Using Narrow Line-Width Laser to Measure the Thickness and Refractive Index of the Film

We demonstrate applications of a novel setup which is used for measuring the relative phase difference between S and P polarization at an oblique incidence point in optically denser medium by analyzing the relative frequency shift of adjacent axial modes of S and P resonances of a monolithic folded Fabry-Perot cavity (MFC). The relative phase difference at a reflection point A in an optically denser medium is inferred to be around -167.4° for a confocal cavity and -201.1° for a parallel cavity. Given the n1, n3, φ1, φ3, λ, and Δ, the elliptic formula tan(ψ)exp(iΔ) = Rp/Rs is used to find a solution for thickness d and refractive index n2 of the thin film coated on point A, where Rs and Rp are total refractive index of s and p component of light related to two unknown values. Since it is hard to deduce an analytical solution for thickness and refractive index of the film, we firstly used exhaustion method to find the set of solution about thickness and refractive index when assumed there is no light absorption by the film and then Particle Swarm Optimization (PSO) to find a set of solution of thickness and complex refractive index which accounts the light absorption by the film.

一种监控膜厚的新算法

光学薄膜的光学特性与其每一膜层的厚度密切相关,为了制备出符合要求的光学薄膜产品,在制备过程中必须监控膜厚。光学薄膜实时监控精度决定了所镀制的光学薄膜的厚度精度。针对光电极值法极值点附近监控精度低、无法精确监控非规整膜系的缺陷,提出了新的光学薄膜膜厚监控算法。该算法通过数学运算,使得光学薄膜的光学厚度与透射率呈线性关系,并且有效地消除光源波动、传输噪声等共模干扰的影响,算法精度可控制在2%以内。