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Hot-carrier reliability in OPTVLD-LDMOS
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作者 程骏骥 陈星弼 《Journal of Semiconductors》 EI CAS CSCD 2012年第6期24-27,共4页
An improved structure that eliminates hot-carrier effects(HCE) in optimum variation lateral doping (OPTVLD) LDMOS is proposed.A formula is proposed showing that the surface electric field intensity of the conventi... An improved structure that eliminates hot-carrier effects(HCE) in optimum variation lateral doping (OPTVLD) LDMOS is proposed.A formula is proposed showing that the surface electric field intensity of the conventional structure is strong enough to make a hot-carrier injected into oxide.However,the proposed structure effectively reduces the maximum surface electric field from 268 to 100 kV/cm and can be realized without changing any process,and thereby reduces HCE significantly. 展开更多
关键词 hot-carrier effects OPTVLD LDMOS surface electric field intensity
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