On the basis of existing techniques, a compact micro-displacement sensor of phase grating interference （PGI） is described, which adopts cylindrical hologram diffraction grating as the calibration standard. The optic...On the basis of existing techniques, a compact micro-displacement sensor of phase grating interference （PGI） is described, which adopts cylindrical hologram diffraction grating as the calibration standard. The optical principle of the sensor is explained, and the relation between the grating motion displacement and the phase shift of interference stripes is deduced. The improvement of the integral structure and the method of photoelectric signal processing are described in detail. With the software system based on the virtual instrument development platform Labwindows/CVI and other hardwares such as the precision displacement worktable, the surfaces of typical parts are measured and the characterization results are given. The sensor has wide measuring range and high resolution, its sensitivity and resolution being independent of the wavelength of the incident light. The vertical measuring range is 0-6 mm, and the vertical resolution is 0.005μm. The experimental results show that the sensor can be used to measure and characterize the surface topography parameters of the plane and curved surface.展开更多
ASeblsf-tmraicxti：n gA innteewrf esreelnf-cme ioxcincgu rms iicnr oa -liansteerrf derioodmee t（eLrD b）a sbeyd r eofnl eecxtitnergn tahl ep lhiagshet fmroomdu ala tmioinrr oisr-plirkees etanrtgedet. in front of the ...ASeblsf-tmraicxti：n gA innteewrf esreelnf-cme ioxcincgu rms iicnr oa -liansteerrf derioodmee t（eLrD b）a sbeyd r eofnl eecxtitnergn tahl ep lhiagshet fmroomdu ala tmioinrr oisr-plirkees etanrtgedet. in front of the laser. Sinusoidal phase modulation of the beam is obtained by an electro-optic crystal （EOC） in the external cavity. The phase of the interference signal is demodulated by Fourier analysis method. The combination of the modulation and demodulation decreases the sensitivity of the instru-ment to fluctuations of the laser power and the noise induced by environment. Experimentally, the new micro-interferometer is applied to measure the micro-displacement of a high precision commer-cial PZT with an accuracy of 〈10 nm.展开更多
基金This project is supported by National Natural Sciences Foundation of China (No.50175037).
文摘On the basis of existing techniques, a compact micro-displacement sensor of phase grating interference （PGI） is described, which adopts cylindrical hologram diffraction grating as the calibration standard. The optical principle of the sensor is explained, and the relation between the grating motion displacement and the phase shift of interference stripes is deduced. The improvement of the integral structure and the method of photoelectric signal processing are described in detail. With the software system based on the virtual instrument development platform Labwindows/CVI and other hardwares such as the precision displacement worktable, the surfaces of typical parts are measured and the characterization results are given. The sensor has wide measuring range and high resolution, its sensitivity and resolution being independent of the wavelength of the incident light. The vertical measuring range is 0-6 mm, and the vertical resolution is 0.005μm. The experimental results show that the sensor can be used to measure and characterize the surface topography parameters of the plane and curved surface.
基金Selected from Proceedings of the 7th International Conference on Frontiers of Design and Manufacturing (ICFDM’2006)This project is supported by Na-tional Natural Science Foundation of China (No. 50375074)Specialized Research Fund for the Doctoral Program of Higher Education (No. 20050319007).
文摘ASeblsf-tmraicxti：n gA innteewrf esreelnf-cme ioxcincgu rms iicnr oa -liansteerrf derioodmee t（eLrD b）a sbeyd r eofnl eecxtitnergn tahl ep lhiagshet fmroomdu ala tmioinrr oisr-plirkees etanrtgedet. in front of the laser. Sinusoidal phase modulation of the beam is obtained by an electro-optic crystal （EOC） in the external cavity. The phase of the interference signal is demodulated by Fourier analysis method. The combination of the modulation and demodulation decreases the sensitivity of the instru-ment to fluctuations of the laser power and the noise induced by environment. Experimentally, the new micro-interferometer is applied to measure the micro-displacement of a high precision commer-cial PZT with an accuracy of 〈10 nm.
