Surface of Al 2O 3 ceramic was processed by an excimer laser and the characteristics of topography were examined based on the application of the microelectromechanical system(MEMS). It is indicated that the statisti...Surface of Al 2O 3 ceramic was processed by an excimer laser and the characteristics of topography were examined based on the application of the microelectromechanical system(MEMS). It is indicated that the statistic parameters of surface topography processed by the excimer laser have an obvious regularity. The arithmetic-mean value R a and the root-mean square value R q change with the changing of processing parameters in the same step and trend, and there is a quantitative relation between them.A simplified model is proposed for the excimer laser processing surface profile, whose results of the analysis and calculation agree basically with the experimental data. Furthermore,the surfaces processed by excimer laser are greatly flat. Skewness root-mean-square value Z· q changed little with the change of the technological parameters. The above characteristics depend on the processing principle of excimer laser, quite different from the cutting processing.展开更多
文摘Surface of Al 2O 3 ceramic was processed by an excimer laser and the characteristics of topography were examined based on the application of the microelectromechanical system(MEMS). It is indicated that the statistic parameters of surface topography processed by the excimer laser have an obvious regularity. The arithmetic-mean value R a and the root-mean square value R q change with the changing of processing parameters in the same step and trend, and there is a quantitative relation between them.A simplified model is proposed for the excimer laser processing surface profile, whose results of the analysis and calculation agree basically with the experimental data. Furthermore,the surfaces processed by excimer laser are greatly flat. Skewness root-mean-square value Z· q changed little with the change of the technological parameters. The above characteristics depend on the processing principle of excimer laser, quite different from the cutting processing.
