High-Performance and Flexible Co-Planar Integrated Microsystem of Carbon-Based All-Solid-State Micro-Supercapacitor and Real-Time Temperature Sensor

With the rapid development of flexible and portable microelectronics,the extreme demand for miniaturized,mechanically flexible,and integrated microsystems are strongly stimulated.Here,biomass-derived carbons(BDCs)are prepared by KOH activation using Qamgur precursor,exhibiting three-dimensional(3D)hierarchical porous structure.Benefiting from unobstructed 3D hierarchical porous structure,BDCs provide an excellent specific capacitance of 433 F g^(-1)and prominent cyclability without capacitance degradation after 50000 cycles at 50 A g^(-1).Furthermore,BDC-based planar micro-supercapacitors(MSCs)without metal collector,prepared by mask-assisted coating,exhibit outstanding areal-specific capacitance of 84 mF cm^(-2)and areal energy density of 10.6μWh cm^(-2),exceeding most of the previous carbon-based MSCs.Impressively,the MSCs disclose extraordinary flexibility with capacitance retention of almost 100%under extreme bending state.More importantly,a flexible planar integrated system composed of the MSC and temperature sensor is assembled to efficiently monitor the temperature variation,providing a feasible route for flexible MSC-based functional micro-devices.

Design and Implementation of Batch Calibration System for Platinum Resistance Temperature Sensors

Developing a calibration and collection system of platinum resistance temperature sensor using Python language environment can read the information returned by the serial port and automatically generate an"Temperature Sensor Calibration Record Table"excel table with the current date as the file name.It can collect data from 10 platinum resistance temperature sensors at once,achieving automation and improving work efficiency.

Dynamic Calibration of the Cutting Temperature Sensor of NiCr/NiSi Thin-film Thermocouple

In high-speed cutting, natural thermocouple, artificial thermocouple and infrared radiation temperature measurement are usually adopted for measuring cutting temperature, but these methods have difficulty in measuring transient temperature accurately of cutting area on account of low response speed and limited cutting condition. In this paper, NiCr/NiSi thin-film thermocouples（TFTCs） are fabricated according to temperature characteristic of cutting area in high-speed cutting by means of advanced twinned microwave electro cyclotron resonance（MW-ECR） plasma source enhanced radio frequency（RF） reaction non-balance magnetron sputtering technique, and can be used for transient cutting temperature measurement. The time constants of the TFTCs with different thermo-junction film width are measured at four kinds of sampling frequency by using Ultra-CFR short pulsed laser system that established. One-dimensional unsteady heat conduction model is constructed and the dynamic performance is analyzed theoretically. It can be seen from the analysis results that the NiCr/NiSi TFTCs are suitable for measuring transient temperature which varies quickly, the response speed of TFTCs can be obviously improved by reducing the thickness of thin-film, and the area of thermo-junction has little influence on dynamic response time. The dynamic calibration experiments are made on the constructed dynamic calibration system, and the experimental results confirm that sampling frequency should be larger than 50 kHz in dynamic measurement for stable response time, and the shortest response time is 0.042 ms. Measurement methods and devices of cutting heat and cutting temperature measurement are developed and improved by this research, which provide practical methods and instruments in monitoring cutting heat and cutting temperature for research and production in high-speed machining.

A NEW FABRICATION PROCESS FOR A FLEXIBLE SKIN WITH TEMPERATURE SENSOR ARRAY AND ITS APPLICATIONS

This paper reports a novel technique for fabrication of a flexible skin with a temperature sensor array (40×1 sensors). A simplified MEMS technology using platinum resistors as sensing materials, which are sandwiched between two polyimide layers as flexible substrates is developed. The two polyimide layers are deposited on top of a thin aluminum layer, which serves as a sacrificial layer such that the flexible skin can be released by metal etching and peeled off easily. The flexible skin with a temperature sensor array has a high mechanical flexibility and can be handily attached on a highly curved surface to detect tiny temperature distribution inside a small area. The sensor array shows a linear output and has a sensitivity of 7.5 mV/°C (prior to amplifiers) at a drive current of 1 mA. To demonstrate its applications, two examples have been demonstrated, including measurement of temperature distribution around a micro heater of a micro PCR (polymerase chain reaction) chip for DNA amplification and detection of separation point for flow over a circular cylinder. The development of the flexible skin with a temperature sensor array may be crucial for measuring temperature distribution on any curved surface in the fields of aerodynamics, space exploration, auto making and biomedical applications etc.

Electroless Nickel Plating and Electroplating on FBG Temperature Sensor

Metal-coated fiber Bragg grating（FBG）temperature sensors were prepared via electroless nickel（EN）plating and tin electroplating methods on the surface of normal bare FBG.The surface morphologies of the metal-coated layers were observed under a metallographic microscope.The effects of pretreatment sequence,pH value of EN plating solution and current density of electroplating on the performance of the metal-coated layers were analyzed.Meanwhile, the Bragg wavelength shift induced by temperature was monitored by an optical spectrum analyzer.Sensitivity of the metal-coated FBG（MFBG）sensor was almost two times that of normal bare FBG sensor.The measuring temperature of the MFBG sensor could be up to 280℃,which was much better than that of conventional FBG sensor.

Optical temperature sensor based on up-conversion fluorescence emission in Yb^(3+):Er^(3+) co-doped ceramics glass

yb^3＋：Er^3＋ co-doped oxy-fluoride ceramics glass has been prepared. The mechanism of up-conversion emissions about Er^3＋ was discussed, and the temperature properties of green up-conversion fluorescence between 303 and 823 K were investigated. The results show that the sensitivity of this sample reaches its maximum value, about 0.0047 K^-1, when the temperature is 383 K, indicating that this kind of sample can be used as high temperature and high sensitivity optical temperature sensor.

Multifunctional disk device for optical switch and temperature sensor

A multifunctional surface plasmon polariton disk device coupled by two metal-insulator-metal（MIM） waveguides is proposed and investigated numerically with finite-difference time-domain simulation. It can be used as optical switch and temperature sensor by filling disk with liquid crystal and ethanol, respectively. The simulation results demonstrate that the transmission characteristics of an optical switch can be manipulated by adjusting the radius of disk and the slit width between disk and MIM waveguides. The transmittance and modulation depth of optical switch at 1550 nm are up to 64.82% and 17.70 d B, respectively. As a temperature sensor, its figure of merit can reach 30.46. In this paper, an optical switch with better efficiency and a temperature sensor with better sensitivity can be achieved.

An E-type Temperature Sensor for Upper Air Meteorology

An E-type high-precision temperature sensor, which is adopted for upper air meteorology, was proposed in this paper. A computational fluid dynamics(CFD) method was implemented to analyze temperature rise induced by solar radiation at different altitudes and solar radiation intensities. A temperature rise correction equation was obtained by fitting the CFD results using a Broyden-Fletcher-Goldfarb-Shanno(BFGS) method. To verify the performance of the temperature sensor, an experimental platform was constructed. Through simulations and experiments, the relationship among the altitude, solar radiation intensity and radiation temperature rise was obtaned. The root-mean-square error(RMSE) between the temperature rise derived from the correction equation and that derived from the experiments is 0.013 K. The sample determination coefficient r2 of the solar radiation error correction equation is 0.9975.

Temperature sensor based on a single-mode tapered optical fiber

A temperature sensor is demonstrated and fabricated by coating the single-mode tapered optical fiber with temperature-sensitive silicone rubber. It works on the change of the evanescent fields in the tapered optical fiber. Small changes in the refractive index of coating film greatly influence the power of evanescent fields, which modulate the transmission optical power in the waist region. The range of temperature measured is from -20℃ to 70 ℃. The results show that the temperature sensor has high temperature sensitivity （0.012 mW/℃） and good repeatability.

Capacitive micromachined ultrasonic transducer as a resonant temperature sensor

Resonant temperature sensors have drawn considerable attention for their advantages such as high sensitivity,digitized signal output and high precision.This paper presents a new type of resonant temperature sensor,which uses capacitive micromachined ultrasonic transducer(CMUT)as the sensing element.A lumped electro-mechanical-thermal model was established to show its working principle for temperature measurement.The theoretical model explicitly explains the thermally induced changes in the resonant frequency of the CMUT.Then,the finite element method was used to further investigate the sensing performance.The numerical results agree well with the established analytical model qualitatively.The numerical results show that the resonant frequency varies linearly with the temperature over the range of 20℃to 140℃ at the first four vibrating modes.However,the first order vibrating mode shows a higher sensitivity than the other three higher modes.When working at the first order vibrating mode,the temperature coefficient of the resonance frequency(TCf)can reach as high as-1114.3 ppm/℃ at a bias voltage equal to 90%of the collapse voltage of the MCUT.The corresponding nonlinear error was as low as 1.18%.It is discovered that the sensing sensitivity is dependent on the applied bias voltages.A higher sensitivity can be achieved by increasing the bias voltages.

Fabry-Perot Temperature Sensor for Quasi-Distributed Measurement Utilizing OTDR

A quasi-distributed Fabry-Perot fiber optic temperature sensor array using optical time domain reflectometry （OTDR） technique is presented. The F-P sensor is made by two face to face single-mode optical fibers and their surfaces have been polished. Due to the low reflectivity of the fiber surfaces, the sensor is described as low Fresnel Fabry-Perot interferometer （FPI）. The working principle is analyzed using twobeam optical interference approximation. To measure the temperature, a certain temperature sensitive material is filled in the cavity. The slight changes of the reflective intensity which is induced by the refractive index of the material was caught by OTDR. The length of the cavity is obtained by monitoring the interference spectrum which is used for the setting of the sensor static characteristics within the quasi-linear range. Based on our design, a three point sensor array are fabricated and characterized. The experimental results show that with the temperature increasing from -30℃ to 80℃, the reflectivity increase in a good linear manner. The sensitivity was approximate 0.074 dB℃. For the low transmission loss, more sensors can be integrated.

A Nonlinear Mirror Structure to Improve the Performance of the Distributed Fiber Temperature Sensor Based on Raman Backscattering

A novel nonlinear mirror structure which can increase the optical signal-to-noise ratio of a distributed fiber Raman temperature sensor is proposed, and 6 dB improvement of the optical signal-to-noise ratio is obtained. With the assistance of the nonlinear mirror, we demonstrate that the spatial resolution of the sensor is improved from 3 m to 1 m, and the temperature accuracy is improved from ±0.6℃ to ±0.2℃. The theoretical analysis and the experimental data are in good agreement.

Tunable and highly sensitive temperature sensor based on graphene photonic crystal fiber

Optical fiber temperature sensors have been widely employed in enormous areas ranging from electric power industry,medical treatment,ocean dynamics to aerospace.Recently,graphene optical fiber temperature sensors attract tremendous attention for their merits of simple structure and direct power detecting ability.However,these sensors based on transfer techniques still have limitations in the relatively low sensitivity or distortion of the transmission characteristics,due to the unsuitable Fermi level of graphene and the destruction of fiber structure,respectively.Here,we propose a tunable and highly sensitive temperature sensor based on graphene photonic crystal fiber(Gr-PCF)with the non-destructive integration of graphene into the holes of PCF.This hybrid structure promises the intact fiber structure and transmission mode,which efficiently enhances the temperature detection ability of graphene.From our simulation,we find that the temperature sensitivity can be electrically tuned over four orders of magnitude and achieve up to~3.34×10^(-3) dB/(cm·℃)when the graphene Fermi level is~35 meV higher than half the incident photon energy.Additionally,this sensitivity can be further improved by~10 times through optimizing the PCF structure(such as the fiber hole diameter)to enhance the light–matter interaction.Our results provide a new way for the design of the highly sensitive temperature sensors and broaden applications in all-fiber optoelectronic devices.

Bulk GaN-based SAW resonators with high quality factors for wireless temperature sensor

Surface acoustic wave(SAW)resonator with outstanding quality factors of 4829/6775 at the resonant/anti-resonant frequencies has been demonstrated on C-doped semi-insulating bulk GaN.The impact of device parameters including aspect ratio of length to width of resonators,number of interdigital transducers,and acoustic propagation direction on resonator performance have been studied.For the first time,we demonstrate wireless temperature sensing from 21.6 to 120℃ with a stable temperature coefficient of frequency of–24.3 ppm/℃ on bulk GaN-based SAW resonators.

Effect of anode area on the sensing mechanism of vertical GaN Schottky barrier diode temperature sensor

Effect of anode area on temperature sensing ability is investigated for a vertical GaN Schottky-barrier-diode sensor.The current-voltage-temperature characteristics are comparable to each other for Schottky barrier diodes with different anode areas,excepting the series resistance.In the sub-threshold region,the contribution of series resistance on the sensitivity can be ignored due to the relatively small current.The sensitivity is dominated by the current density.A large anode area is helpful for enhancing the sensitivity at the same current level.In the fully turn-on region,the contribution of series resistance dominates the sensitivity.Unfortunately,a large series resistance degrades the temperature error and linearity,implying that a larger anode area will help to decrease the series resistance and to improve the sensing ability.

Cascaded dual-channel fiber SPR temperature sensor based on liquid and solid encapsulations

In order to control the working wavelength range of the fiber surface plasmon resonance(SPR)temperature sensor and realize the wavelength division multiplexing type multi-channel fiber SPR temperature sensor,by comprehensively investigating the influence of liquids with different thermal-optical coefficients and solid packaging materials on the performance of fiber SPR temperature sensor,a dual-channel fiber SPR temperature sensor based on liquid-solid cascade encapsulation was designed and fabricated.The liquid temperature sensing stage encapsulated in capillary worked in 616.03 nm-639.05 nm band,the solid sensing stage coated with pouring sealant worked in 719.37 nm-825.27 nm band,and the two stages were cascaded to form a fiber dual-channel temperature sensor.The testing results indicated that when the temperature range was 35℃-95℃,the sensitivity of two-stage temperature detection was−0.384 nm/℃and−1.765 nm/℃respectively.The proposed fiber sensor has simple fabrication and excellent performance which can be widely used in various fields of dual-channel temperature measurement and temperature compensation.

A Simulation of the Response of a Sounding Temperature Sensor Based on the Combination of a Genetic Algorithm and Computational Fluid Dynamics

The present study aims at improving the accuracy of weather forecast by providing useful information on the behavior and response of a sounding temperature sensor.A hybrid approach relying on Computational Fluid Dynamics and a genetic algorithm(GA)is used to simulate the system represented by the bead thermistor and the surrounding air.In particular,the influence of different lead angles,sensor lead length,and lead number is considered.The results have shown that when the length of the lead wire of the bead thermistor is increased,the radiation temperature rise is reduced;when the number of lead wire is four and the angle between the lead wires is 180°,the solar radiation angle has a scarce influence on the radiation temperature rise of the sounding temperature sensor.

Fabrication and Characterization of Yarn-Based Temperature Sensor for Respiratory Monitoring

The development of wearable technologies promotes the research of flexible sensors.It is hoped that a flexible sensor can collect different physiological data,such as temperature and respiratory rate(RR).The temperature of the exhaled gas is generally higher than that in the air,and the periodic change of temperature is related to the respiratory rate.In this work,we use platinum fiber and spandex fiber to prepare yarn-based temperature sensor with high tensile performance through hollow spindle wrapping spinning technology.After the measurement,the sensitivity of the sensor can reach at least 3.18×10^(-3)℃^(-1).We use the sensor and ordinary fabric mask to prepare a sensor mask that can monitor human respiratory signals to explore the performance of the sensor in RR measurement.The experimental results show that when measuring human RR,the yarn-based temperature sensor can accurately distinguish different respiratory states such as normal breathing,deep breathing,and rapid breathing while speaking.It is suggested that yarn-based temperature sensors can be used in medical fields such as real-time respiratory detection and temperature measurement.

Design and Realization of a Portable Temperature Sensor Calibrator

Due to the complex erection environment of various types of automatic stations,the provincial meteorological inspection department is difficult to carry out this work in terms of equipment or staffing. For this reason,a portable temperature sensor calibrator was developed,and it uses semiconductor refrigeration technology to increase and decrease temperature quickly. It uses an intelligent PID temperature controller as a control device to provide a stable temperature environment; it is small,light and easy to operate,and it provides technical support for the calibration of temperature sensors. The structure and working principle of this equipment were analyzed,and its performance was tested. All the indicators could meet the requirements of field calibration. The calibrator will provide a strong guarantee for the reliability of temperature data obtained at automatic meteorological stations.

Temperature Dependence of Electrical Properties of Organic Thin Film Transistors Based on pn Heterojuction and Their Applications in Temperature Sensors

Organic thin film transistors based on an F16CuPc/α6T pn heterojunction have been fabricated and analyzed to investigate the temperature dependence of electrical properties and apply in temperature sensors. The mobility follows a thermally activated hopping process. At temperatures over 200 K, the value of thermal activation energy (EA) is 40. 1 meV, similar to that of the single-layer device. At temperatures ranging from 100 to 200 K, we have a second regime with a much lower EA of 16.3 meV, where the charge transport is dominated by shallow traps. Similarly, at temperatures above 200 K, threshold voltage (VT) increases linearly with decreasing temperature, and the variations of VT of 0.185 V/K is larger than the variation of VT (~0.020 V/K) in the single layer devices. This result is due to the interface dipolar charges. At temperatures ranging from 100 K to 200 K, we have a second regime with much lower variations of 0.090 V/K. By studying gate voltage (VG)-dependence temperature variation factor (k), the maximum value of k (~0.11 dec/K) could be obtained at VG = 5 V. Furthermore, the pn heterojunction device could be characterized as a temperature sensor well working at low operating voltages.