A micro thermal control device with polyimide based micro louver was proposed.The device structure was designed,the actuation voltage was analyzed theoretically and fabrication process was described.The micro louver p...A micro thermal control device with polyimide based micro louver was proposed.The device structure was designed,the actuation voltage was analyzed theoretically and fabrication process was described.The micro louver prototype was fabricated using UV laser micromachining,electrochemistry etch and magnetron sputtering deposition technologies.The main parameters were tested and results were presented.展开更多
文摘A micro thermal control device with polyimide based micro louver was proposed.The device structure was designed,the actuation voltage was analyzed theoretically and fabrication process was described.The micro louver prototype was fabricated using UV laser micromachining,electrochemistry etch and magnetron sputtering deposition technologies.The main parameters were tested and results were presented.