The total ionizing dose radiation effects in the polycrystalline silicon thin film transistors are studied. Transfer characteristics, high-frequency capacitance-voltage curves and low-frequency noises (LFN) are measur...The total ionizing dose radiation effects in the polycrystalline silicon thin film transistors are studied. Transfer characteristics, high-frequency capacitance-voltage curves and low-frequency noises (LFN) are measured before and after radiation. The experimental results show that threshold voltage and hole-field-effect mobility decrease, while sub-threshold swing and low-frequency noise increase with the increase of the total dose. The contributions of radiation induced interface states and oxide trapped charges to the shift of threshold voltage are also estimated. Furthermore, spatial distributions of oxide trapped charges before and after radiation are extracted based on the LFN measurements.展开更多
Thin gate oxide radio frequency (RF) PDSOI nMOSFETs that are suitable for integration with 0.1μm SO1 CMOS technology are fabricated, and the total ionizing dose radiation responses of the nMOSFETs having four diffe...Thin gate oxide radio frequency (RF) PDSOI nMOSFETs that are suitable for integration with 0.1μm SO1 CMOS technology are fabricated, and the total ionizing dose radiation responses of the nMOSFETs having four different device structures are characterized and compared for an equivalent gamma dose up to 1 Mrad (Si), using the front and back gate threshold voltages, off-state leakage, transconductance and output characteristics to assess direct current (DC) performance. Moreover, the frequency response of these devices under total ionizing dose radiation is presented, such as small-signal current gain and maximum available/stable gain. The results indicate that all the RF PDSOI nMOSFETs show significant degradation in both DC and RF characteristics after radiation, in particular to the float body nMOS. By comparison with the gate backside body contact (GBBC) structure and the body tied to source (BTS) contact structure, the low barrier body contact (LBBC) structure is more effective and excellent in the hardness of total ionizing dose radiation although there are some sacrifices in drive current, switching speed and high frequency response.展开更多
基金Supported by the National Natural Science Foundation of China under Grant Nos 61574048 and 61204112the Science and Technology Research Project of Guangdong Province under Grant Nos 2015B090912002 and 2014A030313656the Pearl River S&T Nova Program of Guangzhou
文摘The total ionizing dose radiation effects in the polycrystalline silicon thin film transistors are studied. Transfer characteristics, high-frequency capacitance-voltage curves and low-frequency noises (LFN) are measured before and after radiation. The experimental results show that threshold voltage and hole-field-effect mobility decrease, while sub-threshold swing and low-frequency noise increase with the increase of the total dose. The contributions of radiation induced interface states and oxide trapped charges to the shift of threshold voltage are also estimated. Furthermore, spatial distributions of oxide trapped charges before and after radiation are extracted based on the LFN measurements.
基金supported by the National Natural Science Foundation of China (No. 60576051)the State Key Development Program for BasicResearch of China (No. 2006CB3027-01)
文摘Thin gate oxide radio frequency (RF) PDSOI nMOSFETs that are suitable for integration with 0.1μm SO1 CMOS technology are fabricated, and the total ionizing dose radiation responses of the nMOSFETs having four different device structures are characterized and compared for an equivalent gamma dose up to 1 Mrad (Si), using the front and back gate threshold voltages, off-state leakage, transconductance and output characteristics to assess direct current (DC) performance. Moreover, the frequency response of these devices under total ionizing dose radiation is presented, such as small-signal current gain and maximum available/stable gain. The results indicate that all the RF PDSOI nMOSFETs show significant degradation in both DC and RF characteristics after radiation, in particular to the float body nMOS. By comparison with the gate backside body contact (GBBC) structure and the body tied to source (BTS) contact structure, the low barrier body contact (LBBC) structure is more effective and excellent in the hardness of total ionizing dose radiation although there are some sacrifices in drive current, switching speed and high frequency response.