A new thyristor is proposed and realized in the foundry＇s 0.18-μm CMOS process for electrostatic dis-charge（ESD） protection.Without extra mask layers or process steps, the new ultra-low-voltage-trigger thyristor（...A new thyristor is proposed and realized in the foundry＇s 0.18-μm CMOS process for electrostatic dis-charge（ESD） protection.Without extra mask layers or process steps, the new ultra-low-voltage-trigger thyristor（ULVT thyristor） has a trigger voltage as low as 6.7 V and an ESD robustness exceeding 50 mA/μm, which enables effective ESD protection.Compared with the traditional medium-voltage-trigger thyristor（MVT thyristor）, the new structure not only has a lower trigger voltage, but can also provide better ESD protection under both positive and negative ESD zapping conditions.展开更多
文摘A new thyristor is proposed and realized in the foundry＇s 0.18-μm CMOS process for electrostatic dis-charge（ESD） protection.Without extra mask layers or process steps, the new ultra-low-voltage-trigger thyristor（ULVT thyristor） has a trigger voltage as low as 6.7 V and an ESD robustness exceeding 50 mA/μm, which enables effective ESD protection.Compared with the traditional medium-voltage-trigger thyristor（MVT thyristor）, the new structure not only has a lower trigger voltage, but can also provide better ESD protection under both positive and negative ESD zapping conditions.
