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Enhancement-mode AlGaN/GaN high electronic mobility transistors with thin barrier
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作者 马晓华 于惠游 +6 位作者 全思 杨丽媛 潘才渊 杨凌 王昊 张进成 郝跃 《Chinese Physics B》 SCIE EI CAS CSCD 2011年第2期453-457,共5页
An enhancement-mode (E-mode) A1GaN/GaN high electron mobility transistor (HEMTs) was fabricated with 15-nm A1GaN barrier layer. E-mode operation was achieved by using fluorine plasma treatment and post-gate rapid ... An enhancement-mode (E-mode) A1GaN/GaN high electron mobility transistor (HEMTs) was fabricated with 15-nm A1GaN barrier layer. E-mode operation was achieved by using fluorine plasma treatment and post-gate rapid thermal annealing. The thin barrier depletion-HEMTs with a threshold voltage typically around -1.7 V, which is higher than that of the 22-nm barrier depletion-mode HEMTs (-3.5 V). Therefore, the thin barrier is emerging as an excellent candidate to realize the enhancement-mode operation. With 0.6-tim gate length, the devices treated by fluorine plasma for 150-W RF power at 150 s exhibited a threshold voltage of 1.3 V. The maximum drain current and maximum transconductance are 300 mA/mm, and 177 mS/ram, respectively. Compared with the 22-nm barrier E-mode devices, VT of the thin barrier HEMTs is much more stable under the gate step-stress, 展开更多
关键词 high electron mobility transistors A1GAN/GAN thin barrier fluorine plasma treatment threshold voltage
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薄隔层层间窜流原因分析及技术对策 被引量:1
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作者 陈杰 王军 +6 位作者 代红 李辉 夏铭莉 袁平 王勇 唐玉科 顾永来 《世界石油工业》 2021年第1期71-78,共8页
薄隔层地层固井中射孔和压裂对水泥环造成的破坏易引起环空窜流,针对这一问题,开展环空窜流主因分析,通过提高顶替效率、平衡压力、短候凝固井技术、使用管外封隔器、改善水泥石抗冲击能力等针对性技术措施,成功解决了油水薄隔层射孔投... 薄隔层地层固井中射孔和压裂对水泥环造成的破坏易引起环空窜流,针对这一问题,开展环空窜流主因分析,通过提高顶替效率、平衡压力、短候凝固井技术、使用管外封隔器、改善水泥石抗冲击能力等针对性技术措施,成功解决了油水薄隔层射孔投产后环空窜流的问题。对解决薄隔层地层固井质量低、易发生水窜的难题具有良好的指导意义。 展开更多
关键词 薄隔层井 环空窜流 水泥环 技术对策 特殊固井技术
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