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Emerging Flexible Thermally Conductive Films:Mechanism,Fabrication,Application 被引量:7
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作者 Chang‑Ping Feng Fang Wei +7 位作者 Kai‑Yin Sun Yan Wang Hong‑Bo Lan Hong‑Jing Shang Fa‑Zhu Ding Lu Bai Jie Yang Wei Yang 《Nano-Micro Letters》 SCIE EI CAS CSCD 2022年第8期24-57,共34页
Effective thermal management is quite urgent for electronics owing to their ever-growing integration degree,operation frequency and power density,and the main strategy of thermal management is to remove excess energy ... Effective thermal management is quite urgent for electronics owing to their ever-growing integration degree,operation frequency and power density,and the main strategy of thermal management is to remove excess energy from electronics to outside by thermal conductive materials.Compared to the conventional thermal management materials,flexible thermally conductive films with high in-plane thermal conductivity,as emerging candidates,have aroused greater interest in the last decade,which show great potential in thermal management applications of next-generation devices.However,a comprehensive review of flexible thermally conductive films is rarely reported.Thus,we review recent advances of both intrinsic polymer films and polymer-based composite films with ultrahigh in-plane thermal conductivity,with deep understandings of heat transfer mechanism,processing methods to enhance thermal conductivity,optimization strategies to reduce interface thermal resistance and their potential applications.Lastly,challenges and opportunities for the future development of flexible thermally conductive films are also discussed. 展开更多
关键词 thermal conductivity Flexible thermally conductive films Heat transfer mechanism Interface thermal resistance thermal management applications
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XANES analysis of tribo-chemical and thermal films generating from some organic polysulfides 被引量:2
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作者 YI Hongling ZENG Xiangqiong +3 位作者 CAO Yan RENTianhui M. Kasrai G. M. Bancroft 《Chinese Science Bulletin》 SCIE EI CAS 2006年第22期2710-2716,共7页
X 光检查吸收近的边结构(XANES ) 光谱学第一被用来描绘从烷基,本甲基和包含酰的器官的 polysulfides 产生的 triboehemical 和热电影的化学性质。从这些 polysulfides 产生的热电影主要由 FeSO4l 和烷基化二硫组成,这被发现了也存在... X 光检查吸收近的边结构(XANES ) 光谱学第一被用来描绘从烷基,本甲基和包含酰的器官的 polysulfides 产生的 triboehemical 和热电影的化学性质。从这些 polysulfides 产生的热电影主要由 FeSO4l 和烷基化二硫组成,这被发现了也存在在表面下并且从包含酰的 polysulfides 产生的热电影的体积。Undertriboehemical 条件,电影的作文依赖于添加剂的分子结构。也就是,从烷基 polysulfide 产生的 triboehemical 电影由烷基化二硫组成在外面表面, FeSO_4 的混合物, FeS_2 和亚在表面下,并且 FeSO_4in 体积;为本甲基 polysulfide 的 triboehemical 电影的作文由 FeSO4 组成在外面,出现作文在表面下并且体积与烷基 polysulfide.For 一样是包含酰的 polysulfides, triboehemical 电影由烷基化二硫组成在外面表面,和 FeS_2 在表面下并且体积。 展开更多
关键词 有机聚硫化物 XANES 薄膜学 X射线吸收
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Pyrolysis Characteristics and Thermal Kinetics of Degradable Films 被引量:3
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作者 WANG Xing LU Jia-Long ZHANG Yi-Ping 《Pedosphere》 SCIE CAS CSCD 2007年第5期654-659,共6页
开发可能减解的电影是为解决电影污染的问题的一个重要工具;在最近的年里,然而,仅仅与可能减解的塑料薄膜的热分析有关有很少研究。这研究详细说明了作文和热分解一个种有点用示差热分析(DTA ) 技术的三种可能减解的塑料薄膜。结果... 开发可能减解的电影是为解决电影污染的问题的一个重要工具;在最近的年里,然而,仅仅与可能减解的塑料薄膜的热分析有关有很少研究。这研究详细说明了作文和热分解一个种有点用示差热分析(DTA ) 技术的三种可能减解的塑料薄膜。结果证明可能减解的电影和平常的电影有类似的 DTA 曲线,它反映了他们的类似的作文;然而,小差别被测量,它由于可能减解的电影的增加的成分。每部电影的热分解反应订单是大约 0.93。热分解激活精力和 pre 指数的因素跟随了平常的电影 】 相片的顺序可能减解的电影 】 相片可能减解的碳酸钙电影 】 可被细菌破坏的电影。这研究的结果为利用塑料薄膜引起的土壤污染为新理论打了基础。 展开更多
关键词 可降解薄膜 示差热分析 高温分解 热动力学
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Conductive Polyaniline/Cellulose/Graphite Composite Films with High Thermal Stability and Antibacterial Activity 被引量:7
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作者 JingHuan Chen JinGang Liu +3 位作者 WenTao Zhang Kun Wang XueRen Qian RunCang Sun 《Paper And Biomaterials》 2017年第1期40-51,共12页
Functional composite films were successfully prepared from cellulose, graphite(GP), and polyaniline(PANI) using a combination of physical and chemical processes. Cellulosewasdissolved in N-methylmorpholine-N-oxide mon... Functional composite films were successfully prepared from cellulose, graphite(GP), and polyaniline(PANI) using a combination of physical and chemical processes. Cellulosewasdissolved in N-methylmorpholine-N-oxide monohydrate(NMMO) and regenerated in water to form the matrix. GP was dispersed in the NMMO solvent prior to the dissolution of the cellulose, and PANI was deposited on the surfaces of the cellulose/GP films by in situ chemical polymerization. The structures of the PANI/cellusose/GP composite films were investigated using X-ray diffraction analysis, Fourier transform infrared spectroscopy, scanning electron microscopy(SEM), and SEM/energy-dispersive X-ray spectroscopy. The mechanical strengths, thermal stabilities, conductivities, and antibacterial activities of the films were studied in detail. The results showed that GP formed a multilayered structure in the cellulose matrix and that the PANI nanoparticles were tightly wrapped on the film surface. The film thickness increased from 40 mm to 100 mm after the addition of GP and PANI. The tensile strength of the composite films was 80~107 MPa, with the elongation at break being 3%~10%. The final residual weight of the composite films was as high as 65%, and the conductivity of the composite films reached 14.36 S/m. The cellulose matrix ensured that the films were flexible and exhibited desirable mechanical properties, while the GP filler significantly improved the thermal stability of the films. The PANI coating acted as a protective layer during burning and provided good electrical conductivity and antibacterial activity against Escherichia coli; both of these characteristics were slightly enhanced by the incorporation of GP. These PANI/cellulose/GP composite films should be suitable for use in electronics, antistatic packing, and numerous other applications. 展开更多
关键词 CELLULOSE GRAPHITE POLYANILINE conductive film thermal stability antibacterial activity
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Enhancing the thermal conductivity of polymer-assisted deposited Al_2O_3 film by nitrogen doping 被引量:2
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作者 黄江 张胤 +3 位作者 潘泰松 曾波 胡国华 林媛 《Chinese Physics B》 SCIE EI CAS CSCD 2012年第12期372-376,共5页
Polymer-assisted deposition technique has been used to deposit Al2O3 and N-doped Al2O3 (AION) thin films on Si(100) substrates. The chemical compositions, crystallinity, and thermal conductivity of the as-grown fi... Polymer-assisted deposition technique has been used to deposit Al2O3 and N-doped Al2O3 (AION) thin films on Si(100) substrates. The chemical compositions, crystallinity, and thermal conductivity of the as-grown films have been characterized by X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), and 3-omega method, respectively. Amorphous and polycrystalline Al2O3 and AlON thin films have been formed at 700 ℃ and 1000 ℃. The thermal conductivity results indicated that the effect of nitrogen doping on the thermal conductivity is determined by the competition of the increase of Al-N bonding and the suppression of crystallinity. A 67% enhancement in thermal conductivity has been achieved for the samples grown at 700 ℃, demonstrating that the nitrogen doping is an effective way to improve the thermal performance of polymer-assisted-deposited Al2O3 thin films at a relatively low growth temperature. 展开更多
关键词 nitrogen-doped Al2O3 thin film thermal conductivity polymer-assisted deposition
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Effect of Mg-Film Thickness on the Formation of Semiconductor Mg_2Si Films Prepared by Resistive Thermal Evaporation Method 被引量:3
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作者 余宏 谢泉 CHEN Qian 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2014年第3期612-616,共5页
Mg films of various thicknesses were deposited on Si(111) substrates at room temperature by resistive thermal evaporation method, and then the Mg/Si samples were annealed at 40 ℃ for 4 h. The effects of Mg film thi... Mg films of various thicknesses were deposited on Si(111) substrates at room temperature by resistive thermal evaporation method, and then the Mg/Si samples were annealed at 40 ℃ for 4 h. The effects of Mg film thickness on the formation and structure of Mg2Si films were investigated. The results showed that the crystallization quality of Mg2Si films was strongly influenced by the thickness of Mg film. The XRD peak intensity of Mg2Si (220) gradually increased initially and then decreased with increasing Mg film thickness. The XRD peak intensity of Mg2Si (220) reached its maximum when the Mg film of 380 um was used. The thickness of the Mg2Si film annealed at 400℃ for 4 h was approximately 3 times of the Mg film. 展开更多
关键词 Mg film thickness Mg2Si films Mg2Si films thickness thermal evaporation ANNEALING
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Thermal Expansion Coefficients of Thin Crystal Films 被引量:6
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作者 HUANG Jian-Ping WU Xue-Zhong LI Sheng-Yi 《Communications in Theoretical Physics》 SCIE CAS CSCD 2005年第5X期921-924,共4页
The formulas for atomic displacements and Hamiltonian of a thin crystal film in phonon occupation number representation are obtained with the aid of Green's function theory. On the basis of these results, the form... The formulas for atomic displacements and Hamiltonian of a thin crystal film in phonon occupation number representation are obtained with the aid of Green's function theory. On the basis of these results, the formulas for thermal expansion coefficients of the thin crystal film are derived with the perturbation theory, and the numerical calculations are carried out. The results show that the thinner films have larger thermal expansion coefficients. 展开更多
关键词 热扩展系数 薄膜晶体 GREEN函数 混乱理论
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B4C/NRL flexible films for thermal neutron shielding 被引量:1
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作者 Yi-Chuan Liao Dui-Gong Xu Peng-Cheng Zhang 《Nuclear Science and Techniques》 SCIE CAS CSCD 2018年第2期17-25,共9页
Boron carbide/natural rubber latex(B_4 C/NRL)flexible films were prepared via dip-molding with B_4 C content in the range of 5–55 wt% for thermal neutron(0.0253 e V) shielding. B_4 C was well dispersed in NRL accordi... Boron carbide/natural rubber latex(B_4 C/NRL)flexible films were prepared via dip-molding with B_4 C content in the range of 5–55 wt% for thermal neutron(0.0253 e V) shielding. B_4 C was well dispersed in NRL according to microscopic observation. Both the inside and outside surfaces of the film were smooth. For B_4 C/NRL flexible films, the minimum elongation at break was greater than 600%, the minimum tensile strength was greater than 12 MPa, and the hardness was in the range of 35–55 HA,which were suitable for preparing flexible wearable products. The attenuation efficiencies of the B_4 C/NRL flexible films for thermal neutrons were also calculated. The B_4 C/NRL flexible films exhibit good attenuation effect for thermal neutrons. 展开更多
关键词 B4C Natural rubber LATEX thermal NEUTRON SHIELD Flexible film
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Effects of deposition parameters on microstructure and thermal conductivity of diamond films deposited by DC arc plasma jet chemical vapor deposition 被引量:2
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作者 瞿全炎 邱万奇 +3 位作者 曾德长 刘仲武 代明江 周克崧 《中国有色金属学会会刊:英文版》 EI CSCD 2009年第1期131-137,共7页
The uniform diamond films with 60 mm in diameter were deposited by improved DC arc plasma jet chemical vapor deposition technique. The structure of the film was characterized by scanning electronic microcopy(SEM) and ... The uniform diamond films with 60 mm in diameter were deposited by improved DC arc plasma jet chemical vapor deposition technique. The structure of the film was characterized by scanning electronic microcopy(SEM) and laser Raman spectrometry. The thermal conductivity was measured by a photo thermal deflection technique. The effects of main deposition parameters on microstructure and thermal conductivity of the films were investigated. The results show that high thermal conductivity, 10.0 W/(K·cm), can be obtained at a CH4 concentration of 1.5% (volume fraction) and the substrate temperatures of 880-920 ℃ due to the high density and high purity of the film. A low pressure difference between nozzle and vacuum chamber is also beneficial to the high thermal conductivity. 展开更多
关键词 金刚石膜 性能 等离子喷射 稳定性
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Effects of rapid thermal annealing on the room-temperature NO_2-sensing properties of WO_3 thin films under LED radiation 被引量:1
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作者 胡明 贾丁立 +2 位作者 刘青林 李明达 孙鹏 《Chinese Physics B》 SCIE EI CAS CSCD 2013年第6期615-620,共6页
WO3 thin films were sputtered onto alumina substrates by DC facing-target magnetron sputtering. One sample was rapid-thermal-annealed (RTA) at 600 ℃ in a gas mixture of N2:O2 = 4 : 1, and as a comparison, another... WO3 thin films were sputtered onto alumina substrates by DC facing-target magnetron sputtering. One sample was rapid-thermal-annealed (RTA) at 600 ℃ in a gas mixture of N2:O2 = 4 : 1, and as a comparison, another was conventionally thermal-annealed at 600 ℃ in air. The morphology of both was investigated by scanning electron microscopy (SEM) and atomic force microscopy (AFM), and the crystallization structure and phase identification were characterized by X-ray diffraction (XRD). The NO2-sensing measurements were taken under LED light at room temperature. The sensitivity of the RTA-treated sample was found to be high, up to nearly 100, whereas the sensitivity of the conventionally thermal-annealed sample was about five under the same conditions. From the much better selectivity and response-recovery characteristics, it can be concluded that compared to conventional thermal annealing, RTA has a greater effect on the NO2-sensing properties of WO3 thin films. 展开更多
关键词 gas sensor tungsten-oxide thin film rapid thermal annealing LED
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Influence of nitrogen doping on thermal stability of fluorinated amorphous carbon thin films 被引量:1
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作者 刘雄飞 周昕 高金定 《中国有色金属学会会刊:英文版》 EI CSCD 2006年第1期54-58,共5页
Nitrogen doping fluorinated amorphous carbon (a-C∶F) films were deposited using radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) and annealed in Ar environment in order to investigate their therma... Nitrogen doping fluorinated amorphous carbon (a-C∶F) films were deposited using radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) and annealed in Ar environment in order to investigate their thermal stability. Surface morphology and the thickness of the films before and after annealing were characterized by AFM and ellipsometer. Raman spectra and FTIR were used to analyze the chemical structure of the films. The results show that the surface of the films becomes more homogeneous either by the addition of N2 or after annealing. Deposition rate of the films increases a little at first and then decreases sharply with the increase of N2 source gas flux. It is also found that the fraction of aromatic rings structure increases and the thermal stability of the films is strengthened with the increase of N2 flux. Nitrogen doping is a feasible approach to improve the thermal stability of a-C∶F films. 展开更多
关键词 氟化碳 非晶薄膜 掺杂 热稳定性 RF-PECVD
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Deposition and electrical properties of cadmium telluride thin films by thermal vacuum evaporation technique 被引量:1
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作者 Nazar Abbas Shah Manzar Abbas Muhammad Bashir Waqar Ahmad Adil Syed Muhammad Ashraf Atta 《材料科学与工程(中英文版)》 2009年第10期11-17,34,共8页
关键词 薄膜技术 真空蒸镀 电学性能 碲化镉 沉积法 原子力显微镜 真空退火 样本结构
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P-Type Nitrogen-Doped ZnO Films Prepared by In-Situ Thermal Oxidation of Zn_3N_2 Films
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作者 靳玉平 张斌 +1 位作者 王建中 施立群 《Chinese Physics Letters》 SCIE CAS CSCD 2016年第5期119-122,共4页
P-type nitrogen-doped ZnO films are prepared successfully by in-situ thermal oxidation of Zn3N2 films. The prepared films are characterized by x-ray diffraction, non-Rutherford back.scattering (non-RBS) spectroscopy... P-type nitrogen-doped ZnO films are prepared successfully by in-situ thermal oxidation of Zn3N2 films. The prepared films are characterized by x-ray diffraction, non-Rutherford back.scattering (non-RBS) spectroscopy, x- ray photoelectron spectroscopy, and photoluminescence spectrum. The results show that the Zn3N1 films start to transform to ZnO at 400℃ and the total nitrogen content decreases with the increasing annealing temperature. The p-type fihns are achieved at 500℃ with a low resistivity of 6.33Ω.cm and a high hole concentration of +8.82 × 10^17 cm-3, as well as a low level of carbon contamination, indicating that the substitutional nitrogen (No) is an effective acceptor in the ZnO:N film. The photoluminescence spectra show clear UV emissions and also indicate the presence of oxygen vacancy (Vo) defects in the ZnO:N films. The p-type doping mechanism is briefly discussed. 展开更多
关键词 ZnO in or as In P-Type Nitrogen-Doped ZnO films Prepared by In-Situ thermal Oxidation of Zn3N2 films of by
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Thickness Dependence of Structural and Optical Properties of Chromium Thin Films as an Infrared Reflector for Solar-thermal Conversion Applications 被引量:1
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作者 李擎煜 GONG Dianqing 程旭东 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2019年第6期1239-1247,共9页
The thermal emittance of Cr film, as an IR reflector, was investigated for the use in SSAC. The Cr thin films with different thicknesses were deposited on silicon wafers, optical quartz and stainless steel substrates ... The thermal emittance of Cr film, as an IR reflector, was investigated for the use in SSAC. The Cr thin films with different thicknesses were deposited on silicon wafers, optical quartz and stainless steel substrates by cathodic arc ion plating technology as a metallic IR reflector layer in SSAC. The thickness of Cr thin films was optimized to achieve the minimum thermal emittance. The effects of structural, microstructural, optical, surface and cross-sectional morphological properties of Cr thin films were investigated on the emittance. An optimal thickness about 450 nm of the Cr thin film for the lowest total thermal emittance of 0.05 was obtained. The experimental results suggested that the Cr metallic thin film with optimal thickness could be used as an effective infrared reflector for the development of SSAC structure. 展开更多
关键词 thermal emittance chromium thin film solar selective absorbing coating cathodic arc ion plating
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Thermal Characteristics of PVA-PANI-ZnS Nanocomposite Film Synthesized by Gamma Irradiation Method
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作者 Afarin Bahrami Kasra Behzad +1 位作者 Nastaran Faraji Alireza Kharazmi 《Chinese Physics Letters》 SCIE CAS CSCD 2018年第11期83-85,共3页
Gamma irradiation is employed for in situ preparation of PVA-PANI-ZnS nanocomposite. The irradiation dose is varied from 10 to 40 kGy at 10 kGy intervals. The XRD result confirms the formation of crystalline phases co... Gamma irradiation is employed for in situ preparation of PVA-PANI-ZnS nanocomposite. The irradiation dose is varied from 10 to 40 kGy at 10 kGy intervals. The XRD result confirms the formation of crystalline phases corresponding to ZnS nanoparticles, PVA and PANI. Field emission scanning electron microscopy shows the formation of agglomerated PANI along the PVA backbone, within which the ZnS nanoparticles are dispersed.UV-visible spectroscopy is conducted to measure the transmittance spectra of samples revealing the electronic absorption characteristics of ZnS and PANI nanoparticles. Photo-acoustic(PA) setup is installed to investigate the thermal properties of samples. The PA spectroscopy indicates a high value of thermal diffusivity for samples due to the presence of ZnS and PANI nanoparticles. Moreover, at higher doses, the more polymerization and formation of PANI and ZnS nanoparticles result in enhancement of thermal diffusivity. 展开更多
关键词 ZNS XRD thermal Characteristics of PVA-PANI-ZnS Nanocomposite film Synthesized by Gamma Irradiation Method PVA
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Morphology and Structure of SiO_2 Film Using Thermal Oxidation Process on(111)Silicon Crystals in Dry Oxygen Atmosphere
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作者 TaokaT. 《Rare Metals》 SCIE EI CAS CSCD 1989年第1期32-38,共7页
By means of scanning electron microscope(SEM)and high voltage electron microscope(HVEM)we have observed and analysed morphology and micro-structure of silicon oxide film with different thickness formed on(111)silicon ... By means of scanning electron microscope(SEM)and high voltage electron microscope(HVEM)we have observed and analysed morphology and micro-structure of silicon oxide film with different thickness formed on(111)silicon monocrystal under dry oxygen atmosphere at 1100℃.Compared with their oxidation kinetic curves consisted of three stages,we suggested a mechanism on forming silicon oxide film.According to electron and X-ray diffraction analyses the silicon oxide films consisted of silica with different crystal structure.We also have discussed a stacking fault and a dislocation formed in the Si-Sio_2 interface region simulaneously forming silicon oxide film. 展开更多
关键词 Silicon Crystals in Dry Oxygen Atmosphere Morphology and Structure of SiO2 film Using thermal Oxidation Process on SIO
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A Genetic Algorithm for Simultaneous Determination of Thin Films Thermal Transport Properties and Contact Resistance
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作者 Zhengxing HUANG Zhen'an TANG +2 位作者 Ziqiang XU Haitao DING Yuqin GU 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2006年第3期339-341,共3页
一个基因算法(GA ) 被学习同时决定热运输性质和在厚底层上扔的薄电影的接触抵抗。Apulsed 相片热反射(PPR ) 系统为大小被采用。GA 被用来提取热性质。大小在硅底层上在不同厚度的 SiO_2 薄电影上被执行。结果证明伴有 PPR 系统的 GA ... 一个基因算法(GA ) 被学习同时决定热运输性质和在厚底层上扔的薄电影的接触抵抗。Apulsed 相片热反射(PPR ) 系统为大小被采用。GA 被用来提取热性质。大小在硅底层上在不同厚度的 SiO_2 薄电影上被执行。结果证明伴有 PPR 系统的 GA 为底层上的薄电影的热性质的同时的决心是有用的。 展开更多
关键词 薄膜 热传递性质 接触热阻 遗传算法 同时测定
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Coefficient of thermal expansion of stressed thin films
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作者 王正道 蒋少卿 《中国有色金属学会会刊:英文版》 CSCD 2006年第B01期220-225,共6页
A new technique was proposed to determine the coefficient of thermal expansion (CTE) of thin films at low temperature. Different pre-stress could be applied and the elastic modulus of materials at different temperatur... A new technique was proposed to determine the coefficient of thermal expansion (CTE) of thin films at low temperature. Different pre-stress could be applied and the elastic modulus of materials at different temperatures was measured with CTE simultaneously to eliminate the influence of mechanical deformation caused by the pre-stress. By using this technique, the CTEs of polyimide/silica nanocomposite films with different silica doping levels were experimentally studied at temperature from 77 K to 287 K, and some characteristics related to this new technique were discussed. 展开更多
关键词 预应力薄膜 聚酰亚胺薄膜 热膨胀系数 弹性模量
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Approximate solutions for the problem of liquid film flow over an unsteady stretching sheet with thermal radiation and magnetic field
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作者 M.M.KHADER 《Applied Mathematics and Mechanics(English Edition)》 SCIE EI CSCD 2018年第6期867-876,共10页
The proposed method is based on replacement of the unknown function by a truncated series of the shifted Legendre polynomial expansion. An approximate formula of the integer derivative is introduced. Special attention... The proposed method is based on replacement of the unknown function by a truncated series of the shifted Legendre polynomial expansion. An approximate formula of the integer derivative is introduced. Special attention is given to study the convergence analysis and derive an upper bound of the error for the presented approximate formula. The introduced method converts the proposed equation by means of collocation points to a system of algebraic equations with shifted Legendre coefficients. Thus, after solving this system of equations, the shifted Legendre coefficients are obtained. This efficient numerical method is used to solve the system of ordinary differential equations which describe the thin film flow and heat transfer with the effects of the thermal radiation, magnetic field, and slip velocity. 展开更多
关键词 liquid film thermal radiation unsteady stretching sheet Legendrecollocation method convergence analysis
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High quality NbTiN films fabrication and rapid thermal annealing investigation
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作者 葛欢 金贻荣 宋小会 《Chinese Physics B》 SCIE EI CAS CSCD 2019年第7期439-443,共5页
NbTiN thin films are good candidates for applications including single-photon detector, kinetic inductance detector, hot electron bolometer, and superconducting quantum computing circuits because of their favorable ch... NbTiN thin films are good candidates for applications including single-photon detector, kinetic inductance detector, hot electron bolometer, and superconducting quantum computing circuits because of their favorable characteristics,such as good superconducting properties and easy fabrication.In this work, we systematically investigated the growth of high-quality NbTiN films with different thicknesses on Si substrates by reactive DC-magnetron sputtering method.After optimizing the growth conditions, such as the gas pressure, Ar/N2 mixture ratio, and sputtering power, we obtained films with excellent superconducting properties.A high superconducting transition temperature of 15.5 K with narrow transition width of 0.03 K was obtained in a film of 300 nm thickness with surface roughness of less than 0.2 nm.In an ultra-thin film of 5 nm thick, we still obtained a transition temperature of 7.6 K.In addition, rapid thermal annealing(RTA) in atmosphere of nitrogen or nitrogen and hydrogen mixture was studied to improve the film quality.The results showed that Tc and crystal size of the NbTiN films were remarkably increased by RTA.For ultrathin films, the annealing in N2/H2 mixture had better effect than that in pure N2.The Tc of 10 nm films improved from 9.6 K to 10.3 K after RTA in N2/H2 mixture at 450℃. 展开更多
关键词 SUPERCONDUCTING transition temperature surface ROUGHNESS NbTiN film RAPID thermal ANNEALING
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