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Alternative flexible correction forming of a blade: multipoint correction with surface measurement and deformation simulation
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作者 Da-Wei Zhang Wen-Long Gao-Zhang Qi Zhang 《Advances in Manufacturing》 SCIE EI CAS CSCD 2023年第4期587-600,共14页
Distortion during the forging or machining processes of a blade causes problems in subsequent manufacturing. This paper proposes an alternative multipoint correction method integrated with blade measurement, determina... Distortion during the forging or machining processes of a blade causes problems in subsequent manufacturing. This paper proposes an alternative multipoint correction method integrated with blade measurement, determination of correcting parameters, and adjustment of the correcting die. An iterative algorithm for determining the correcting parameters is proposed. Measuring equipment combining a laser displacement sensor with multipoint flexible support is manufactured to measure the blade shape. Multipoint correcting equipment with an adaptive lower die and rapid adjustment is manufactured, and software is developed for data analysis and equipment control. The correction experiment for a rough-machined steam-turbine blade indicates that the correcting parameters can be determined after one modification based on numerical simulation, and that a rough blade that meets the allowance for finish machining can be obtained using the determined correction parameters. 展开更多
关键词 BLADE surface measurement Numerical simulation Multipoint correction
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Surface Measurement Based on Instantaneous Random Illumination 被引量:4
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作者 张辉 张丽艳 +1 位作者 王宏涛 陈鉴富 《Chinese Journal of Aeronautics》 SCIE EI CAS CSCD 2009年第3期316-324,共9页
This article introduces a surface measurement system which is able to take a measurement in an extremely short period of less than 2 milliseconds. It is composed of two cameras together with a specifically designed pr... This article introduces a surface measurement system which is able to take a measurement in an extremely short period of less than 2 milliseconds. It is composed of two cameras together with a specifically designed projector that projects an instantaneous random image pattern onto the objective surface. With the aid of the projected pattern, a match of image with corresponding sub-pixel is steadily established and a cluster of dense 3D points is obtained at the same time. A detailed discussion about the des... 展开更多
关键词 surface measurement stereo matching CALIBRATION instantaneous random illumination
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Surface shape detection methods for large radio telescopes
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作者 Zhengxiong Sun Jinqing Wang +7 位作者 Linfeng Yu Yongchen Jiang Zheng Lou Yongbin Jiang Rongbin Zhao Qian Ye Qinghui Liu Guangli Wang 《Astronomical Techniques and Instruments》 CSCD 2024年第5期275-283,共9页
The surface accuracy of a radio telescope is directly related to its operational efficiency and detection sensitivity.This is crucial under high-frequency observation conditions,where surface shape errors need to be c... The surface accuracy of a radio telescope is directly related to its operational efficiency and detection sensitivity.This is crucial under high-frequency observation conditions,where surface shape errors need to be controlled to within 1/16 of the working wavelength.In addition,the primary reflector of large radio telescopes is subject to dynamic deformation,caused by factors such as gravity and thermal effects.This paper presents a method for detecting the surface shape of radio telescopes using radio interferometry techniques combined with active reflector adjustment technology.This enables accurate assessment and correction of surface errors,ensuring the electrical performance of the radio telescope.This study investigates the practical applications of high-precision measurement techniques,such as microwave holography,out-of-focus holography,and wavefront distortion methods at the Tianma 65 m radio telescope(TMRT).Furthermore,the study presents the construction method of gravity models at different elevation angles and demonstrates the efficacy of the active reflector model.The results of the measurements indicate that the application of these methods to the TMRT has led to a notable enhancement of the accuracy of the primary reflector and a substantial improvement in efficiency in the Q-band.Through a process of iterative measurements and adjustments,the surface shape error is ultimately reduced to 0.28 mm root mean square(RMS). 展开更多
关键词 Radio telescope Holographic measurements surface shape measurements Antenna efficiency
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Fast Measurement of Dielectric Conductivity for Space Application by Surface Potential Decay Method 被引量:1
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作者 全荣辉 周凯 +2 位作者 方美华 池卫英 张振龙 《Chinese Physics Letters》 SCIE CAS CSCD 2017年第6期104-106,共3页
Surface potential decay of polymers for electrical insulation can help to determine the dark conductivity for spacecraft charging analysis. Due to the existence of radiation-induced conductivity, it decays fast in the... Surface potential decay of polymers for electrical insulation can help to determine the dark conductivity for spacecraft charging analysis. Due to the existence of radiation-induced conductivity, it decays fast in the first few hours after irradiation and exponentially slowly for the remaining time. The measurement of dark conductivity with this method usually takes the slow part and needs a couple of days. Integrating the Fowler formula into the deep dielectric charging equations, we obtain a new expression for the fast decay part. The experimental data of different materials, dose rates and temperatures are fitted by the new expression. Both the dark conductivity and the radiation-induced conductivity are derived and compared with other methods. The result shows a good estimation of dark conductivity and radiation-induced conductivity in high-resistivity polymers, which enables a fast measurement of dielectric conductivity within about 600 rain after irradiation. 展开更多
关键词 Fast measurement of Dielectric Conductivity for Space Application by surface Potential Decay Method
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Development of Squirming Robot for the Inspection of Internal Surface
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作者 YANG Qing-hua, ZHANG Li-bin, XU Fang, DU Ming-yu, RUAN Jian, YUAN Ju-long (College of Mechanical & Electrical Engineering, Zhejiang University of Technology, Hangzhou 310032, China) 《厦门大学学报(自然科学版)》 CAS CSCD 北大核心 2002年第S1期50-51,共2页
In many cases, the internal surface of the mechanical elements is required to detect and measure. For this task, a special mobile device should be utilized. A squirming robot is presented for the purpose, which is wor... In many cases, the internal surface of the mechanical elements is required to detect and measure. For this task, a special mobile device should be utilized. A squirming robot is presented for the purpose, which is working on the controlled deformation of a pneumatic columnar elastic shell. This elastic shell is made of caoutchouc. It is strengthened by the internal spiral metal wire, which also restricts its deformation in radial direction, so it can only deform in axis direction. The squirming robot also involves four osculums and a vision system. It can go forward and back and turn around easily by controlling the four osculums and the moving velocity can be controlled through the pressure of compressed air. The moving step can be flexibly adjusted. In this paper, the working principle and mechanical characteristics of the columnar elastic shell are analyzed and discussed in detail. The relationship between the elongation X and the pressure of compressed air P, the bending angular degree θ and the pressure of compressed air P are first established by using the theory of elasticity mechanics. And also we simulate its nonlinear dynamic system in certain diving force F and elastic coefficient E of elastic shell. The results indicate this squirming robot is simple in structure, low cost in manufacture and being apt to be miniaturized. It can be used in detecting the internal surface of mechanical elements or inside certain complicate pipe, when this equipment is manufactured in special, and that this process is able to be fulfilled. 展开更多
关键词 surface measurement PNEUMATIC squirming robot simulate
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Determination of Surface Roughness in Wire and Arc Additive Manufacturing Based on Laser Vision Sensing 被引量:2
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作者 Jun Xiong Yan-Jiang Li +1 位作者 Zi-Qiu Yin Hui Chen 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2018年第4期133-139,共7页
Wire and arc additive manufacturing(WAAM) shows a great promise for fabricating fully dense metal parts by means of melting materials in layers using a welding heat source. However, due to a large layer height produce... Wire and arc additive manufacturing(WAAM) shows a great promise for fabricating fully dense metal parts by means of melting materials in layers using a welding heat source. However, due to a large layer height produced in WAAM, an unsatisfactory surface roughness of parts processed by this technology has been a key issue. A methodology based on laser vision sensing is proposed to quantitatively calculate the surface roughness of parts deposited by WAAM.Calibrations for a camera and a laser plane of the optical system are presented. The reconstruction precision of the laser vision system is verified by a standard workpiece. Additionally, this determination approach is utilized to calculate the surface roughness of a multi-layer single-pass thin-walled part. The results indicate that the optical measurement approach based on the laser vision sensing is a simple and effective way to characterize the surface roughness of parts deposited by WAAM. The maximum absolute error is less than 0.15 mm. The proposed research provides the foundation for surface roughness optimization with different process parameters. 展开更多
关键词 Wire and arc additive manufacturing surface roughness measurement Laser vision sensing Three-dimensional reconstruction
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New Approach for Measured Surface Localization Based on Umbilical Points
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作者 Xiao-Ping Xiao Ming Yin +2 位作者 Liang Heng Guo-Fu Yin Zi-Sheng Li 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2017年第5期1203-1215,共13页
Measured surface localization (MSL) is one of the key essentials for the assessment of form error in pre- cision manufacturing. Currently, the researches on MSL have focused on the corresponding relation search betw... Measured surface localization (MSL) is one of the key essentials for the assessment of form error in pre- cision manufacturing. Currently, the researches on MSL have focused on the corresponding relation search between two surfaces, the performance improvement of localization algorithms and the uncertainty analysis of localization. However, low efficiency, limitation of localization algo- rithms and mismatch of multiple similarities of feature points with no prior are the common disadvantages for MSL. In order to match feature points quickly and fulfill MSL efficiently, this paper presents a new localization approach for measured surfaces by extracting the generic umbilics and estimating their single complex variables, describing the match methods of ambiguous relation at umbilics, presenting the initial localization process of one pair matched points, refining MSL on the basis of obtained closet points for some measured points by the improvement directed projection method. In addition, the proposed algorithm is simulated in two different types of surfaces,two different localization types and multiple similar sur- faces, also tested with the part of B-spline surface machined and bottle mould with no knowledge, finally the initial and accurate rigid body transformation matrix, localization errors between two surfaces and execution time are got. The experimental results show that the pro- posed method is feasible, more accurate in localization and high in efficiency. The proposed research can not only improve the accuracy and performance of form error assessment, but also provide an effective guideline for the integration of different types of measured surfaces. 展开更多
关键词 Measured surface localization Umbilicalpoints and complex variable Similar surface patchesInitial and accurate localization
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CAD-DIRECTED INSPECTION PLANNING FOR FREEFORM SURFACE USING CONTACT PROBES
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作者 Chen Manyi Li Bin Duan Zhengcheng 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2005年第4期579-581,共3页
A methodology for CAD-directed measurement of freeform surface using a coordinate measuring machine equipped with a touch-trigger probe is presented, mainly including adaptive sampling of measurement points and regist... A methodology for CAD-directed measurement of freeform surface using a coordinate measuring machine equipped with a touch-trigger probe is presented, mainly including adaptive sampling of measurement points and registration of freeform surface. The proposed sampling method follows four steps: Freeform surface is fitted by bi-cubic B-spline; Curvedness measure of the surface is computed; Given a number of sampling points, an iterative algorithm is constructed for selecting a set of measurement points by employing the curvedness information; The measurement points is regularized for tradeoff between maximizing the measurement accuracy and minimizing the sampling time and cost. The aforesaid algorithm is demonstrated in term of a marine propeller blade. An offset surface registration method is presented to improve alignment accuracy of freeform objects, and Monte Carlo simulation is conducted to verify the effectiveness of the method. 展开更多
关键词 Freeform surface Inspection Coordinate measurement Contact probe
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Polypyrrole Chitosan Cobalt Ferrite Nanoparticles Composite Layer for Measuring the Low Concentration of Fluorene Using Surface Plasmon Resonance
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作者 A.R.Sadrolhosseini M.Naseri M.K.Halimah 《Chinese Physics Letters》 SCIE CAS CSCD 2017年第5期111-114,共4页
Fluorene is a polycyclic aromatic hydrocarbon, which is a hazardous toxic chemical in the environment. The measurement of low concentrations of fluorene is a subject of intense interest in chemistry and in the environ... Fluorene is a polycyclic aromatic hydrocarbon, which is a hazardous toxic chemical in the environment. The measurement of low concentrations of fluorene is a subject of intense interest in chemistry and in the environment. Polypyrrole chitosan cobalt ferrite nanoparticles are prepared using the electrochemical method. The prepared layers are characterized using field emission scanning electron microscopy, Fourier transform infrared spectroscopy, and energy dispersive spectroscopy. The layers are used to detect fluorene using the surface plasmon resonance technique at room temperature. The composite layer is evaluated after detection of fluorene using atomic force microscopy. The fluorene is bound on the layer, and the shift of the resonance angle is about 0.0052°, corresponding to the limitation of 0.01 ppm. 展开更多
关键词 Co NP Polypyrrole Chitosan Cobalt Ferrite Nanoparticles Composite Layer for Measuring the Low Concentration of Fluorene Using surface Plasmon Resonance
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Design of TE_(01δ) Test Probe for Measuring the Microwave Surface Resistance of HTS Thin Film
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作者 Cheng Zeng Zheng-Xiang Luo Qi-Shao Zhang Kai Yang 《Journal of Electronic Science and Technology of China》 2008年第2期212-215,共4页
A new TEo1δ test probe with proper transmission factor is fabricated for the measurement of surface resistance of high temperature superconductor (HTS) thin film. Coupling holes instead of coupling loops are used i... A new TEo1δ test probe with proper transmission factor is fabricated for the measurement of surface resistance of high temperature superconductor (HTS) thin film. Coupling holes instead of coupling loops are used in the probe for its easier machining and relatively low loss. Two 6 mm × 3 mm × 8 mm dielectric waveguides, one side of them is coated by silver, are used for coupling. The measurement result of S21 agrees well with the simulation because the size of the probe can be rigidly controlled by machine. The microwave surface resistance of four YBCO/MgO films are measured at 77 K and 12 GHz and scaled to 10 GHz according to thef2 rule. The average surface resistance of four HTS thin fdms is 0.38 mΩ, the standard deviation and relative standard deviation of one single HTS thin film are 0.009 mΩ and 2.4%, respectively. 展开更多
关键词 High temperature superconductor surface resistance surface resistance measurement.
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A shaped annular beam tri-heterodyne confocal microscope with good anti-environmental interference capability 被引量:2
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作者 赵维谦 冯政德 邱丽荣 《Chinese Physics B》 SCIE EI CAS CSCD 2007年第6期1624-1631,共8页
annular beam tri-heterodyne confocal microscope has been proposed to improve the anti-environmental interference capability and the resolution of a eonfoeal microscope. It simultaneously detects far-, on-, and near-fo... annular beam tri-heterodyne confocal microscope has been proposed to improve the anti-environmental interference capability and the resolution of a eonfoeal microscope. It simultaneously detects far-, on-, and near-focus signals with given phase differences by dividing the measured light path of the eonfoeal microscope into three sub-paths (signals). Pair-wise real-time heterodyne subtraction of the three signals is used to improve the anti-environmental interference capability, axial resolution, and linearity; and a shaped annular beam super-resolution technique is used to improve lateral resolution. Theoretical analyses and preliminary experiments indicate that an axial resolution of about 1 nm can be achieved with a shaped annular beam tri-heterodyne confoeal microscope and its lateral resolution can be better than 0.2 um for A = 632.8 nm, the numerical aperture of the lens of the microscope is NA = 0.85, and the normalized radius e = 0.5. 展开更多
关键词 confocal microscopy SUPER-RESOLUTION surface measurements
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Qualification of superpolished substrates for laser-gyro by surface integrated scatter measurement 被引量:1
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作者 魏志猛 龙兴武 杨开勇 《Chinese Optics Letters》 SCIE EI CAS CSCD 2010年第2期181-183,共3页
Integrated scatterometer for qualification of superpolished substrates for laser-gyro by surface scatter loss measurement is constructed. Different from the qualification of substrate by surface roughness, the scatter... Integrated scatterometer for qualification of superpolished substrates for laser-gyro by surface scatter loss measurement is constructed. Different from the qualification of substrate by surface roughness, the scatterometer measures the forward surface scatter loss to check whether the mirror made of the substrate will be suitable for the required laser-gyro lock-in specification. The scatterometer utilizes convex lens instead of integrating sphere to collect scatter light. Special sample support and baffle are designed to block unwanted light. The result of stability test is given, which is about 0.4% over 10 h. 展开更多
关键词 GYROSCOPES Meteorological instruments Mirrors surface measurement surface roughness
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Vibration shape testing of space sheet structure 被引量:1
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作者 樊红朝 钱晋武 《Journal of Shanghai University(English Edition)》 CAS 2010年第5期354-358,共5页
The space sheet for a solar array structure is large in dimension, and flexible to induce complex distortion. It is difficult to measure the distortion. A large-scale flexible test prototype system is built for sheet ... The space sheet for a solar array structure is large in dimension, and flexible to induce complex distortion. It is difficult to measure the distortion. A large-scale flexible test prototype system is built for sheet structure vibration monitoring based on the vibration information of the solar array in space. The system provides an intelligent test method for flexible space structure with embedded sensors and non-visualization reinstruction. Multiple fiber Bragg grating (FBG) sensors are packaged and embedded into the structure with spatial division multiplexing (SDM) and wavelength division multiplexing (WDM). The sensor interrogator distinguishes wavelength shifts that can be turned into curvature of the curve. The structure shape is reconstructed based on the curvature information and the arc-length, and then displayed. The experiment shows that the system has a high FBG sensitivity. The reconstruction algorithm is fast with high precision. The system has great potential for use in health monitoring of the space sheet structure. 展开更多
关键词 smart materials and structures solar array surface measurement fiber Bragg grating
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A Semi-Automatic Thickness Inspection Technique for Marine Propellers
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作者 M K Lam S F Lee +3 位作者 C S Lam W S Chow P Iovenitti S H Masood 《厦门大学学报(自然科学版)》 CAS CSCD 北大核心 2002年第S1期213-213,共1页
This paper describes the design and development of a Semi-Automatic Precision Caliper System to measure the thickness of an outboard marine engine propeller blade.Several commonly used methods for measuring the thickn... This paper describes the design and development of a Semi-Automatic Precision Caliper System to measure the thickness of an outboard marine engine propeller blade.Several commonly used methods for measuring the thickness of a propeller blade are reviewed in this paper.These include the P rops Scan,3D Vision System and Black Dog.However,the operating practices and availability of different facilities in industry necessitate a more cost-effect ive approach.An alternative method using a Semi-Automatic Precision Caliper S ystem is therefore proposed.Details of the design criteria,principles of oper ation as well as the testing and verification of the system are presented.The paper concludes that the Semi-Automatic Precision Caliper System is a low cost and effective method for measuring the thickness of a propeller. 展开更多
关键词 thickness measurement PROPELLERS profilemetry METROLOGY surface measurement
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Influence of Participating Media on the Radiation Thermometry for Surface Temperature Measurement 被引量:2
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作者 Yuying LIU Xinxin ZHANG 《Journal of Thermal Science》 SCIE EI CAS CSCD 2005年第4期368-373,381,共7页
A temperature measurement model of radiation thermometry for the surface covered by participating media was developed. The model was based on the radiation heat transfer of participating media and principles of radiat... A temperature measurement model of radiation thermometry for the surface covered by participating media was developed. The model was based on the radiation heat transfer of participating media and principles of radiation pyrometers, and solved by integral formulation of discrete ordinate method on spectral waveband. The influence of water mist on the indicated temperature of Raytek MR1SB one/two color pyrometer was discussed. Mie theory was used to calculate the radiative properties of water mist. In order to verify the model, a laboratory temperature measurement experiment was executed. The result shows that temperature of radiation thermometry is sensitive to the spectral response wavelength of pyrometer, and the simulated temperature of pyrometer agrees well with the experimental measurements on a suitable wavelength. The simulated temperature was lower than the real temperature of surface for one-color pyrometer, and it could be higher or lower than the real one for two-color pyrometer with the influence of participating media. 展开更多
关键词 participating media radiation thermometry surface temperature measurement discrete ordinatemethod.
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Windtunnel studies of surface shear stress vector distribution measurement using shear sensitive liquid crystal coatings 被引量:2
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作者 ZHAO JiSong SCHOLZ Peter GU LiangXian 《Science China(Technological Sciences)》 SCIE EI CAS 2011年第10期2730-2734,共5页
Shear sensitive liquid crystal coating (SSLCC) can measure surface shear stress vector distribution efficiently with a high spa-tial resolution. The purpose of the present paper is to modify and extend the surface she... Shear sensitive liquid crystal coating (SSLCC) can measure surface shear stress vector distribution efficiently with a high spa-tial resolution. The purpose of the present paper is to modify and extend the surface shear stress measurement technique de-termined by Reda et al. to wind tunnel studies. All the facilities employed in the technique are very common and simple. The measurement technique is applied to surface flow beneath a tangential jet and surface flow in a turbulence wedge generated by a small cylinder in windtunnel flow. Spatially resolved shear stresses over planar surface are obtained, although the magnitude is not fully calibrated. 展开更多
关键词 shear sensitive liquid crystal surface shear stress measurement tangential jet flow turbulence wedge
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Higher Harmonics Generation in Tapping Mode Atomic Force Microscope 被引量:2
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作者 李渊 钱建强 《Chinese Physics Letters》 SCIE CAS CSCD 2009年第10期72-74,共3页
The contribution of higher harmonics to the movement of a micro rectangular cantilever in tapping mode AFM is investigated. The dependence between the phase lag of the higher harmonic components and tip-sample separat... The contribution of higher harmonics to the movement of a micro rectangular cantilever in tapping mode AFM is investigated. The dependence between the phase lag of the higher harmonic components and tip-sample separation are found to be an order of magnitude higher than the base one, reflecting an increasing sensitivity to local variations of surface properties compared to the normal phase signal The strong correlation between the higher harmonic amplitude and average sample deformation implies that the higher harmonic amplitude can be taken to monitor the tapping force or as feedback variable to fulfill a constant repulsive force mode. 展开更多
关键词 Instrumentation and measurement surfaces interfaces and thin films
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Screener3D:a gaseous time projection chamber for ultra-low radioactive material screening 被引量:1
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作者 Hai-Yan Du Cheng-Bo Du +8 位作者 Karl Giboni Ke Han Sheng-Ming He Li-Qiang Liu Yue Meng Shao-Bo Wang Tao Zhang Li Zhao Ji-Fang Zhou 《Nuclear Science and Techniques》 SCIE EI CAS CSCD 2021年第12期103-115,共13页
In experiments searching for rare signals,background events from the detector itself are some of the major factors limiting search sensitivity.Screening for ultra-low radioactive detector materials is becoming ever mo... In experiments searching for rare signals,background events from the detector itself are some of the major factors limiting search sensitivity.Screening for ultra-low radioactive detector materials is becoming ever more essential.We propose to develop a gaseous time projection chamber(TPC)with a Micromegas readout for radio screening.The TPC records three-dimensional trajectories of charged particles emitted from a flat sample placed in the active volume of the detector.The detector can distinguish the origin of an event and identify the particle types with information from trajectories,which significantly increases the screening sensitivity.For a particles from the sample surface,we observe that our proposed detector can reach a sensitivity higher than 100 l Bq m-2 within two days. 展开更多
关键词 Charged-particle detector surface a measurement Ultra-low radioactivity Material screening
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Absolute surface form measurement of flat optics based on oblique incidence method 被引量:1
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作者 Longbo Xu Shijie Liu +2 位作者 Rihong Zhu You Zhou Jie Chen 《Chinese Optics Letters》 SCIE EI CAS CSCD 2018年第10期30-33,共4页
In this Letter, a test method based on oblique incidence is practically implemented in the interferometric measurement process. Three sets of wavefront data are achieved through cavity interference measurement with a ... In this Letter, a test method based on oblique incidence is practically implemented in the interferometric measurement process. Three sets of wavefront data are achieved through cavity interference measurement with a Fizeau interferometer and one oblique incidence measurement. An iterative algorithm is applied to retrieve the absolute surface shape of the test flat. By adding two sets of measurements, the absolute surface error of the interferometer's reference flat can be obtained. The new method can not only calibrate the reference flat error of interferometer, but also provide the absolute measurement method for high precision optical components applied in high power laser systems. 展开更多
关键词 Absolute surface form measurement of flat optics based on oblique incidence method
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COMPACT PHASE GRATING INTERFERENCE SENSOR FOR MICRO-DISPLACEMENT 被引量:2
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作者 XIAO Gang XIE Tiebang WANG Xuanze 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2006年第1期131-133,共3页
On the basis of existing techniques, a compact micro-displacement sensor of phase grating interference (PGI) is described, which adopts cylindrical hologram diffraction grating as the calibration standard. The optic... On the basis of existing techniques, a compact micro-displacement sensor of phase grating interference (PGI) is described, which adopts cylindrical hologram diffraction grating as the calibration standard. The optical principle of the sensor is explained, and the relation between the grating motion displacement and the phase shift of interference stripes is deduced. The improvement of the integral structure and the method of photoelectric signal processing are described in detail. With the software system based on the virtual instrument development platform Labwindows/CVI and other hardwares such as the precision displacement worktable, the surfaces of typical parts are measured and the characterization results are given. The sensor has wide measuring range and high resolution, its sensitivity and resolution being independent of the wavelength of the incident light. The vertical measuring range is 0-6 mm, and the vertical resolution is 0.005μm. The experimental results show that the sensor can be used to measure and characterize the surface topography parameters of the plane and curved surface. 展开更多
关键词 Sensor surface topography Phase grating interference(PGI)Micro-displacement measurement
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