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Dynamic modeling of total ionizing dose-induced threshold voltage shifts in MOS devices
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作者 陆广宝 刘俊 +2 位作者 张传国 高扬 李永钢 《Chinese Physics B》 SCIE EI CAS CSCD 2023年第1期113-122,共10页
The total ionizing dose(TID) effect is a key cause for the degradation/failure of semiconductor device performance under energetic-particle irradiation. We developed a dynamic model of mobile particles and defects by ... The total ionizing dose(TID) effect is a key cause for the degradation/failure of semiconductor device performance under energetic-particle irradiation. We developed a dynamic model of mobile particles and defects by solving the rate equations and Poisson's equation simultaneously, to understand threshold voltage shifts induced by TID in silicon-based metal–oxide–semiconductor(MOS) devices. The calculated charged defect distribution and corresponding electric field under different TIDs are consistent with experiments. TID changes the electric field at the Si/SiO_(2) interface by inducing the accumulation of oxide charged defects nearby, thus shifting the threshold voltage accordingly. With increasing TID, the oxide charged defects increase to saturation, and the electric field increases following the universal 2/3 power law. Through analyzing the influence of TID on the interfacial electric field by different factors, we recommend that the radiation-hardened performance of devices can be improved by choosing a thin oxide layer with high permittivity and under high gate voltages. 展开更多
关键词 dynamic modeling total ionizing dose threshold voltage shifts radiation-hardening
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A Novel CMOS Voltage Reference Based on Threshold Voltage Difference Between p-Type and n-Type MOSFETs
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作者 孔明 郭健民 +1 位作者 张科 李文宏 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2007年第10期1546-1550,共5页
A novel MOS-only voltage reference is presented,which is based on the threshold voltage difference between p-type and n-type MOSFETs. Its precision is improved by the cancellation of the process variation. The referen... A novel MOS-only voltage reference is presented,which is based on the threshold voltage difference between p-type and n-type MOSFETs. Its precision is improved by the cancellation of the process variation. The reference has been successfully implemented in a Chartered 0.35μm CMOS process. The occupied chip area is 0. 022mm^2. Measurements indicate that without trimming, the average output voltage error is 6mV at room temperature compared with the simulation result. The temperature coefficient is 180ppm/℃ in the worst case in the temperature range of 0 to 100℃ ,and the line regulation is ± 1.1%. The reference is applied in an adaptive power MOSFET driver. 展开更多
关键词 MOS-only voltage reference threshold voltage temperature coefficient line regulation
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Threshold Voltage Model for a Fully Depleted SOI-MOSFET with a Non-Uniform Profile
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作者 张国和 邵志标 周凯 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2007年第6期842-847,共6页
A novel approximation of the two-dimensional (2D) potential function perpendicular to the channel is proposed,and then an analytical threshold voltage model for a fully depleted SOI-MOSFET with a non-uniform Gaussia... A novel approximation of the two-dimensional (2D) potential function perpendicular to the channel is proposed,and then an analytical threshold voltage model for a fully depleted SOI-MOSFET with a non-uniform Gaussian distribution doping profile is given based on this approximation. The model agrees well with numerical simulation by MEDICI. The result represents a new way and some reference points in analyzing and controlling the threshold voltage of non-uniform fully depleted (FD) SOI devices in practice. 展开更多
关键词 fully depleted SOI-MOSFET NON-UNIFORM surface potential threshold voltage
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An Analytical Threshold Voltage Model for Fully Depleted SOI MOSFETs
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作者 李瑞贞 韩郑生 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2005年第12期2303-2308,共6页
A new two-dimensional (2D) analytical model for the threshold-voltage of fully depleted SOI MOSFETs is derived. The 2D potential distribution functions in the active layer of the devices are obtained through solving... A new two-dimensional (2D) analytical model for the threshold-voltage of fully depleted SOI MOSFETs is derived. The 2D potential distribution functions in the active layer of the devices are obtained through solving the 2D Poisson's equation. The minimum of the potential at the oxide-Si layer interface is used to monitor the threshold voltage of the SOI MOSFETs. This model is verified by its excellent agreement with MEDICI simulation using SOI MOSFETs with different gate lengths,gate oxide thicknesses,silicon film thicknesses,and channel doping concentrations. 展开更多
关键词 fully depleted SOI MOSFETs surface potential threshold voltage
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Comparative Methodical Assessment of Established MOSFET Threshold Voltage Extraction Methods at 10-nm Technology Node 被引量:1
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作者 Yashu Swami Sanjeev Rai 《Circuits and Systems》 2016年第13期4248-4279,共33页
Threshold voltage (V<sub>TH</sub>) is the most evocative aspect of MOSFET operation. It is the crucial device constraint to model on-off transition characteristics. Precise V<sub>TH</sub> value... Threshold voltage (V<sub>TH</sub>) is the most evocative aspect of MOSFET operation. It is the crucial device constraint to model on-off transition characteristics. Precise V<sub>TH</sub> value of the device is extracted and evaluated by several estimation techniques. However, these assessed values of V<sub>TH</sub> diverge from the exact values due to various short channel effects (SCEs) and non-idealities present in the device. Numerous prevalent V<sub>TH</sub> extraction methods are discussed. All the results are verified by extensive 2-D TCAD simulation and confirmed through analytical results at 10-nm technology node. Aim of this research paper is to explore and present a comparative study of largely applied threshold extraction methods for bulk driven nano-MOSFETs especially at 10-nm technology node along with various sub 45-nm technology nodes. Application of the threshold extraction methods to implement noise analysis is briefly presented to infer the most appropriate extraction method at nanometer technology nodes. 展开更多
关键词 threshold voltage Constant Current Source Technique Linear Extrapolation Technique threshold voltage Estimation Techniques Short Channel Effects Drift Diffusion Model Resistive Load Inverter Noise Margin Analysis
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Vertical nanowire/nanosheet FETs with a horizontal channel for threshold voltage modulation
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作者 Yongbo Liu Huilong Zhu +5 位作者 Yongkui Zhang Xiaolei Wang Weixing Huang Chen Li Xuezheng Ai Qi Wang 《Journal of Semiconductors》 EI CAS CSCD 2022年第1期81-89,共9页
A new type of vertical nanowire(VNW)/nanosheet(VNS)FETs combining a horizontal channel(HC)with bulk/back-gate electrode configuration,including Bulk-HC and FD-SOI-HC VNWFET,is proposed and investigated by TCAD simulat... A new type of vertical nanowire(VNW)/nanosheet(VNS)FETs combining a horizontal channel(HC)with bulk/back-gate electrode configuration,including Bulk-HC and FD-SOI-HC VNWFET,is proposed and investigated by TCAD simulation.Comparisons were carried out between conventional VNWFET and the proposed devices.FD-SOI-HC VNWFET exhibits better Ion/Ioff ratio and DIBL than Bulk-HC VNWFET.The impact of channel doping and geometric parameters on the electrical character-istic and body factor(γ)of the devices was investigated.Moreover,threshold voltage modulation by bulk/back-gate bias was im-plemented and a largeγis achieved for wide range V_(th)modulation.In addition,results of I_(on)enhancement and Ioff reduction in-dicate the proposed devices are promising candidates for performance and power optimization of NW/NS circuits by adopting dynamic threshold voltage management.The results of preliminary experimental data are discussed as well. 展开更多
关键词 vertical nanowire NANOSHEET silicon on insulator(SOI) threshold voltage multi-V_(th) threshold voltage modulation
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A Method to Separate Effects of Oxide-Trapped Charge and Interface-Trapped Charge on Threshold Voltage in pMOSFETs Under Hot-Carrier Stress
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作者 杨国勇 王金延 +3 位作者 霍宗亮 毛凌锋 谭长华 许铭真 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2003年第7期673-679,共7页
A simple new method based on the measurement of charge pumping technique is proposed to separate and quantify experimentally the effects of oxide-trapped charges and interface-trapped charges on threshold voltage degr... A simple new method based on the measurement of charge pumping technique is proposed to separate and quantify experimentally the effects of oxide-trapped charges and interface-trapped charges on threshold voltage degradation in p-channel metal-oxide-semiconductor field-effect transistors (pMOSFETs) under hot-carrier stress.Further,the experimental results verify the validness of this method.It is shown that,all three mechanisms of electron trapping effect,hole trapping effect and interface trap generation play important roles in p-channel MOSFETs degradation.It is noted that interface-trapped charge is still the dominant mechanism for hot-carrier-induced degradation in p-channel MOSFETs,while a significant contribution of oxide-trapped charge to threshold voltage is demonstrated and quantified. 展开更多
关键词 MOS device oxide trap interface trap hot-carrier degradation threshold voltage
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Threshold Voltage Model of a Double-Gate MOSFET with Schottky Source and Drain
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作者 徐博卷 杜刚 +3 位作者 夏志良 曾朗 韩汝琦 刘晓彦 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2007年第8期1179-1183,共5页
A quasi two-dimensional (2D) analytical model of a double-gate (DG) MOSFET with Schottky source/drain is developed based on the Poisson equation.The 2D potential distribution in the channel is calculated.An expres... A quasi two-dimensional (2D) analytical model of a double-gate (DG) MOSFET with Schottky source/drain is developed based on the Poisson equation.The 2D potential distribution in the channel is calculated.An expression for threshold voltage for a short-channel DG MOSFET with Schottky S/D is also presented by defining the turn-on condition.The results of the model are verified by the numerical simulator DESSIS-ISE. 展开更多
关键词 DOUBLE-GATE Schottky barrier threshold voltage
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A Temperature-Dependent Model for Threshold Voltage and Potential Distribution of Fully Depleted SOI MOSFETs
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作者 唐俊雄 唐明华 +3 位作者 杨锋 张俊杰 周益春 郑学军 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2008年第1期45-49,共5页
A temperature-dependent model for threshold voltage and potential distribution of fully depleted silicon-on- insulator metal-oxide-semiconductor field-effect transistors is developed. The two-dimensional potential dis... A temperature-dependent model for threshold voltage and potential distribution of fully depleted silicon-on- insulator metal-oxide-semiconductor field-effect transistors is developed. The two-dimensional potential distribution function in the silicon thin film based on an approximate parabolic function has been applied to solve the two-dimensional Poisson's equation with suitable boundary conditions. The minimum of the surface potential is used to deduce the threshold voltage model. The model reveals the variations of potential distribution and threshold voltage with temperature, taking into account short-channel effects. Furthermore, the model is verified by the SILVACO ATLAS simulation. The calculations and the simulation agree well. 展开更多
关键词 fully depleted silicon-on-insulator MOSFETs POTENTIAL threshold voltage
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Analytical Modeling of Threshold Voltage for Double-Gate MOSFET Fully Comprising Quantum Mechanical Effects
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作者 张大伟 田立林 余志平 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2005年第3期429-435,共7页
The analytical solutions to 1D Schrdinger equation (in depth direction) in double gate (DG) MOSFETs are derived to calculate electron density and threshold voltage.The non uniform potential in the channel is concern... The analytical solutions to 1D Schrdinger equation (in depth direction) in double gate (DG) MOSFETs are derived to calculate electron density and threshold voltage.The non uniform potential in the channel is concerned with an arbitrary depth so that the analytical solutions agree well with numerical ones.Then,an implicit expression for electron density and a closed form of threshold voltage are presented fully comprising quantum mechanical (QM) effects.This model predicts an increased electron density with an increasing channel depth in subthreshold region or mild inversion region.However,it becomes independent on channel depth in strong inversion region,which is in accordance with numerical analysis.It is also concluded that the QM model,which barely considers a box like potential in the channel,slightly over predicts threshold voltage and underestimates electron density,and the error increases with an increasing channel depth or a decreasing gate oxide thickness. 展开更多
关键词 DG MOSFET 1D analytical QM solution non uniform potential in channel depth direction electron density threshold voltage channel depth
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Compact Threshold Voltage Model for FinFETs
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作者 张大伟 田立林 余志平 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2005年第4期667-671,共5页
A 2D analytical electrostatics analysis for the cross-section of a FinFET (or tri-gate MOSFET) is performed to calculate the threshold voltage.The analysis results in a modified gate capacitance with a coefficient H i... A 2D analytical electrostatics analysis for the cross-section of a FinFET (or tri-gate MOSFET) is performed to calculate the threshold voltage.The analysis results in a modified gate capacitance with a coefficient H introduced to model the effect of tri-gates and its asymptotic behavior in 2D is that for double-gate MOSFET.The potential profile obtained analytically at the cross-section agrees well with numerical simulations.A compact threshold voltage model for FinFET,comprising quantum mechanical effects,is then proposed.It is concluded that both gate capacitance and threshold voltage will increase with a decreased height,or a decreased gate-oxide thickness of the top gate,which is a trend in FinFET design. 展开更多
关键词 FINFET 2D analytical electrostatic analysis compact model threshold voltage
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Effect of X-ray irradiation on threshold voltage of AlGaN/GaN HEMTs with p-GaN and MIS Gates 被引量:3
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作者 Yongle Qi Denggui Wang +4 位作者 Jianjun Zhou Kai Zhang Yuechan Kong Suzhen Wu Tangsheng Chen 《Nanotechnology and Precision Engineering》 CAS CSCD 2020年第4期241-243,共3页
Commercially available AlGaN/GaN high-electron-mobility transistors(HEMTs)are beginning to enter the public scene froma range of suppliers.Based on previous studies,commercial GaN-based electronics are expected to be ... Commercially available AlGaN/GaN high-electron-mobility transistors(HEMTs)are beginning to enter the public scene froma range of suppliers.Based on previous studies,commercial GaN-based electronics are expected to be tolerant to different types of irradiation in space.To test this assumption,we compared the characteristic electrical curves obtained at different X-ray irradiation doses for GaN HEMT devices manufactured by Infineon and Transphorm.The p-GaN-based device was found to be more robust with a stable threshold voltage,whereas the threshold voltage of the device with ametal-insulator-semiconductor gatewas found to shift first in the negative and then the positive direction.This dynamic phenomenon is caused by the releasing and trapping effects of radiation-induced charges in the dielectric layer and at the interface of irradiated devices.As such,the p-GaNgate-based GaN HEMT provides a promising solution for use as an electric source in space. 展开更多
关键词 p-GaN gate GaN HEMTs X-ray irradiation threshold voltage
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The effect of substrate doping on the flatband and threshold voltages of a strained-Si pMOSFET 被引量:1
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作者 王斌 张鹤鸣 +4 位作者 胡辉勇 张玉明 周春宇 王冠宇 李妤晨 《Chinese Physics B》 SCIE EI CAS CSCD 2013年第2期539-544,共6页
The effect of substrate doping on the flatband and threshold voltages of a strained-Si/SiGe p metal-oxide semiconductor field-effect transistor(pMOSFET) has been studied.By physically deriving the models of the flat... The effect of substrate doping on the flatband and threshold voltages of a strained-Si/SiGe p metal-oxide semiconductor field-effect transistor(pMOSFET) has been studied.By physically deriving the models of the flatband and threshold voltages,which have been validated by numerical simulation and experimental data,the shift in the plateau from the inversion region to the accumulation region as the substrate doping increases has been explained.The proposed model can provide a valuable reference to the designers of strained-Si devices and has been implemented in software for extracting the parameters of a strained-Si MOSFET. 展开更多
关键词 strained-Si pMOSFET flatband voltage threshold voltage DOPING
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A two-dimensional analytical model for channel potential and threshold voltage of short channel dual material gate lightly doped drain MOSFET 被引量:1
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作者 Shweta Tripathi 《Chinese Physics B》 SCIE EI CAS CSCD 2014年第11期620-625,共6页
An analytical model for the channel potential and the threshold voltage of the short channel dual-material-gate lightly doped drain (DMG-LDD) metal-oxide-semiconductor field-effect transistor (MOSFET) is presented... An analytical model for the channel potential and the threshold voltage of the short channel dual-material-gate lightly doped drain (DMG-LDD) metal-oxide-semiconductor field-effect transistor (MOSFET) is presented using the parabolic approximation method. The proposed model takes into account the effects of the LDD region length, the LDD region doping, the lengths of the gate materials and their respective work functions, along with all the major geometrical parameters of the MOSFET. The impact of the LDD region length, the LDD region doping, and the channel length on the channel potential is studied in detail. Furthermore, the threshold voltage of the device is calculated using the minimum middle channel potential, and the result obtained is compared with the DMG MOSFET threshold voltage to show the improvement in the threshold voltage roll-off. It is shown that the DMG-LDD MOSFET structure alleviates the problem of short channel effects (SCEs) and the drain induced barrier lowering (DIBL) more efficiently. The proposed model is verified by comparing the theoretical results with the simulated data obtained by using the commercially available ATLASTM 2D device simulator. 展开更多
关键词 dual-material-gate MOSFET lightly doped drain short channel effect threshold voltage
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An analytical threshold voltage model for dual-strained channel PMOSFET 被引量:1
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作者 秦珊珊 张鹤鸣 +3 位作者 胡辉勇 戴显英 宣荣喜 舒斌 《Chinese Physics B》 SCIE EI CAS CSCD 2010年第11期608-614,共7页
Based on the analysis of vertical electric potential distribution across the dual-channel strained p-type Si/strained Si1-xGex/relaxd Si1-yGey(s-Si/s-SiGe/Si1-yGey) metal-oxide-semiconductor field-effect transistor ... Based on the analysis of vertical electric potential distribution across the dual-channel strained p-type Si/strained Si1-xGex/relaxd Si1-yGey(s-Si/s-SiGe/Si1-yGey) metal-oxide-semiconductor field-effect transistor (PMOSFET), analytical expressions of the threshold voltages for buried channel and surface channel are presented. And the maximum allowed thickness of s-Si is given, which can ensure that the strong inversion appears earlier in the buried channel (compressive strained SiGe) than in the surface channel (tensile strained Si), because the hole mobility in the buried channel is higher than that in the surface channel. Thus they offer a good accuracy as compared with the results of device simulator ISE. With this model, the variations of threshold voltage and maximum allowed thickness of s-Si with design parameters can be predicted, such as Ge fraction, layer thickness, and doping concentration. This model can serve as a useful tool for p-channel s-Si/s-SiGe/Si1-yGey metal-oxide-semiconductor field-effect transistor (MOSFET) designs. 展开更多
关键词 strained Si strained SiGe dual-channel metal-oxide-semiconductor field-effect transistor (MOSFET) threshold voltage
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Investigation on threshold voltage of p-channel GaN MOSFETs based on p-GaN/AlGaN/GaN heterostructure 被引量:1
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作者 Ruo-Han Li Wu-Xiong Fei +8 位作者 Rui Tang Zhao-Xi Wu Chao Duan Tao Zhang Dan Zhu Wei-Hang Zhang Sheng-Lei Zhao Jin-Cheng Zhang Yue Hao 《Chinese Physics B》 SCIE EI CAS CSCD 2021年第8期480-484,共5页
The threshold voltage(V_(th))of the p-channel metal-oxide-semiconductor field-effect transistors(MOSFETs)is investigated via Silvaco-Atlas simulations.The main factors which influence the threshold voltage of p-channe... The threshold voltage(V_(th))of the p-channel metal-oxide-semiconductor field-effect transistors(MOSFETs)is investigated via Silvaco-Atlas simulations.The main factors which influence the threshold voltage of p-channel GaN MOSFETs are barrier heightΦ_(1,p),polarization charge density σ_(b),and equivalent unite capacitance C_(oc).It is found that the thinner thickness of p-GaN layer and oxide layer will acquire the more negative threshold voltage V_(th),and threshold voltage|V_(th)|increases with the reduction in p-GaN doping concentration and the work-function of gate metal.Meanwhile,the increase in gate dielectric relative permittivity may cause the increase in threshold voltage|V_(th)|.Additionally,the parameter influencing output current most is the p-GaN doping concentration,and the maximum current density is 9.5 mA/mm with p-type doping concentration of 9.5×10^(16) cm^(-3) at VGS=-12 V and VDS=-10 V. 展开更多
关键词 p-channel GaN MOSFETs enhancement mode(E-mode) threshold voltage
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A two-dimensional threshold voltage analytical model for metal-gate/high-k/SiO_2 /Si stacked MOSFETs
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作者 马飞 刘红侠 +1 位作者 樊继斌 王树龙 《Chinese Physics B》 SCIE EI CAS CSCD 2012年第10期439-445,共7页
In this paper the influences of the metal-gate and high-k/SiO 2 /Si stacked structure on the metal-oxide-semiconductor field-effect transistor(MOSFET) are investigated.The flat-band voltage is revised by considering... In this paper the influences of the metal-gate and high-k/SiO 2 /Si stacked structure on the metal-oxide-semiconductor field-effect transistor(MOSFET) are investigated.The flat-band voltage is revised by considering the influences of stacked structure and metal-semiconductor work function fluctuation.The two-dimensional Poisson's equation of potential distribution is presented.A threshold voltage analytical model for metal-gate/high-k/SiO 2 /Si stacked MOSFETs is developed by solving these Poisson's equations using the boundary conditions.The model is verified by a two-dimensional device simulator,which provides the basic design guidance for metal-gate/high-k/SiO 2 /Si stacked MOSFETs. 展开更多
关键词 metal-gate HIGH-K work function flat-band voltage threshold voltage metal-oxide-semiconductor field-effect transistor
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Effect of substrate doping on threshold voltages of buried channel pMOSFET based on strained-SiGe technology
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作者 王斌 张鹤鸣 +3 位作者 胡辉勇 张玉明 周春宇 李妤晨 《Journal of Central South University》 SCIE EI CAS 2014年第6期2292-2297,共6页
The effect of substrate doping on the threshold voltages of buried channel pMOSFET based on strained-SiGe technology was studied.By physically deriving the models of the threshold voltages,it is found that the layer w... The effect of substrate doping on the threshold voltages of buried channel pMOSFET based on strained-SiGe technology was studied.By physically deriving the models of the threshold voltages,it is found that the layer which inversely occurs first is substrate doping dependent,giving explanation for the variation of plateau observed in the C-V characteristics of this device,as the doping concentration increases.The threshold voltages obtained from the proposed model are-1.2805 V for buried channel and-2.9358 V for surface channel at a lightly doping case,and-3.41 V for surface channel at a heavily doping case,which agrees well with the experimental results.Also,the variations of the threshold voltages with several device parameters are discussed,which provides valuable reference to the designers of strained-SiGe devices. 展开更多
关键词 buried pMOSFET strained SiGe plateau threshold voltage substrate doping Ge fraction
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Double-gate tunnel field-effect transistor:Gate threshold voltage modeling and extraction
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作者 李妤晨 张鹤鸣 +3 位作者 胡辉勇 张玉明 王斌 周春宇 《Journal of Central South University》 SCIE EI CAS 2014年第2期587-592,共6页
The tunnel field-effect transistor(TFET) is a potential candidate for the post-CMOS era.As one of the most important electrical parameters of a device,double gate TFET(DG-TFET) gate threshold voltage was studied.First... The tunnel field-effect transistor(TFET) is a potential candidate for the post-CMOS era.As one of the most important electrical parameters of a device,double gate TFET(DG-TFET) gate threshold voltage was studied.First,a numerical simulation study of transfer characteristic and gate threshold voltage in DG-TFET was reported.Then,a simple analytical model for DG-TFET gate threshold voltage VTG was built by solving quasi-two-dimensional Poisson equation in Si film.The model as a function of the drain voltage,the Si layer thickness,the gate length and the gate dielectric was discussed.It is shown that the proposed model is consistent with the simulation results.This model should be useful for further investigation of performance of circuits containing TFETs. 展开更多
关键词 tunnel field-effect transistor gated P-I-N diode threshold voltage modeling EXTRACTION
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A threshold voltage model MOSFETs considering for high-k gate-dielectric fringing-field effect
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作者 季峰 徐静平 黎沛涛 《Chinese Physics B》 SCIE EI CAS CSCD 2007年第6期1757-1763,共7页
In this paper, a threshold voltage model for high-k gate-dielectric metal-oxide-semiconductor field-effect transistors (MOSFETs) is developed, with more accurate boundary conditions of the gate dielectric derived th... In this paper, a threshold voltage model for high-k gate-dielectric metal-oxide-semiconductor field-effect transistors (MOSFETs) is developed, with more accurate boundary conditions of the gate dielectric derived through a conformal mapping transformation method to consider the fringing-field effects including the influences of high-k gate-dielectric and sidewall spacer. Comparing with similar models, the proposed model can be applied to general situations where the gate dielectric and sidewall spacer can have different dielectric constants. The influences of sidewall spacer and high-k gate dielectric on fringing field distribution of the gate dielectric and thus threshold voltage behaviours of a MOSFET are discussed in detail. 展开更多
关键词 threshold voltage MOSFET conformal mapping fringing field
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