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MICRO/NANO-MACHINING ON SILICON SURFACE WITH A MODIFIED ATOMIC FORCE MICROSCOPE 被引量:4
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作者 Zhao Qingliang,Sun Tao,Dong Shen,Liang Yingchun (School of Mechanical Engineering,Harbin Institute of Technology) 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2001年第3期207-211,共5页
To understand the deformation and removal mechanism of material on nano-scale at ultralow loads,a systemic study on AFM micro/nano-machining on single crystal ailicon is conducted. The results indicate that AFM nano- ... To understand the deformation and removal mechanism of material on nano-scale at ultralow loads,a systemic study on AFM micro/nano-machining on single crystal ailicon is conducted. The results indicate that AFM nano- machining has a precisely dimensional controllability and a good surface quality on nanometer scale.A SEM is adopted to observe nano-machined region and chips,the results indicate that the material removal mechanisms change with the applied normal load. An XPS is used to analyze the changes of chemical composition inside and outside the nano-machined region respectively.The nano-indentation which is conducted with the same AFM diamond tip on the machined region shows a big discrepancy compared with that on the macro-scale. The calculated results show higher nano-hardness and elastic modulus than normal values .This phenomenon on be regarded as the indentation size effect(ISE). 展开更多
关键词 Atomic force microscope Diamond tip Nano-machining Single crystal silicon Mechanical property
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SUB-NANOMETER POLISHING OF MAGNETIC RIGID DISK HEADS TO AVOID POLE TIP RECESSION 被引量:2
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作者 SHEN Rulin ZHOU Li ZHONG Jue 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2008年第4期7-10,共4页
For the purpose of solving the problem that too large pole tip recession (PTR) is produced in magnetic rigid disk heads by mechanical polishing, a chemical mechanical nano-grinding experiment is performed by using a... For the purpose of solving the problem that too large pole tip recession (PTR) is produced in magnetic rigid disk heads by mechanical polishing, a chemical mechanical nano-grinding experiment is performed by using a float-piece polisher with a tin plate to achieve a more plane and smoother surface. A basal solution, addition agents and a range of pH value are suitably selected to find a kind of slurry, with which the PTR can be controlled on sub-nanometer scale and the giant magnetic resistance (GMR) corrosion and electrostatic damage (ESD) can be avoided. Moreover, the cause that TiC protrudes from the substrate surface of the heads is studied. The appropriate shape and size of diamond abrasive are selected according to the chemical activation of A1203 and TiC in the same slurry. In this way, the chemical and mechanical interactions are optimized and the optimal surface that has small PTR and TiC asperity is achieved. Ultimatily, the chemical mechanical nano-grinding in combination with mechanical nano-grinding is adopted. Sub-nanometer PTR is achieved and the TiC asperity is eliminated by the chemical mechanical nano-grinding with large size ofmonocrystalline followed by mechanical nano-grinding with smalle polycrystalline diamonds. 展开更多
关键词 Polishing Magnetic rigid disk head Pole tip recession (PTR) Chemical mechanical nano-grinding
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CRACK TIP STRUCTURE AND DUCTILE-BRITTLE TRANSITION IN BULK SINGLE CRYSTALS 被引量:1
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《Acta Metallurgica Sinica(English Letters)》 SCIE EI CAS CSCD 1995年第1期1-9,共9页
Based on the crack tip structure a new model of ductile -brittle transition was proposed. Using this new model we calculated the dependence of the transition temperature-strain rate over a wide range of strain rate. F... Based on the crack tip structure a new model of ductile -brittle transition was proposed. Using this new model we calculated the dependence of the transition temperature-strain rate over a wide range of strain rate. Finally the significance of this new model is discussed in detail. 展开更多
关键词 fracture mechanics disllocation dislocation free zone. crack tip ductile-brittle transition
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