In order to elucidate the microstructure evolution and silicide precipitation behavior during high-temperature deformation,TiB reinforced titanium matrix composites were subjected to isothermal hot compression at 950...In order to elucidate the microstructure evolution and silicide precipitation behavior during high-temperature deformation,TiB reinforced titanium matrix composites were subjected to isothermal hot compression at 950℃,strain rate of 0.05 s^(−1) and employing different strains of 0.04,0.40,0.70 and 1.00.The results show that with the increase of strain,a decrease in the content,dynamic recrystallization of theαphase and the vertical distribution of TiB along the compression axis lead to stress stability.Meantime,continuous dynamic recrystallization reduces the orientation difference of the primaryαphase,which weakens the texture strength of the matrix.The recrystallization mechanisms are strain-induced grain boundary migration and particle stimulated nucleation by TiB.The silicide of Ti_(6)Si_(3) is mainly distributed at the interface of TiB andαphase.The precipitation of silicide is affected by element diffusion,and TiB whisker accelerates the precipitation behavior of silicide by hindering the movement of dislocations and providing nucleation particles.展开更多
Self-aligned Titanium Silicide (Salicide), Light-Doped Drain (LDD) technology was studied. Results show that, this technology suppresses effectivily short-channel effects. The sheet resistance of active region decreas...Self-aligned Titanium Silicide (Salicide), Light-Doped Drain (LDD) technology was studied. Results show that, this technology suppresses effectivily short-channel effects. The sheet resistance of active region decreases by four times. The sheet resistance of polysilicon gate region decreases by one order of magnitute. Using this technology, the speed of the 3 μm NMOS 12-bits multiplier increases by two times relative to conventional one.展开更多
基金financial supports from the National Natural Science Foundation of China (No. 51871184)the Natural Science Foundation of Shandong Province, China (No. ZR2019MEM037)+1 种基金the Zhoucun School-City Integration Development Plan, China (No. 2020ZCXCZH03)the School-city Integration Development Project of Zibo, China (No. 2019ZBXC022)。
文摘In order to elucidate the microstructure evolution and silicide precipitation behavior during high-temperature deformation,TiB reinforced titanium matrix composites were subjected to isothermal hot compression at 950℃,strain rate of 0.05 s^(−1) and employing different strains of 0.04,0.40,0.70 and 1.00.The results show that with the increase of strain,a decrease in the content,dynamic recrystallization of theαphase and the vertical distribution of TiB along the compression axis lead to stress stability.Meantime,continuous dynamic recrystallization reduces the orientation difference of the primaryαphase,which weakens the texture strength of the matrix.The recrystallization mechanisms are strain-induced grain boundary migration and particle stimulated nucleation by TiB.The silicide of Ti_(6)Si_(3) is mainly distributed at the interface of TiB andαphase.The precipitation of silicide is affected by element diffusion,and TiB whisker accelerates the precipitation behavior of silicide by hindering the movement of dislocations and providing nucleation particles.
文摘Self-aligned Titanium Silicide (Salicide), Light-Doped Drain (LDD) technology was studied. Results show that, this technology suppresses effectivily short-channel effects. The sheet resistance of active region decreases by four times. The sheet resistance of polysilicon gate region decreases by one order of magnitute. Using this technology, the speed of the 3 μm NMOS 12-bits multiplier increases by two times relative to conventional one.
基金the National Natural Science Foundation of China(Nos.51801156 and 52074231)the Chongqing Natural Science Foundation,China(No.cstc2020jcyj-msxm X1056)for the financial support to this work。
