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Generating Microstructures with Highly Variable Mechanical Performance using Two-Photon Lithography and Thiol-ene Photopolymerization
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作者 Xiao Yang Yan-Fang Niu +4 位作者 Meng-Xiao Wei Jun-Ning Zhang Ke-Liang Liu Xin Du Zhong-Ze Gu 《Chinese Journal of Polymer Science》 SCIE EI CAS CSCD 2023年第1期67-74,共8页
In this study,we investigate the effect of the exposure dose on the mechanical property of the photoresins generated with acrylate self-polymerization and thiol-ene polymerization.The results indicate that the mechani... In this study,we investigate the effect of the exposure dose on the mechanical property of the photoresins generated with acrylate self-polymerization and thiol-ene polymerization.The results indicate that the mechanical performance of the thiol-ene photoresin is highly depended on the exposure dose during the solidification process.With 350-fold exposure dose change,the stiffness of the thiol-ene photoresin reached more that 700-fold change compare to 14-fold of the acrylate photoresin.We developed a TPL photoresist based on our results and show the capability to fabricate microstrucutres with high resolution and variable mechanical performances using this method. 展开更多
关键词 THIOL-ENE Two photo lithography 3D printing PHOTORESIST
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Combining two-photon lithography with laser ablation of sacrificial layers:A route to isolated 3D magnetic nanostructures
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作者 Arjen van den Berg Mylène Caruel +1 位作者 Matthew Hunt Sam Ladak 《Nano Research》 SCIE EI CSCD 2023年第1期1441-1447,共7页
Three-dimensional(3D)nanostructured functional materials are important systems allowing new means for intricate control of electromagnetic properties.A key problem is realising a 3D printing methodology on the nanosca... Three-dimensional(3D)nanostructured functional materials are important systems allowing new means for intricate control of electromagnetic properties.A key problem is realising a 3D printing methodology on the nanoscale that can yield a range of functional materials.In this article,it is shown that two-photon lithography,when combined with laser ablation of sacrificial layers,can be used to realise such a vision and produce 3D functional nanomaterials of complex geometry.Proof-of-principle is first shown by fabricating planar magnetic nanowires raised above the substrate that exhibit controlled domain wall injection and propagation.Secondly,3D artificial spin-ice(3DASI)structures are fabricated,whose complex switching can be probed using optical magnetometry.We show that by careful analysis of the magneto-optical Kerr effect signal and by comparison with micromagnetic simulations,depth dependent switching information can be obtained from the 3DASI lattice.The work paves the way for new materials,which exploit additional physics provided by non-trivial 3D geometries. 展开更多
关键词 three-dimensional(3D)nanomagnetism 3D lithography 3D artificial spin ice sacrificial layers magneto-optical Kerr effect
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The study of lithographic variation in resistive random access memory
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作者 Yuhang Zhang Guanghui He +2 位作者 Feng Zhang Yongfu Li Guoxing Wang 《Journal of Semiconductors》 EI CAS CSCD 2024年第5期69-79,共11页
Reducing the process variation is a significant concern for resistive random access memory(RRAM).Due to its ultrahigh integration density,RRAM arrays are prone to lithographic variation during the lithography process,... Reducing the process variation is a significant concern for resistive random access memory(RRAM).Due to its ultrahigh integration density,RRAM arrays are prone to lithographic variation during the lithography process,introducing electrical variation among different RRAM devices.In this work,an optical physical verification methodology for the RRAM array is developed,and the effects of different layout parameters on important electrical characteristics are systematically investigated.The results indicate that the RRAM devices can be categorized into three clusters according to their locations and lithography environments.The read resistance is more sensitive to the locations in the array(~30%)than SET/RESET voltage(<10%).The increase in the RRAM device length and the application of the optical proximity correction technique can help to reduce the variation to less than 10%,whereas it reduces RRAM read resistance by 4×,resulting in a higher power and area consumption.As such,we provide design guidelines to minimize the electrical variation of RRAM arrays due to the lithography process. 展开更多
关键词 layout lithography process variation resistive random access memory
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Two-photon live imaging of direct glia-to-neuron conversion in the mouse cortex
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作者 Zongqin Xiang Shu He +13 位作者 Rongjie Chen Shanggong Liu Minhui Liu Liang Xu Jiajun Zheng Zhouquan Jiang Long Ma Ying Sun Yongpeng Qin Yi Chen Wen Li Xiangyu Wang Gong Chen Wenliang Lei 《Neural Regeneration Research》 SCIE CAS CSCD 2024年第8期1781-1788,共8页
Over the past decade,a growing number of studies have reported transcription factor-based in situ reprogramming that can directly conve rt endogenous glial cells into functional neurons as an alternative approach for ... Over the past decade,a growing number of studies have reported transcription factor-based in situ reprogramming that can directly conve rt endogenous glial cells into functional neurons as an alternative approach for n euro regeneration in the adult mammalian central ne rvous system.Howeve r,many questions remain regarding how a terminally differentiated glial cell can transform into a delicate neuron that forms part of the intricate brain circuitry.In addition,concerns have recently been raised around the absence of astrocyte-to-neuron conversion in astrocytic lineage-tra cing mice.In this study,we employed repetitive two-photon imaging to continuously capture the in situ astrocyte-to-neuron conversion process following ecto pic expression of the neural transcription factor NeuroD1 in both prolife rating reactive astrocytes and lineage-tra ced astrocytes in the mouse cortex.Time-lapse imaging over several wee ks revealed the ste p-by-step transition from a typical astrocyte with numero us short,tapered branches to a typical neuro n with a few long neurites and dynamic growth cones that actively explored the local environment.In addition,these lineage-converting cells were able to migrate ra dially or to ngentially to relocate to suitable positions.Furthermore,two-photon Ca2+imaging and patch-clamp recordings confirmed that the newly generated neuro ns exhibited synchronous calcium signals,repetitive action potentials,and spontaneous synaptic responses,suggesting that they had made functional synaptic connections within local neural circuits.In conclusion,we directly visualized the step-by-step lineage conversion process from astrocytes to functional neurons in vivo and unambiguously demonstrated that adult mammalian brains are highly plastic with respect to their potential for neuro regeneration and neural circuit reconstruction. 展开更多
关键词 astrocyte-to-neuron conversion Ca2+imaging direct lineage conversion GLIA ASTROCYTE in vivo reprogramming lineage-tracing mice NeuroD1 NEURON two-photon imaging
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Scalable integration of nano-,and microfluidics with hybrid two-photon lithography 被引量:2
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作者 Oliver Vanderpoorten Quentin Peter +4 位作者 Pavan K.Challa Ulrich F.Keyser Jeremy Baumberg Clemens F.Kaminski Tuomas P.J.Knowles 《Microsystems & Nanoengineering》 EI CSCD 2019年第1期264-272,共9页
Nanofluidic devices have great potential for applications in areas ranging from renewable energy to human health.A crucial requirement for the successful operation of nanofluidic devices is the ability to interface th... Nanofluidic devices have great potential for applications in areas ranging from renewable energy to human health.A crucial requirement for the successful operation of nanofluidic devices is the ability to interface them in a scalable manner with the outside world.Here,we demonstrate a hybrid two photon nanolithography approach interfaced with conventional mask whole-wafer UV-photolithography to generate master wafers for the fabrication of integrated micro and nanofluidic devices.Using this approach we demonstrate the fabrication of molds from SU-8 photoresist with nanofluidic features down to 230 nm lateral width and channel heights from micron to sub-100 nm.Scanning electron microscopy and atomic force microscopy were used to characterize the printing capabilities of the system and show the integration of nanofluidic channels into an existing microfluidic chip design.The functionality of the devices was demonstrated through super-resolution microscopy,allowing the observation of features below the diffraction limit of light produced using our approach.Single molecule localization of diffusing dye molecules verified the successful imprint of nanochannels and the spatial confinement of molecules to 200 nm across the nanochannel molded from the master wafer.This approach integrates readily with current microfluidic fabrication methods and allows the combination of microfluidic devices with locally two-photon-written nano-sized functionalities,enabling rapid nanofluidic device fabrication and enhancement of existing microfluidic device architectures with nanofluidic features. 展开更多
关键词 lithography INTEGRATION FLUID
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Two-photon lithography for 3D magnetic nanostructure fabrication 被引量:3
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作者 Gwilym Williams Matthew Hunt +8 位作者 Benedikt Boehm Andrew May Michael Taverne Daniel Ho Sean Giblin Dan Read John Rarity Rolf Allenspach Sam Ladak 《Nano Research》 SCIE EI CAS CSCD 2018年第2期845-854,共10页
铁磁性的材料作为在数据存储设备记录媒介许多十年被利用了。到一架二维的飞机的材料的监禁是在完成超离频的记录的一个重要瓶颈密度,和这导致了提议三维(3D ) 利用领域的跑道记忆沿着 nanowires 围繁殖。然而,复杂几何学的磁性的 nan... 铁磁性的材料作为在数据存储设备记录媒介许多十年被利用了。到一架二维的飞机的材料的监禁是在完成超离频的记录的一个重要瓶颈密度,和这导致了提议三维(3D ) 利用领域的跑道记忆沿着 nanowires 围繁殖。然而,复杂几何学的磁性的 nanostructures 高度容易正在质问并且不是的 3D 的制造与标准平版印刷术技术完成了。这里,我们表明一条新途径构造 3D 用二光子的平版印刷术和电气化学的免职的联合的复杂几何学的磁性的 nanostructures。磁性被发现是亲密地,与结构,和磁性的成像的 3D 几何学有关,实验提供领域墙在 3D nanostructured 连接卡住的证据。 展开更多
关键词 平版印刷术 铁磁性 3D 光子 制造 数据存储设备 几何学 记录媒介
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A simple Bessel module with tunable focal depth and constant resolution for commercial two-photon microscope
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作者 Ting Mo Yiran Liu +4 位作者 Fatao Bie Zimin Dai Jin Chang Hui Gong Wei Zhou 《Journal of Innovative Optical Health Sciences》 SCIE EI CSCD 2023年第4期150-159,共10页
The volumetric imaging of two-photon microscopy expands the focal depth and improves the throughput,which has unparalleled superiority for three-dimension samples,especially in neuroscience.However,emerging in volumet... The volumetric imaging of two-photon microscopy expands the focal depth and improves the throughput,which has unparalleled superiority for three-dimension samples,especially in neuroscience.However,emerging in volumetric imaging is still largely customized,which limits the integration with commercial two-photon systems.Here,we analyzed the key parameters that modulate the focal depth and lateral resolution of polarized annular imaging and proposed a volumetric imaging module that can be directly integrated into commercial two-photon systems using conventional optical elements.This design incorporates the beam diameter adjustment settings of commercial two-photon systems,allowing flexibility to adjust the depth of focus while maintaining the same lateral resolution.Further,the depth range and lateral resolution of the design were verified,and the imaging throughput was demonstrated by an increase in the number of imaging neurons in the awake mouse cerebral cortex. 展开更多
关键词 Volumetric imaging Bessel beam two-photon microscopy
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A novelα-ketoamide reactivity-based two-photon fluorogenic probe for visualizing peroxynitrite in Parkinson's disease models
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作者 Tao Shao Xianning Xu +8 位作者 Lan Wang Yu Shen Jun Zhao Huizi Li Duoteng Zhang Wei Du Hua Bai Bo Peng Lin Li 《Journal of Innovative Optical Health Sciences》 SCIE EI CSCD 2023年第4期79-89,共11页
Peroxynitrite(ONOO^(-))contributes to oxidative stress and neurodegeneration in Parkinson's disease(PD).Developing a peroxynitrite probe would enable in situ visualization of the overwhelming ONOO^(-)flux and unde... Peroxynitrite(ONOO^(-))contributes to oxidative stress and neurodegeneration in Parkinson's disease(PD).Developing a peroxynitrite probe would enable in situ visualization of the overwhelming ONOO^(-)flux and understanding of the ONOO^(-)stress-induced neuropathology of PD.Herein,a novelα-ketoamide-based fluorogenic probe(DFlu)was designed for ONOO^(-)monitoring in multiple PD models.The results demonstrated that DFlu exhibits a fluorescence turn-on response to ONOO^(-)with high specificity and sensitivity.The efficacy of DFlu for intracellular ONOO^(-)imaging was demonstrated systematically.The results showed that DFlu can successfully visualize endogenous and exogenous ONOO^(-)in cells derived from chemical and biochemical routes.More importantly,the two-photon excitation ability of DFlu has been well demonstrated by monitoring exogenous/endogenous ONOO^(-)production and scavenging in live zebraflsh PD models.This work provides a reliable and promisingα-ketoamide-based optical tool for identifying variations of ONOO^(-)in PD models. 展开更多
关键词 α-Ketoamide two-photon fluorogenic probe BIOIMAGING PEROXYNITRITE Parkinson's disease.
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Simulation research on surface growth process of positive and negative frequency detuning chromium atom lithographic gratings
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作者 尹志珺 唐朝辉 +9 位作者 谭文 肖光旭 姚玉林 薛栋柏 顾振杰 雷李华 顿雄 邓晓 程鑫彬 李同保 《Chinese Physics B》 SCIE EI CAS CSCD 2023年第10期367-376,共10页
Chromium atom photolithography gratings are a promising technology for the development of nanoscale length standard substances due to their high accuracy,uniformity,and consistency.However,the inherent difference betw... Chromium atom photolithography gratings are a promising technology for the development of nanoscale length standard substances due to their high accuracy,uniformity,and consistency.However,the inherent difference between the interaction of positive and negative frequency detuning standing wave field and the atoms can cause a difference in the adjacent peak-to-valley heights of the grating in positive and negative frequency detuning chromium atom lithography,which greatly reduces its accuracy.In this study,we performed a controlled variable growth simulation using the semi-classical theoretical model and Monte Carlo method with trajectory tracking and ballistic deposition methods to investigate the influence of key experimental parameters on the surface growth process of positive and negative frequency detuning atomic lithography gratings.We established a theoretical model based on simulation results and summarized empirical equations to guide the selection of experimental parameters.Our simulations achieved uniform positive and negative frequency detuning atomic lithography gratings with a period of 1/4 of the wavelength corresponding to the atomic transition frequency,and adjacent peak-to-valley heights differing by no more than 2 nm,providing an important theoretical reference for the controllable fabrication of these gratings. 展开更多
关键词 self-traceable grating atom lithography positive and negative frequency detuning surface growth
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Two-photon absorption of FAPbBr_(3) perovskite nanocrystals
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作者 张轩宇 肖书宇 +2 位作者 王雄彬 贺廷超 陈锐 《Chinese Physics B》 SCIE EI CAS CSCD 2023年第6期27-33,共7页
Perovskite nanocrystals(NCs) with high two-photon absorption(TPA) cross-section are of great interest due to their potential applications in three-dimensional optical data storage and multiphoton fluorescence microsco... Perovskite nanocrystals(NCs) with high two-photon absorption(TPA) cross-section are of great interest due to their potential applications in three-dimensional optical data storage and multiphoton fluorescence microscopy. Among various perovskite materials, FAPbBr_(3) NCs show a better development prospect due to their excellent stability. However, there are few reports on their nonlinear optical properties. In this work, the nonlinear optical behavior of FAPbBr_(3) NCs is studied.The methods of multiphoton absorption photoluminescence saturation and open aperture Z-scan technique were applied to determine the TPA cross-section of FAPbBr_(3)NCs, which was around 2.76 × 10^(-45)cm^(4)·s·photon^(-1) at 800 nm. In addition,temperature-dependent photoluminescence induced by TPA was investigated, and the small longitudinal optical phonon energy and electron–phonon coupling strength was obtained, which confirm the weak Pb–Br interaction. Meanwhile, it is found that the exciton binding energy in FAPbBr_(3) NCs was 69.668 me V, which may be ascribed to the strong hydrogen bond interaction. It is expected that our findings will promote the application of FAPbBr_(3) NCs in optoelectronic devices. 展开更多
关键词 FAPbBr_(3)nanocrystals two-photon absorption cross-section Z-SCAN multiphoton absorption photoluminescence saturation
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Production of χc and ηc in Ultra-Peripheral Collisions with Two-Photon Processes
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作者 Gongming Yu Yanbing Cai +1 位作者 Quangui Gao Qiang Hu 《Journal of Modern Physics》 2023年第12期1634-1640,共7页
We calculate the production of χ<sub>c</sub> and η<sub>c</sub> by the two-photon process in ultra-peripheral heavy ion collisions at Relativistic Heavy Ion Collider (RHIC) and Large Hadron Co... We calculate the production of χ<sub>c</sub> and η<sub>c</sub> by the two-photon process in ultra-peripheral heavy ion collisions at Relativistic Heavy Ion Collider (RHIC) and Large Hadron Collider (LHC) energies. The differential cross section of transverse momentum distribution and rapidity distribution for (H = χ<sub>c</sub> and η<sub>c</sub>), are estimated by using the equivalent photon flux in the impact parameter space. The numerical results indicate that the study of χ<sub>c</sub> and η<sub>c</sub> in ultra-peripheral heavy ion collisions are feasible at RHIC and LHC energies. 展开更多
关键词 CHARMONIUM two-photon Processes Ultra-Peripheral Collisions
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基于掩模光刻的液晶波前校正器设计与制备
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作者 杜莹 陈梅蕊 +5 位作者 刘禹彤 曹宗新 毛红敏 李小平 孙会娟 曹召良 《中国光学(中英文)》 EI CAS CSCD 北大核心 2024年第2期324-333,共10页
液晶波前校正器通常基于液晶显示器的工艺制备而成,因此其研制成本高、定制难度大。本文基于掩模光刻法制备液晶波前校正器,以实现液晶波前校正器的专用化、低成本研制。基于掩模光刻技术设计并制备了91像素的无源液晶驱动电极,并封装... 液晶波前校正器通常基于液晶显示器的工艺制备而成,因此其研制成本高、定制难度大。本文基于掩模光刻法制备液晶波前校正器,以实现液晶波前校正器的专用化、低成本研制。基于掩模光刻技术设计并制备了91像素的无源液晶驱动电极,并封装成液晶光学校正单元。设计并制备了驱动连接电路板,实现了液晶光学驱动单元和驱动电路板的匹配对接。对液晶波前校正器响应特性进行检测。结果显示,其相位调制量为5.5个波长,响应时间为224 ms。利用Zygo干涉仪进行球面波的产生和静态倾斜像差的校正。结果显示,其可以产生正负离焦波前,且对水平倾斜像差校正后,Zernike多项式中第一项的值从1.18降至0.16,校正幅度达86%,实现了像差的有效校正。本文的研究工作可为液晶波前校正器的研制提供新思路,进而拓宽其应用领域和场景。 展开更多
关键词 液晶波前校正器 掩模光刻 波前 响应特性 像差校正
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晶圆级薄膜铌酸锂波导制备工艺与性能表征
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作者 叶志霖 李世凤 +5 位作者 崔国新 尹志军 王学斌 赵刚 胡小鹏 祝世宁 《人工晶体学报》 CAS 北大核心 2024年第3期426-433,共8页
随着光子集成和光通信技术的快速发展,低损耗波导是实现高效光子传输的关键元件,其性能直接影响整个集成芯片的性能。因此,低损耗波导的制备技术是当前铌酸锂集成光子技术研究的热点和难点。本研究针对晶圆级低损耗薄膜铌酸锂波导的制... 随着光子集成和光通信技术的快速发展,低损耗波导是实现高效光子传输的关键元件,其性能直接影响整个集成芯片的性能。因此,低损耗波导的制备技术是当前铌酸锂集成光子技术研究的热点和难点。本研究针对晶圆级低损耗薄膜铌酸锂波导的制备工艺进行了深入研究,在4英寸的薄膜铌酸锂晶圆上,基于深紫外光刻和电感耦合等离子体刻蚀技术,成功制备出了传输损耗低于0.15 dB/cm的波导,同时刻蚀深度误差控制在10%以内,极大地提高了波导结构的精确度。此外,本研究还提出了一种基于微环谐振腔的晶圆上波导损耗的表征方案,能更精确地评估波导性能。通过测试,发现所制备的波导合格率超过85%,显示出良好的可重复性和可靠性。本文中发展的晶圆级薄膜铌酸锂加工工艺,对推进铌酸锂波导的大规模制备和应用具有重要意义。 展开更多
关键词 薄膜铌酸锂 晶圆级加工 波导损耗测量 深紫外光刻 ICP刻蚀 集成光子技术
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近代雕版翻刻新式印刷书籍考论
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作者 孙云霄 《出版科学》 北大核心 2024年第1期99-107,共9页
中国近代出现的使用雕版翻刻新式印刷书籍的现象,是新、旧印刷技术和出版产业过渡阶段的特殊情形,它在一定程度上为现代出版企业力所不及的偏远落后地区带来新风,补充了当地贫匮的教育资源。通过借助版本实物和文献资料,系统考察了这一... 中国近代出现的使用雕版翻刻新式印刷书籍的现象,是新、旧印刷技术和出版产业过渡阶段的特殊情形,它在一定程度上为现代出版企业力所不及的偏远落后地区带来新风,补充了当地贫匮的教育资源。通过借助版本实物和文献资料,系统考察了这一现象的时间跨度与地理分布,以及所翻刻新式书籍的种类特点。传统的雕版印刷业在外来文化和技术的冲击下,一方面要与新式印刷业发生碰撞、竞争,另一方面也会努力融入和利用新文化流行的大势,但由于效率低下,在社会日新月异、民众对新闻新知需求日益迫切的情况下,最终退出历史舞台。 展开更多
关键词 近代 石印 铅印 印刷业 雕版翻刻
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Patterning single-layer materials by electrical breakdown using atomic force microscopy
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作者 Yajie Yang Jiajia Lu +1 位作者 Yanbo Xie Libing Duan 《Nanotechnology and Precision Engineering》 EI CAS CSCD 2024年第1期71-77,共7页
The development of nanoelectronics and nanotechnologies has been boosted significantly by the emergence of 2D materials because of their atomic thickness and peculiar properties,and developing a universal,precise patte... The development of nanoelectronics and nanotechnologies has been boosted significantly by the emergence of 2D materials because of their atomic thickness and peculiar properties,and developing a universal,precise patterning technology for single-layer 2D materials is critical for assembling nanodevices.Demonstrated here is a nanomachining technique using electrical breakdown by an AFM tip to fabricate nanopores,nanostrips,and other nanostructures on demand.This can be achieved by voltage scanning or applying a constant voltage while moving the tip.By measuring the electrical current,the formation process on single-layer materials was shown quantitatively.The present results provide evidence of successful pattern fabrication on single-layer MoS2,boron nitride,and graphene,although further confirmation is still needed.The proposed method holds promise as a general nanomachining technology for the future. 展开更多
关键词 2D material NANOPATTERN AFM Electrical breakdown lithography
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大功率808 nm分布反馈激光器阵列研制
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作者 孙春明 朱振 +4 位作者 任夫洋 陈康 苏建 夏伟 徐现刚 《固体电子学研究与进展》 CAS 2024年第1期72-76,共5页
为了提高808 nm大功率半导体激光器阵列的波长稳定性,提出了带有二阶布拉格光栅的大功率宽条型808 nm分布反馈激光器阵列。相比于传统的一阶布拉格光栅,其可以显著抑制简并纵模的产生,提高器件的波长锁定范围。借助于金属有机化学气相... 为了提高808 nm大功率半导体激光器阵列的波长稳定性,提出了带有二阶布拉格光栅的大功率宽条型808 nm分布反馈激光器阵列。相比于传统的一阶布拉格光栅,其可以显著抑制简并纵模的产生,提高器件的波长锁定范围。借助于金属有机化学气相沉积、全息光刻、干法刻蚀以及湿法腐蚀等工艺,完成了器件的制备,并且在准连续条件(200 A、200μs、20 Hz)下,对所制备的激光器阵列进行了不同温度下的性能测试。测试结果表明:器件峰值输出功率可达到190 W,光电转换效率超过55%,光谱半高宽为0.6 nm,温漂系数为0.06 nm/K,波长锁定范围达到125℃(-35~90℃)。另外,对其进行了老化考评,结果显示,老化2 000 h后峰值功率衰减小于4%。 展开更多
关键词 温漂系数 二次外延 全息光刻 二阶光栅 激光器阵列
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微模具重复利用的高深宽比铜微结构微电铸复制技术
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作者 苏少雄 孙云娜 +3 位作者 宋嘉诚 吴永进 姚锦元 丁桂甫 《微纳电子技术》 CAS 2024年第4期162-169,共8页
针对紫外线光刻、电铸成型和注塑(UV-LIGA)工艺的去胶难题,提出了一种以脱模代替去胶的改良工艺,用于批量制造高深宽比铜微结构。该工艺以可重复利用的硅橡胶软模具代替传统的SU-8光刻微模具,采用硅通孔(TSV)镀铜技术进行微电铸填充,然... 针对紫外线光刻、电铸成型和注塑(UV-LIGA)工艺的去胶难题,提出了一种以脱模代替去胶的改良工艺,用于批量制造高深宽比铜微结构。该工艺以可重复利用的硅橡胶软模具代替传统的SU-8光刻微模具,采用硅通孔(TSV)镀铜技术进行微电铸填充,然后通过直接脱模实现金属微结构的完全释放,既解决了去胶难题,又能够解决高深宽比微模具电铸因侧壁金属化导致的空洞包夹问题,同时可以大幅降低成套工艺成本。仿真和实验结果显示,热处理可以改善脱模效果,显著降低脱模损伤,支持微模具重复利用。采用初步优化的改良工艺已成功实现深宽比约3∶1的铜微结构的高精度复制。 展开更多
关键词 紫外线光刻、电铸成型和注塑(UV-LIGA)工艺 硅橡胶模具 硅通孔(TSV)镀铜 脱模 模具重复利用
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Attosecond ionization time delays in strong-field physics
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作者 马永哲 倪宏程 吴健 《Chinese Physics B》 SCIE EI CAS CSCD 2024年第1期102-121,共20页
Electronic processes within atoms and molecules reside on the timescale of attoseconds. Recent advances in the laserbased pump-probe interrogation techniques have made possible the temporal resolution of ultrafast ele... Electronic processes within atoms and molecules reside on the timescale of attoseconds. Recent advances in the laserbased pump-probe interrogation techniques have made possible the temporal resolution of ultrafast electronic processes on the attosecond timescale, including photoionization and tunneling ionization. These interrogation techniques include the attosecond streak camera, the reconstruction of attosecond beating by interference of two-photon transitions, and the attoclock. While the former two are usually employed to study photoionization processes, the latter is typically used to investigate tunneling ionization. In this review, we briefly overview these timing techniques towards an attosecond temporal resolution of ionization processes in atoms and molecules under intense laser fields. In particular, we review the backpropagation method, which is a novel hybrid quantum-classical approach towards the full characterization of tunneling ionization dynamics. Continued advances in the interrogation techniques promise to pave the pathway towards the exploration of ever faster dynamical processes on an ever shorter timescale. 展开更多
关键词 strong-field ionization ATTOSECOND time delay photoionization time delay tunneling time delay attosecond streak camera reconstruction of attosecond beating by interference of two-photon transitions(RABBITT) attoclock backpropagation
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In vivo imaging of the neuronal response to spinal cord injury:a narrative review
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作者 Junhao Deng Chang Sun +5 位作者 Ying Zheng Jianpeng Gao Xiang Cui Yu Wang Licheng Zhang Peifu Tang 《Neural Regeneration Research》 SCIE CAS CSCD 2024年第4期811-817,共7页
Deciphering the neuronal response to injury in the spinal cord is essential for exploring treatment strategies for spinal cord injury(SCI).However,this subject has been neglected in part because appropriate tools are ... Deciphering the neuronal response to injury in the spinal cord is essential for exploring treatment strategies for spinal cord injury(SCI).However,this subject has been neglected in part because appropriate tools are lacking.Emerging in vivo imaging and labeling methods offer great potential for observing dynamic neural processes in the central nervous system in conditions of health and disease.This review first discusses in vivo imaging of the mouse spinal cord with a focus on the latest imaging techniques,and then analyzes the dynamic biological response of spinal cord sensory and motor neurons to SCI.We then summarize and compare the techniques behind these studies and clarify the advantages of in vivo imaging compared with traditional neuroscience examinations.Finally,we identify the challenges and possible solutions for spinal cord neuron imaging. 展开更多
关键词 anterior horn neurons calcium imaging central nervous system dorsal horn neurons dorsal root ganglion in vivo imaging neuronal response spinal cord injury spinal cord two-photon microscopy
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纳米压印技术在太阳能电池中应用的研究进展
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作者 李芳 张静 刘彦伯 《微纳电子技术》 CAS 2024年第4期49-62,共14页
对纳米压印技术原理、分类和不同领域的应用进行了简单阐述。总结了纳米压印技术在不同类型的太阳能电池,如晶硅太阳能电池、薄膜太阳能电池、聚合物太阳能电池及其他新型太阳能电池中的应用,并重点阐述了纳米压印技术在制备太阳能电池... 对纳米压印技术原理、分类和不同领域的应用进行了简单阐述。总结了纳米压印技术在不同类型的太阳能电池,如晶硅太阳能电池、薄膜太阳能电池、聚合物太阳能电池及其他新型太阳能电池中的应用,并重点阐述了纳米压印技术在制备太阳能电池减反膜、图案化衬底、图案化活性层和图案化电极等有效减少太阳能电池表面太阳光反射和大大提高太阳能电池光电转换效率方面的研究进展。最后,针对纳米压印技术在产业化中所面临的困难进行了分析和总结,并提出了纳米压印技术在太阳能电池领域未来的研究重点和发展方向。 展开更多
关键词 纳米压印 太阳能电池 减反 图案化 光电转换效率
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