Ultrafast laser processing technology has offered a wide range of opportunities in micro/nano fabrication and other fields such as nanotechnology,biotechnology,energy science,and photonics due to its controllable proc...Ultrafast laser processing technology has offered a wide range of opportunities in micro/nano fabrication and other fields such as nanotechnology,biotechnology,energy science,and photonics due to its controllable processing precision,diverse processing capabilities,and broad material adaptability.The processing abilities and applications of the ultrafast laser still need more exploration.In the field of material processing,controlling the atomic scale structure in nanomaterials is challenging.Complex effects exist in ultrafast laser surface/interface processing,making it difficult to modulate the nanostructure and properties of the surface/interface as required.In the ultrafast laser fabrication of micro functional devices,the processing ability needs to be improved.Here,we review the research progress of ultrafast laser micro/nano fabrication in the areas of material processing,surface/interface controlling,and micro functional devices fabrication.Several useful ultrafast laser processing methods and applications in these areas are introduced.With various processing effects and abilities,the ultrafast laser processing technology has demonstrated application values in multiple fields from science to industry.展开更多
Controllable fabrication of surface micro/nano structures is the key to realizing surface functionalization for various applications.As a versatile approach,ultrafast laser ablation has been widely studied for surface...Controllable fabrication of surface micro/nano structures is the key to realizing surface functionalization for various applications.As a versatile approach,ultrafast laser ablation has been widely studied for surface micro/nano structuring.Increasing research eforts in this feld have been devoted to gaining more control over the fabrication processes to meet the increasing need for creation of complex structures.In this paper,we focus on the in-situ deposition process following the plasma formation under ultrafast laser ablation.From an overview perspective,we frstly summarize the diferent roles that plasma plumes,from pulsed laser ablation of solids,play in diferent laser processing approaches.Then,the distinctive in-situ deposition process within surface micro/nano structuring is highlighted.Our experimental work demonstrated that the in-situ deposition during ultrafast laser surface structuring can be controlled as a localized micro-additive process to pile up secondary ordered structures,through which a unique kind of hierarchical structure with fort-like bodies sitting on top of micro cone arrays were fabricated as a showcase.The revealed laser-matter interaction mechanism can be inspiring for the development of new ultrafast laser fabrication approaches,adding a new dimension and more fexibility in controlling the fabrication of functional surface micro/nano structures.展开更多
During femtosecond laser fabrication,photons are mainly absorbed by electrons,and the subsequent energy transfer from electrons to ions is of picosecond order.Hence,lattice motion is negligible within the femtosecond ...During femtosecond laser fabrication,photons are mainly absorbed by electrons,and the subsequent energy transfer from electrons to ions is of picosecond order.Hence,lattice motion is negligible within the femtosecond pulse duration,whereas femtosecond photon-electron interactions dominate the entire fabrication process.Therefore,femtosecond laser fabrication must be improved by controlling localized transient electron dynamics,which poses a challenge for measuring and controlling at the electron level during fabrication processes.Pump-probe spectroscopy presents a viable solution,which can be used to observe electron dynamics during a chemical reaction.In fact,femtosecond pulse durations are shorter than many physical/chemical characteristic times,which permits manipulating,adjusting,or interfering with electron dynamics.Hence,we proposed to control localized transient electron dynamics by temporally or spatially shaping femtosecond pulses,and further to modify localized transient materials properties,and then to adjust material phase change,and eventually to implement a novel fabrication method.This review covers our progresses over the past decade regarding electrons dynamics control(EDC)by shaping femtosecond laser pulses in micro/nanomanufacturing:(1)Theoretical models were developed to prove EDC feasibility and reveal its mechanisms;(2)on the basis of the theoretical predictions,many experiments are conducted to validate our EDC-based femtosecond laser fabrication method.Seven examples are reported,which proves that the proposed method can significantly improve fabrication precision,quality,throughput and repeatability and effectively control micro/nanoscale structures;(3)a multiscale measurement system was proposed and developed to study the fundamentals of EDC from the femtosecond scale to the nanosecond scale and to the millisecond scale;and(4)As an example of practical applications,our method was employed to fabricate some key structures in one of the 16 Chinese National S&T Major Projects,for which electron dynamics were measured using our multiscale measurement system.展开更多
We present a novel approach for tailoring the laser induced surface topography upon femtosecond(fs)pulsed laser irradiation.The method employs spatially controlled double fs laser pulses to actively regulate the hydro...We present a novel approach for tailoring the laser induced surface topography upon femtosecond(fs)pulsed laser irradiation.The method employs spatially controlled double fs laser pulses to actively regulate the hydrodynamic microfluidic motion of the melted layer that gives rise to the structures formation.The pulse train used,in particular,consists of a previously unexplored spatiotemporal intensity combination including one pulse with Gaussian and another with periodically modulated intensity distribution created by Direct Laser Interference Patterning(DLIP).The interpulse delay is appropriately chosen to reveal the contribution of the microfluidic melt flow,while it is found that the sequence of the Gaussian and DLIP pulses remarkably influences the surface profile attained.Results also demonstrate that both the spatial intensity of the double pulse and the effective number of pulses per irradiation spot can further be modulated to control the formation of complex surface morphologies.The underlying physical processes behind the complex patterns’generation were interpreted in terms of a multiscale model combining electron excitation with melt hydrodynamics.We believe that this work can constitute a significant step forward towards producing laser induced surface structures on demand by tailoring the melt microfluidic phenomena.展开更多
利用飞秒激光微加工平台,结合激光直写技术,在50 nm厚的金膜上制备出了二维光栅,研究了扫描速度和扫描间距固定时,飞秒激光能量密度的改变对二维光栅结构的影响。通过扫描电子显微镜(Scanning Electron Microscopy,SEM)对制备的二维光...利用飞秒激光微加工平台,结合激光直写技术,在50 nm厚的金膜上制备出了二维光栅,研究了扫描速度和扫描间距固定时,飞秒激光能量密度的改变对二维光栅结构的影响。通过扫描电子显微镜(Scanning Electron Microscopy,SEM)对制备的二维光栅的形貌进行表征,并准确测量了光栅参数。利用氦氖激光分析了二维光栅的衍射效果,并与数值模拟得到的图案进行比较,分析了条纹缝宽和栅格尺寸对衍射点阵列光强分布的影响。研究表明飞秒激光直写技术可以方便快速地通过加工参数的改变制备不同尺寸分布的二维光栅。展开更多
Long period fiber gratings (LPFGs) with different spectral characteristics were fabricated with 1 kHz, 50 fs laser pulses. The contrast of resonant rejection band can be significantly increased by a proper amount of...Long period fiber gratings (LPFGs) with different spectral characteristics were fabricated with 1 kHz, 50 fs laser pulses. The contrast of resonant rejection band can be significantly increased by a proper amount of axial stress along a fiber during laser writing or post- processing with lower energy density laser irradiation. Variations of focal condition, pulse energy of laser irradiation and the number of grating periods lead to the generation of resonance rejection band of LPFGs from single-peak to multi-peak plus larger out-of-band loss. The out-of-band loss is primarily caused by Mie scattering from the laser processed cites, and it can be reduced by decreasing the duty cycle of grating pitch instead of lowing down the actual power of laser irradiation.展开更多
基金supported by the National Natural Science Foundation of China(No.52075289)the Tsinghua-Jiangyin Innovation Special Fund(TJISF,No.2023JYTH0104).
文摘Ultrafast laser processing technology has offered a wide range of opportunities in micro/nano fabrication and other fields such as nanotechnology,biotechnology,energy science,and photonics due to its controllable processing precision,diverse processing capabilities,and broad material adaptability.The processing abilities and applications of the ultrafast laser still need more exploration.In the field of material processing,controlling the atomic scale structure in nanomaterials is challenging.Complex effects exist in ultrafast laser surface/interface processing,making it difficult to modulate the nanostructure and properties of the surface/interface as required.In the ultrafast laser fabrication of micro functional devices,the processing ability needs to be improved.Here,we review the research progress of ultrafast laser micro/nano fabrication in the areas of material processing,surface/interface controlling,and micro functional devices fabrication.Several useful ultrafast laser processing methods and applications in these areas are introduced.With various processing effects and abilities,the ultrafast laser processing technology has demonstrated application values in multiple fields from science to industry.
基金support by the National Key Research and Development Program of China(No.2017YFB1104300)the National Natural Science Foundation of China(Nos.51575309 and 51210009)the Tsinghua University Initiative Scientifc Research Program(No.2018Z05JZY009).
文摘Controllable fabrication of surface micro/nano structures is the key to realizing surface functionalization for various applications.As a versatile approach,ultrafast laser ablation has been widely studied for surface micro/nano structuring.Increasing research eforts in this feld have been devoted to gaining more control over the fabrication processes to meet the increasing need for creation of complex structures.In this paper,we focus on the in-situ deposition process following the plasma formation under ultrafast laser ablation.From an overview perspective,we frstly summarize the diferent roles that plasma plumes,from pulsed laser ablation of solids,play in diferent laser processing approaches.Then,the distinctive in-situ deposition process within surface micro/nano structuring is highlighted.Our experimental work demonstrated that the in-situ deposition during ultrafast laser surface structuring can be controlled as a localized micro-additive process to pile up secondary ordered structures,through which a unique kind of hierarchical structure with fort-like bodies sitting on top of micro cone arrays were fabricated as a showcase.The revealed laser-matter interaction mechanism can be inspiring for the development of new ultrafast laser fabrication approaches,adding a new dimension and more fexibility in controlling the fabrication of functional surface micro/nano structures.
基金supported by the National Natural Science Foundation of China(NSFC)(Grant Nos.90923039,91323301,50705009,51105037,51322511 and 51025521)National Basic Research Program of China(973 Program)(Grant No.2011CB013000)+4 种基金the 863 Project of China under Grant No.2008AA03Z301the Cultivation Fund of the Key Scientific and Technical Innovation Project,Ministry of Education of China(No.708018)the 111 Project of China(Grant No.B08043)Multidisciplinary University Research Initiative(MURI)program of USA under Grant No.N00014-05-1-0432National Science Foundation of USA under Grant No.0423233.
文摘During femtosecond laser fabrication,photons are mainly absorbed by electrons,and the subsequent energy transfer from electrons to ions is of picosecond order.Hence,lattice motion is negligible within the femtosecond pulse duration,whereas femtosecond photon-electron interactions dominate the entire fabrication process.Therefore,femtosecond laser fabrication must be improved by controlling localized transient electron dynamics,which poses a challenge for measuring and controlling at the electron level during fabrication processes.Pump-probe spectroscopy presents a viable solution,which can be used to observe electron dynamics during a chemical reaction.In fact,femtosecond pulse durations are shorter than many physical/chemical characteristic times,which permits manipulating,adjusting,or interfering with electron dynamics.Hence,we proposed to control localized transient electron dynamics by temporally or spatially shaping femtosecond pulses,and further to modify localized transient materials properties,and then to adjust material phase change,and eventually to implement a novel fabrication method.This review covers our progresses over the past decade regarding electrons dynamics control(EDC)by shaping femtosecond laser pulses in micro/nanomanufacturing:(1)Theoretical models were developed to prove EDC feasibility and reveal its mechanisms;(2)on the basis of the theoretical predictions,many experiments are conducted to validate our EDC-based femtosecond laser fabrication method.Seven examples are reported,which proves that the proposed method can significantly improve fabrication precision,quality,throughput and repeatability and effectively control micro/nanoscale structures;(3)a multiscale measurement system was proposed and developed to study the fundamentals of EDC from the femtosecond scale to the nanosecond scale and to the millisecond scale;and(4)As an example of practical applications,our method was employed to fabricate some key structures in one of the 16 Chinese National S&T Major Projects,for which electron dynamics were measured using our multiscale measurement system.
基金support by the European Union’s Horizon 2020 research and innovation program through the project BioCombs4Nanofibres(Grant Agreement No.862016)。
文摘We present a novel approach for tailoring the laser induced surface topography upon femtosecond(fs)pulsed laser irradiation.The method employs spatially controlled double fs laser pulses to actively regulate the hydrodynamic microfluidic motion of the melted layer that gives rise to the structures formation.The pulse train used,in particular,consists of a previously unexplored spatiotemporal intensity combination including one pulse with Gaussian and another with periodically modulated intensity distribution created by Direct Laser Interference Patterning(DLIP).The interpulse delay is appropriately chosen to reveal the contribution of the microfluidic melt flow,while it is found that the sequence of the Gaussian and DLIP pulses remarkably influences the surface profile attained.Results also demonstrate that both the spatial intensity of the double pulse and the effective number of pulses per irradiation spot can further be modulated to control the formation of complex surface morphologies.The underlying physical processes behind the complex patterns’generation were interpreted in terms of a multiscale model combining electron excitation with melt hydrodynamics.We believe that this work can constitute a significant step forward towards producing laser induced surface structures on demand by tailoring the melt microfluidic phenomena.
文摘利用飞秒激光微加工平台,结合激光直写技术,在50 nm厚的金膜上制备出了二维光栅,研究了扫描速度和扫描间距固定时,飞秒激光能量密度的改变对二维光栅结构的影响。通过扫描电子显微镜(Scanning Electron Microscopy,SEM)对制备的二维光栅的形貌进行表征,并准确测量了光栅参数。利用氦氖激光分析了二维光栅的衍射效果,并与数值模拟得到的图案进行比较,分析了条纹缝宽和栅格尺寸对衍射点阵列光强分布的影响。研究表明飞秒激光直写技术可以方便快速地通过加工参数的改变制备不同尺寸分布的二维光栅。
文摘Long period fiber gratings (LPFGs) with different spectral characteristics were fabricated with 1 kHz, 50 fs laser pulses. The contrast of resonant rejection band can be significantly increased by a proper amount of axial stress along a fiber during laser writing or post- processing with lower energy density laser irradiation. Variations of focal condition, pulse energy of laser irradiation and the number of grating periods lead to the generation of resonance rejection band of LPFGs from single-peak to multi-peak plus larger out-of-band loss. The out-of-band loss is primarily caused by Mie scattering from the laser processed cites, and it can be reduced by decreasing the duty cycle of grating pitch instead of lowing down the actual power of laser irradiation.