Aluminum-doped zinc oxide （ZnO：Al）, abbreviated as ZAO, is a novel and widely used transparent conductive material. The ZAO powder was synthesized by chemical coprecipitation. The ZAO ceramic sputtering target mate...Aluminum-doped zinc oxide （ZnO：Al）, abbreviated as ZAO, is a novel and widely used transparent conductive material. The ZAO powder was synthesized by chemical coprecipitation. The ZAO ceramic sputtering target materials were fabricated by sintering in air, and ZAO transparent conductive films were prepared by RF magnetron sputtering on glass substrates. XRD proved that such films had an orientation of （002） crystal panel paralleled to the surface of the glass substrate. The average transmittance of the films in the visible region exceeded 80%.展开更多
In order to achieve the objective of controlling IR radiation characteristics of space target,we design multilayer insulation film structure to cover the target.In space environment the structure comes to cryogenic va...In order to achieve the objective of controlling IR radiation characteristics of space target,we design multilayer insulation film structure to cover the target.In space environment the structure comes to cryogenic vacuum multilayer insulation film structure.It can quickly lower the surface temperature of space target,approaching to the ultra-low temperature of the space environment.A vacuum simulation verification test was designed and performed.Through the analysis of test results,we can see that the surface temperature of space target covered by the structure changes with the ambient temperature,having no direct relationship with internal temperature of the target.Therefore,the designed cryogenic vacuum multilayer insulation film structure has excellent IR radiation control performance.It can reduce the target’s IR radiation intensity so as to reduce the probability of detection by IR detectors.展开更多
This article mainly deals with the preparation and properties of PZTthin films. A new type of Metal-Me tal Oxide composite target was developed. Relating factors have been discussed. The electrical and optical propert...This article mainly deals with the preparation and properties of PZTthin films. A new type of Metal-Me tal Oxide composite target was developed. Relating factors have been discussed. The electrical and optical properties of PZT thin films have also been studied.展开更多
High resistance thin film chip resistors(0603 type) were studied,and the specifications are as follows:1 k? with tolerance about ±0.1% after laser trimming and temperature coefficient of resistance(TCR) less than...High resistance thin film chip resistors(0603 type) were studied,and the specifications are as follows:1 k? with tolerance about ±0.1% after laser trimming and temperature coefficient of resistance(TCR) less than ±15×10-6/℃.Cr-Si-Ta-Al films were prepared with Ar flow rate and sputtering power fixed at 20 standard-state cubic centimeter per minute(sccm) and 100 W,respectively.The experiment shows that the electrical properties of Cr-SiTa-Al deposition films can meet the specification requirements of 0603 type thin film chip resistors when the deposition time was about 11 min and deposition films were annealed at 500 ℃ for 120 min.The morphologies of Cr-Si-TaAl film surfaces were examined by scanning electron microscopy(SEM).The analysis suggests that Ta and Al may be distributed in CrSi2 film with mixed form of several structures(e.g.,bridge-like,capillary-like or island-like structures),and such a structure distribution is responsible for high film resistance and low TCR of Cr-Si-Ta-Al film.展开更多
The nonuniform Yb-Er Codoped Al2O3 films were prepared on SiO2/Si substrates using a medium frequency magnetron sputtering system. Two asymmetry targets in the system were introduced to realize the nonuniform dopant. ...The nonuniform Yb-Er Codoped Al2O3 films were prepared on SiO2/Si substrates using a medium frequency magnetron sputtering system. Two asymmetry targets in the system were introduced to realize the nonuniform dopant. Some curves of Photoluminescence （PL） peak intensity were obtained by adjusting the deposition parameters, such as, the pillar number of erbium and ytterbium in the mixed target and the distance between a sample table and targets. Typically, the curve of PL peak intensity against the offset distance was approximately linear. The ratio of the PL intensity at the two ends of the same sample was 12.6 and the slope was 71.83/mm when the pillar numbers of the erbium and ytterbium in the mixed target are 5 and 60, respectively, and the distance between targets and the sample table is 2.9 cm.展开更多
Particle shape has been recognized as one of the key properties of nanoparticles in biomedical applications including targeted drug delivery.Targeting ability of shape-engineered particles depends largely on targeting...Particle shape has been recognized as one of the key properties of nanoparticles in biomedical applications including targeted drug delivery.Targeting ability of shape-engineered particles depends largely on targeting ligands conjugated on the particle surface.However,poor capacity for surface ligand conjugation remains a problem in anisotropic nanoparticles made with biodegradable polymers such as PLGA.In this study,we prepared anisotropic PLGA nanoparticles with abundant conjugatable surface functional groups by a film stretching-based fabrication method with poly(ethylene-alt-maleic acid)(PEMA).Scanning electron microscopy images showed that microrods and nanorods were successfully fabricated by the PEMA-based film stretching method.The presence of surface carboxylic acid groups was confirmed by confocal microscopy and zeta potential measurements.Using the improved film-stretching method,the amount of protein conjugated to the surface of nanorods was increased three-fold.Transferrin-conjugated,nanorods fabricated by the improved method exhibited higher binding and internalization than unmodified counterparts.Therefore,the PEMA-based film-stretching system presented in this study would be a promising fabrication method for non-spherical biodegradable polymeric micro-and nanoparticles with high capacity of surface modifications for enhanced targeted delivery.展开更多
In this paper,we reported a surface acoustic wave(SAW)device prepared and optimized by piezoelectric films containing AIN,AIScN(Sc-20 at%)and AIScN(Sc-30 at%)by reactive magnetron sputtering using Al and AISc alloy ta...In this paper,we reported a surface acoustic wave(SAW)device prepared and optimized by piezoelectric films containing AIN,AIScN(Sc-20 at%)and AIScN(Sc-30 at%)by reactive magnetron sputtering using Al and AISc alloy targets.We calculated the material intrinsic electromechanical coupling coefficient k_(t)^(2) of AlScN(Sc-20 at%)and AlScN(Sc-30 at%)which are much better than AIN.It can be explained by the lattice softening.Furtherly,the results were confirmed by transmission electron microscopy(TEM)observation of the microstructure.Then the SAW devices based on three thin films were tested by vector network analysis obtaining the device equivalent electro mechanical coupling coefficient k_(eff)^(2).The value of AIScN(Sc-20 at%)k_(eff)^(2),which equals to 1.94%,is higher than that of AIN and AIScN(Sc-30 at%)while the value of AIScN(Sc-30 at%)k_(t)^(2) is higher than that of others.It is shown in our study that the crystallinity and orientation of the material still have a greater impact on k_(eff)^(2) but it does not have influence on k_(t)^(2) in the actual device preparation process.展开更多
文摘Aluminum-doped zinc oxide （ZnO：Al）, abbreviated as ZAO, is a novel and widely used transparent conductive material. The ZAO powder was synthesized by chemical coprecipitation. The ZAO ceramic sputtering target materials were fabricated by sintering in air, and ZAO transparent conductive films were prepared by RF magnetron sputtering on glass substrates. XRD proved that such films had an orientation of （002） crystal panel paralleled to the surface of the glass substrate. The average transmittance of the films in the visible region exceeded 80%.
基金Sponsored by the High-tech Research and Development Program of China (Grant No. 2007AA701101B)
文摘In order to achieve the objective of controlling IR radiation characteristics of space target,we design multilayer insulation film structure to cover the target.In space environment the structure comes to cryogenic vacuum multilayer insulation film structure.It can quickly lower the surface temperature of space target,approaching to the ultra-low temperature of the space environment.A vacuum simulation verification test was designed and performed.Through the analysis of test results,we can see that the surface temperature of space target covered by the structure changes with the ambient temperature,having no direct relationship with internal temperature of the target.Therefore,the designed cryogenic vacuum multilayer insulation film structure has excellent IR radiation control performance.It can reduce the target’s IR radiation intensity so as to reduce the probability of detection by IR detectors.
文摘This article mainly deals with the preparation and properties of PZTthin films. A new type of Metal-Me tal Oxide composite target was developed. Relating factors have been discussed. The electrical and optical properties of PZT thin films have also been studied.
基金supported by the National Natural Science Foundation of China(Grant No:10274018)the Foundation of Hebei Provincial Education Department(Grant No:002013)the Key Foundation of Hebei Normal University(Grant No:120203).
基金Supported by Science and Technology Committee of Tianjin (No.06YFGPGX08400)Ministry of Science and Technology of China (No.2009GJF20022)Innovation Fund of Tianjin University
文摘High resistance thin film chip resistors(0603 type) were studied,and the specifications are as follows:1 k? with tolerance about ±0.1% after laser trimming and temperature coefficient of resistance(TCR) less than ±15×10-6/℃.Cr-Si-Ta-Al films were prepared with Ar flow rate and sputtering power fixed at 20 standard-state cubic centimeter per minute(sccm) and 100 W,respectively.The experiment shows that the electrical properties of Cr-SiTa-Al deposition films can meet the specification requirements of 0603 type thin film chip resistors when the deposition time was about 11 min and deposition films were annealed at 500 ℃ for 120 min.The morphologies of Cr-Si-TaAl film surfaces were examined by scanning electron microscopy(SEM).The analysis suggests that Ta and Al may be distributed in CrSi2 film with mixed form of several structures(e.g.,bridge-like,capillary-like or island-like structures),and such a structure distribution is responsible for high film resistance and low TCR of Cr-Si-Ta-Al film.
基金Project supported by the National Natural Science Foundation of China (60477023)the Natural Science Foundation of Science and Tech-nology Commission of Liaoning Province (20062137)
文摘The nonuniform Yb-Er Codoped Al2O3 films were prepared on SiO2/Si substrates using a medium frequency magnetron sputtering system. Two asymmetry targets in the system were introduced to realize the nonuniform dopant. Some curves of Photoluminescence （PL） peak intensity were obtained by adjusting the deposition parameters, such as, the pillar number of erbium and ytterbium in the mixed target and the distance between a sample table and targets. Typically, the curve of PL peak intensity against the offset distance was approximately linear. The ratio of the PL intensity at the two ends of the same sample was 12.6 and the slope was 71.83/mm when the pillar numbers of the erbium and ytterbium in the mixed target are 5 and 60, respectively, and the distance between targets and the sample table is 2.9 cm.
基金supported by a grant from the Korean Healthcare Technology R&D Project,Ministry for Health and Welfare Affairs,Republic of Korea(HI15C2558)。
文摘Particle shape has been recognized as one of the key properties of nanoparticles in biomedical applications including targeted drug delivery.Targeting ability of shape-engineered particles depends largely on targeting ligands conjugated on the particle surface.However,poor capacity for surface ligand conjugation remains a problem in anisotropic nanoparticles made with biodegradable polymers such as PLGA.In this study,we prepared anisotropic PLGA nanoparticles with abundant conjugatable surface functional groups by a film stretching-based fabrication method with poly(ethylene-alt-maleic acid)(PEMA).Scanning electron microscopy images showed that microrods and nanorods were successfully fabricated by the PEMA-based film stretching method.The presence of surface carboxylic acid groups was confirmed by confocal microscopy and zeta potential measurements.Using the improved film-stretching method,the amount of protein conjugated to the surface of nanorods was increased three-fold.Transferrin-conjugated,nanorods fabricated by the improved method exhibited higher binding and internalization than unmodified counterparts.Therefore,the PEMA-based film-stretching system presented in this study would be a promising fabrication method for non-spherical biodegradable polymeric micro-and nanoparticles with high capacity of surface modifications for enhanced targeted delivery.
基金supported by the Innovation Funds of GRIMAT Engineering Institute Co.,Ltd.
文摘In this paper,we reported a surface acoustic wave(SAW)device prepared and optimized by piezoelectric films containing AIN,AIScN(Sc-20 at%)and AIScN(Sc-30 at%)by reactive magnetron sputtering using Al and AISc alloy targets.We calculated the material intrinsic electromechanical coupling coefficient k_(t)^(2) of AlScN(Sc-20 at%)and AlScN(Sc-30 at%)which are much better than AIN.It can be explained by the lattice softening.Furtherly,the results were confirmed by transmission electron microscopy(TEM)observation of the microstructure.Then the SAW devices based on three thin films were tested by vector network analysis obtaining the device equivalent electro mechanical coupling coefficient k_(eff)^(2).The value of AIScN(Sc-20 at%)k_(eff)^(2),which equals to 1.94%,is higher than that of AIN and AIScN(Sc-30 at%)while the value of AIScN(Sc-30 at%)k_(t)^(2) is higher than that of others.It is shown in our study that the crystallinity and orientation of the material still have a greater impact on k_(eff)^(2) but it does not have influence on k_(t)^(2) in the actual device preparation process.
