This paper reports the fabrication of regular large-area laser-induced periodic surface structures(LIPSSs)in indium tin oxide(ITO)films via femtosecond laser direct writing focused by a cylindrical lens.The regular LI...This paper reports the fabrication of regular large-area laser-induced periodic surface structures(LIPSSs)in indium tin oxide(ITO)films via femtosecond laser direct writing focused by a cylindrical lens.The regular LIPSSs exhibited good properties as nanowires,with a resistivity almost equal to that of the initial ITO film.By changing the laser fluence,the nanowire resistances could be tuned from 15 to 73 kΩ/mm with a consistency of±10%.Furthermore,the average transmittance of the ITO films with regular LIPSSs in the range of 1200-2000 nm was improved from 21%to 60%.The regular LIPSS is promising for transparent electrodes of nano-optoelectronic devices-particularly in the near-infrared band.展开更多
本文介绍了ITO(Indium Tin Oxide)透明导电膜的制备工艺,对影响其光学和电学特性的因素作了分析。并讨论了透明导电的机理,在K9玻璃上制备的ITO透明导电膜,在500～600nm波长范围内,典型的峰值透过率为90％,面电阻为40～50Ω/□。用该技...本文介绍了ITO(Indium Tin Oxide)透明导电膜的制备工艺,对影响其光学和电学特性的因素作了分析。并讨论了透明导电的机理,在K9玻璃上制备的ITO透明导电膜,在500～600nm波长范围内,典型的峰值透过率为90％,面电阻为40～50Ω/□。用该技术制备的样品作为透明电极,在液晶光阀空间光调制器中得到了应用。展开更多
基金We are grateful for financial supports from the Ministry of Science and Technology of China(Grant No.2021YFA1401100)National Natural Science Foundation of China(Grant Nos.12074123,11804227,91950112),and the Foundation of‘Manufacturing beyond limits’of Shanghai.
文摘This paper reports the fabrication of regular large-area laser-induced periodic surface structures(LIPSSs)in indium tin oxide(ITO)films via femtosecond laser direct writing focused by a cylindrical lens.The regular LIPSSs exhibited good properties as nanowires,with a resistivity almost equal to that of the initial ITO film.By changing the laser fluence,the nanowire resistances could be tuned from 15 to 73 kΩ/mm with a consistency of±10%.Furthermore,the average transmittance of the ITO films with regular LIPSSs in the range of 1200-2000 nm was improved from 21%to 60%.The regular LIPSS is promising for transparent electrodes of nano-optoelectronic devices-particularly in the near-infrared band.
文摘本文介绍了ITO(Indium Tin Oxide)透明导电膜的制备工艺,对影响其光学和电学特性的因素作了分析。并讨论了透明导电的机理,在K9玻璃上制备的ITO透明导电膜,在500～600nm波长范围内,典型的峰值透过率为90％,面电阻为40～50Ω/□。用该技术制备的样品作为透明电极,在液晶光阀空间光调制器中得到了应用。
