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Ultra-broadband microwave absorber and high-performance pressure sensor based on aramid nanofiber,polypyrrole and nickel porous aerogel
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作者 Leyi Zhang Hongyu Jin +7 位作者 Hanxin Liao Rao Zhang Bochong Wang Jianyong Xiang Congpu Mu Kun Zhai Tianyu Xue Fusheng Wen 《International Journal of Minerals,Metallurgy and Materials》 SCIE EI CAS CSCD 2024年第8期1912-1921,共10页
Electronic devices have become ubiquitous in our daily lives,leading to a surge in the use of microwave absorbers and wearable sensor devices across various sectors.A prime example of this trend is the aramid nanofibe... Electronic devices have become ubiquitous in our daily lives,leading to a surge in the use of microwave absorbers and wearable sensor devices across various sectors.A prime example of this trend is the aramid nanofibers/polypyrrole/nickel(APN)aerogels,which serve dual roles as both microwave absorbers and pressure sensors.In this work,we focused on the preparation of aramid nanofibers/polypyrrole(AP15)aerogels,where the mass ratio of aramid nanofibers to pyrrole was 1:5.We employed the oxidative polymerization method for the preparation process.Following this,nickel was thermally evaporated onto the surface of the AP15 aerogels,resulting in the creation of an ultralight(9.35 mg·cm^(-3)).This aerogel exhibited a porous structure.The introduction of nickel into the aerogel aimed to enhance magnetic loss and adjust impedance matching,thereby improving electromagnetic wave absorption performance.The minimum reflection loss value achieved was-48.7 dB,and the maximum effective absorption bandwidth spanned 8.42 GHz with a thickness of 2.9 mm.These impressive metrics can be attributed to the three-dimensional network porous structure of the aerogel and perfect impedance matching.Moreover,the use of aramid nanofibers and a three-dimensional hole structure endowed the APN aerogels with good insulation,flame-retardant properties,and compression resilience.Even under a compression strain of 50%,the aerogel maintained its resilience over 500 cycles.The incorporation of polypyrrole and nickel particles further enhanced the conductivity of the aerogel.Consequently,the final APN aerogel sensor demonstrated high sensitivity(10.78 kPa-1)and thermal stability.In conclusion,the APN aerogels hold significant promise as ultra-broadband microwave absorbers and pressure sensors. 展开更多
关键词 porous aerogel aramid nanofibers microwave absorbers pressure sensor porous structure
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Sandwich probe temperature sensor based on In_(2)O_(3)-IZO thin film for ultra-high temperatures
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作者 Xu Fan Bian Tian +7 位作者 Meng Shi Zhongkai Zhang Zhaojun Liu Guoliang Zhou Jiangjiang Liu Le Li Qijing Lin Zhuangde Jiang 《International Journal of Extreme Manufacturing》 SCIE EI CAS CSCD 2024年第5期284-297,共14页
High-temperature thin-film thermocouples(TFTCs)have attracted significant attention in the aerospace and steel metallurgy industry.However,previous studies on TFTCs have primarily focused on the two-dimensional planar... High-temperature thin-film thermocouples(TFTCs)have attracted significant attention in the aerospace and steel metallurgy industry.However,previous studies on TFTCs have primarily focused on the two-dimensional planar-type,whose thermal sensitive area has to be perpendicular to the test environment,and therefore affects the thermal fluids pattern or loses accuracy.In order to address this problem,recent studies have developed three-dimensional probe-type TFTCs,which can be set parallel to the test environment.Nevertheless,the probe-type TFTCs are limited by their measurement threshold and poor stability at high temperatures.To address these issues,in this study,we propose a novel probe-type TFTC with a sandwich structure.The sensitive layer is compounded with indium oxide doped zinc oxide and fabricated using screen-printing technology.With the protection of sandwich structure on electrode film,the sensor demonstrates robust high-temperature stability,enabling continuous working at 1200℃ above 5 h with a low drift rate of 2.3℃·h^(−1).This sensor exhibits a high repeatability of 99.3% when measuring a wide range of temperatures,which is beyond the most existing probe-type TFTCs reported in the literature.With its excellent high-temperature performance,this temperature sensor holds immense potentials for enhancing equipment safety in the aerospace engineering and ensuring product quality in the steel metallurgy industry. 展开更多
关键词 probe-type thin-film thermocouples sandwich structure high-temperature stability drift rate temperature sensor
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Flexible capacitive pressure sensor based on interdigital electrodes with porous microneedle arrays for physiological signal monitoring
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作者 Jiahui Xu Minghao Wang +9 位作者 Minyi Jin Siyan Shang Chuner Ni Yili Hu Xun Sun Jun Xu Bowen Ji Le Li Yuhua Cheng Gaofeng Wang 《Nanotechnology and Precision Engineering》 EI CAS CSCD 2024年第1期18-31,共14页
Flexible pressure sensors have many potential applications in the monitoring of physiological signals because of their good biocompatibil-ity and wearability.However,their relatively low sensitivity,linearity,and stab... Flexible pressure sensors have many potential applications in the monitoring of physiological signals because of their good biocompatibil-ity and wearability.However,their relatively low sensitivity,linearity,and stability have hindered their large-scale commercial application.Herein,aflexible capacitive pressure sensor based on an interdigital electrode structure with two porous microneedle arrays(MNAs)is pro-posed.The porous substrate that constitutes the MNA is a mixed product of polydimethylsiloxane and NaHCO3.Due to its porous and interdigital structure,the maximum sensitivity(0.07 kPa-1)of a porous MNA-based pressure sensor was found to be seven times higher than that of an imporous MNA pressure sensor,and it was much greater than that of aflat pressure sensor without a porous MNA structure.Finite-element analysis showed that the interdigital MNA structure can greatly increase the strain and improve the sensitivity of the sen-sor.In addition,the porous MNA-based pressure sensor was found to have good stability over 1500 loading cycles as a result of its bilayer parylene-enhanced conductive electrode structure.Most importantly,it was found that the sensor could accurately monitor the motion of afinger,wrist joint,arm,face,abdomen,eye,and Adam’s apple.Furthermore,preliminary semantic recognition was achieved by monitoring the movement of the Adam’s apple.Finally,multiple pressure sensors were integrated into a 33 array to detect a spatial pressure distribu-×tion.Compared to the sensors reported in previous works,the interdigital electrode structure presented in this work improves sensitivity and stability by modifying the electrode layer rather than the dielectric layer. 展开更多
关键词 Capacitive pressure sensor Microneedle array Porous PDMS Interdigital electrode
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Flexible polydimethylsiloxane pressure sensor with micro-pyramid structures and embedded silver nanowires:A novel application in urinary flow measurement
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作者 Ben-Song Wang Ang Gao +4 位作者 Song-Wei Huang Qi-Hong Ning Cheng Zhou Qi-Xiang Song Da-XiangCui 《Nanotechnology and Precision Engineering》 EI CAS CSCD 2024年第3期1-12,共12页
Flexible pressure sensors are lightweight and highly sensitive,making them suitable for use in small portable devices to achieve precise measurements of tiny forces.This article introduces a low-cost and easy-fabricat... Flexible pressure sensors are lightweight and highly sensitive,making them suitable for use in small portable devices to achieve precise measurements of tiny forces.This article introduces a low-cost and easy-fabrication strategy for piezoresistive flexible pressure sensors.By embedding silver nanowires into a polydimethylsiloxane layer with micro-pyramids on its surface,a flexible pressure sensor is created that can detect low pressure (17.3 Pa) with fast response (<20 ms) and high sensitivity (69.6 mA kPa-1).Furthermore,the pressure sensor exhibits a sensitive and stable response to a small amount of water flowing on its surface.On this basis,the flexible pressure sensor is innovatively combined with a micro-rotor to fabricate a novel urinary flow-rate meter (uroflowmeter),and results from a simulated human urination experiment show that the uroflowmeter accurately captured all the essential shape characteristics that were present in the pump-simulated urination curves.Looking ahead,this research provides a new reference for using flexible pressure sensors in urinary flow-rate monitoring. 展开更多
关键词 Flexible pressure sensor Silver nanowires Portable device Uroflowmeter Healthcare
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Blade-Coated Porous 3D Carbon Composite Electrodes Coupled with Multiscale Interfaces for Highly Sensitive All-Paper Pressure Sensors
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作者 Bowen Zheng Ruisheng Guo +4 位作者 Xiaoqiang Dou Yueqing Fu Bingjun Yang Xuqing Liu Feng Zhou 《Nano-Micro Letters》 SCIE EI CAS CSCD 2024年第12期217-232,共16页
Flexible and wearable pressure sensors hold immense promise for health monitoring,covering disease detection and postoperative rehabilitation.Developing pressure sensors with high sensitivity,wide detection range,and ... Flexible and wearable pressure sensors hold immense promise for health monitoring,covering disease detection and postoperative rehabilitation.Developing pressure sensors with high sensitivity,wide detection range,and cost-effectiveness is paramount.By leveraging paper for its sustainability,biocompatibility,and inherent porous structure,herein,a solution-processed all-paper resistive pressure sensor is designed with outstanding performance.A ternary composite paste,comprising a compressible 3D carbon skeleton,conductive polymer poly(3,4-ethylene dioxythiophene):poly(styrenesulfonate),and cohesive carbon nanotubes,is blade-coated on paper and naturally dried to form the porous composite electrode with hierachical micro-and nano-structured surface.Combined with screen-printed Cu electrodes in submillimeter finger widths on rough paper,this creates a multiscale hierarchical contact interface between electrodes,significantly enhancing sensitivity(1014 kPa-1)and expanding the detection range(up to 300 kPa)of as-resulted all-paper pressure sensor with low detection limit and power consumption.Its versatility ranges from subtle wrist pulses,robust finger taps,to large-area spatial force detection,highlighting its intricate submillimetermicrometer-nanometer hierarchical interface and nanometer porosity in the composite electrode.Ultimately,this all-paper resistive pressure sensor,with its superior sensing capabilities,large-scale fabrication potential,and cost-effectiveness,paves the way for next-generation wearable electronics,ushering in an era of advanced,sustainable technological solutions. 展开更多
关键词 Micro-and nano-structures PEDOT:PSS Flexible pressure sensors Health monitoring Multiscale interfaces
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High Sensitivity Submicron Scale Temperature Sensor Based on Perovskite Nanoplatelet Lasers
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作者 ZHAO Ruofan TAO Jianxun +7 位作者 XI Yuying CHEN Jiangzhao JI Ting WANG Wenyan WEN Rong CUI Yanxia CHEN Junsheng LI Guohui 《发光学报》 EI CAS CSCD 北大核心 2024年第9期1511-1520,共10页
Submicron scale temperature sensors are crucial for a range of applications,particularly in micro and na-noscale environments.One promising solution involves the use of active whispering gallery mode(WGM)microresonato... Submicron scale temperature sensors are crucial for a range of applications,particularly in micro and na-noscale environments.One promising solution involves the use of active whispering gallery mode(WGM)microresonators.These resonators can be remotely excited and read out using free-space structures,simplifying the process of sensing.In this study,we present a submicron-scale temperature sensor with a remarkable sensitivity up to 185 pm/℃based on a trian-gular MAPbI3 nanoplatelet(NPL)laser.Notably,as temperature changes,the peak wavelength of the laser line shifts lin-early.This unique characteristic allows for precise temperature sensing by tracking the peak wavelength of the NPL laser.The optical modes are confined within the perovskite NPL,which measures just 85 nm in height,due to total internal reflec-tion.Our NPL laser boasts several key features,including a high Q of~2610 and a low laser threshold of about 19.8μJ·cm^(−2).The combination of exceptional sensitivity and ultra-small size makes our WGM device an ideal candidate for integration into systems that demand compact temperature sensors.This advancement paves the way for significant prog-ress in the development of ultrasmall temperature sensors,opening new possibilities across various fields. 展开更多
关键词 temperature sensor submicron scale perovskite nanoplatelet
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Nanocellulose-Assisted Construction of Multifunctional MXene-Based Aerogels with Engineering Biomimetic Texture for Pressure Sensor and Compressible Electrode 被引量:10
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作者 Ting Xu Qun Song +9 位作者 Kun Liu Huayu Liu Junjie Pan Wei Liu Lin Dai Meng Zhang Yaxuan Wang Chuanling Si Haishun Du Kai Zhang 《Nano-Micro Letters》 SCIE EI CAS CSCD 2023年第7期122-135,共14页
Multifunctional architecture with intriguing structural design is highly desired for realizing the promising performances in wearable sensors and flexible energy storage devices.Cellulose nanofiber(CNF)is employed for... Multifunctional architecture with intriguing structural design is highly desired for realizing the promising performances in wearable sensors and flexible energy storage devices.Cellulose nanofiber(CNF)is employed for assisting in building conductive,hyperelastic,and ultralight Ti_(3)C_(2)T_(x)MXene hybrid aerogels with oriented tracheid-like texture.The biomimetic hybrid aerogels are constructed by a facile bidirectional freezing strategy with CNF,carbon nanotube(CNT),and MXene based on synergistic electrostatic interaction and hydrogen bonding.Entangled CNF and CNT“mortars”bonded with MXene“bricks”of the tracheid structure produce good interfacial binding,and superior mechanical strength(up to 80%compressibility and extraordinary fatigue resistance of 1000 cycles at 50%strain).Benefiting from the biomimetic texture,CNF/CNT/MXene aerogel shows ultralow density of 7.48 mg cm^(-3)and excellent electrical conductivity(~2400 S m^(-1)).Used as pressure sensors,such aerogels exhibit appealing sensitivity performance with the linear sensitivity up to 817.3 kPa^(-1),which affords their application in monitoring body surface information and detecting human motion.Furthermore,the aerogels can also act as electrode materials of compressive solid-state supercapacitors that reveal satisfactory electrochemical performance(849.2 mF cm^(-2)at 0.8 mA cm^(-2))and superior long cycle compression performance(88%after 10,000 cycles at a compressive strain of 30%). 展开更多
关键词 NANOCELLULOSE AEROGELS MXene SUPERCAPACITORS pressure sensors
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MXene-based flexible pressure sensor with piezoresistive properties significantly enhanced by atomic layer infiltration 被引量:1
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作者 Zilian Qi Tianwei Zhang +3 位作者 Xiao-Dong Zhang Qing Xu Kun Cao Rong Chen 《Nano Materials Science》 EI CAS CSCD 2023年第4期439-446,共8页
The flexible pressure sensor has been credited for leading performance including higher sensitivity,faster response/recovery,wider detection range and higher mechanical durability,thus driving the development of novel... The flexible pressure sensor has been credited for leading performance including higher sensitivity,faster response/recovery,wider detection range and higher mechanical durability,thus driving the development of novel sensing materials enabled by new processing technologies.Using atomic layer infiltration,Pt nanocrystals with dimensions on the order of a few nanometers can be infiltrated into the compressible lamellar structure of Ti3C2Tx MXene,allowing a modulation of its interlayer spacing,electrical conductivity and piezoresistive property.The flexible piezoresistive sensor is further developed from the Pt-infiltrated MXene on a paper substrate.It is demonstrated that Pt infiltration leads to a significant enhancement of the pressure-sensing performance of the sensor,including increase of sensitivity from 0.08 kPa^(-1)to 0.5 kPa^(-1),extension of detection limit from 5 kPa to 9 kPa,decrease of response time from 200 ms to 20 ms,and reduction of recovery time from 230 ms to 50 ms.The mechanical durability of the flexible sensor is also improved,with the piezoresistive performance stable over 1000 cycles of flexure fatigue.The atomic layer infiltration process offers new possibilities for the structure modification of MXene for advanced sensor applications. 展开更多
关键词 MXene Atomic layer deposition Pt infiltration PIEZORESISTIVE Flexible pressure sensor
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High-Performance and Flexible Co-Planar Integrated Microsystem of Carbon-Based All-Solid-State Micro-Supercapacitor and Real-Time Temperature Sensor 被引量:1
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作者 Dongming Liu Jiaxin Ma +6 位作者 Shuanghao Zheng Wenlong Shao Tianpeng Zhang Siyang Liu Xigao Jian Zhongshuai Wu Fangyuan Hu 《Energy & Environmental Materials》 SCIE EI CAS CSCD 2023年第6期291-296,共6页
With the rapid development of flexible and portable microelectronics,the extreme demand for miniaturized,mechanically flexible,and integrated microsystems are strongly stimulated.Here,biomass-derived carbons(BDCs)are ... With the rapid development of flexible and portable microelectronics,the extreme demand for miniaturized,mechanically flexible,and integrated microsystems are strongly stimulated.Here,biomass-derived carbons(BDCs)are prepared by KOH activation using Qamgur precursor,exhibiting three-dimensional(3D)hierarchical porous structure.Benefiting from unobstructed 3D hierarchical porous structure,BDCs provide an excellent specific capacitance of 433 F g^(-1)and prominent cyclability without capacitance degradation after 50000 cycles at 50 A g^(-1).Furthermore,BDC-based planar micro-supercapacitors(MSCs)without metal collector,prepared by mask-assisted coating,exhibit outstanding areal-specific capacitance of 84 mF cm^(-2)and areal energy density of 10.6μWh cm^(-2),exceeding most of the previous carbon-based MSCs.Impressively,the MSCs disclose extraordinary flexibility with capacitance retention of almost 100%under extreme bending state.More importantly,a flexible planar integrated system composed of the MSC and temperature sensor is assembled to efficiently monitor the temperature variation,providing a feasible route for flexible MSC-based functional micro-devices. 展开更多
关键词 3D hierarchical porous carbon biomass-derived carbon integrated microsystem micro-supercapacitors temperature sensor
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Self-healing Au/PVDF-HFP composite ionic gel for flexible underwater pressure sensor
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作者 Ruiyang Yin Linlin Li +1 位作者 Lili Wang Zheng Lou 《Journal of Semiconductors》 EI CAS CSCD 2023年第3期76-94,共19页
Ionic gels can be potentially used in wearable devices owing to their high humidity resistance and non-volatility.However,the applicability of existing ionic gel pressure sensors is limited by their low sensitivity.Th... Ionic gels can be potentially used in wearable devices owing to their high humidity resistance and non-volatility.However,the applicability of existing ionic gel pressure sensors is limited by their low sensitivity.Therefore,it is very import-ant to develop an ionic gel pressure sensor with high sensitivity and a wide pressure detection range without sacrificing mechan-ical stretchability and self-healing ability.Herein,we report an effective strategy for developing pressure sensors based on ion-ic gel composites consisting of high-molecular-weight polymers,ionic liquids,and Au nanoparticles.The resulting capacitive pressure sensors exhibit high pressure sensitivity,fast response,and excellent self-healing properties.The sensors composed of highly hydrophobic polymers and ionic liquids can be used to track underwater movements,demonstrating broad application prospects in human motion state monitoring and underwater mechanical operations. 展开更多
关键词 ionic gel pressure sensor high performance underwater operation SELF-HEALING
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Design and Implementation of Batch Calibration System for Platinum Resistance Temperature Sensors
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作者 Hui LIANG Tianwen SONG Yun XIAN 《Meteorological and Environmental Research》 CAS 2023年第5期19-23,共5页
Developing a calibration and collection system of platinum resistance temperature sensor using Python language environment can read the information returned by the serial port and automatically generate an"Temper... Developing a calibration and collection system of platinum resistance temperature sensor using Python language environment can read the information returned by the serial port and automatically generate an"Temperature Sensor Calibration Record Table"excel table with the current date as the file name.It can collect data from 10 platinum resistance temperature sensors at once,achieving automation and improving work efficiency. 展开更多
关键词 PYTHON Air temperature sensor COLLECTION
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On the Temperature Profile of the Thermally Excited Resonant Silicon Micro Structural Pressure Sensor 被引量:2
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作者 樊尚春 贾振宏 《Chinese Journal of Aeronautics》 SCIE EI CAS CSCD 2002年第3期156-160,共5页
According to the sensing structure of a practical silicon resonant pressure micro sensor whose preliminary sensing unit is a square silicon diaphragm and the final sensing unit is a silicon beam resonator, its operati... According to the sensing structure of a practical silicon resonant pressure micro sensor whose preliminary sensing unit is a square silicon diaphragm and the final sensing unit is a silicon beam resonator, its operating mechanism is analyzed. The thermal resistor acts as the excited unit, and the piezoresistive unit acts as the detector, for the above micro sensor. By using the amplitude and phase conditions, the self exciting closed loop system is investigated based on the operating mechanism for the abov... 展开更多
关键词 thermal excitation resonant sensor silicon microstructure pressure sensor
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Wireless contactless pressure measurement of an LC passive pressure sensor with a novel antenna for high-temperature applications 被引量:1
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作者 李晨 谭秋林 +3 位作者 薛晨阳 张文栋 李运芝 熊继军 《Chinese Physics B》 SCIE EI CAS CSCD 2015年第4期540-545,共6页
In this paper, a novel antenna is proposed for high-temperature testing, which can make the high-temperature pressure characteristics of a wireless passive ceramic pressure sensor demonstrated at up to a temperature o... In this paper, a novel antenna is proposed for high-temperature testing, which can make the high-temperature pressure characteristics of a wireless passive ceramic pressure sensor demonstrated at up to a temperature of 600℃. The design parameters of the antenna are similar to those of the sensor, which will increase the coupling strength between the sensor and testing antenna. The antenna is fabricated in thick film integrated technology, and the properties of the alumina ceramic and silver ensure the feasibility of the antenna in high-temperature environments. The sensor, coupled with the ceramic antenna, is investigated using a high-temperature pressure testing platform. The experimental measurement results show that the pressure signal in a harsh environment can be detected by the frequency diversity of the sensor. 展开更多
关键词 ceramic antenna contactless pressure measurement high-temperature application wireless passive pressure sensor
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Flexible temperature sensor with high sensitivity ranging from liquid nitrogen temperature to 1200℃ 被引量:7
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作者 Zhaojun Liu Bian Tian +6 位作者 Zhuangde Jiang Shuimin Li Jiaming Lei Zhongkai Zhang Jiangjiang Liu Peng Shi Qijing Lin 《International Journal of Extreme Manufacturing》 SCIE EI CAS CSCD 2023年第1期355-366,共12页
Flexible temperature sensors have been extensively investigated due to their prospect of wide application in various flexible electronic products.However,most of the current flexible temperature sensors only work well... Flexible temperature sensors have been extensively investigated due to their prospect of wide application in various flexible electronic products.However,most of the current flexible temperature sensors only work well in a narrow temperature range,with their application at high or low temperatures still being a big challenge.This work proposes a flexible thermocouple temperature sensor based on aerogel blanket substrate,the temperature-sensitive layer of which uses the screen-printing technology to prepare indium oxide and indium tin oxide.It has good temperature sensitivity,with the test sensitivity reaching 226.7μV℃^(−1).Most importantly,it can work in a wide temperature range,from extremely low temperatures down to liquid nitrogen temperature to high temperatures up to 1200℃,which is difficult to be achieved by other existing flexible temperature sensors.This temperature sensor has huge application potential in biomedicine,aerospace and other fields. 展开更多
关键词 flexible sensor temperature THERMOCOUPLE
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Isolated Solid-State Packaging Technology of High-Temperature Pressure Sensor
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作者 张生才 金鹏 +2 位作者 姚素英 赵毅强 曲宏伟 《Transactions of Tianjin University》 EI CAS 2003年第4期264-268,共5页
The principle of miniature isolated solid-state encapsulation technology of high-temperature pressure sensor and the structure of packaging are discussed, including static electricity bonding, stainless steel diaphrag... The principle of miniature isolated solid-state encapsulation technology of high-temperature pressure sensor and the structure of packaging are discussed, including static electricity bonding, stainless steel diaphragm selection and rippled design, laser welding, silicon oil infilling, isolation and other techniques used in sensor packaging, which can affect the performance of the sensor. By adopting stainless steel diaphragm and high-temperature silicon oil as isolation materials, not only the encapsulation of the sensor is as small as 15 mm in diameter and under 1 mA drive, its full range output is 72 mV and zero stability is 0.48% F.S/mon, but also the reliability of the sensor is improved and its application is widely broadened. 展开更多
关键词 high-temperature pressure sensor static electricity bonding isolated solid-state silicon oil infilling
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A Novel Built-in CMOS Temperature Sensor for VLSI Circuits 被引量:3
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作者 王乃龙 张盛 周润德 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2004年第3期252-256,共5页
A novel temperature sensor is developed and presented especially for the purpose of on-line thermal monitoring of VLSI chips.This sensor requires very small silicon area and low power consumption,and the simulation re... A novel temperature sensor is developed and presented especially for the purpose of on-line thermal monitoring of VLSI chips.This sensor requires very small silicon area and low power consumption,and the simulation results show that its accuracy is in the order of 0.8℃.The proposed sensor can be easily implemented using regular CMOS process technologies,and can be easily integrated to any VLSI circuits to increase their reliability. 展开更多
关键词 temperature sensor thermal testability frequency-output
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Investigation of a Pressure Sensor with Temperature Compensation Using Two Concentric Wheatstone-Bridge Circuits 被引量:4
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作者 Chi-Chang Hsieh Chih-Ching Hung Yan-Huei Li 《Modern Mechanical Engineering》 2013年第2期104-113,共10页
This study presents a silicon-based pressure sensor with temperature compensation. The eight piezoresistors were designed on the polycrystalline silicon membrane and constructed by two concentric Wheatstone-bridge cir... This study presents a silicon-based pressure sensor with temperature compensation. The eight piezoresistors were designed on the polycrystalline silicon membrane and constructed by two concentric Wheatstone-bridge circuits to perform two sets of sensors. The sensor in the central circuit measures the membrane deflection caused by the combined effects of pressure and temperature, while the outer one measures only the deflection caused by the working temperature. From this arrangement, it is reliable and accurate to measure the pressure by comparing the output signals from the two concentric Wheatstone-bridge circuits. The optimal positions of the eight piezoresistors were simulated by simulation software ANSYS. The investigated pressure sensor was fabricated by the micro electro-mechanical systems (MEMS) techniques. The measuring performance and an indication of the conventional single Wheatstone-bridge pressure sensor is easily affected under variation of different working temperature and causes a maximum absolute error up to 45.5%, while the double Wheatstone-bridge pressure sensor is able to compensate the error, and reduces it down to 1.13%. The results in this paper demonstrate an effective temperature compensation performance, and have a great performance and stability in the pressure measuring system as well. 展开更多
关键词 pressure sensor temperature COMPENSATION Wheatstone-Bridge CIRCUIT MEMS
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Minority-Carrier Exclusion Effect in Thin-Film SOI Temperature Sensor
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作者 李斌 黎沛涛 +1 位作者 刘百勇 郑学仁 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2003年第5期461-465,共5页
A silicon temperature sensor with a conventional resistor structure is fabricated on thin-film silicon-on-insulator (SOI) substrate.The sensor has very promising characteristics.The maximum operating temperature ca... A silicon temperature sensor with a conventional resistor structure is fabricated on thin-film silicon-on-insulator (SOI) substrate.The sensor has very promising characteristics.The maximum operating temperature can reach 550℃ even at a low current of 0.1mA.Experimental results support that the minority-carrier exclusion effect can be strong in the conventional resistor structure when the silicon film is sufficiently thin,thus significantly raising the maximum operating temperature.Moreover,since the structure of the device on thin-film SOI wafer is not crucial in controlling the maximum operating temperature,device layout can be varied according to the requirements of applications. 展开更多
关键词 minority-carrier exclusion effect high temperature sensors spreading resistance SOI
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Temperature sensor based on polymer thin film optical waveguide
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作者 王龙德 张彤 +2 位作者 张晓阳 李若舟 汪鲁宁 《Journal of Southeast University(English Edition)》 EI CAS 2013年第2期152-157,共6页
Based on attenuated total reflection (ATR) and thermo-optic effect, the polymeric thin film planar optical waveguide is used as the temperature sensor, and the factors influencing the sensitivity of the temperature ... Based on attenuated total reflection (ATR) and thermo-optic effect, the polymeric thin film planar optical waveguide is used as the temperature sensor, and the factors influencing the sensitivity of the temperature sensor are comprehensively analyzed. Combined with theoretical analysis and experimental investigation, the sensitivity of the temperature sensor is related to the thicknesses of the upper cladding layer, the waveguide layer, the optical loss of the polymer material and the guided wave modes. The results show that the slope value about reflectivity and temperature, which stands for the sensitivity of the polymer thin film temperature sensor, is associated with the waveguide film thickness and the guided wave modes, and the slope value is the highest in the zero reflectance of a certain transverse electric (TE) mode. To improve the sensitivity of the temperature sensor, the sensor's working incident light exterior angle α should be chosen under a certain TE mode with the reflectivity to be zero. This temperature sensor is characterized by high sensitivity and simple structure and it is easily fabricated. 展开更多
关键词 temperature sensor planar optical waveguide guided wave mode thermo-optic effect prism coupling
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The Effect of Temperature and Doping Level on the Characteristics of Piezoresistive Pressure Sensor
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作者 Beddiaf Abdelaziz Kerrour Fouad Salah Kemouche 《Journal of Sensor Technology》 2014年第2期59-65,共7页
Piezoresistive pressure sensors based on silicon have a large thermal drift because of their high sensitivity to temperature. The study of the effect of the temperature and doping level on characteristics of these sen... Piezoresistive pressure sensors based on silicon have a large thermal drift because of their high sensitivity to temperature. The study of the effect of the temperature and doping level on characteristics of these sensors is essential to define the parameters that cause the output characteristics drift. In this study, we adopted the model of Kanda to determine the effect of the temperature and of doping level on the piezoresistivity of the Silicon monocrystal. This is to represent P(N,T) and for p-type silicon as functions of impurity concentration for different temperatures. This allows us to see the effect of temperature and doping concentration on the output characteristics of the sensor. Finally, we study the geometric influence parameters and doping on these characteristics to optimize the sensor performance. This study allows us to predict the sensor behavior against temperature and to minimize this effect by optimizing the doping concentration. 展开更多
关键词 THERMAL DRIFT pressure PIEZORESISTIVITY PIEZORESISTIVE COEFFICIENTS sensor
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