To improve the thermoelectric converting performance in applications such as power generation,reutilization of heat energy,refrigeration,and ultrasensitive sensors in scramjet engines,a thermoelectric film/substrate s...To improve the thermoelectric converting performance in applications such as power generation,reutilization of heat energy,refrigeration,and ultrasensitive sensors in scramjet engines,a thermoelectric film/substrate system is widely designed and applied,whose interfacial behavior dominates the strength and service life of thermoelectric devices.Herein,a theoretical model of a thermoelectric film bonded to a graded substrate is proposed.The interfacial shear stress,the normal stress in the thermoelectric film,and the stress intensity factors affected by various material and geometric parameters are comprehensively studied.It is found that adjusting the inhomogeneity parameter of the graded substrate,thermal conductivity,and current density of the thermoelectric film can reduce the risk of interfacial failure of the thermoelectric film/graded substrate system.Selecting a stiffer and thicker thermoelectric film is advantageous to the reliability of the thermoelectric film/graded substrate system.The results should be of great guiding significance for the present and upcoming applications of thermoelectric materials in various fields.展开更多
Thermoelectric materials have aroused widespread concern due to their unique ability to directly convert heat to electricity without any moving parts or noxious emissions.Taking advantages of two-dimensional structure...Thermoelectric materials have aroused widespread concern due to their unique ability to directly convert heat to electricity without any moving parts or noxious emissions.Taking advantages of two-dimensional structures of thermoelectric films,the potential applications of thermoelectric materials are diversified,particularly in microdevices.Well-controlled nanostructures in thermoelectric films are effective to optimize the electrical and thermal transport,which can significantly improve the performance of thermoelectric materials.In this paper,various physical and chemical approaches to fabricate thermoelectric films,including inorganic,organic,and inorganic–organic composites,are summarized,where more attentions are paid on the inorganic thermoelectric films for their excellent thermoelectric responses.Additionally,strategies for enhancing the performance of thermoelectric films are also discussed.展开更多
Multidimensional integration and multifunctional com-ponent assembly have been greatly explored in recent years to extend Moore’s Law of modern microelectronics.However,this inevitably exac-erbates the inhomogeneity ...Multidimensional integration and multifunctional com-ponent assembly have been greatly explored in recent years to extend Moore’s Law of modern microelectronics.However,this inevitably exac-erbates the inhomogeneity of temperature distribution in microsystems,making precise temperature control for electronic components extremely challenging.Herein,we report an on-chip micro temperature controller including a pair of thermoelectric legs with a total area of 50×50μm^(2),which are fabricated from dense and flat freestanding Bi2Te3-based ther-moelectric nano films deposited on a newly developed nano graphene oxide membrane substrate.Its tunable equivalent thermal resistance is controlled by electrical currents to achieve energy-efficient temperature control for low-power electronics.A large cooling temperature difference of 44.5 K at 380 K is achieved with a power consumption of only 445μW,resulting in an ultrahigh temperature control capability over 100 K mW^(-1).Moreover,an ultra-fast cooling rate exceeding 2000 K s^(-1) and excellent reliability of up to 1 million cycles are observed.Our proposed on-chip temperature controller is expected to enable further miniaturization and multifunctional integration on a single chip for microelectronics.展开更多
Electronic skins are artificial skin-type multifunctional sensors,which hold great potentials in intelligent robotics,limb prostheses and human health monitoring.However,it is a great challenge to independently and ac...Electronic skins are artificial skin-type multifunctional sensors,which hold great potentials in intelligent robotics,limb prostheses and human health monitoring.However,it is a great challenge to independently and accurately read various physical signals without power supplies.Here,a self-powered flexible temperature-pressure bimodal sensor based on high-performance thermoelectric films and porous microconed conductive elastic materials is presented.Through introducing flexible heat-sink design and harvesting body heat energy,the thin-film thermoelectric device could not only precisely sense temperature signal but also drive the pressure sensor for detecting external tactile stimulus.The integration of Bi-Te based thermoelectric film with high stability in wide temperature range enables the sensor to sense the ambient temperature with high resolution(<0.1 K)as well as excellent sensitivity(3.77 mV K^(-1)).Meanwhile,the porous microconed elastomer responds to pressure variation with low-pressure detection(16 Pa)and a high sensitivity of 37 kPa^(-1).Furthermore,the bimodal sensor could accurately and simultaneously monitor human wrist pulse and body temperature in real time,which demonstrates promising applications in self-powered electronic skins for human health monitoring systems.展开更多
Bi2Se3 thin films were electrochemically deposited on Ti and indium tin oxide-coated glass substrates, respectively, at room temperature, using Bi(NO3)3·5H2O and SeO2 as starting materials in diluted HNO3 solut...Bi2Se3 thin films were electrochemically deposited on Ti and indium tin oxide-coated glass substrates, respectively, at room temperature, using Bi(NO3)3·5H2O and SeO2 as starting materials in diluted HNO3 solution. A conventional three-electrode cell was used with a platinum sheet as a counter electrode, and a saturated calomel electrode was used as a reference electrode. The films were annealed in argon atmosphere. The influence of cold isostatic pressing before annealing on the microstructure and thermoelectric properties of the films was investigated. X-ray diffraction analysis indicates that the film grown on the indium tin oxide-coated glass substrate is pure rhombohedral Bi2Se3, and the film grown on the Ti substrate consists of both rhombohedral and orthorhombic Bi2Se3.展开更多
Bi_2Te_3 thin films and GeTe/B_2Te_3 superlattices of different thicknesses are prepared on the silicon dioxide substrates by magnetron sputtering technique and thermally annealed at 573 K for 30 min. Thermoelectric...Bi_2Te_3 thin films and GeTe/B_2Te_3 superlattices of different thicknesses are prepared on the silicon dioxide substrates by magnetron sputtering technique and thermally annealed at 573 K for 30 min. Thermoelectric(TE)measurements indicate that optimal thickness and thickness ratio improve the TE performance of Bi_2Te_3 thin films and GeTe/B_2Te_3 superlattices, respectively. High TE performances with figure-of-merit(ZT) values as high as 1.32 and 1.56 are achieved at 443 K for 30 nm and 50 nm Bi_2Te_3 thin films, respectively. These ZT values are higher than those of p-type Bi_2Te_3 alloys as reported. Relatively high ZT of the GeTe/B_2Te_3 superlattices at 300-380 K were 0.62-0.76. The achieved high ZT value may be attributed to the unique nano-and microstructures of the films,which increase phonon scattering and reduce thermal conductivity. The results indicate that Bi_2Te_3-based thin films can serve as high-performance materials for applications in TE devices.展开更多
Three Bi2Sr2Co2Oy thin films with different microstructures have been prepared by chemical solution deposition on LaAlO 3(001) through varying the annealing temperature.With the decrease in the annealing temperature...Three Bi2Sr2Co2Oy thin films with different microstructures have been prepared by chemical solution deposition on LaAlO 3(001) through varying the annealing temperature.With the decrease in the annealing temperature,both the size and c-axis alignment degree of grains in the film decrease as well,leading to an increase in the film resistivity.In addition,the decrease in the annealing temperature also results in a slight increase in the Seebeck coefficient due to the enhanced energy filtering effect of the small-grain film.The nanostructured Bi2Sr2Co2Oy film with an average grain size of about 100 nm shows a power factor comparable to that of films with larger grains.Since the thermal conductivity of the nanostructured films can be depressed due to the enhanced phonon scattering by grain boundary,a higher figure of merit is expected in Bi2Sr2Co2Oy thin film with grains in nanometer size.展开更多
GeTe-based materials have attracted significant attention as high-efficiency thermoelectric materials for mid-temperature applications.However,GeTe thin-film materials with thermoelectric performances comparable to th...GeTe-based materials have attracted significant attention as high-efficiency thermoelectric materials for mid-temperature applications.However,GeTe thin-film materials with thermoelectric performances comparable to that of their bulk counterparts have not yet been reported,because of their unsatisfactory electrical and thermal properties caused by their poor crystal quality and high carrier concentration.Herein,a series of Sb-doped GeTe films and devices with remarkable thermoelectric performances are presented.These films are prepared through magnetron sputtering deposition at 553 K and exhibit a unique microstructure that consists of coarse-and fine-sized grains with high crystallization quality.The fine grains enhance the scattering associated with phonon transport and the coarse grains provide electron transport channels,which can suppress the thermal conductivity without obviously sacrificing the electrical conductivity.Moreover,Sb doping can effectively optimize the carrier concentration and increase the carrier effective mass,while introducing point defects and stacking faults to further scatter the phonon transport and decrease the thermal conductivity.Consequently,a peak power factor of 22.37μW cm−1 K−2 is obtained at 703 K and a maximum thermoelectric figure of merit of 1.53 is achieved at 673 K,which are substantially larger than the values reported in the existing literature.A flexible thermoelectric generator is designed and fabricated using Sb-doped GeTe films deposited on polyimide and achieves a maximum output power density of 2.22×103 W m−2 for a temperature difference of 300 K.展开更多
基金Project supported by the National Natural Science Foundation of China(Nos.11972363 and12272401)the Opening Project of State Key Laboratory of Solid Lubrication(Lanzhou Institute of Chemical Physics)(No.LSL-20012001)the Research Fund of State Key Laboratory of Mechanics and Control of Mechanical Structures(Nanjing University of Aeronautics and Astronautics)(No.MCMS-E-0221G01)。
文摘To improve the thermoelectric converting performance in applications such as power generation,reutilization of heat energy,refrigeration,and ultrasensitive sensors in scramjet engines,a thermoelectric film/substrate system is widely designed and applied,whose interfacial behavior dominates the strength and service life of thermoelectric devices.Herein,a theoretical model of a thermoelectric film bonded to a graded substrate is proposed.The interfacial shear stress,the normal stress in the thermoelectric film,and the stress intensity factors affected by various material and geometric parameters are comprehensively studied.It is found that adjusting the inhomogeneity parameter of the graded substrate,thermal conductivity,and current density of the thermoelectric film can reduce the risk of interfacial failure of the thermoelectric film/graded substrate system.Selecting a stiffer and thicker thermoelectric film is advantageous to the reliability of the thermoelectric film/graded substrate system.The results should be of great guiding significance for the present and upcoming applications of thermoelectric materials in various fields.
基金Project supported by the Joint Funds of the National Natural Science Foundation of China(Grant No.U1601213)the National Natural Science Foundation of China(Grant Nos.51601005 and 61704006)+1 种基金the Beijing Natural Science Foundation(Grant No.2182032)the Fundamental Research Funds for the Central Universities
文摘Thermoelectric materials have aroused widespread concern due to their unique ability to directly convert heat to electricity without any moving parts or noxious emissions.Taking advantages of two-dimensional structures of thermoelectric films,the potential applications of thermoelectric materials are diversified,particularly in microdevices.Well-controlled nanostructures in thermoelectric films are effective to optimize the electrical and thermal transport,which can significantly improve the performance of thermoelectric materials.In this paper,various physical and chemical approaches to fabricate thermoelectric films,including inorganic,organic,and inorganic–organic composites,are summarized,where more attentions are paid on the inorganic thermoelectric films for their excellent thermoelectric responses.Additionally,strategies for enhancing the performance of thermoelectric films are also discussed.
基金The authors thank D.Berger,D.Hofmann and C.Kupka in IFW Dresden for helpful technical support.H.R.acknowledges funding from the DFG(Deutsche Forschungsgemeinschaft)within grant number RE3973/1-1.Q.J.,H.R.and K.N.conceived the work.With the support from N.Y.and X.J.,Q.J.and T.G.fabricated the thermoelectric films and conducted the structural and compositional characterizations.Q.J.prepared microchips and fabricated the on-chip micro temperature controllers.Q.J.and N.P.carried out the temperature-dependent material and device performance measurements.Q.J.and H.R.performed the simulation and analytical calculations.Q.J.,H.R.and K.N.wrote the manuscript with input from the other coauthors.All the authors discussed the results and commented on the manuscript.
文摘Multidimensional integration and multifunctional com-ponent assembly have been greatly explored in recent years to extend Moore’s Law of modern microelectronics.However,this inevitably exac-erbates the inhomogeneity of temperature distribution in microsystems,making precise temperature control for electronic components extremely challenging.Herein,we report an on-chip micro temperature controller including a pair of thermoelectric legs with a total area of 50×50μm^(2),which are fabricated from dense and flat freestanding Bi2Te3-based ther-moelectric nano films deposited on a newly developed nano graphene oxide membrane substrate.Its tunable equivalent thermal resistance is controlled by electrical currents to achieve energy-efficient temperature control for low-power electronics.A large cooling temperature difference of 44.5 K at 380 K is achieved with a power consumption of only 445μW,resulting in an ultrahigh temperature control capability over 100 K mW^(-1).Moreover,an ultra-fast cooling rate exceeding 2000 K s^(-1) and excellent reliability of up to 1 million cycles are observed.Our proposed on-chip temperature controller is expected to enable further miniaturization and multifunctional integration on a single chip for microelectronics.
基金supported by the National Key R&D Program of China(Grant No.2018YFA0702100)the Zhejiang Provincial Key R&D Program of China(Grant No.2021C05002)+1 种基金the Beijing Nova Programme Interdisciplinary Cooperation Project(Grant Nos.Z191100001119019 and Z191100001119013)the Fundamental Research Funds for the Central Universities。
文摘Electronic skins are artificial skin-type multifunctional sensors,which hold great potentials in intelligent robotics,limb prostheses and human health monitoring.However,it is a great challenge to independently and accurately read various physical signals without power supplies.Here,a self-powered flexible temperature-pressure bimodal sensor based on high-performance thermoelectric films and porous microconed conductive elastic materials is presented.Through introducing flexible heat-sink design and harvesting body heat energy,the thin-film thermoelectric device could not only precisely sense temperature signal but also drive the pressure sensor for detecting external tactile stimulus.The integration of Bi-Te based thermoelectric film with high stability in wide temperature range enables the sensor to sense the ambient temperature with high resolution(<0.1 K)as well as excellent sensitivity(3.77 mV K^(-1)).Meanwhile,the porous microconed elastomer responds to pressure variation with low-pressure detection(16 Pa)and a high sensitivity of 37 kPa^(-1).Furthermore,the bimodal sensor could accurately and simultaneously monitor human wrist pulse and body temperature in real time,which demonstrates promising applications in self-powered electronic skins for human health monitoring systems.
基金supported by the Major State Basic Research Development Program of China (No.2007CB607500.)
文摘Bi2Se3 thin films were electrochemically deposited on Ti and indium tin oxide-coated glass substrates, respectively, at room temperature, using Bi(NO3)3·5H2O and SeO2 as starting materials in diluted HNO3 solution. A conventional three-electrode cell was used with a platinum sheet as a counter electrode, and a saturated calomel electrode was used as a reference electrode. The films were annealed in argon atmosphere. The influence of cold isostatic pressing before annealing on the microstructure and thermoelectric properties of the films was investigated. X-ray diffraction analysis indicates that the film grown on the indium tin oxide-coated glass substrate is pure rhombohedral Bi2Se3, and the film grown on the Ti substrate consists of both rhombohedral and orthorhombic Bi2Se3.
文摘Bi_2Te_3 thin films and GeTe/B_2Te_3 superlattices of different thicknesses are prepared on the silicon dioxide substrates by magnetron sputtering technique and thermally annealed at 573 K for 30 min. Thermoelectric(TE)measurements indicate that optimal thickness and thickness ratio improve the TE performance of Bi_2Te_3 thin films and GeTe/B_2Te_3 superlattices, respectively. High TE performances with figure-of-merit(ZT) values as high as 1.32 and 1.56 are achieved at 443 K for 30 nm and 50 nm Bi_2Te_3 thin films, respectively. These ZT values are higher than those of p-type Bi_2Te_3 alloys as reported. Relatively high ZT of the GeTe/B_2Te_3 superlattices at 300-380 K were 0.62-0.76. The achieved high ZT value may be attributed to the unique nano-and microstructures of the films,which increase phonon scattering and reduce thermal conductivity. The results indicate that Bi_2Te_3-based thin films can serve as high-performance materials for applications in TE devices.
基金Project supported by the Young Scientists Fund of the National Natural Science Foundation of China (Grant No. 10904030)the Specialized Research Fund for the Doctoral Program of Higher Education of China (Grant No. 20091301120002 )
文摘Three Bi2Sr2Co2Oy thin films with different microstructures have been prepared by chemical solution deposition on LaAlO 3(001) through varying the annealing temperature.With the decrease in the annealing temperature,both the size and c-axis alignment degree of grains in the film decrease as well,leading to an increase in the film resistivity.In addition,the decrease in the annealing temperature also results in a slight increase in the Seebeck coefficient due to the enhanced energy filtering effect of the small-grain film.The nanostructured Bi2Sr2Co2Oy film with an average grain size of about 100 nm shows a power factor comparable to that of films with larger grains.Since the thermal conductivity of the nanostructured films can be depressed due to the enhanced phonon scattering by grain boundary,a higher figure of merit is expected in Bi2Sr2Co2Oy thin film with grains in nanometer size.
基金financial support from the Ministry of Science and Technology of China(Nos.2017YFA0700702,2017YFA0700705)the National Natural Science Foundation of China(Nos.52073290,51927803)+2 种基金the Liaoning Province Science and Technology Plan Project(2022-MS-011)the Science Fund for Distinguished Young Scholars of Liaoning Province(2023JH6/100500004)the Science and Technology Plan Projects of Shenyang(No.21108901).
文摘GeTe-based materials have attracted significant attention as high-efficiency thermoelectric materials for mid-temperature applications.However,GeTe thin-film materials with thermoelectric performances comparable to that of their bulk counterparts have not yet been reported,because of their unsatisfactory electrical and thermal properties caused by their poor crystal quality and high carrier concentration.Herein,a series of Sb-doped GeTe films and devices with remarkable thermoelectric performances are presented.These films are prepared through magnetron sputtering deposition at 553 K and exhibit a unique microstructure that consists of coarse-and fine-sized grains with high crystallization quality.The fine grains enhance the scattering associated with phonon transport and the coarse grains provide electron transport channels,which can suppress the thermal conductivity without obviously sacrificing the electrical conductivity.Moreover,Sb doping can effectively optimize the carrier concentration and increase the carrier effective mass,while introducing point defects and stacking faults to further scatter the phonon transport and decrease the thermal conductivity.Consequently,a peak power factor of 22.37μW cm−1 K−2 is obtained at 703 K and a maximum thermoelectric figure of merit of 1.53 is achieved at 673 K,which are substantially larger than the values reported in the existing literature.A flexible thermoelectric generator is designed and fabricated using Sb-doped GeTe films deposited on polyimide and achieves a maximum output power density of 2.22×103 W m−2 for a temperature difference of 300 K.