Now vibration isolation of ultra precision machine tool is usually achieved through air springs systems. As far as HCM I sub micro turning machine developed by HIT, an active vibration isolation system that consists o...Now vibration isolation of ultra precision machine tool is usually achieved through air springs systems. As far as HCM I sub micro turning machine developed by HIT, an active vibration isolation system that consists of air springs and electro magnetic actuators was presented. The primary function of air springs is to support the turning machine and to isolate the high frequency vibration. The electro magnetic actuators controlled by fuzzy neural networks isolate the low frequency vibration. The experiment indicates that active vibration isolation system isolates base vibration effectively in all the frequency range. So the vibration of the machine bed is controlled under 10 -6 g and the surface roughness is improved.展开更多
In order to minimize vibration and improve rotary precision of spindle, we apply active vibration control technique to ultra-precision turning machine based on the analysis of vibration characteristic of aerostatic be...In order to minimize vibration and improve rotary precision of spindle, we apply active vibration control technique to ultra-precision turning machine based on the analysis of vibration characteristic of aerostatic bearing spindle. Using aerostatic bearing itself as actuator, the vibration of spindle is controlled by adjusting admission pressure respectively and by changing pressure distribution in the bearing. The experiments and simulations prove that this method can minimize the vibration of spindle effectively.展开更多
With the increasing market demand for optical complex surface parts,the application of multi-axis ultraprecision single-point diamond turning is increasing.A tool path generation method is very important to decrease m...With the increasing market demand for optical complex surface parts,the application of multi-axis ultraprecision single-point diamond turning is increasing.A tool path generation method is very important to decrease manufacturing time,enhance surface quality,and reduce cost.Compared with the tool path generation of the traditional multi-axis milling,that of the ultra-precision single-point diamond turning requires higher calculation accuracy and efficiency.This paper reviews the tool path generation of ultra-precision diamond turning,considering several key issues:cutter location(CL)points calculation,the topological form of tool path,interpolation mode,and G code optimization.展开更多
Ultra-precision machining causes materials to undergo a greatly strained deformation process in a short period of time.The effect of shear strain rates on machining quality, in particular on surface anisotropy, is a t...Ultra-precision machining causes materials to undergo a greatly strained deformation process in a short period of time.The effect of shear strain rates on machining quality, in particular on surface anisotropy, is a topic deserving of research that has thus far been overlooked.This study analyzes the impact of the strain rate during the ultra-precision turning of single-crystal silicon on the anisotropy of surface roughness.Focusing on the establishment of cutting models considering the tool rake angle and the edge radius, this is the first research that takes into account the strain rate dislocation emission criteria in studying the effects of the edge radius, the cutting speed, and the cutting thickness on the plastic deformation of single-crystal silicon.The results of this study show that the uses of a smaller edge radius, faster cutting speeds, and a reduced cutting thickness can result in optimally uniform surface roughness, while the use of a very sharp cutting tool is essential when operating with smaller cutting thicknesses.A further finding is that insufficient plastic deformation is the major cause of increased surface roughness in the ultra-precision turning of brittle materials.On this basis, we propose that the capacity of single-crystal silicon to emit dislocations be improved as much as possible before brittle fracture occurs, thereby promoting plastic deformation and minimizing the anisotropy of surface roughness in the machined workpiece.展开更多
文摘Now vibration isolation of ultra precision machine tool is usually achieved through air springs systems. As far as HCM I sub micro turning machine developed by HIT, an active vibration isolation system that consists of air springs and electro magnetic actuators was presented. The primary function of air springs is to support the turning machine and to isolate the high frequency vibration. The electro magnetic actuators controlled by fuzzy neural networks isolate the low frequency vibration. The experiment indicates that active vibration isolation system isolates base vibration effectively in all the frequency range. So the vibration of the machine bed is controlled under 10 -6 g and the surface roughness is improved.
文摘In order to minimize vibration and improve rotary precision of spindle, we apply active vibration control technique to ultra-precision turning machine based on the analysis of vibration characteristic of aerostatic bearing spindle. Using aerostatic bearing itself as actuator, the vibration of spindle is controlled by adjusting admission pressure respectively and by changing pressure distribution in the bearing. The experiments and simulations prove that this method can minimize the vibration of spindle effectively.
基金supports of the Funds for the National Natural Science Foundation of China [grant numbers 51575386,51275344]
文摘With the increasing market demand for optical complex surface parts,the application of multi-axis ultraprecision single-point diamond turning is increasing.A tool path generation method is very important to decrease manufacturing time,enhance surface quality,and reduce cost.Compared with the tool path generation of the traditional multi-axis milling,that of the ultra-precision single-point diamond turning requires higher calculation accuracy and efficiency.This paper reviews the tool path generation of ultra-precision diamond turning,considering several key issues:cutter location(CL)points calculation,the topological form of tool path,interpolation mode,and G code optimization.
基金Supported by the National Natural Science Foundation of China（No.50875068）,and the National High Technology Research and Development Programme of China（No.2009AA044302）.
基金supported by the National Defence Scientific Research of China (A3520133004)
文摘Ultra-precision machining causes materials to undergo a greatly strained deformation process in a short period of time.The effect of shear strain rates on machining quality, in particular on surface anisotropy, is a topic deserving of research that has thus far been overlooked.This study analyzes the impact of the strain rate during the ultra-precision turning of single-crystal silicon on the anisotropy of surface roughness.Focusing on the establishment of cutting models considering the tool rake angle and the edge radius, this is the first research that takes into account the strain rate dislocation emission criteria in studying the effects of the edge radius, the cutting speed, and the cutting thickness on the plastic deformation of single-crystal silicon.The results of this study show that the uses of a smaller edge radius, faster cutting speeds, and a reduced cutting thickness can result in optimally uniform surface roughness, while the use of a very sharp cutting tool is essential when operating with smaller cutting thicknesses.A further finding is that insufficient plastic deformation is the major cause of increased surface roughness in the ultra-precision turning of brittle materials.On this basis, we propose that the capacity of single-crystal silicon to emit dislocations be improved as much as possible before brittle fracture occurs, thereby promoting plastic deformation and minimizing the anisotropy of surface roughness in the machined workpiece.
