Tantalum nitride and tantalum carbide films were fabricated using magnetron sputtering of tantalum followed by nitrogen and carbon plasma-based ion implantation （N-PBII and C-PBII）. The phase evolution and morpholog...Tantalum nitride and tantalum carbide films were fabricated using magnetron sputtering of tantalum followed by nitrogen and carbon plasma-based ion implantation （N-PBII and C-PBII）. The phase evolution and morphology of the films were studied using glancing angle X-ray diffraction （GXRD） and transmission electron microscopy （TEM）. It was found that the main phase in the tantalum nitride films was crystalline TaNo.1 whose grain size increases with increasing implantation voltage and phase content increases with increasing implantation dose. In the tantalum carbide film, the main phase was Ta2C. TaC phase also appeared as the implantation dose increased. XRD results from various glancing angles show that the phases with high nitrogen or carbon content, Ta4N5 and TaC, are present in the surface of the films. X-ray photoelectron spectra （XPS） from the tantalum carbide film reveal that the surface carbon content is higher than that of the inner film.展开更多
A wolfram tailing glass contains a substantial proportion of wolfram tailing and other ingredients such as fcldspar, limestone, soda,thenardite and fluorbaryt. Samples of wolfram glasses were implanted with tantalum i...A wolfram tailing glass contains a substantial proportion of wolfram tailing and other ingredients such as fcldspar, limestone, soda,thenardite and fluorbaryt. Samples of wolfram glasses were implanted with tantalum ions at doses of 5×1016. 1×1017 and 2 ×1017 ions/cm2at room temperature, then were treated at 700℃ for 1h and 900℃ for 2h. Scanning electron microscope and X-ray diffraction analysis were applied to study the morphology and crystal phases of unimplanted and implanted heat-treatment samples.The results show that there is no change of crystal phases in the unimplanted and implanted heated samples but the crystal valumes of wollastonite of implanted is more than that of unimplanted sample. It can be seen that the crystals become fine and dense after implantation, because the concentration of nucleation sites may increase with increasing tantalumions dose.展开更多
基金supported by the National Basic Research Program of China (No. 2007CB607602)the Science Found for Distinguished Yong Scholars of Heilongjiang Province,China (No. JC200901)+1 种基金the National Natural Science Foundation of China (No. 50875058)the Program of Excellent Teams of Harbin Institute of Technology
文摘Tantalum nitride and tantalum carbide films were fabricated using magnetron sputtering of tantalum followed by nitrogen and carbon plasma-based ion implantation （N-PBII and C-PBII）. The phase evolution and morphology of the films were studied using glancing angle X-ray diffraction （GXRD） and transmission electron microscopy （TEM）. It was found that the main phase in the tantalum nitride films was crystalline TaNo.1 whose grain size increases with increasing implantation voltage and phase content increases with increasing implantation dose. In the tantalum carbide film, the main phase was Ta2C. TaC phase also appeared as the implantation dose increased. XRD results from various glancing angles show that the phases with high nitrogen or carbon content, Ta4N5 and TaC, are present in the surface of the films. X-ray photoelectron spectra （XPS） from the tantalum carbide film reveal that the surface carbon content is higher than that of the inner film.
文摘A wolfram tailing glass contains a substantial proportion of wolfram tailing and other ingredients such as fcldspar, limestone, soda,thenardite and fluorbaryt. Samples of wolfram glasses were implanted with tantalum ions at doses of 5×1016. 1×1017 and 2 ×1017 ions/cm2at room temperature, then were treated at 700℃ for 1h and 900℃ for 2h. Scanning electron microscope and X-ray diffraction analysis were applied to study the morphology and crystal phases of unimplanted and implanted heat-treatment samples.The results show that there is no change of crystal phases in the unimplanted and implanted heated samples but the crystal valumes of wollastonite of implanted is more than that of unimplanted sample. It can be seen that the crystals become fine and dense after implantation, because the concentration of nucleation sites may increase with increasing tantalumions dose.
