Surface texturing is a widely accepted approach for friction reduction between mechanical components. Through-mask electrochemical mieromachining is a simple and reliable process for metal surface texturing in which m...Surface texturing is a widely accepted approach for friction reduction between mechanical components. Through-mask electrochemical mieromachining is a simple and reliable process for metal surface texturing in which mass transport conditions have profound influence on final machined quality. An ultrasonic stirrer is usually adopted for mass transfer enhancement. However, understanding of the effects of ultrasonic stirring on mass transfer is limited, and is far from sufficient for developing guidelines for its practical application. In this work, the influences of ultrasonic stirring parameters on mass transfer have been investigated numerically and experimentally. With the numerical method, periodic pressure change in the electrolyte over time has been obtained, showing that ultrasonic stirring results in drastic transient pressure change in electrolyte fluid fields. Parameters related to ultrasonic frequency, vibration amplitude, and the depth of anode surface immersed in the electrolyte solution influence pressure amplitude. Validation experiments have been conducted and etched surface profile and morphology characterized, which show that the experimental observations are in agreement with numerical predictions. With the optimized mass transfer, well-defined micro-pits array of 30 gm and a smooth etched surface on tin-bronze substrate in large scale have been demonstrated.展开更多
Electrochemical machining(ECM) is an important machining technique for the aeronautical manufacturing industry. Through-mask ECM is a form of ECM for machining metal parts with a hole array. In order to extend the mac...Electrochemical machining(ECM) is an important machining technique for the aeronautical manufacturing industry. Through-mask ECM is a form of ECM for machining metal parts with a hole array. In order to extend the machining area, a serpentine flow channel with multiple curves was used for through-mask ECM. With the extension of the flow channel, ensuring a machining consistency along the flow channel has been a challenge. The electrolyte conductivity is the main factor affecting the machining consistency. To analyze the change rules of the electrolyte conductivity, variations in the bubble rate and the temperature of the electrolyte in the electrolyte flow were explored under different power sources. Results indicate that pulse-power machining can reduce variations in the bubble rate and the temperature in the serpentine flow channel, and then the electrolyte conductivity can be stabilized within a very small range. Experiments using through-mask ECM were conducted in two types of power sources. Experimental results support the importance of pulse-power machining. A 14×28 hole array with a 2.5 mm diameter was fabricated by a pulsed power source. The aperture deviation of the hole array is less than 0.05 mm, and the roundness deviation is less than 15 lm when fabricated with pulse machining.展开更多
Invar alloy consisting of 64% iron and 36% nickel has been widely used for the production of shadow masks for organic light emitting diodes（OLEDs） because of its low thermal expansion coefficient（1.86 × 10^-6c...Invar alloy consisting of 64% iron and 36% nickel has been widely used for the production of shadow masks for organic light emitting diodes（OLEDs） because of its low thermal expansion coefficient（1.86 × 10^-6cm/°C）.To fabricate micro-hole arrays on 30 lm invar alloy film,through-mask electrochemical micromachining（TMEMM） was developed and combined with a portion of the photolithography etching process.For precise hole shapes,patterned photoresist（PR） film was applied as an insulating mask.To investigate the relationship between the current density and the material removal rate,the principle of the electrochemical machining was studied with a focus on the equation.The finite element method（FEM） was used to verify the influence of each parameter on the current density on the invar alloy film surface.The parameters considered were the thickness of the PR mask,inter-electrode gap（IEG）,and electrolyte concentration.Design of experiments（DOE） was used to figure out the contribution of each parameter.A simulation was conducted with varying parameters to figure out their relationships with the current density.Optimization was conducted to select the suitable conditions.An experiment was carried out to verify the simulation results.It was possible to fabricate micro-hole arrays on invar alloy film using TMEMM,which is a promising method that can be applied to fabrications of OLEDs shadow masks.展开更多
基金supported by the National Natural Science Foundation of China(Grant Nos.51375381,51775431,51675422&51575427)
文摘Surface texturing is a widely accepted approach for friction reduction between mechanical components. Through-mask electrochemical mieromachining is a simple and reliable process for metal surface texturing in which mass transport conditions have profound influence on final machined quality. An ultrasonic stirrer is usually adopted for mass transfer enhancement. However, understanding of the effects of ultrasonic stirring on mass transfer is limited, and is far from sufficient for developing guidelines for its practical application. In this work, the influences of ultrasonic stirring parameters on mass transfer have been investigated numerically and experimentally. With the numerical method, periodic pressure change in the electrolyte over time has been obtained, showing that ultrasonic stirring results in drastic transient pressure change in electrolyte fluid fields. Parameters related to ultrasonic frequency, vibration amplitude, and the depth of anode surface immersed in the electrolyte solution influence pressure amplitude. Validation experiments have been conducted and etched surface profile and morphology characterized, which show that the experimental observations are in agreement with numerical predictions. With the optimized mass transfer, well-defined micro-pits array of 30 gm and a smooth etched surface on tin-bronze substrate in large scale have been demonstrated.
基金supported financially by the National Natural Science Foundation of China(No.51535006)
文摘Electrochemical machining(ECM) is an important machining technique for the aeronautical manufacturing industry. Through-mask ECM is a form of ECM for machining metal parts with a hole array. In order to extend the machining area, a serpentine flow channel with multiple curves was used for through-mask ECM. With the extension of the flow channel, ensuring a machining consistency along the flow channel has been a challenge. The electrolyte conductivity is the main factor affecting the machining consistency. To analyze the change rules of the electrolyte conductivity, variations in the bubble rate and the temperature of the electrolyte in the electrolyte flow were explored under different power sources. Results indicate that pulse-power machining can reduce variations in the bubble rate and the temperature in the serpentine flow channel, and then the electrolyte conductivity can be stabilized within a very small range. Experiments using through-mask ECM were conducted in two types of power sources. Experimental results support the importance of pulse-power machining. A 14×28 hole array with a 2.5 mm diameter was fabricated by a pulsed power source. The aperture deviation of the hole array is less than 0.05 mm, and the roundness deviation is less than 15 lm when fabricated with pulse machining.
基金supported by the National Research Foundation of Korea(NRF)grant funded by the Korean government(MSIP)(No.2015R1A2A1A15054116)
文摘Invar alloy consisting of 64% iron and 36% nickel has been widely used for the production of shadow masks for organic light emitting diodes（OLEDs） because of its low thermal expansion coefficient（1.86 × 10^-6cm/°C）.To fabricate micro-hole arrays on 30 lm invar alloy film,through-mask electrochemical micromachining（TMEMM） was developed and combined with a portion of the photolithography etching process.For precise hole shapes,patterned photoresist（PR） film was applied as an insulating mask.To investigate the relationship between the current density and the material removal rate,the principle of the electrochemical machining was studied with a focus on the equation.The finite element method（FEM） was used to verify the influence of each parameter on the current density on the invar alloy film surface.The parameters considered were the thickness of the PR mask,inter-electrode gap（IEG）,and electrolyte concentration.Design of experiments（DOE） was used to figure out the contribution of each parameter.A simulation was conducted with varying parameters to figure out their relationships with the current density.Optimization was conducted to select the suitable conditions.An experiment was carried out to verify the simulation results.It was possible to fabricate micro-hole arrays on invar alloy film using TMEMM,which is a promising method that can be applied to fabrications of OLEDs shadow masks.
