit signal is suppressed. For arbitrary wavelet scale device, the center frequency is three times the radius of frequency band, which ensures that the frequency band of the SGSAW＇s wavelet device is continuous, and avoids losing signals caused by the discontinuation of frequency band. Experimental result confirms that the BAW suppression, ripples in band, receiving loss and insertion loss of the SGSAW＇ s wavelet device are remarkably improved compared with those of the FGSAW＇ s wavelet device.

Surface Acoustic Wave Humidity Sensors Based on(1120) ZnO Piezoelectric Films Sputtered on R-Sapphire Substrates

ZnO films on R-sapphire substrates are prepared and characterized by x-ray diffraction and scanning electron microscopy, which indicate that the thin films are well crystallized with （1120） texture. Love wave and Rayleigh wave are used for fabrications of humidity sensors, which are excited in [1100] and [0001] directions of the （1120） ZnO piezoelectric films, respectively. The experimental results show that both kinds of sensors have good humidity response and repeatability, and the performances of the Love wave sensors are better than those of the Rayleigh wave sensors at room temperature. Moreover, the theoretical calculations of the mass sensitivity of the sensors are a/so carried out and the calculated results are in good agreement with the experimental measurements.