Electronic devices have become ubiquitous in our daily lives,leading to a surge in the use of microwave absorbers and wearable sensor devices across various sectors.A prime example of this trend is the aramid nanofibe...Electronic devices have become ubiquitous in our daily lives,leading to a surge in the use of microwave absorbers and wearable sensor devices across various sectors.A prime example of this trend is the aramid nanofibers/polypyrrole/nickel(APN)aerogels,which serve dual roles as both microwave absorbers and pressure sensors.In this work,we focused on the preparation of aramid nanofibers/polypyrrole(AP15)aerogels,where the mass ratio of aramid nanofibers to pyrrole was 1:5.We employed the oxidative polymerization method for the preparation process.Following this,nickel was thermally evaporated onto the surface of the AP15 aerogels,resulting in the creation of an ultralight(9.35 mg·cm^(-3)).This aerogel exhibited a porous structure.The introduction of nickel into the aerogel aimed to enhance magnetic loss and adjust impedance matching,thereby improving electromagnetic wave absorption performance.The minimum reflection loss value achieved was-48.7 dB,and the maximum effective absorption bandwidth spanned 8.42 GHz with a thickness of 2.9 mm.These impressive metrics can be attributed to the three-dimensional network porous structure of the aerogel and perfect impedance matching.Moreover,the use of aramid nanofibers and a three-dimensional hole structure endowed the APN aerogels with good insulation,flame-retardant properties,and compression resilience.Even under a compression strain of 50%,the aerogel maintained its resilience over 500 cycles.The incorporation of polypyrrole and nickel particles further enhanced the conductivity of the aerogel.Consequently,the final APN aerogel sensor demonstrated high sensitivity(10.78 kPa-1)and thermal stability.In conclusion,the APN aerogels hold significant promise as ultra-broadband microwave absorbers and pressure sensors.展开更多
High-temperature thin-film thermocouples(TFTCs)have attracted significant attention in the aerospace and steel metallurgy industry.However,previous studies on TFTCs have primarily focused on the two-dimensional planar...High-temperature thin-film thermocouples(TFTCs)have attracted significant attention in the aerospace and steel metallurgy industry.However,previous studies on TFTCs have primarily focused on the two-dimensional planar-type,whose thermal sensitive area has to be perpendicular to the test environment,and therefore affects the thermal fluids pattern or loses accuracy.In order to address this problem,recent studies have developed three-dimensional probe-type TFTCs,which can be set parallel to the test environment.Nevertheless,the probe-type TFTCs are limited by their measurement threshold and poor stability at high temperatures.To address these issues,in this study,we propose a novel probe-type TFTC with a sandwich structure.The sensitive layer is compounded with indium oxide doped zinc oxide and fabricated using screen-printing technology.With the protection of sandwich structure on electrode film,the sensor demonstrates robust high-temperature stability,enabling continuous working at 1200℃ above 5 h with a low drift rate of 2.3℃·h^(−1).This sensor exhibits a high repeatability of 99.3% when measuring a wide range of temperatures,which is beyond the most existing probe-type TFTCs reported in the literature.With its excellent high-temperature performance,this temperature sensor holds immense potentials for enhancing equipment safety in the aerospace engineering and ensuring product quality in the steel metallurgy industry.展开更多
Flexible pressure sensors have many potential applications in the monitoring of physiological signals because of their good biocompatibil-ity and wearability.However,their relatively low sensitivity,linearity,and stab...Flexible pressure sensors have many potential applications in the monitoring of physiological signals because of their good biocompatibil-ity and wearability.However,their relatively low sensitivity,linearity,and stability have hindered their large-scale commercial application.Herein,aflexible capacitive pressure sensor based on an interdigital electrode structure with two porous microneedle arrays(MNAs)is pro-posed.The porous substrate that constitutes the MNA is a mixed product of polydimethylsiloxane and NaHCO3.Due to its porous and interdigital structure,the maximum sensitivity(0.07 kPa-1)of a porous MNA-based pressure sensor was found to be seven times higher than that of an imporous MNA pressure sensor,and it was much greater than that of aflat pressure sensor without a porous MNA structure.Finite-element analysis showed that the interdigital MNA structure can greatly increase the strain and improve the sensitivity of the sen-sor.In addition,the porous MNA-based pressure sensor was found to have good stability over 1500 loading cycles as a result of its bilayer parylene-enhanced conductive electrode structure.Most importantly,it was found that the sensor could accurately monitor the motion of afinger,wrist joint,arm,face,abdomen,eye,and Adam’s apple.Furthermore,preliminary semantic recognition was achieved by monitoring the movement of the Adam’s apple.Finally,multiple pressure sensors were integrated into a 33 array to detect a spatial pressure distribu-×tion.Compared to the sensors reported in previous works,the interdigital electrode structure presented in this work improves sensitivity and stability by modifying the electrode layer rather than the dielectric layer.展开更多
Flexible pressure sensors are lightweight and highly sensitive,making them suitable for use in small portable devices to achieve precise measurements of tiny forces.This article introduces a low-cost and easy-fabricat...Flexible pressure sensors are lightweight and highly sensitive,making them suitable for use in small portable devices to achieve precise measurements of tiny forces.This article introduces a low-cost and easy-fabrication strategy for piezoresistive flexible pressure sensors.By embedding silver nanowires into a polydimethylsiloxane layer with micro-pyramids on its surface,a flexible pressure sensor is created that can detect low pressure (17.3 Pa) with fast response (<20 ms) and high sensitivity (69.6 mA kPa-1).Furthermore,the pressure sensor exhibits a sensitive and stable response to a small amount of water flowing on its surface.On this basis,the flexible pressure sensor is innovatively combined with a micro-rotor to fabricate a novel urinary flow-rate meter (uroflowmeter),and results from a simulated human urination experiment show that the uroflowmeter accurately captured all the essential shape characteristics that were present in the pump-simulated urination curves.Looking ahead,this research provides a new reference for using flexible pressure sensors in urinary flow-rate monitoring.展开更多
Flexible and wearable pressure sensors hold immense promise for health monitoring,covering disease detection and postoperative rehabilitation.Developing pressure sensors with high sensitivity,wide detection range,and ...Flexible and wearable pressure sensors hold immense promise for health monitoring,covering disease detection and postoperative rehabilitation.Developing pressure sensors with high sensitivity,wide detection range,and cost-effectiveness is paramount.By leveraging paper for its sustainability,biocompatibility,and inherent porous structure,herein,a solution-processed all-paper resistive pressure sensor is designed with outstanding performance.A ternary composite paste,comprising a compressible 3D carbon skeleton,conductive polymer poly(3,4-ethylene dioxythiophene):poly(styrenesulfonate),and cohesive carbon nanotubes,is blade-coated on paper and naturally dried to form the porous composite electrode with hierachical micro-and nano-structured surface.Combined with screen-printed Cu electrodes in submillimeter finger widths on rough paper,this creates a multiscale hierarchical contact interface between electrodes,significantly enhancing sensitivity(1014 kPa-1)and expanding the detection range(up to 300 kPa)of as-resulted all-paper pressure sensor with low detection limit and power consumption.Its versatility ranges from subtle wrist pulses,robust finger taps,to large-area spatial force detection,highlighting its intricate submillimetermicrometer-nanometer hierarchical interface and nanometer porosity in the composite electrode.Ultimately,this all-paper resistive pressure sensor,with its superior sensing capabilities,large-scale fabrication potential,and cost-effectiveness,paves the way for next-generation wearable electronics,ushering in an era of advanced,sustainable technological solutions.展开更多
Submicron scale temperature sensors are crucial for a range of applications,particularly in micro and na-noscale environments.One promising solution involves the use of active whispering gallery mode(WGM)microresonato...Submicron scale temperature sensors are crucial for a range of applications,particularly in micro and na-noscale environments.One promising solution involves the use of active whispering gallery mode(WGM)microresonators.These resonators can be remotely excited and read out using free-space structures,simplifying the process of sensing.In this study,we present a submicron-scale temperature sensor with a remarkable sensitivity up to 185 pm/℃based on a trian-gular MAPbI3 nanoplatelet(NPL)laser.Notably,as temperature changes,the peak wavelength of the laser line shifts lin-early.This unique characteristic allows for precise temperature sensing by tracking the peak wavelength of the NPL laser.The optical modes are confined within the perovskite NPL,which measures just 85 nm in height,due to total internal reflec-tion.Our NPL laser boasts several key features,including a high Q of~2610 and a low laser threshold of about 19.8μJ·cm^(−2).The combination of exceptional sensitivity and ultra-small size makes our WGM device an ideal candidate for integration into systems that demand compact temperature sensors.This advancement paves the way for significant prog-ress in the development of ultrasmall temperature sensors,opening new possibilities across various fields.展开更多
Multifunctional architecture with intriguing structural design is highly desired for realizing the promising performances in wearable sensors and flexible energy storage devices.Cellulose nanofiber(CNF)is employed for...Multifunctional architecture with intriguing structural design is highly desired for realizing the promising performances in wearable sensors and flexible energy storage devices.Cellulose nanofiber(CNF)is employed for assisting in building conductive,hyperelastic,and ultralight Ti_(3)C_(2)T_(x)MXene hybrid aerogels with oriented tracheid-like texture.The biomimetic hybrid aerogels are constructed by a facile bidirectional freezing strategy with CNF,carbon nanotube(CNT),and MXene based on synergistic electrostatic interaction and hydrogen bonding.Entangled CNF and CNT“mortars”bonded with MXene“bricks”of the tracheid structure produce good interfacial binding,and superior mechanical strength(up to 80%compressibility and extraordinary fatigue resistance of 1000 cycles at 50%strain).Benefiting from the biomimetic texture,CNF/CNT/MXene aerogel shows ultralow density of 7.48 mg cm^(-3)and excellent electrical conductivity(~2400 S m^(-1)).Used as pressure sensors,such aerogels exhibit appealing sensitivity performance with the linear sensitivity up to 817.3 kPa^(-1),which affords their application in monitoring body surface information and detecting human motion.Furthermore,the aerogels can also act as electrode materials of compressive solid-state supercapacitors that reveal satisfactory electrochemical performance(849.2 mF cm^(-2)at 0.8 mA cm^(-2))and superior long cycle compression performance(88%after 10,000 cycles at a compressive strain of 30%).展开更多
The flexible pressure sensor has been credited for leading performance including higher sensitivity,faster response/recovery,wider detection range and higher mechanical durability,thus driving the development of novel...The flexible pressure sensor has been credited for leading performance including higher sensitivity,faster response/recovery,wider detection range and higher mechanical durability,thus driving the development of novel sensing materials enabled by new processing technologies.Using atomic layer infiltration,Pt nanocrystals with dimensions on the order of a few nanometers can be infiltrated into the compressible lamellar structure of Ti3C2Tx MXene,allowing a modulation of its interlayer spacing,electrical conductivity and piezoresistive property.The flexible piezoresistive sensor is further developed from the Pt-infiltrated MXene on a paper substrate.It is demonstrated that Pt infiltration leads to a significant enhancement of the pressure-sensing performance of the sensor,including increase of sensitivity from 0.08 kPa^(-1)to 0.5 kPa^(-1),extension of detection limit from 5 kPa to 9 kPa,decrease of response time from 200 ms to 20 ms,and reduction of recovery time from 230 ms to 50 ms.The mechanical durability of the flexible sensor is also improved,with the piezoresistive performance stable over 1000 cycles of flexure fatigue.The atomic layer infiltration process offers new possibilities for the structure modification of MXene for advanced sensor applications.展开更多
With the rapid development of flexible and portable microelectronics,the extreme demand for miniaturized,mechanically flexible,and integrated microsystems are strongly stimulated.Here,biomass-derived carbons(BDCs)are ...With the rapid development of flexible and portable microelectronics,the extreme demand for miniaturized,mechanically flexible,and integrated microsystems are strongly stimulated.Here,biomass-derived carbons(BDCs)are prepared by KOH activation using Qamgur precursor,exhibiting three-dimensional(3D)hierarchical porous structure.Benefiting from unobstructed 3D hierarchical porous structure,BDCs provide an excellent specific capacitance of 433 F g^(-1)and prominent cyclability without capacitance degradation after 50000 cycles at 50 A g^(-1).Furthermore,BDC-based planar micro-supercapacitors(MSCs)without metal collector,prepared by mask-assisted coating,exhibit outstanding areal-specific capacitance of 84 mF cm^(-2)and areal energy density of 10.6μWh cm^(-2),exceeding most of the previous carbon-based MSCs.Impressively,the MSCs disclose extraordinary flexibility with capacitance retention of almost 100%under extreme bending state.More importantly,a flexible planar integrated system composed of the MSC and temperature sensor is assembled to efficiently monitor the temperature variation,providing a feasible route for flexible MSC-based functional micro-devices.展开更多
Ionic gels can be potentially used in wearable devices owing to their high humidity resistance and non-volatility.However,the applicability of existing ionic gel pressure sensors is limited by their low sensitivity.Th...Ionic gels can be potentially used in wearable devices owing to their high humidity resistance and non-volatility.However,the applicability of existing ionic gel pressure sensors is limited by their low sensitivity.Therefore,it is very import-ant to develop an ionic gel pressure sensor with high sensitivity and a wide pressure detection range without sacrificing mechan-ical stretchability and self-healing ability.Herein,we report an effective strategy for developing pressure sensors based on ion-ic gel composites consisting of high-molecular-weight polymers,ionic liquids,and Au nanoparticles.The resulting capacitive pressure sensors exhibit high pressure sensitivity,fast response,and excellent self-healing properties.The sensors composed of highly hydrophobic polymers and ionic liquids can be used to track underwater movements,demonstrating broad application prospects in human motion state monitoring and underwater mechanical operations.展开更多
Developing a calibration and collection system of platinum resistance temperature sensor using Python language environment can read the information returned by the serial port and automatically generate an"Temper...Developing a calibration and collection system of platinum resistance temperature sensor using Python language environment can read the information returned by the serial port and automatically generate an"Temperature Sensor Calibration Record Table"excel table with the current date as the file name.It can collect data from 10 platinum resistance temperature sensors at once,achieving automation and improving work efficiency.展开更多
According to the sensing structure of a practical silicon resonant pressure micro sensor whose preliminary sensing unit is a square silicon diaphragm and the final sensing unit is a silicon beam resonator, its operati...According to the sensing structure of a practical silicon resonant pressure micro sensor whose preliminary sensing unit is a square silicon diaphragm and the final sensing unit is a silicon beam resonator, its operating mechanism is analyzed. The thermal resistor acts as the excited unit, and the piezoresistive unit acts as the detector, for the above micro sensor. By using the amplitude and phase conditions, the self exciting closed loop system is investigated based on the operating mechanism for the abov...展开更多
In this paper, a novel antenna is proposed for high-temperature testing, which can make the high-temperature pressure characteristics of a wireless passive ceramic pressure sensor demonstrated at up to a temperature o...In this paper, a novel antenna is proposed for high-temperature testing, which can make the high-temperature pressure characteristics of a wireless passive ceramic pressure sensor demonstrated at up to a temperature of 600℃. The design parameters of the antenna are similar to those of the sensor, which will increase the coupling strength between the sensor and testing antenna. The antenna is fabricated in thick film integrated technology, and the properties of the alumina ceramic and silver ensure the feasibility of the antenna in high-temperature environments. The sensor, coupled with the ceramic antenna, is investigated using a high-temperature pressure testing platform. The experimental measurement results show that the pressure signal in a harsh environment can be detected by the frequency diversity of the sensor.展开更多
Flexible temperature sensors have been extensively investigated due to their prospect of wide application in various flexible electronic products.However,most of the current flexible temperature sensors only work well...Flexible temperature sensors have been extensively investigated due to their prospect of wide application in various flexible electronic products.However,most of the current flexible temperature sensors only work well in a narrow temperature range,with their application at high or low temperatures still being a big challenge.This work proposes a flexible thermocouple temperature sensor based on aerogel blanket substrate,the temperature-sensitive layer of which uses the screen-printing technology to prepare indium oxide and indium tin oxide.It has good temperature sensitivity,with the test sensitivity reaching 226.7μV℃^(−1).Most importantly,it can work in a wide temperature range,from extremely low temperatures down to liquid nitrogen temperature to high temperatures up to 1200℃,which is difficult to be achieved by other existing flexible temperature sensors.This temperature sensor has huge application potential in biomedicine,aerospace and other fields.展开更多
The principle of miniature isolated solid-state encapsulation technology of high-temperature pressure sensor and the structure of packaging are discussed, including static electricity bonding, stainless steel diaphrag...The principle of miniature isolated solid-state encapsulation technology of high-temperature pressure sensor and the structure of packaging are discussed, including static electricity bonding, stainless steel diaphragm selection and rippled design, laser welding, silicon oil infilling, isolation and other techniques used in sensor packaging, which can affect the performance of the sensor. By adopting stainless steel diaphragm and high-temperature silicon oil as isolation materials, not only the encapsulation of the sensor is as small as 15 mm in diameter and under 1 mA drive, its full range output is 72 mV and zero stability is 0.48% F.S/mon, but also the reliability of the sensor is improved and its application is widely broadened.展开更多
A novel temperature sensor is developed and presented especially for the purpose of on-line thermal monitoring of VLSI chips.This sensor requires very small silicon area and low power consumption,and the simulation re...A novel temperature sensor is developed and presented especially for the purpose of on-line thermal monitoring of VLSI chips.This sensor requires very small silicon area and low power consumption,and the simulation results show that its accuracy is in the order of 0.8℃.The proposed sensor can be easily implemented using regular CMOS process technologies,and can be easily integrated to any VLSI circuits to increase their reliability.展开更多
This study presents a silicon-based pressure sensor with temperature compensation. The eight piezoresistors were designed on the polycrystalline silicon membrane and constructed by two concentric Wheatstone-bridge cir...This study presents a silicon-based pressure sensor with temperature compensation. The eight piezoresistors were designed on the polycrystalline silicon membrane and constructed by two concentric Wheatstone-bridge circuits to perform two sets of sensors. The sensor in the central circuit measures the membrane deflection caused by the combined effects of pressure and temperature, while the outer one measures only the deflection caused by the working temperature. From this arrangement, it is reliable and accurate to measure the pressure by comparing the output signals from the two concentric Wheatstone-bridge circuits. The optimal positions of the eight piezoresistors were simulated by simulation software ANSYS. The investigated pressure sensor was fabricated by the micro electro-mechanical systems (MEMS) techniques. The measuring performance and an indication of the conventional single Wheatstone-bridge pressure sensor is easily affected under variation of different working temperature and causes a maximum absolute error up to 45.5%, while the double Wheatstone-bridge pressure sensor is able to compensate the error, and reduces it down to 1.13%. The results in this paper demonstrate an effective temperature compensation performance, and have a great performance and stability in the pressure measuring system as well.展开更多
A silicon temperature sensor with a conventional resistor structure is fabricated on thin-film silicon-on-insulator (SOI) substrate.The sensor has very promising characteristics.The maximum operating temperature ca...A silicon temperature sensor with a conventional resistor structure is fabricated on thin-film silicon-on-insulator (SOI) substrate.The sensor has very promising characteristics.The maximum operating temperature can reach 550℃ even at a low current of 0.1mA.Experimental results support that the minority-carrier exclusion effect can be strong in the conventional resistor structure when the silicon film is sufficiently thin,thus significantly raising the maximum operating temperature.Moreover,since the structure of the device on thin-film SOI wafer is not crucial in controlling the maximum operating temperature,device layout can be varied according to the requirements of applications.展开更多
Based on attenuated total reflection (ATR) and thermo-optic effect, the polymeric thin film planar optical waveguide is used as the temperature sensor, and the factors influencing the sensitivity of the temperature ...Based on attenuated total reflection (ATR) and thermo-optic effect, the polymeric thin film planar optical waveguide is used as the temperature sensor, and the factors influencing the sensitivity of the temperature sensor are comprehensively analyzed. Combined with theoretical analysis and experimental investigation, the sensitivity of the temperature sensor is related to the thicknesses of the upper cladding layer, the waveguide layer, the optical loss of the polymer material and the guided wave modes. The results show that the slope value about reflectivity and temperature, which stands for the sensitivity of the polymer thin film temperature sensor, is associated with the waveguide film thickness and the guided wave modes, and the slope value is the highest in the zero reflectance of a certain transverse electric (TE) mode. To improve the sensitivity of the temperature sensor, the sensor's working incident light exterior angle α should be chosen under a certain TE mode with the reflectivity to be zero. This temperature sensor is characterized by high sensitivity and simple structure and it is easily fabricated.展开更多
Piezoresistive pressure sensors based on silicon have a large thermal drift because of their high sensitivity to temperature. The study of the effect of the temperature and doping level on characteristics of these sen...Piezoresistive pressure sensors based on silicon have a large thermal drift because of their high sensitivity to temperature. The study of the effect of the temperature and doping level on characteristics of these sensors is essential to define the parameters that cause the output characteristics drift. In this study, we adopted the model of Kanda to determine the effect of the temperature and of doping level on the piezoresistivity of the Silicon monocrystal. This is to represent P(N,T) and for p-type silicon as functions of impurity concentration for different temperatures. This allows us to see the effect of temperature and doping concentration on the output characteristics of the sensor. Finally, we study the geometric influence parameters and doping on these characteristics to optimize the sensor performance. This study allows us to predict the sensor behavior against temperature and to minimize this effect by optimizing the doping concentration.展开更多
基金The authors acknowledge the financial support from the National Natural Science Foundation of China(Nos.52071280 and 51972280)the Natural Science Foundation of Hebei Province,China(Nos.E2020203151 and E2022203208)+1 种基金the Research Program of the College Science&Technology of Hebei Province,China(No.ZD2020121)the Cultivation Project for Basic Research and Innovation of Yanshan University,China(No.2021LGZD016).
文摘Electronic devices have become ubiquitous in our daily lives,leading to a surge in the use of microwave absorbers and wearable sensor devices across various sectors.A prime example of this trend is the aramid nanofibers/polypyrrole/nickel(APN)aerogels,which serve dual roles as both microwave absorbers and pressure sensors.In this work,we focused on the preparation of aramid nanofibers/polypyrrole(AP15)aerogels,where the mass ratio of aramid nanofibers to pyrrole was 1:5.We employed the oxidative polymerization method for the preparation process.Following this,nickel was thermally evaporated onto the surface of the AP15 aerogels,resulting in the creation of an ultralight(9.35 mg·cm^(-3)).This aerogel exhibited a porous structure.The introduction of nickel into the aerogel aimed to enhance magnetic loss and adjust impedance matching,thereby improving electromagnetic wave absorption performance.The minimum reflection loss value achieved was-48.7 dB,and the maximum effective absorption bandwidth spanned 8.42 GHz with a thickness of 2.9 mm.These impressive metrics can be attributed to the three-dimensional network porous structure of the aerogel and perfect impedance matching.Moreover,the use of aramid nanofibers and a three-dimensional hole structure endowed the APN aerogels with good insulation,flame-retardant properties,and compression resilience.Even under a compression strain of 50%,the aerogel maintained its resilience over 500 cycles.The incorporation of polypyrrole and nickel particles further enhanced the conductivity of the aerogel.Consequently,the final APN aerogel sensor demonstrated high sensitivity(10.78 kPa-1)and thermal stability.In conclusion,the APN aerogels hold significant promise as ultra-broadband microwave absorbers and pressure sensors.
基金supports from the National Key Research and Development Program of China(2022YFB3207502).
文摘High-temperature thin-film thermocouples(TFTCs)have attracted significant attention in the aerospace and steel metallurgy industry.However,previous studies on TFTCs have primarily focused on the two-dimensional planar-type,whose thermal sensitive area has to be perpendicular to the test environment,and therefore affects the thermal fluids pattern or loses accuracy.In order to address this problem,recent studies have developed three-dimensional probe-type TFTCs,which can be set parallel to the test environment.Nevertheless,the probe-type TFTCs are limited by their measurement threshold and poor stability at high temperatures.To address these issues,in this study,we propose a novel probe-type TFTC with a sandwich structure.The sensitive layer is compounded with indium oxide doped zinc oxide and fabricated using screen-printing technology.With the protection of sandwich structure on electrode film,the sensor demonstrates robust high-temperature stability,enabling continuous working at 1200℃ above 5 h with a low drift rate of 2.3℃·h^(−1).This sensor exhibits a high repeatability of 99.3% when measuring a wide range of temperatures,which is beyond the most existing probe-type TFTCs reported in the literature.With its excellent high-temperature performance,this temperature sensor holds immense potentials for enhancing equipment safety in the aerospace engineering and ensuring product quality in the steel metallurgy industry.
基金supported in part by the National Natural Science Foundation of China(Grant No.62104056)the Zhejiang Provincial Natural Science Foundation of China(Grant No.LQ21F010010)+4 种基金the National Natural Science Foundation of China(Grant Nos.62141409 and 62204204)the National Key R&D Program of China(Grant No.2022ZD0208602)the Zhejiang Provincial Key Research&Development Fund(Grant Nos.2019C04003 and 2021C01041)the Shanghai Sailing Program(Grant No.21YF1451000)the Key Research and Development Program of Shaanxi(Grant No.2022GY-001).
文摘Flexible pressure sensors have many potential applications in the monitoring of physiological signals because of their good biocompatibil-ity and wearability.However,their relatively low sensitivity,linearity,and stability have hindered their large-scale commercial application.Herein,aflexible capacitive pressure sensor based on an interdigital electrode structure with two porous microneedle arrays(MNAs)is pro-posed.The porous substrate that constitutes the MNA is a mixed product of polydimethylsiloxane and NaHCO3.Due to its porous and interdigital structure,the maximum sensitivity(0.07 kPa-1)of a porous MNA-based pressure sensor was found to be seven times higher than that of an imporous MNA pressure sensor,and it was much greater than that of aflat pressure sensor without a porous MNA structure.Finite-element analysis showed that the interdigital MNA structure can greatly increase the strain and improve the sensitivity of the sen-sor.In addition,the porous MNA-based pressure sensor was found to have good stability over 1500 loading cycles as a result of its bilayer parylene-enhanced conductive electrode structure.Most importantly,it was found that the sensor could accurately monitor the motion of afinger,wrist joint,arm,face,abdomen,eye,and Adam’s apple.Furthermore,preliminary semantic recognition was achieved by monitoring the movement of the Adam’s apple.Finally,multiple pressure sensors were integrated into a 33 array to detect a spatial pressure distribu-×tion.Compared to the sensors reported in previous works,the interdigital electrode structure presented in this work improves sensitivity and stability by modifying the electrode layer rather than the dielectric layer.
基金supported by the National Natural Science Foundation of China(Grant No.82270819)the Project of Integra-tive Chinese and Western Medicine(Grant No.ZXXT-202206)+1 种基金the National Key Research and Development Program of China(Grant No.2023YFC3606001)the Basic Science Research Project of Renji Hospital(Grant No.RJTI22-MS-015).
文摘Flexible pressure sensors are lightweight and highly sensitive,making them suitable for use in small portable devices to achieve precise measurements of tiny forces.This article introduces a low-cost and easy-fabrication strategy for piezoresistive flexible pressure sensors.By embedding silver nanowires into a polydimethylsiloxane layer with micro-pyramids on its surface,a flexible pressure sensor is created that can detect low pressure (17.3 Pa) with fast response (<20 ms) and high sensitivity (69.6 mA kPa-1).Furthermore,the pressure sensor exhibits a sensitive and stable response to a small amount of water flowing on its surface.On this basis,the flexible pressure sensor is innovatively combined with a micro-rotor to fabricate a novel urinary flow-rate meter (uroflowmeter),and results from a simulated human urination experiment show that the uroflowmeter accurately captured all the essential shape characteristics that were present in the pump-simulated urination curves.Looking ahead,this research provides a new reference for using flexible pressure sensors in urinary flow-rate monitoring.
基金support by the Science Fund of Shandong Laboratory of Advanced Materials and Green Manufacturing at Yantai(AMGM2021A03)the"Special Lubrication and Sealing for Aerospace"Shaanxi Provincial Science and Technology Innovation Team(2024RS-CXTD-63)+1 种基金the Xianyang2023 Key Research and Development Plan(L2023-ZDYF-QYCX-009)the World First Class University and First Class Academic Discipline Construction Funding 2023(0604024GH0201332,0604024SH0201332).
文摘Flexible and wearable pressure sensors hold immense promise for health monitoring,covering disease detection and postoperative rehabilitation.Developing pressure sensors with high sensitivity,wide detection range,and cost-effectiveness is paramount.By leveraging paper for its sustainability,biocompatibility,and inherent porous structure,herein,a solution-processed all-paper resistive pressure sensor is designed with outstanding performance.A ternary composite paste,comprising a compressible 3D carbon skeleton,conductive polymer poly(3,4-ethylene dioxythiophene):poly(styrenesulfonate),and cohesive carbon nanotubes,is blade-coated on paper and naturally dried to form the porous composite electrode with hierachical micro-and nano-structured surface.Combined with screen-printed Cu electrodes in submillimeter finger widths on rough paper,this creates a multiscale hierarchical contact interface between electrodes,significantly enhancing sensitivity(1014 kPa-1)and expanding the detection range(up to 300 kPa)of as-resulted all-paper pressure sensor with low detection limit and power consumption.Its versatility ranges from subtle wrist pulses,robust finger taps,to large-area spatial force detection,highlighting its intricate submillimetermicrometer-nanometer hierarchical interface and nanometer porosity in the composite electrode.Ultimately,this all-paper resistive pressure sensor,with its superior sensing capabilities,large-scale fabrication potential,and cost-effectiveness,paves the way for next-generation wearable electronics,ushering in an era of advanced,sustainable technological solutions.
文摘Submicron scale temperature sensors are crucial for a range of applications,particularly in micro and na-noscale environments.One promising solution involves the use of active whispering gallery mode(WGM)microresonators.These resonators can be remotely excited and read out using free-space structures,simplifying the process of sensing.In this study,we present a submicron-scale temperature sensor with a remarkable sensitivity up to 185 pm/℃based on a trian-gular MAPbI3 nanoplatelet(NPL)laser.Notably,as temperature changes,the peak wavelength of the laser line shifts lin-early.This unique characteristic allows for precise temperature sensing by tracking the peak wavelength of the NPL laser.The optical modes are confined within the perovskite NPL,which measures just 85 nm in height,due to total internal reflec-tion.Our NPL laser boasts several key features,including a high Q of~2610 and a low laser threshold of about 19.8μJ·cm^(−2).The combination of exceptional sensitivity and ultra-small size makes our WGM device an ideal candidate for integration into systems that demand compact temperature sensors.This advancement paves the way for significant prog-ress in the development of ultrasmall temperature sensors,opening new possibilities across various fields.
基金supported by the Project of Jinan City(202228044)National Natural Science Foundation of China(32071720,32271814)+1 种基金the China Postdoctoral Science Foundation(2021M702456)China Scholarship Council for supporting their PhD program。
文摘Multifunctional architecture with intriguing structural design is highly desired for realizing the promising performances in wearable sensors and flexible energy storage devices.Cellulose nanofiber(CNF)is employed for assisting in building conductive,hyperelastic,and ultralight Ti_(3)C_(2)T_(x)MXene hybrid aerogels with oriented tracheid-like texture.The biomimetic hybrid aerogels are constructed by a facile bidirectional freezing strategy with CNF,carbon nanotube(CNT),and MXene based on synergistic electrostatic interaction and hydrogen bonding.Entangled CNF and CNT“mortars”bonded with MXene“bricks”of the tracheid structure produce good interfacial binding,and superior mechanical strength(up to 80%compressibility and extraordinary fatigue resistance of 1000 cycles at 50%strain).Benefiting from the biomimetic texture,CNF/CNT/MXene aerogel shows ultralow density of 7.48 mg cm^(-3)and excellent electrical conductivity(~2400 S m^(-1)).Used as pressure sensors,such aerogels exhibit appealing sensitivity performance with the linear sensitivity up to 817.3 kPa^(-1),which affords their application in monitoring body surface information and detecting human motion.Furthermore,the aerogels can also act as electrode materials of compressive solid-state supercapacitors that reveal satisfactory electrochemical performance(849.2 mF cm^(-2)at 0.8 mA cm^(-2))and superior long cycle compression performance(88%after 10,000 cycles at a compressive strain of 30%).
基金supported by the National Natural Science Foundation of China(51835005,52273237,51871103)National Key Research and Development Program of China(2020YFB2010401)+1 种基金the Hubei Province Natural Science Foundation for innovative research groups(2020CFA030)Tencent Foundation and the Independent Innovation Research Fund of Huazhong University of Science and Technology(2019kfyXMBZ025).
文摘The flexible pressure sensor has been credited for leading performance including higher sensitivity,faster response/recovery,wider detection range and higher mechanical durability,thus driving the development of novel sensing materials enabled by new processing technologies.Using atomic layer infiltration,Pt nanocrystals with dimensions on the order of a few nanometers can be infiltrated into the compressible lamellar structure of Ti3C2Tx MXene,allowing a modulation of its interlayer spacing,electrical conductivity and piezoresistive property.The flexible piezoresistive sensor is further developed from the Pt-infiltrated MXene on a paper substrate.It is demonstrated that Pt infiltration leads to a significant enhancement of the pressure-sensing performance of the sensor,including increase of sensitivity from 0.08 kPa^(-1)to 0.5 kPa^(-1),extension of detection limit from 5 kPa to 9 kPa,decrease of response time from 200 ms to 20 ms,and reduction of recovery time from 230 ms to 50 ms.The mechanical durability of the flexible sensor is also improved,with the piezoresistive performance stable over 1000 cycles of flexure fatigue.The atomic layer infiltration process offers new possibilities for the structure modification of MXene for advanced sensor applications.
基金support from Liao Ning Revitalization Talents Program(XLYC1907144)Dalian Youth Science and Technology Star Project Support Program(No.2017RQ104)+6 种基金National Key Research and Development Program of China(No.2020YFB0311600)National Natural Science Foundation of China(Grant Nos.22125903,51872283,22075279)Liaoning BaiQianWan Talents Program(Grant XLYC1807153)Dalian Innovation Support Plan for High Level Talents(2019RT09)Dalian National Laboratory For Clean Energy(DNL),CAS,DNL Cooperation Fund,CAS(DNL201912,DNL201915,DNL202016,DNL202019)DICP(DICP ZZBS201802,DICP I2020032)The Joint Fund of the Yulin University and the Dalian National Laboratory for Clean Energy(YLU-DNL Fund 2021002,2021009).
文摘With the rapid development of flexible and portable microelectronics,the extreme demand for miniaturized,mechanically flexible,and integrated microsystems are strongly stimulated.Here,biomass-derived carbons(BDCs)are prepared by KOH activation using Qamgur precursor,exhibiting three-dimensional(3D)hierarchical porous structure.Benefiting from unobstructed 3D hierarchical porous structure,BDCs provide an excellent specific capacitance of 433 F g^(-1)and prominent cyclability without capacitance degradation after 50000 cycles at 50 A g^(-1).Furthermore,BDC-based planar micro-supercapacitors(MSCs)without metal collector,prepared by mask-assisted coating,exhibit outstanding areal-specific capacitance of 84 mF cm^(-2)and areal energy density of 10.6μWh cm^(-2),exceeding most of the previous carbon-based MSCs.Impressively,the MSCs disclose extraordinary flexibility with capacitance retention of almost 100%under extreme bending state.More importantly,a flexible planar integrated system composed of the MSC and temperature sensor is assembled to efficiently monitor the temperature variation,providing a feasible route for flexible MSC-based functional micro-devices.
基金supported by the National Natural Science Foundation of China(NSFC,Grant Nos.61874111,62174152 and 62022079)the National Key Research and Development Program of China(Grant No.2020YFB1506400)+1 种基金the Youth Innovation Promotion Association of the Chinese Academy of Sciences(No.2020115)the Strategic Priority Research Program of the Chinese Academy of Sciences(XDA16021200).
文摘Ionic gels can be potentially used in wearable devices owing to their high humidity resistance and non-volatility.However,the applicability of existing ionic gel pressure sensors is limited by their low sensitivity.Therefore,it is very import-ant to develop an ionic gel pressure sensor with high sensitivity and a wide pressure detection range without sacrificing mechan-ical stretchability and self-healing ability.Herein,we report an effective strategy for developing pressure sensors based on ion-ic gel composites consisting of high-molecular-weight polymers,ionic liquids,and Au nanoparticles.The resulting capacitive pressure sensors exhibit high pressure sensitivity,fast response,and excellent self-healing properties.The sensors composed of highly hydrophobic polymers and ionic liquids can be used to track underwater movements,demonstrating broad application prospects in human motion state monitoring and underwater mechanical operations.
基金Supported by the Scientific Research and Technology Development Project of Wuzhou Meteorological Bureau(WUQIKEZ2021009).
文摘Developing a calibration and collection system of platinum resistance temperature sensor using Python language environment can read the information returned by the serial port and automatically generate an"Temperature Sensor Calibration Record Table"excel table with the current date as the file name.It can collect data from 10 platinum resistance temperature sensors at once,achieving automation and improving work efficiency.
基金The Chinese Aeronautics Science Foundation(99I5 10 0 6)Foundation for University Key Teacherby the Ministry of Education
文摘According to the sensing structure of a practical silicon resonant pressure micro sensor whose preliminary sensing unit is a square silicon diaphragm and the final sensing unit is a silicon beam resonator, its operating mechanism is analyzed. The thermal resistor acts as the excited unit, and the piezoresistive unit acts as the detector, for the above micro sensor. By using the amplitude and phase conditions, the self exciting closed loop system is investigated based on the operating mechanism for the abov...
基金Project supported by the National Natural Science Foundation for Distinguished Young Scholars,China(Grant No.51425505)the National Natural Science Foundation of China(Grant No.61471324)+1 种基金the Program for the Outstanding Innovative Teams of Higher Learning Institutions of Shanxi Province,China(Grant No.2013-077)the Graduate Students Outstanding Innovation Project of Shanxi Province,China(Grant No.20143020)
文摘In this paper, a novel antenna is proposed for high-temperature testing, which can make the high-temperature pressure characteristics of a wireless passive ceramic pressure sensor demonstrated at up to a temperature of 600℃. The design parameters of the antenna are similar to those of the sensor, which will increase the coupling strength between the sensor and testing antenna. The antenna is fabricated in thick film integrated technology, and the properties of the alumina ceramic and silver ensure the feasibility of the antenna in high-temperature environments. The sensor, coupled with the ceramic antenna, is investigated using a high-temperature pressure testing platform. The experimental measurement results show that the pressure signal in a harsh environment can be detected by the frequency diversity of the sensor.
基金supported by The National Key Research and Development Program of China(2020YFB2009100)Natural Science Basic Research Program of Shaanxi(Program No.2022JQ-508)National Science and Technology Major Project(Grant No.J2019-V-0006-0100),Open research fund of SKLMS(Grant No.sklms2021009).
文摘Flexible temperature sensors have been extensively investigated due to their prospect of wide application in various flexible electronic products.However,most of the current flexible temperature sensors only work well in a narrow temperature range,with their application at high or low temperatures still being a big challenge.This work proposes a flexible thermocouple temperature sensor based on aerogel blanket substrate,the temperature-sensitive layer of which uses the screen-printing technology to prepare indium oxide and indium tin oxide.It has good temperature sensitivity,with the test sensitivity reaching 226.7μV℃^(−1).Most importantly,it can work in a wide temperature range,from extremely low temperatures down to liquid nitrogen temperature to high temperatures up to 1200℃,which is difficult to be achieved by other existing flexible temperature sensors.This temperature sensor has huge application potential in biomedicine,aerospace and other fields.
文摘The principle of miniature isolated solid-state encapsulation technology of high-temperature pressure sensor and the structure of packaging are discussed, including static electricity bonding, stainless steel diaphragm selection and rippled design, laser welding, silicon oil infilling, isolation and other techniques used in sensor packaging, which can affect the performance of the sensor. By adopting stainless steel diaphragm and high-temperature silicon oil as isolation materials, not only the encapsulation of the sensor is as small as 15 mm in diameter and under 1 mA drive, its full range output is 72 mV and zero stability is 0.48% F.S/mon, but also the reliability of the sensor is improved and its application is widely broadened.
文摘A novel temperature sensor is developed and presented especially for the purpose of on-line thermal monitoring of VLSI chips.This sensor requires very small silicon area and low power consumption,and the simulation results show that its accuracy is in the order of 0.8℃.The proposed sensor can be easily implemented using regular CMOS process technologies,and can be easily integrated to any VLSI circuits to increase their reliability.
文摘This study presents a silicon-based pressure sensor with temperature compensation. The eight piezoresistors were designed on the polycrystalline silicon membrane and constructed by two concentric Wheatstone-bridge circuits to perform two sets of sensors. The sensor in the central circuit measures the membrane deflection caused by the combined effects of pressure and temperature, while the outer one measures only the deflection caused by the working temperature. From this arrangement, it is reliable and accurate to measure the pressure by comparing the output signals from the two concentric Wheatstone-bridge circuits. The optimal positions of the eight piezoresistors were simulated by simulation software ANSYS. The investigated pressure sensor was fabricated by the micro electro-mechanical systems (MEMS) techniques. The measuring performance and an indication of the conventional single Wheatstone-bridge pressure sensor is easily affected under variation of different working temperature and causes a maximum absolute error up to 45.5%, while the double Wheatstone-bridge pressure sensor is able to compensate the error, and reduces it down to 1.13%. The results in this paper demonstrate an effective temperature compensation performance, and have a great performance and stability in the pressure measuring system as well.
文摘A silicon temperature sensor with a conventional resistor structure is fabricated on thin-film silicon-on-insulator (SOI) substrate.The sensor has very promising characteristics.The maximum operating temperature can reach 550℃ even at a low current of 0.1mA.Experimental results support that the minority-carrier exclusion effect can be strong in the conventional resistor structure when the silicon film is sufficiently thin,thus significantly raising the maximum operating temperature.Moreover,since the structure of the device on thin-film SOI wafer is not crucial in controlling the maximum operating temperature,device layout can be varied according to the requirements of applications.
基金The National Natural Science Foundation of China(No.60977038)the Specialized Research Fund for the Doctoral Program of Higher Education(No.20110092110016)+1 种基金the National Basic Research Program of China(973Program)(No.2011CB302004)the Foundation of Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology of Ministry of Education of China(No.201204)
文摘Based on attenuated total reflection (ATR) and thermo-optic effect, the polymeric thin film planar optical waveguide is used as the temperature sensor, and the factors influencing the sensitivity of the temperature sensor are comprehensively analyzed. Combined with theoretical analysis and experimental investigation, the sensitivity of the temperature sensor is related to the thicknesses of the upper cladding layer, the waveguide layer, the optical loss of the polymer material and the guided wave modes. The results show that the slope value about reflectivity and temperature, which stands for the sensitivity of the polymer thin film temperature sensor, is associated with the waveguide film thickness and the guided wave modes, and the slope value is the highest in the zero reflectance of a certain transverse electric (TE) mode. To improve the sensitivity of the temperature sensor, the sensor's working incident light exterior angle α should be chosen under a certain TE mode with the reflectivity to be zero. This temperature sensor is characterized by high sensitivity and simple structure and it is easily fabricated.
文摘Piezoresistive pressure sensors based on silicon have a large thermal drift because of their high sensitivity to temperature. The study of the effect of the temperature and doping level on characteristics of these sensors is essential to define the parameters that cause the output characteristics drift. In this study, we adopted the model of Kanda to determine the effect of the temperature and of doping level on the piezoresistivity of the Silicon monocrystal. This is to represent P(N,T) and for p-type silicon as functions of impurity concentration for different temperatures. This allows us to see the effect of temperature and doping concentration on the output characteristics of the sensor. Finally, we study the geometric influence parameters and doping on these characteristics to optimize the sensor performance. This study allows us to predict the sensor behavior against temperature and to minimize this effect by optimizing the doping concentration.