针对扫描电子显微镜(Scanning Electron Microscopy,SEM)高分辨率和全天候工作的严格要求,提出并研制了具备高稳定度以及绝缘性能优良的200 kV高稳定性高压直流电源。实验表明该系统能达到3.42‰的开关纹波和2.45‰的工频纹波,每小时的...针对扫描电子显微镜(Scanning Electron Microscopy,SEM)高分辨率和全天候工作的严格要求,提出并研制了具备高稳定度以及绝缘性能优良的200 kV高稳定性高压直流电源。实验表明该系统能达到3.42‰的开关纹波和2.45‰的工频纹波,每小时的长期稳定性达到0.093‰~0.158‰,能够满足SEM对纹波和稳定性的要求。展开更多
Inertial piezoelectric actuators are widely applied in precision devices with simple structure and accurate movement.However,existing inertial piezoelectric actuators still face the challenges of rollback motion and b...Inertial piezoelectric actuators are widely applied in precision devices with simple structure and accurate movement.However,existing inertial piezoelectric actuators still face the challenges of rollback motion and bulky power supply.In this work,an alternate excitation strategy and a customized small power supply for a bimorph rotary piezoelectric actuator(BRPA)are proposed to solve the problems.The BRPA prototype is designed with a bipedal symmetrical structure,measuring 35 mm in height and 32 mm in diameter,which has a maximum rotation velocity of 0.247 rad/s and a resolution of 0.66μrad.Thanks to the bipedal symmetrical structure,the friction directions between the driving feet and the rotor can be coordinated to suppress the rollback.The rollback ratio is almost zero when the phase difference of the exciting signal is set as 180°.The customized power supply is designed and manufactured,whose size is 58 mm×56 mm×46 mm.It can output signals for the single step mode and the continuous mode,and they are adopted to excite BRPA to achieve a small stroke with one single step and a large stroke with continuous step,respectively.Then,an experimental system for optical fiber alignment is developed based on the BRPA and the customized small power supply,the experiment has verified the practicability of this work in the precision fields,especially in the miniaturized precision systems.展开更多
文摘针对扫描电子显微镜(Scanning Electron Microscopy,SEM)高分辨率和全天候工作的严格要求,提出并研制了具备高稳定度以及绝缘性能优良的200 kV高稳定性高压直流电源。实验表明该系统能达到3.42‰的开关纹波和2.45‰的工频纹波,每小时的长期稳定性达到0.093‰~0.158‰,能够满足SEM对纹波和稳定性的要求。
基金supported by the National Natural Science Foundation of China(Grant Nos.52105015 and 52225501)the China Postdoctoral Science Foundation(Grant No.2021M690830)the Postdoctoral Science Foundation of Heilongjiang Province,China(Grant No.LBH-Z21018)。
文摘Inertial piezoelectric actuators are widely applied in precision devices with simple structure and accurate movement.However,existing inertial piezoelectric actuators still face the challenges of rollback motion and bulky power supply.In this work,an alternate excitation strategy and a customized small power supply for a bimorph rotary piezoelectric actuator(BRPA)are proposed to solve the problems.The BRPA prototype is designed with a bipedal symmetrical structure,measuring 35 mm in height and 32 mm in diameter,which has a maximum rotation velocity of 0.247 rad/s and a resolution of 0.66μrad.Thanks to the bipedal symmetrical structure,the friction directions between the driving feet and the rotor can be coordinated to suppress the rollback.The rollback ratio is almost zero when the phase difference of the exciting signal is set as 180°.The customized power supply is designed and manufactured,whose size is 58 mm×56 mm×46 mm.It can output signals for the single step mode and the continuous mode,and they are adopted to excite BRPA to achieve a small stroke with one single step and a large stroke with continuous step,respectively.Then,an experimental system for optical fiber alignment is developed based on the BRPA and the customized small power supply,the experiment has verified the practicability of this work in the precision fields,especially in the miniaturized precision systems.
