We develop an x-ray Ti/Au transition-edge sensor(TES)with an Au absorber deposited on the center of TES and improved its energy resolution using the K-means clustering algorithm in combination with Wiener filter.We fi...We develop an x-ray Ti/Au transition-edge sensor(TES)with an Au absorber deposited on the center of TES and improved its energy resolution using the K-means clustering algorithm in combination with Wiener filter.We firstly extract the main parameters of each recorded pulse trace,which are adopted to classify these traces into several clusters in the K-means clustering algorithm.Then real traces are selected for energy resolution analysis.Following the baseline correction,the Wiener filter is used to improve the signal-to-noise ratio.Although the silicon underneath the TES has not been etched to reduce the thermal conductance,the energy resolution of the developed x-ray TES is improved from 94 eV to 44 eV at 5.9 keV.展开更多
The proximity effect to reduce the transition temperature of a superconducting film is frequently used in transitionedge sensors. Here, we develop these transition-edge sensors using Mo/Au/Au tri-layer films to detect...The proximity effect to reduce the transition temperature of a superconducting film is frequently used in transitionedge sensors. Here, we develop these transition-edge sensors using Mo/Au/Au tri-layer films to detect soft x-rays. They are equipped with an overhanging photon absorber. We reduce the fabrication complexity by integrating the sensor patterning with the tri-layer film formation. We determine the electro-thermal parameters of the sensors through a series of resistance vs. temperature and current vs. voltage measurements. We also demonstrate their energy-resolving capability by using a55Fe radioactive x-ray source. The best energy resolution was approximately 6.66 eV at 5.9 keV, with a theoretical count rate of 500 Hz.展开更多
Optical superconducting transition-edge sensor(TES)has been widely used in quantum information,biological imaging,and fluorescence microscopy owing to its high quantum efficiency,low dark count,and photon number resol...Optical superconducting transition-edge sensor(TES)has been widely used in quantum information,biological imaging,and fluorescence microscopy owing to its high quantum efficiency,low dark count,and photon number resolving capability.The temperature sensitivity(α_(I))and current sensitivity(β_(I))are important parameters for optical TESs,which are generally extracted from the complex impedance.Here we present a method to extractα_(I)andβ_(I)based on a two-fluid model and compare the calculated current-voltage curves,pulse response,and theoretical energy resolution with the measured ones.This method shows qualitative agreement that is suitable for further optimization of optical TESs.展开更多
For photon detection, superconducting transition-edge sensor(TES) micro-calorimeters are excellent energy-resolving devices. In this study, we report our recent work in developing Ti-/Au-based TES. The Ti/Au TES devic...For photon detection, superconducting transition-edge sensor(TES) micro-calorimeters are excellent energy-resolving devices. In this study, we report our recent work in developing Ti-/Au-based TES. The Ti/Au TES devices were designed and implemented with a thickness ratio of 1:1 and different suspended structures using micromachining technology. The characteristics were evaluated and analyzed, including surface morphology, 3 D deformation of suspended Ti/Au TES device structure, I–V characteristics, and low-temperature superconductivity. The results showed that the surface of Ti/Au has good homogeneity and the surface roughness of Ti/Au is significantly increased compared with the substrate. The structure of Ti/Au bilayer film significantly affects the deformation of suspended devices, but the deformation does not affect the I–V characteristics of the devices. For devices with the Ti/Au bilayer(150 μm × 150 μm) and beams(100 μm × 25 μm), the transition temperature(T;) is 253 m K with a width of 6 m K, and the value of the temperature sensitivity α is 95.1.展开更多
Multiplexing technologies based on superconducting quantum interference devices(SQUIDs) are crucial to cryogenic readout of superconducting transition-edge sensor(TES) arrays. Demands for large-scale TES arrays promot...Multiplexing technologies based on superconducting quantum interference devices(SQUIDs) are crucial to cryogenic readout of superconducting transition-edge sensor(TES) arrays. Demands for large-scale TES arrays promote the development of multiplexing technologies towards large multiplexing factors and low readout noise. The development of multiplexing technologies also facilitates new applications of TES arrays in a wide range of frequencies. Here we summarize different types of SQUID-based multiplexing technologies including time-division multiplexing, code-division multiplexing, frequency-division multiplexing and microwave SQUID multiplexing. The advances and parameter constraints of each multiplexing technology are also discussed.展开更多
The accurate analysis of the elemental composition plays a crucial role in the research of functional materials.The emitting characteristic x-ray fluorescence(XRF)photons can be used for precisely discriminating the s...The accurate analysis of the elemental composition plays a crucial role in the research of functional materials.The emitting characteristic x-ray fluorescence(XRF)photons can be used for precisely discriminating the specified element.The detection accuracy of conventional XRF methodology using semiconductor detector is limited by the energy resolution,thus posing a challenge in accurately scaling the actual energy of each XRF photon.We adopt a novel high-resolution x-ray spectrometer based on the superconducting transition-edge sensor(TES)for the XRF spectroscopy measurement of different elements.Properties including high energy resolution,high detection efficiency and precise linearity of the new spectrometer will bring significant benefits in analyzing elemental composition via XRF.In this paper,we study the Ledge emission line profiles of three adjacent rare earth elements with the evenly mixed sample of their oxide components:terbium,dysprosium and holmium.Two orders of magnitude better energy resolution are obtained compared to a commercial silicon drift detector.With this TES-based spectrometer,the spectral lines overlapped or interfered by background can be clearly distinguished,thus making the chemical component analysis more accurate and quantitative.A database of coefficient values for the line strength of the spectrum can then be constructed thereafter.Equipped with the novel XRF spectrometer and an established coefficient database,a direct analysis of the composition proportion of a certain element in an unknown sample can be achieved with high accuracy.展开更多
We have developed a novel thermoelectric gas sensors based on bismuth telluride thin films.These sensors were employed for sensing different concentrations of H_2 gas.Radio frequency (R.F.) magnetron sputtering was em...We have developed a novel thermoelectric gas sensors based on bismuth telluride thin films.These sensors were employed for sensing different concentrations of H_2 gas.Radio frequency (R.F.) magnetron sputtering was employed to deposit the bismuth telluride (Bi_2Te_3) thin films.The morphology of such thin films was investigated and responses of the thermoelectric devices to H_2 were studied.展开更多
能量分辨率是γ射线探测器关键技术指标之一,直接关联γ射线全能峰的尖锐程度、分离程度,从而影响全能峰被识别、区分的能力。提高γ探测器的能量分辨率,是γ探测器发展的一个重要方向,近年发展起来的超高分辨γ射线探测器,能达到25 e V...能量分辨率是γ射线探测器关键技术指标之一,直接关联γ射线全能峰的尖锐程度、分离程度,从而影响全能峰被识别、区分的能力。提高γ探测器的能量分辨率,是γ探测器发展的一个重要方向,近年发展起来的超高分辨γ射线探测器,能达到25 e V@103 ke V的能量分辨率,其相对目前能量分辨率最好的高纯锗探测器的能量分辨率高一个数量级,因此超高分辨超导γ射线探测器成为了一大研究热点。为了推动超高分辨率γ探测器关键技术的实验研究,利用MCNP5采用了不同能量的射线源、不同规格的吸收体以及不同的支撑环境对超高分辨超导γ射线探测器的探测结果进行了模拟。这些模拟对于探测器的模型优化以及谱仪的设计有重要的指导作用。展开更多
基金Project supported by the National Natural Science Foundation of China(Grant Nos.12293032,120101002,12173097,and U1931123)the National Key Basic Research and Development Program of China(Grant Nos.2020YFC2201703 and 2018YFA0404701)Chinese Academy of Sciences(Grant No.GJJSTD20210002)。
文摘We develop an x-ray Ti/Au transition-edge sensor(TES)with an Au absorber deposited on the center of TES and improved its energy resolution using the K-means clustering algorithm in combination with Wiener filter.We firstly extract the main parameters of each recorded pulse trace,which are adopted to classify these traces into several clusters in the K-means clustering algorithm.Then real traces are selected for energy resolution analysis.Following the baseline correction,the Wiener filter is used to improve the signal-to-noise ratio.Although the silicon underneath the TES has not been etched to reduce the thermal conductance,the energy resolution of the developed x-ray TES is improved from 94 eV to 44 eV at 5.9 keV.
基金supported by the National Key Research and Development Program of China (Grant No. 2017YFA0304000)the Shanghai Municipal Science and Technology Major Project (Grant No. 2017SHZDZX02)+2 种基金China National Space Administration (CNSA) (Grant No. D050104)the grant for low energy gamma-ray detection research based on SQUID techniquesupported by the Superconducting Electronics Facility (SELF) of Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences。
文摘The proximity effect to reduce the transition temperature of a superconducting film is frequently used in transitionedge sensors. Here, we develop these transition-edge sensors using Mo/Au/Au tri-layer films to detect soft x-rays. They are equipped with an overhanging photon absorber. We reduce the fabrication complexity by integrating the sensor patterning with the tri-layer film formation. We determine the electro-thermal parameters of the sensors through a series of resistance vs. temperature and current vs. voltage measurements. We also demonstrate their energy-resolving capability by using a55Fe radioactive x-ray source. The best energy resolution was approximately 6.66 eV at 5.9 keV, with a theoretical count rate of 500 Hz.
基金Project supported by the National Key Basic Research and Development Program of China(Grant No.2017YFA0304003)the National Natural Science Foundation of China(Grant Nos.U1831202,U1731119,U1931123,11773083,and 11873099)+1 种基金the Chinese Academy of Sciences(Grant Nos.QYZDJ-SSW-SLH043 and GJJSTD20180003)Jiangsu Province,China(Grant No.BRA2020411).
文摘Optical superconducting transition-edge sensor(TES)has been widely used in quantum information,biological imaging,and fluorescence microscopy owing to its high quantum efficiency,low dark count,and photon number resolving capability.The temperature sensitivity(α_(I))and current sensitivity(β_(I))are important parameters for optical TESs,which are generally extracted from the complex impedance.Here we present a method to extractα_(I)andβ_(I)based on a two-fluid model and compare the calculated current-voltage curves,pulse response,and theoretical energy resolution with the measured ones.This method shows qualitative agreement that is suitable for further optimization of optical TESs.
文摘For photon detection, superconducting transition-edge sensor(TES) micro-calorimeters are excellent energy-resolving devices. In this study, we report our recent work in developing Ti-/Au-based TES. The Ti/Au TES devices were designed and implemented with a thickness ratio of 1:1 and different suspended structures using micromachining technology. The characteristics were evaluated and analyzed, including surface morphology, 3 D deformation of suspended Ti/Au TES device structure, I–V characteristics, and low-temperature superconductivity. The results showed that the surface of Ti/Au has good homogeneity and the surface roughness of Ti/Au is significantly increased compared with the substrate. The structure of Ti/Au bilayer film significantly affects the deformation of suspended devices, but the deformation does not affect the I–V characteristics of the devices. For devices with the Ti/Au bilayer(150 μm × 150 μm) and beams(100 μm × 25 μm), the transition temperature(T;) is 253 m K with a width of 6 m K, and the value of the temperature sensitivity α is 95.1.
基金Project supported by the National Science Foundation of China (Grant Nos. 11653001 and 11653004)。
文摘Multiplexing technologies based on superconducting quantum interference devices(SQUIDs) are crucial to cryogenic readout of superconducting transition-edge sensor(TES) arrays. Demands for large-scale TES arrays promote the development of multiplexing technologies towards large multiplexing factors and low readout noise. The development of multiplexing technologies also facilitates new applications of TES arrays in a wide range of frequencies. Here we summarize different types of SQUID-based multiplexing technologies including time-division multiplexing, code-division multiplexing, frequency-division multiplexing and microwave SQUID multiplexing. The advances and parameter constraints of each multiplexing technology are also discussed.
基金the National Major Scientific Research Instrument Development Project(Grant No.11927805)the National Key Research and Development Program of China(Grant No.2022YFF0608303)+2 种基金the NSFC Young Scientists Fund(Grant No.12005134)the Shanghai-XFEL Beamline Project(SBP)(Grant No.31011505505885920161A2101001)the Shanghai Municipal Science and Technology Major Project(Grant No.2017SHZDZX02)。
文摘The accurate analysis of the elemental composition plays a crucial role in the research of functional materials.The emitting characteristic x-ray fluorescence(XRF)photons can be used for precisely discriminating the specified element.The detection accuracy of conventional XRF methodology using semiconductor detector is limited by the energy resolution,thus posing a challenge in accurately scaling the actual energy of each XRF photon.We adopt a novel high-resolution x-ray spectrometer based on the superconducting transition-edge sensor(TES)for the XRF spectroscopy measurement of different elements.Properties including high energy resolution,high detection efficiency and precise linearity of the new spectrometer will bring significant benefits in analyzing elemental composition via XRF.In this paper,we study the Ledge emission line profiles of three adjacent rare earth elements with the evenly mixed sample of their oxide components:terbium,dysprosium and holmium.Two orders of magnitude better energy resolution are obtained compared to a commercial silicon drift detector.With this TES-based spectrometer,the spectral lines overlapped or interfered by background can be clearly distinguished,thus making the chemical component analysis more accurate and quantitative.A database of coefficient values for the line strength of the spectrum can then be constructed thereafter.Equipped with the novel XRF spectrometer and an established coefficient database,a direct analysis of the composition proportion of a certain element in an unknown sample can be achieved with high accuracy.
文摘We have developed a novel thermoelectric gas sensors based on bismuth telluride thin films.These sensors were employed for sensing different concentrations of H_2 gas.Radio frequency (R.F.) magnetron sputtering was employed to deposit the bismuth telluride (Bi_2Te_3) thin films.The morphology of such thin films was investigated and responses of the thermoelectric devices to H_2 were studied.
文摘能量分辨率是γ射线探测器关键技术指标之一,直接关联γ射线全能峰的尖锐程度、分离程度,从而影响全能峰被识别、区分的能力。提高γ探测器的能量分辨率,是γ探测器发展的一个重要方向,近年发展起来的超高分辨γ射线探测器,能达到25 e V@103 ke V的能量分辨率,其相对目前能量分辨率最好的高纯锗探测器的能量分辨率高一个数量级,因此超高分辨超导γ射线探测器成为了一大研究热点。为了推动超高分辨率γ探测器关键技术的实验研究,利用MCNP5采用了不同能量的射线源、不同规格的吸收体以及不同的支撑环境对超高分辨超导γ射线探测器的探测结果进行了模拟。这些模拟对于探测器的模型优化以及谱仪的设计有重要的指导作用。
