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EFFECT OF SUBSTRATE TEMPERATURE ON Y-Ba-Cu-O THIN FILMS IN SITU GROWTH BY MOCVD
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作者 W. Tao. X. K. Zhang, R. Wang, G. R. Bai Shanghai Institute of Metallurgy, Academia Sinica, Shanghai 200050, China 《真空科学与技术学报》 EI CAS CSCD 1992年第Z1期179-182,共4页
Superconducting thin films of YBa<sub>2</sub>Cu<sub>3</sub>O<sub>7-x</sub>(Y-Ba-Cu-O) with Tc more than 85K have been deposited in situ by metalorganic chemical vapor deposition ... Superconducting thin films of YBa<sub>2</sub>Cu<sub>3</sub>O<sub>7-x</sub>(Y-Ba-Cu-O) with Tc more than 85K have been deposited in situ by metalorganic chemical vapor deposition (MOCVD) on yttria stabilized zirconia(YSZ) substrates. The relationship of film orientation on substrate temperature and the lowest formation temperature region of superconducting phase have been obtained after changing the substrate temperature. The epitaxial relation between Y-Ba-Cu-O films and the YSZ su bstrates were discussed. 展开更多
关键词 EFFECT OF SUBSTRATE TEMPERATURE ON Y-Ba-Cu-O thin films IN SITU growth BY MOCVD TEM In FIGURE Ba Cu
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Effect of Oxygen Partial Pressure on Epitaxial Growth and Properties of Laser-Ablated AZO Thin Films
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作者 王传彬 LUO Sijun +1 位作者 SHEN Qiang 张联盟 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2016年第1期27-30,共4页
Al-doped ZnO(AZO) thin films were grown on c-sapphire substrates by laser ablation under different oxygen partial pressures(P_(O2)).The effect of P_(O2) on the crystal structure,preferred orientation as well a... Al-doped ZnO(AZO) thin films were grown on c-sapphire substrates by laser ablation under different oxygen partial pressures(P_(O2)).The effect of P_(O2) on the crystal structure,preferred orientation as well as the electrical and optical properties of the films was investigated.The structure characterizations indicated that the as-grown films were single-phased with a wurtzite ZnO structure,showing a significant c-axis orientation.The films were well crystallized and exhibited better crystallinity and denser texture when deposited at higher P_(O2).At the optimum oxygen partial pressures of 10- 15 Pa,the AZO thin films were epitaxially grown on c-sapphire substrates with the(0001) plane parallel to the substrate surface,i e,the epitaxial relationship was AZO(000 1) // A1_2O_3(000 1).With increasing P_(O2),the value of Hall carrier mobility was increased remarkably while that of carrier concentration was decreased slightly,which led to an enhancement in electrical conductivity of the AZO thin films.All the films were highly transparent with an optical transmittance higher than 85%. 展开更多
关键词 AZO thin films epitaxial growth laser ablation oxygen partial pressure electrical and optical properties
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Growth and Characterization of InSb Thin Films on GaAs(001) without Any Buffer Layers by MBE
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作者 赵晓蒙 张杨 +4 位作者 崔利杰 关敏 王保强 朱战平 曾一平 《Chinese Physics Letters》 SCIE CAS CSCD 2017年第7期177-181,共5页
We report the growth of InSb layers directly on GaAs (001) substrates without any buffer layers by molecular beam epitaxy (MBE). Influences of growth temperature and V/Ⅲ flux ratios on the crystal quality, the su... We report the growth of InSb layers directly on GaAs (001) substrates without any buffer layers by molecular beam epitaxy (MBE). Influences of growth temperature and V/Ⅲ flux ratios on the crystal quality, the surface morphology and the electrical properties of InSb thin films are investigated. The InSb samples with room- temperature mobility of 44600cm2/Vs are grown under optimized growth conditions. The effect of defects in InSb epitaxial on the electrical properties is researched, and we infer that the formation of In vacancy (VIn) and Sb anti-site (SbIn) defects is the main reason for concentrations changing with growth temperature and Sb2/In flux ratios. The mobility of the InSb sample as a function of temperature ranging from 90 K to 360K is demonstrated and the dislocation scattering mechanism and phonon scattering mechanism are discussed. 展开更多
关键词 growth and Characterization of InSb thin films on GaAs MBE
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