Review of Electronic Speckle Pattern Interferometry(ESPI) for Three Dimensional Displacement Measurement

Three dimensional（3D） displacements, which can be translated further into 3D strain, are key parameters tor design, manufacturing and quality control. Using different optical setups, phase-shift methods, and algorithms, several different 3D electronic speckle pattern interferometry（ESPl） systems for displacement and strain measurements have been achieved and commercialized. This paper provides a review of the recent developments in ESPI systems for 3D displacement and strain measurement. After an overview of the fundamentals of ESP! theory, temporal phase-shift, and spatial phase-shift techniques, 3D deformation measurements by the temporal phase-shift ESPI system, which is suited well for static measurement, and by the spatial phase-shift ESPI system, which is particularly useful for dynamic measurement, are discussed. For each method, the basic theory, a brief derivation and different optical layouts are presented. The state of art application, potential and limitation of the ESPI systems are shown and demonstrated.

Measuring Vibration of Body with Speckle Interferometry

Speckle interferometry is an efficient method to analyze a vibration. In certain conditions, this technique has some outstanding advantage, and need not strict shock--proof condition, compared with the holographic method for measuring vibration. Therefore,it is suitable to analyze a vibration with a large amplitude.Real-time interferometry is a rapid and simple method for measuring vibration of a body, gives speckle pattern containing amplitude distribution of body-surface. By means of time-averaged method, the speckle pattern is recorded in Fourier transform plane, or vibration lines are seen directly with eyes, so as to analyze efficiently amplitude, phase, and model of a vibration. This paper deduces the intensity distribution function with real-time method, and gives experimental demonstration of vibration body-the vibration lines with different frequencies.

New speckle pattern interferometry for precise in situ deformation measurements

A new electronic speckle pattern interferometry method is proposed to realize in situ deformation measurements.The feature of the method is the combination of a high-speed camera and multiple laser Doppler vibrometers(LDVs)for synchronous measurements.The high-speed camera is used to record and select effective interferograms,while the LDVs are used to measure the rigid body displacement caused by vibrations.A series of effective interferograms with known shifted phase values are obtained to calculate the deformation phase.The experimental results show that the method performs well in measuring static and dynamic deformations with high accuracy in vibrating environments.

Measurement of out-of-plane deformation of curved objects with digital speckle pattern interferometry

Digital speckle pattern interferometry （DSPI） is a high-precision deformation t technique for planar objects. However, for curved objects, the three-dimensional （3D） shape information is needed in order to obtain correct deformation measurement in DSPI. Thus, combined shape and deformation measurement techniques of DSPI have been proposed. However, the current techniques are either complex in setup or complicated in operation. Furthermore, the operations of some techniques are too slow for real-time measurement. In this work, we propose a DSPI technique for both 3D shape and out-of-plane deformation measurement. Compared with current techniques, the proposed technique is simple in both setup and operation and is capable of fast deformation measurement. Theoretical analysis and experiments are performed. For a cylinder surface with an arch height of 9 mm, the error of out-of-plane deformation measurement is less than 0.15 μm. The effectiveness of the proposed scheme is verified.

Simultaneous 2D in-plane deformation measurement using electronic speckle pattern interferometry with double phase modulations

Electronic speckle pattern interferometry（ESPI） and digital speckle pattern interferometry are wellestablished non-contact measurement methods. They have been widely used to carry out precise deformation mapping. However, the simultaneous two-dimensional（2D） or three-dimensional（3D） deformation measurements using ESPI with phase shifting usually involve complicated and slow equipment. In this Letter, we solve these issues by proposing a modified ESPI system based on double phase modulations with only one laser and one camera. In-plane normal and shear strains are obtained with good quality. This system can also be developed to measure 3D deformation, and it has the potential to carry out faster measurements with a highspeed camera.

激光电子散斑干涉法隐形牙齿矫治器全场变形测量

构建三维表面微变形同步干涉测量系统,客观准确地测量隐形矫治器的全场变形信息,为提高其临床矫治效能以及安全性提供数据支持。由蓝绿红激光构建三组各自独立的散斑干涉光路,用于同步测量物体表面的二维面内和一维离面变形,利用一个集成相移装置实现三色激光准90°步长的同步相移,并由一台3CCD彩色相机同时记录三色散斑干涉图。通过四步相移算法从分离的红、蓝及绿色散斑干涉图中计算出与离面和面内变形相关的干涉条纹相位;最后,结合自适应条纹滤波和数字差分算法计算得到与表面变形有关的6个应变分量。微转动实验表明:系统的微转角测量精度为2.4",变形测量精度为10με(微应变)。对隐形矫治器的变形测量结果分析表明,矫治器的变形效用与设定的矫治目标相一致。

A sequence pulse counting method for shape measurement in dual-beam speckle interferometry

A temporal approach to fast shape measurement is presented.In principle,the rotational object method is used in combination with the sequence pulse counting method (SPCM) to determine the height of the object through calculating the related phase.Two specimens are tested to demonstrate the validity of the approach.One is an object covered by a Chinese character (tea) with a height variety of 0.3 mm,and the other is an object surface with a relatively large fluctuation of 3.5 mm.The experimental results are compared with mechanical measurements.An axis shifting method is also proposed to determine shapes with relatively large fluctuations.Effects of such parameters on the height measurement as incident angle of the dual light beams,tilting angle of the object,and azimuth angle of the measured point are discussed as well.

数字散斑干涉技术及应用

介绍了数字散斑干涉技术在位移、应变、振动和医学诊断等领域中的应用和国内外发展状况。提出了一种新的应用领域———数字散斑干涉技术在语音识别中的应用 ,并对该方法作了介绍 。

散斑干涉相位条纹图的频域滤波处理

为了解决在数字散斑干涉技术测量时,散斑干涉相位条纹图像中大量噪声对相位解包裹结果和精度产生严重影响的问题,介绍了一种条纹正余弦分解和频域低通滤波结合的方法,实现了散斑干涉相位条纹图的高精度滤波。该方法的基本思路是在对相位图像进行滤波处理前,先将相位图通过正余弦函数进行映射转换成两幅图,分别经过频域滤波,然后再合成为相位图。这种分解频域滤波方法可以在滤波的同时,有效保留相位跳变信息。实验结果表明：与传统的图像降噪方法相比,该方法能够在保留图像＂尖峰＂信息的基础上,较好地滤除图像中的散斑噪声,方法简单有效,有效解决了传统滤波方法应用在相位条纹图中,相图灰度信息丢失10%~40%的问题。

一种改进的载波电子散斑干涉处理方法

提出了一种新的载波电子散斑干涉的处理方法,该方法将载波所形成的直条纹和包含物体变形信息的弯曲条纹在频域直接比较,避免了传统载波干涉方法中的载波频率计算和由此带来的误差 因此在准确程度和方便性方面都有明显改进 本文在给出理论分析的同时进行了实验验证.

三维电子散斑干涉载频调制及其在柴油机上的应用

将电子散斑干涉场的三维载波调制技术应用到三维物体变形测量中.用水平方向、竖直方向及垂直试件表面的三路相干光分别照明物体,在水平和竖直方向通过控制反射镜的微小偏转引入载波,实现位移场干涉条纹的调制;利用物体的微小偏转实现离面位移场干涉条纹的调制;结合傅里叶变换法,分别解调出变形场的位相,从而实现了物体三维变形场的精确测量.将该技术应用到柴油机油泵的三维位移测量上,成功测量了油泵的三维位移场.

时间序列散斑干涉技术研究及应用

当用相干激光照射在一个连续位移或变形的漫射物体表面时 ,在与参考光形成干涉的接收面上即产生一随时间变化的散斑干涉场 通过对这一干涉场的时间域进行分析 ,可实现时变位移场的定量检测 本文介绍了基本时间序列散斑干涉场的扫描相位方法和时间序列相位法的相位函数解调原理 ,探讨了它们的计量特性 。

电子散斑干涉载频调制形貌测量方法的分析

根据电子散斑干涉载频调制测量物体形貌的基本原理,物体表面的微小偏转可引入包含物体高度信息的载波干涉条纹。将物体的偏转视为变形,对物体变形与载波干涉条纹之间的关系进行了讨论,得出了离面位移引入载波和面内位移引入含有物体高度信息相位的结论。发现利用典型电子散斑干涉系统测量物体形貌效果最好,并通过实验得到了验证。

双目视觉DIC测量系统的离面位移测量精度

采用离面位移测量精度达到10nm～20nm的电子散斑干涉测量系统验证了双目视觉数字散斑相关测量系统的离面位移测量精度。分别用电子散斑干涉测量系统和双目视觉数字散斑相关测量系统同时测量了平板离面位移,并对所测量的位移最大值进行了分析处理及比较。结果表明,双目视觉数字散斑相关测量系统的物体离面位移分布云图与电子散斑干涉测量系统的结果基本相同,且两者位移均方根相差为2.76μm～3.56μm,相对误差为4.59%～7.60%。因此,当被测量物体的离面位移大于4μm时,双目视觉Q400测量系统精度可达到电子散斑干涉测量系统的精度。

基于条纹中心线法的电子散斑干涉条纹信息提取

电子散斑干涉技术(ESPI)是光学测量的一种重要的方法,对ESPI条纹的信息提取是ESPI进行光学测量的关键步骤之一,本文在介绍电子散斑干涉条纹中心线法的基础上,开展了ESPI条纹图预处理和基于条纹细化算法的骨架线提取的研究,包括对细化的条纹进行修整、拟合,该方法可以实现条纹骨架的快速、准确的自动提取。设计了一套应力形变装置,运用电子散斑干涉条纹中心线法对试件表面的形变进行实际检测,得到测量结果,对结果进行了分析,实验测量值与实际相符。

聚碳酸酯拉伸应变局部化实验

采用电子散斑技术对聚碳酸酯材料拉伸过程的表面变形进行了实验研究,量化得到了试验在拉伸载荷作用下的连续变形分布,用扫描电镜(SEM)观察了断口形貌。结果表明,在粘弹性区域,沿拉伸方向产生平行的形变带,离面位移随载荷之间而增大;在屈服区域,产生应变局部化,形成800μm的剪切带,而且聚碳酸酯的断裂是由局部应力集中所致,其裂纹传播由次裂纹扩展速度控制的,断面形貌具有典型的抛物线特征。

双光路电子散斑振动测量系统

本文给出了一种双光路电子散斑振动测量系统 ,该系统结合了普通 ESPI离面振动测量光路和退敏感光路 ,既能对较大振幅范围的振动进行定性观测 ,又能实现全场自动定量分析 ,同时避免了相位去包裹处理 .系统具有较高的抗干扰能力 ,可以应用于实际工程中复杂非连续结构的振动特性分析 .

相移测量技术中相移器研究

本文介绍一种用于相移测量技术的相移器。该相移器由计算机通过Ｄ／Ａ接口板自动控制输出电压幅度，其电路采用闭环控制，位移由压电晶体产生，具有很高的电压稳定度（０１％）和较小的相移误差（小于３°）。描述相移器的结构。

基于同态滤波的电子散斑干涉图像处理

由于散斑具有可测的强度和确定的相位,正逐渐被人们重视和进一步研究,现广泛应用于无损检测领域。电子散斑干涉条纹图上总是附带大量的随机散斑颗粒噪声。一般来说,散斑图像记录的变形信息主要集中在低频部分,而噪声主要在高频部分。为了得到变形物体的连续相位分布,需要用适当的方法对散斑干涉条纹图像进行滤波降噪处理。同态滤波是一种将亮度范围压缩和对比度增强的频域处理方法。采用基于同态滤波原理设计出的新的低通滤波器,将其运用于3步相移电子散斑干涉条纹图像处理,并从理论上进行了详细的论述。结果表明,运用该滤波器处理散斑条纹图像,过滤了大量的散斑颗粒噪声,增强了散斑干涉条纹的对比度。

用电子散斑法对纯镍薄片弯曲变形的测量

由于建立的电子散斑法有位移测量精度高、量程大的特点,且自制的力传感器灵敏度高、量程相 对较大,从而保证了本实验中镍片在三点弯中的反应被全程、精确地记录下来.基于时间序列的电子散斑法, 测出了10-100μm不同厚度的纯镍薄片在三点弯下的载荷-位移曲线,其中包括弹性部分以及进入塑性屈服 两个阶段,据此可以推出不同厚度镍片的三点弯刚度.实验表明镍片的抗弯刚度受其厚度的影响很大,尤其在 薄片厚度较小时表现得更为明显,即表现出明显的尺度效应.