Piezoelectric actuators operating in piezoelectric-induced strain/stress or electromechanical res.onanceinduced vibration or wave-motion friction drive mechanism have shown many advantagesover traditional electromagne...Piezoelectric actuators operating in piezoelectric-induced strain/stress or electromechanical res.onanceinduced vibration or wave-motion friction drive mechanism have shown many advantagesover traditional electromagnetic mot ors,especilly,when miniaturizing into millimeter-scale size,while magnetoelectric act uators operating in magnetostrictive mechanism are capable of piezo-dlectric self-sensing and remote operation under an applied magnetic field.This paper summarizesthe recent progresses in piezoelectric ceramic and single crystal materials based actuators andmicromotors,ferromagnetic/ferroeletric laminated magnetoelectric actuat ors,including rotary,linear,planner,and spherical motion actuators,and bending motion magnetoelectric actuators.Their driving mechanisms,operation propertics,and applications are also explained.展开更多
基金supported by the National Natural Science Foundation of China(Grant Nos.50872002,51072003,and 51132001)the Ministry of Sci-ence and Technology of China through 973 Program(Grant No.2009CB623305).
文摘Piezoelectric actuators operating in piezoelectric-induced strain/stress or electromechanical res.onanceinduced vibration or wave-motion friction drive mechanism have shown many advantagesover traditional electromagnetic mot ors,especilly,when miniaturizing into millimeter-scale size,while magnetoelectric act uators operating in magnetostrictive mechanism are capable of piezo-dlectric self-sensing and remote operation under an applied magnetic field.This paper summarizesthe recent progresses in piezoelectric ceramic and single crystal materials based actuators andmicromotors,ferromagnetic/ferroeletric laminated magnetoelectric actuat ors,including rotary,linear,planner,and spherical motion actuators,and bending motion magnetoelectric actuators.Their driving mechanisms,operation propertics,and applications are also explained.