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Transport properties and microstructure of La_(0.7)Sr_(0.3)MnO_3 nanocrystalline thin films grown by polymer-assisted chemical solution deposition 被引量:1
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作者 Min Zhang Li Lv +2 位作者 Zhantao Wei Xinsheng Yang Xin Zhang 《Journal of Modern Transportation》 2014年第1期50-54,共5页
Perovskite-based materials can be widely used in the aerospace and transportation field. Perovskite man-ganese oxides La0.7Sr0.3MnO3 (LSMO) thin films were grown on LaAlO3 (100) and Si (100) single crystal sub-s... Perovskite-based materials can be widely used in the aerospace and transportation field. Perovskite man-ganese oxides La0.7Sr0.3MnO3 (LSMO) thin films were grown on LaAlO3 (100) and Si (100) single crystal sub-strates by the polymer-assisted chemical solution deposi-tion (PACSD) method. Electronic transport behavior, microstructure, and magnetoresistance (MR) of LSMO thin films on different substrates were investigated. The resis-tance of LSMO films fabricated on LaAlO3 substrates is smaller than that on the Si substrates. The magnetic field reduces resistance of LSMO films both on Si and LAO in the wide temperature region, when the insulator-metal transition temperature shifts to higher temperature. The low-field magnetoresistance of LSMO films on Si in low temperature range at 1 T is larger than that of LSMO films on LAO. However, the MR of LSMO film on LAO films at room-temperature is about 5.17%. The thin films are smooth and dense with uniform nanocrystal size grain. These results demonstrate that PACSD is an effective technique for producing high quality LSMO films, which is significant to improve the magnetic properties and the application of automotive sensor. 展开更多
关键词 Polymer-assisted chemical solutiondeposition (PACSD) La0.7Sr0.3MnO3 (LSMO) thin films transport properties and microstructure
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A Genetic Algorithm for Simultaneous Determination of Thin Films Thermal Transport Properties and Contact Resistance
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作者 Zhengxing HUANG Zhen'an TANG +2 位作者 Ziqiang XU Haitao DING Yuqin GU 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2006年第3期339-341,共3页
A genetic algorithm (GA) was studied to simultaneously determine the thermal transport properties and the contact resistance of thin films deposited on a thick substrate. A pulsed photothermal reflectance (PPR) sy... A genetic algorithm (GA) was studied to simultaneously determine the thermal transport properties and the contact resistance of thin films deposited on a thick substrate. A pulsed photothermal reflectance (PPR) system was employed for the measurements. The GA was used to extract the thermal properties. Measurements were performed on SiO2 thin films of different thicknesses on silicon substrate. The results show that the GA accompanied with the PPR system is useful for the simultaneous determination of thermal properties of thin films on a substrate. 展开更多
关键词 thin film Thermal transport properties Thermal contact resistance Genetic algorithm
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Cascade excitation of vortex motion and reentrant superconductivity in flexible Nb thin films
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作者 张丽萍 徐祖雨 +11 位作者 黎晓杰 张旭 秦明阳 张若舟 徐娟 程文欣 袁洁 王华兵 Alejandro V.Silhanek 朱北沂 苗君 金魁 《Chinese Physics B》 SCIE EI CAS CSCD 2023年第4期613-621,共9页
High quality Nb films were successfully prepared on both flexible polyimide(PI)and rigid Al2O3substrates and their transport properties were systematically studied at various applied currents,external magnetic fields,... High quality Nb films were successfully prepared on both flexible polyimide(PI)and rigid Al2O3substrates and their transport properties were systematically studied at various applied currents,external magnetic fields,and sample orientations.It is found that a curved Nb/PI film exhibits quite different superconducting transition and vortex dynamics compared to the flat Nb/Al2O3film.For the curved Nb/PI film,smooth superconducting transitions were obtained at low currents,while unexpected cascade structures were revealed in theρ(T)curves at high currents.We attribute this phenomenon to the gradient distribution of vortex density together with a variation of superconductivity along the curved film.In addition,reentrant superconductivity was induced in the curved Nb/PI thin film by properly choosing the measurement conditions.We attribute this effect to the vortex pinning from both in-plane vortices and out-of-plane vortices.This work reveals the complex transport properties of curved superconducting thin films,providing important insights for further theoretical investigations and practical developments of flexible superconductors. 展开更多
关键词 vortex dynamics flexible superconducting films transport properties superconducting films
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Large Room Temperature Magneto-Resistance in Magnetically Disordered Fe<sub>1.5</sub>Ti<sub>0.5</sub>O<sub>3-δ</sub>Thin Films
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作者 Ekaterine Chikoidze Yves Dumont +4 位作者 Elena Popova Niels Keller Andrey Shumilin Veniamin Kozub Benedicte Warot-Fonrose 《World Journal of Condensed Matter Physics》 2014年第4期250-261,共12页
Electronic transport properties of magnetically disordered R(-3)c phase Fe1.5Ti0.5O3-δ thin films epitaxially grown on Al2O3(0001) substrates have been studied. The measured magnetization in configurations with the m... Electronic transport properties of magnetically disordered R(-3)c phase Fe1.5Ti0.5O3-δ thin films epitaxially grown on Al2O3(0001) substrates have been studied. The measured magnetization in configurations with the magnetic field perpendicular and parallel to the film plane shows weak values of 0.1μB/formula compared to the theoretical value of 2μB/formula and a strong anisotropy with no saturation in perpendicular configuration. These properties are associated with the ato- mic scale disorder of Ti/Fe ions along c-axis. At zero-magnetic field and within the temperature range of 80 K to 400 K, the conduction mechanism appears to be Efros-Shklovskii variable range hopping with a carrier localization length of ξ0= 0.86nm. Magneto-resistance (MR) is positive in perpendicular configuration, while it is negative in parallel configuration, with significant values of MR = 27%- 37% at room temperature at 9 Tesla. Electron localization lengths were deduced from experiment for different external magnetic fields. The origin of magneto-resistance observed in experiment, is discussed. 展开更多
关键词 PACS Numbers: 73.50.-h. transport Processes in thin filmS 72.20.Ee Hopping transport 75.47.Lx MAGNETIC Oxides 75.70.Ak MAGNETIC Properties of Monolayers and thin filmS
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Effect of Temperature Deposition on Superconducting Properties of Overdoped Co-122 Thin Films
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作者 Oscar Rodriguez Alvaro Marino 《材料科学与工程(中英文A版)》 2014年第11期330-333,共4页
关键词 脉冲激光沉积 沉积温度 超导性能 钴掺杂 薄膜 织构生长 扩散效果 缓冲层
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Epitaxial growth and electrical transport properties of La_(0.5)Sr_(0.5)CoO_3 thin films prepared by pulsed laser deposition 被引量:1
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作者 李美亚 熊光成 +3 位作者 王忠烈 范守善 赵清太 林揆训 《Science China Mathematics》 SCIE 1999年第8期865-872,共8页
Epitaxial growth of the Lag0.5Sr0.5CoO3(LSCO) thin films has been realized on LaAl03, SrTiO3 and MgO substrates by pulsed laser deposition. The epitaxial growth behavior and the electrical transport properties of thes... Epitaxial growth of the Lag0.5Sr0.5CoO3(LSCO) thin films has been realized on LaAl03, SrTiO3 and MgO substrates by pulsed laser deposition. The epitaxial growth behavior and the electrical transport properties of these films were studied systematically. The temperature dependencies of the resistivity of the film have been determined. Studies indicate that close dependencies exist between the crystal structures and the electrical transport properties of the epitaxial LSCO films, and that the epitaxial thin films are of low resistivity and metallic conductive features. The epitaxial films deposited on the LaAlO3 substrates at about 700℃ possess the optimal properties compared with the others. Discussions of the dependencies and the mechanisms of the epitaxial structures on the electrical transport properties of the LSCO films have been made. 展开更多
关键词 EPITAXIAL growth PULSED laser DEPOSITION La0.5Sr0.5CoO3 thin film electrical transport properties.
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Effect of Zn Doping on Transport Properties of La_(2/3)Sr_(1/3)Mn_(1-x)Zn_xO_3 Films
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作者 赵省贵 陈长乐 金克新 《Journal of Rare Earths》 SCIE EI CAS CSCD 2007年第6期734-738,共5页
La2/3 Sr1/3 Mn1-x ZnxO3films (x =0.05, 0.1,0.3, and 0.5) were prepared using magnetron sputtering method, and the effect of Zn doping on transport properties of the films was studied. An analysis of X-ray diffractio... La2/3 Sr1/3 Mn1-x ZnxO3films (x =0.05, 0.1,0.3, and 0.5) were prepared using magnetron sputtering method, and the effect of Zn doping on transport properties of the films was studied. An analysis of X-ray diffraction showed that the main phase of the bulk target was orthorhombic and the films had better epitaxial character. It was found that the films with x =0.05 and x =0.1 exhibited typical insulator-metal transition. No transition of the films with x≥0.3 was observed and the dominant transport was variable-range hopping due to observable secondary phase ZnO. These could be attributed to the Zn doping effect on manganites. 展开更多
关键词 MANGANITES thin film transport properties double exchange interaction rare earths
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Lattice Effect on the Transport Properties in Double Doped La_(2/3)(Ca_(1-x)Sr_x)_(1/3)MnO_3 Films
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作者 Kexin JIN Changle CHEN +3 位作者 Shenggui ZHAO Yongcang WANG Zhoumo SONG Xiao YUAN 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2005年第6期891-893,共3页
The transport properties in the La2/3(Ca(1-x)Sr(x))1/3MnO3 (x=0.1/3, 2/3) films prepared using the RF magnetron sputtering method were investigated, The effect of the Ca, Sr double-doping at the A position in ... The transport properties in the La2/3(Ca(1-x)Sr(x))1/3MnO3 (x=0.1/3, 2/3) films prepared using the RF magnetron sputtering method were investigated, The effect of the Ca, Sr double-doping at the A position in the La(2/3)A(1/3)MnO3 on the structure of the targets and transport of the films has been studied. With the increase of x, the structures of the targets transform from the rhombohedral phase to the cubic phase; the metal-insulator phase transition temperature (Tp) of the films increases; and the corresponding peak resistivity decreases. All the phenomena can be qualitatively explained by the lattice effect. 展开更多
关键词 thin films transport properties Lattice effect
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Transport Properties of LCMO Granular Films Deposited by the Pulsed Electron Deposition Technique 被引量:2
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作者 陈雷明 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2011年第6期1027-1031,共5页
By finely controlling the deposition parameters in the pulsed electron deposition process, granular La 2/3 Ca 1/3 MnO 3 (LCMO) film was grown on silicon substrates. The substrate temperature, ambient pressure in the... By finely controlling the deposition parameters in the pulsed electron deposition process, granular La 2/3 Ca 1/3 MnO 3 (LCMO) film was grown on silicon substrates. The substrate temperature, ambient pressure in the deposition chamber and acceleration potential for the electron beam were all found to affect the grain size of the film, resulting in different morphologies of the samples. Transport properties of the obtained granular films, especially the magnetoresistance (MR), were studied. Prominent low-field MR was observed in all samples, indicating the forming of grain boundaries in the sample. The low-field MR show great sensitive to the morphology evolution, which reaches the highest value of about 40% for the sample with the grain size of about 250 nm. More interestingly, positive-MR (p-MR) was also detected above 300 K when low magnetic field applying, whereas it disappeared with higher magnetic field applied up to 1.5 and 2 Tesla. Instead of the spin- polarized tunneling process being commonly regarded as a responsible reason, lattice mismatch between LCMO film and silicon substrate appears to be the origin of the p-MR 展开更多
关键词 colossal magnetoresistance granular film transport properties
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Effect of Nickel Distributions Embedded in Amorphous Carbon Films on Transport Properties
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作者 Vali Dalouji Dariush Mehrparvar +1 位作者 Shahram Solaymani Sahar Rezaee 《Chinese Physics Letters》 SCIE CAS CSCD 2018年第2期61-65,共5页
Electrical properties of C/Ni films are studied using four mosaic targets made of pure graphite and stripes of nickel with the surface areas of 1.78,3.21,3.92 and 4.64%.The conductivity data in the temperature range o... Electrical properties of C/Ni films are studied using four mosaic targets made of pure graphite and stripes of nickel with the surface areas of 1.78,3.21,3.92 and 4.64%.The conductivity data in the temperature range of400-500 K shows the extended state conduction.The conductivity data in the temperature range of 150-300 K shows the multi-phonon hopping conduction.The Berthelot-type conduction dominates in the temperature range of 50-150 K.The conductivity of the films in the temperature range about 〈 50 K is described in terms of variable-range hopping conduction.In low temperatures,the localized density of state around Fermi level(F)for the film deposition with 3.92% nickel has a maximum value of about 56.2×10^(17)cm^(-3)eV^(-1) with the minimum average hopping distance of about 3.43 × 10^(-6) cm. 展开更多
关键词 NI Effect of Nickel Distributions Embedded in Amorphous Carbon films on transport Properties
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Electron Transport Properties of Two-Dimensional Monolayer Films from Au-P-Au to Au-Si-Au Molecular Junctions
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作者 Dou-Dou Sun Wen-Yong Su +2 位作者 Feng Wang Wan-Xiang Feng Cheng-Lin Heng 《Chinese Physics Letters》 SCIE CAS CSCD 2018年第1期76-80,共5页
We investigate the electronic-transport properties of two-dimensional monolayer films from Au-P-Au molecular junction to Au-Si-Au molecular junction using elastic scattering Green's function theory. In the process of... We investigate the electronic-transport properties of two-dimensional monolayer films from Au-P-Au molecular junction to Au-Si-Au molecular junction using elastic scattering Green's function theory. In the process of replacing the P atoms with Si atoms every other line from the middle of monolayer blue phosphorus molecular structure, the substitution of Si atoms changes the properties of Au-P-Au molecular junction significantly. Interestingly, the current value has a symmetric change as a parabolic curve with the peak appearing in Au-Si_1P_1-Au molecular junction, which provides the most stable current of 15.00 nA in a wide voltage range of 0.70-2.70 V.Moreover, the current-voltage characteristics of the structures indicate that the steps tend to disappear revealing the property similar to metal when the Si atoms dominate the molecular junction. 展开更多
关键词 Electron transport Properties of Two-Dimensional Monolayer films from Au-P-Au to Au-Si-Au Molecular Junctions Si
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Anomalous Electronic Transport in Diamond-Like-Carbon Films of Different Thickness
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作者 Soma Mukherjee Bijay Krishna Chaudhuri +1 位作者 Hironobu Sakata Moriaki Wakaki 《材料科学与工程(中英文B版)》 2011年第5期649-656,共8页
关键词 类金刚石碳薄膜 电子输运 厚度 金属绝缘体转变 X射线光电子能谱 扫描电子显微镜 薄膜半导体 反常
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Enhancing low-field magnetoresistance of La0.67Ca0.33MnO3 films deposited on anodized aluminium-oxide membranes 被引量:2
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作者 唐为华 李培刚 +5 位作者 雷鸣 郭艳峰 陈雷明 李玲红 宋朋云 陈晋平 《Chinese Physics B》 SCIE EI CAS CSCD 2006年第4期767-772,共6页
In this paper we report a new method to fabricate nanostructured films, La0.67Ca0.33MnO3 (LCMO) nanostructured films have been fabricated by using pulsed electron beam deposition (PED) on anodized aluminium oxide ... In this paper we report a new method to fabricate nanostructured films, La0.67Ca0.33MnO3 (LCMO) nanostructured films have been fabricated by using pulsed electron beam deposition (PED) on anodized aluminium oxide (AAO) membranes, The magnetic and electronic transport properties are investigated by using the Quantum Design physics properties measurement system (PPMS) and magnetic properties measurement system (MPMS). The resistance peak temperature (Tp) is about 85 K and the Curie temperature (To) is about 250 K for the LCMO film on an AAO membrane with a pore diameter of 20nm. Large magnetoresistance ratio (MR) is observed near Tp. The MR is as high as 85% under 1 T magnetic field. The great enhancement of MR at low magnetic fields could be attributed to the lattice distortion and the grain boundary that are induced by the nanopores on the AAO membrane. 展开更多
关键词 colossal magnetoresistance nanostructured film transport properties
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石墨烯基薄膜的表面改性与电输运性能研究
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作者 牛亮 杨远俊 +2 位作者 杨庆庆 王伟 李强 《合肥工业大学学报(自然科学版)》 CAS 北大核心 2024年第3期428-432,共5页
文章以天然鳞片石墨为原料,采用改进Hummers方法制备氧化石墨烯(graphene oxide,GO)薄膜,再利用氮离子注入和热处理得到表面改性的氮掺杂还原氧化石墨烯(nitrogen-doped reduced graphene oxide,NrGO)薄膜;利用扫描电子显微镜(scanning ... 文章以天然鳞片石墨为原料,采用改进Hummers方法制备氧化石墨烯(graphene oxide,GO)薄膜,再利用氮离子注入和热处理得到表面改性的氮掺杂还原氧化石墨烯(nitrogen-doped reduced graphene oxide,NrGO)薄膜;利用扫描电子显微镜(scanning electron microscope,SEM)、X射线衍射(X-ray diffraction,XRD)、拉曼(Raman)光谱和X射线光电子能谱(X-ray photoelectron spectroscopy,XPS)表征并系统研究氮离子注入对石墨烯基薄膜表面形貌和微观结构的影响。结果表明:氮离子注入会造成石墨烯基薄膜表面层内碳原子的缺失和氮原子的替代掺杂,从而在NrGO薄膜表面层内实现氮掺杂并产生纳米级孔洞;氮掺杂氧化石墨烯(nitrogen-doped graphene oxide,NGO)薄膜表面层氮掺杂量(质量分数)高达10.86%,热处理后的NrGO薄膜表面层氮掺杂量(质量分数)可达9.90%;I-V测试发现,氮离子注入和热处理对石墨烯基薄膜的电输运性能也产生显著影响。 展开更多
关键词 石墨烯基薄膜 氮掺杂 离子注入 表面改性 电输运性能
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纳米硅薄膜研究的最新进展 被引量:21
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作者 彭英才 何宇亮 《稀有金属》 EI CAS CSCD 北大核心 1999年第1期42-55,共14页
纳米硅薄膜(ncSi∶H)是一种新型低维人工半导体材料,它具有新颖的结构特征与独特的物理性质。综合评述了这种材料在制备方法、结构特征、输运性质和发光特性等方面的最新研究进展,并指出了今后的发展方向。
关键词 纳米硅薄膜 制备方法 结构特征 输运性质 半导体
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光照对BiFe_(0.95)Mn_(0.05)O_3薄膜铁电和输运性质的影响 被引量:3
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作者 彭增伟 刘保亭 +4 位作者 魏大勇 马继奎 王宽冒 李曼 赵光 《人工晶体学报》 EI CAS CSCD 北大核心 2011年第2期388-391,共4页
采用溶胶-凝胶法在Pt(111)/Ti/SiO2/Si(001)基片上制备了BiFe0.95Mn0.05O3(BFMO)薄膜,并构架了Pt/SrRuO3/BFMO/Pt型电容器。X射线衍射(XRD)分析发现在650℃快速退火可以得到良好结晶质量的多晶薄膜。紫光入射到薄膜表面,电滞回线发生变... 采用溶胶-凝胶法在Pt(111)/Ti/SiO2/Si(001)基片上制备了BiFe0.95Mn0.05O3(BFMO)薄膜,并构架了Pt/SrRuO3/BFMO/Pt型电容器。X射线衍射(XRD)分析发现在650℃快速退火可以得到良好结晶质量的多晶薄膜。紫光入射到薄膜表面,电滞回线发生变化,这是由于光照在薄膜内部产生的光生载流子影响了退极化场的分布。研究表明,在紫光照射下,薄膜的漏电流密度变大,电导由5.1×10-7S增大到6.63×10-7S。通过对暗电流密度的拟合发现,BFMO薄膜为欧姆导电机制。 展开更多
关键词 光照 BiFe0.95Mn0.05O3薄膜 铁电性质 输运性质
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TiO_2纳米薄膜电极中光生载流子传输特性研究 被引量:7
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作者 付姚 曹望和 田莹 《化学学报》 SCIE CAS CSCD 北大核心 2006年第17期1761-1764,共4页
采用sol-gel法制备了均匀透明的锐钛矿相纳米TiO2薄膜电极.通过瞬态光电流谱研究了液相电解液中所制备电极内光生载流子的传输特性.结果表明:在TiO2/电解液界面处,TiO2颗粒表面存在两种能够捕获光生电子的表面态.一种是O2吸附所形成的... 采用sol-gel法制备了均匀透明的锐钛矿相纳米TiO2薄膜电极.通过瞬态光电流谱研究了液相电解液中所制备电极内光生载流子的传输特性.结果表明:在TiO2/电解液界面处,TiO2颗粒表面存在两种能够捕获光生电子的表面态.一种是O2吸附所形成的浅能级表面态(So),能级位于导带下0.5eV以内,其捕获光生电子的起始电位约为-0.4V;另一种是晶格氧离子形成的深能级表面态(Sc),能级位于带隙中部,起电子-空穴对复合中心的作用.二者对光生电子的捕获效率与电解液pH值及电极电位(U)有关.高于0.4V的电位能够显著增大光生载流子的传输速率,降低TiO2薄膜费米能级(EFn),有效抑制表面态对光生电子的捕获,进而提高阳极光电流的大小和稳定性. 展开更多
关键词 无机非金属材料 光生载流子传输特性 光电特性 TiO2纳米薄膜电极
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微通道板电子透射膜及其粒子透过特性的研究 被引量:7
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作者 端木庆铎 姜德龙 +5 位作者 田景全 李野 高延军 王国政 吴奎 富丽晨 《电子学报》 EI CAS CSCD 北大核心 2005年第5期904-907,共4页
 文中介绍了微光像管中微通道板电子透射膜及其形成技术,研究了粒子(电子和离子)透过特性.给出了死电压概念、死电压曲线、死电压与膜厚关系曲线以及半视场对比测试结果;给出了采用XPS进行成分分析的结果.介绍了电子透射膜的离子透过特...  文中介绍了微光像管中微通道板电子透射膜及其形成技术,研究了粒子(电子和离子)透过特性.给出了死电压概念、死电压曲线、死电压与膜厚关系曲线以及半视场对比测试结果;给出了采用XPS进行成分分析的结果.介绍了电子透射膜的离子透过特性,给出了表征膜层对离子阻止能力的离子透过率的概念,提出了离子透过率测试的原理方案和相关技术等问题. 展开更多
关键词 微通道板 电子透射膜 免污染成膜工艺 死电压 离子透过率
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高纯金属酞菁的制备及其对TiO_2光催化性能的影响研究 被引量:5
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作者 袁慧 赵高凌 韩高荣 《功能材料》 EI CAS CSCD 北大核心 2005年第4期580-582,共3页
通过简易的溶液沉淀分离方法制得了纯度>97%的高纯金属酞菁的二甲基亚砜(DMSO)溶液。应用制得产物对TiO2 薄膜进行敏化,发现经酞菁铁(FePc)、酞菁钴(CoPc)、双核酞菁钴铁(CoFePc)敏化的TiO2 薄膜的光催化性能分别较未经敏化的TiO2薄... 通过简易的溶液沉淀分离方法制得了纯度>97%的高纯金属酞菁的二甲基亚砜(DMSO)溶液。应用制得产物对TiO2 薄膜进行敏化,发现经酞菁铁(FePc)、酞菁钴(CoPc)、双核酞菁钴铁(CoFePc)敏化的TiO2 薄膜的光催化性能分别较未经敏化的TiO2薄膜提高67.3%、63.0%、16.1%,并通过一系列的对比实验解释了双核酞菁钴铁催化效率低于前两者的原因,为后继利用酞菁敏化TiO2 及其它光催化材料提供借鉴。 展开更多
关键词 金属酞菁 提纯 二氧化钛 光催化性能
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沉积气压对相变域硅薄膜性能的影响 被引量:1
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作者 郝会颖 李伟民 +2 位作者 曾湘波 孔光临 廖显伯 《功能材料》 EI CAS CSCD 北大核心 2011年第8期1489-1491,共3页
采用甚高频等离子体增强化学气相沉积(VHF-PECVD)法,成功制备出一系列从非晶到微晶过渡区域的硅薄膜。研究了气体压强对样品的微结构、光电特性、输运性质以及沉积速率的调控作用。结果表明,增大沉积气压可以提高材料的光敏性及沉积速率... 采用甚高频等离子体增强化学气相沉积(VHF-PECVD)法,成功制备出一系列从非晶到微晶过渡区域的硅薄膜。研究了气体压强对样品的微结构、光电特性、输运性质以及沉积速率的调控作用。结果表明,增大沉积气压可以提高材料的光敏性及沉积速率,但材料的结构有序度以及输运特性变差。 展开更多
关键词 相变域硅薄膜 微结构 光电特性 输运特性
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