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Conduction Properties and Scattering Mechanisms in F-doped Textured Transparent Conducting SnO_2 Films Deposited by APCVD 被引量:1
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作者 Deheng ZHANG(Dept. of Physics, Shandong University, Jinan 250100, China)Honglei MA(Institute of Optoelectronic Materials and Devices, Shandong University, Jinan 250100, China) 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 1997年第1期50-56,共7页
Transparent conducting F-doped texture SnO2 films with resistivity as low as 5× 10-4 Ω ·cm,with carrier concentrations between 3.5 × 1020 and 7× 1020 cm-3 and Hall mobilities from 15.7 to 20.1 cm2... Transparent conducting F-doped texture SnO2 films with resistivity as low as 5× 10-4 Ω ·cm,with carrier concentrations between 3.5 × 1020 and 7× 1020 cm-3 and Hall mobilities from 15.7 to 20.1 cm2/(V/s) have been prepared by atmosphere pressure chemical vapour deposition (APCVD). These polycrystalline films possess a variable preferred orientation, the polycrystallite sizes and orientations vary with substrate temperature. The substrate temperature and fluorine flow rate dependence of conductivity, Hall mobility and carrier conentration fOr the resultingfilms have been obtained. The temperature dependence of the mobiity and carrier concentrationhave been measured over a temperature range 16~400 K. A systematically theoretical analysis on scattering mechanisms for the highly conductive SnO2 films has been given. Both theoretical analysis and experimental results indicate that for these degenerate, polycrystalline SnO2 :F films in the low temperature range (below 100 K), ionized impurity scattering is main scattering mechanism. However, when the temperature is higher than 100 K, the lattice vibration scattering becomes dominant. The grain boundary scattering makes a small contribution to limit the mobility of the films. 展开更多
关键词 SNO cm Conduction Properties and Scattering Mechanisms in F-doped Textured Transparent conducting sno2 films Deposited by APCVD
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Sol-Gel法制备低阻SnO_2薄膜 被引量:8
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作者 李爱武 全宝富 +1 位作者 刘凤敏 陈丽华 《功能材料》 EI CAS CSCD 北大核心 2001年第6期645-646,648,共3页
采用sol gel法制备了SnO2 薄膜。研究了不同的实验条件对薄膜阻值的影响。利用XRD、XPS分析了薄膜的晶体结构和晶粒尺寸。利用这种低阻SnO2 薄膜制作的热线型气敏元件对H2
关键词 SOL-GEL法 气敏特性 二氧化锡薄膜 气敏材料
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超声喷雾法工艺及薄膜性能研究 被引量:5
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作者 殷顺湖 王民权 《功能材料》 EI CAS CSCD 北大核心 1998年第4期402-404,共3页
研究了超声喷雾法制备工艺对膜性能影响的关系,初步探讨了该方法的适用范围,以SnO2为例研究了成膜动力学,为该方法适用化提供了依据。
关键词 超声喷雾法 二氧化锡 薄膜
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卤素掺杂透明导电膜电导特性研究 被引量:2
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作者 殷顺湖 王民权 《硅酸盐通报》 CAS CSCD 1999年第3期48-52,共5页
通过超声喷雾法制备SnO2膜,研究了掺杂卤素原子对电导的影响规律。
关键词 超声喷雾法 掺杂卤素 电导率 二氧化锡 薄膜
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用喷涂法和溶胶-凝胶工艺制备PT/SnO_2(Sb)/SiO_2薄膜 被引量:1
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作者 王世敏 王龙海 《湖北大学学报(自然科学版)》 CAS 1997年第3期233-235,共3页
用喷涂法在石英玻璃衬底上制备RS为100~200Ω/cm2的SnO2(Sb)透明导电薄膜,并且以SnO2(Sb)/SiO2为衬底和底电极,用Sol-Gel法制备PbTiO3(PT)薄膜.PT膜为多晶,与SnO2(Sb... 用喷涂法在石英玻璃衬底上制备RS为100~200Ω/cm2的SnO2(Sb)透明导电薄膜,并且以SnO2(Sb)/SiO2为衬底和底电极,用Sol-Gel法制备PbTiO3(PT)薄膜.PT膜为多晶,与SnO2(Sb)膜之间不存在界面反应. 展开更多
关键词 喷涂法 氧化锡 钛酸铅 薄膜 溶胶-凝胶法
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溶胶-凝胶法制备的SnO_2薄膜气敏特性研究 被引量:1
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作者 高胜国 詹自力 +2 位作者 钟克创 尚中锋 彭春红 《郑州轻工业学院学报(自然科学版)》 CAS 2002年第4期11-13,共3页
以SnCl4 ·5H2 O为原料、用Sol gel法制备出了SnO2 薄膜 ,并对该薄膜的气敏特性进行了测试 .结果表明 ,SnO2 薄膜低温下对乙醇气体有较高的灵敏度和较快的响应恢复时间 ,且长期稳定性较好 .
关键词 气敏特性 溶胶-凝胶法 sno2薄膜 气敏元件 气敏材料
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Investigation of electrophysical, photo- and gas-sensitive properties of ZnO–SnO_(2) sol–gel fflms 被引量:1
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作者 Irina A.Gulyaeva Alexandra P.Ivanisheva +4 位作者 Maria G.Volkova Victoria Yu.Storozhenko Soslan A.Khubezhov Ekaterina M.Bayan Victor V.Petrov 《Journal of Advanced Dielectrics》 2024年第1期42-50,共9页
Thin nanocomposite fflms based on tin dioxide with a low content of zinc oxide(0.5–5 mol.%)were obtained by the sol–gel method.The synthesized fflms are 300–600 nm thick and contains pore sizes of 19–29 nm.The res... Thin nanocomposite fflms based on tin dioxide with a low content of zinc oxide(0.5–5 mol.%)were obtained by the sol–gel method.The synthesized fflms are 300–600 nm thick and contains pore sizes of 19–29 nm.The resulting ZnO–SnO_(2) fflms were comprehensively studied by atomic force and Kelvin probe force microscopy,X-ray diffraction,scanning electron microscopy,and high-resolution X-ray photoelectron spectroscopy spectra.The photoconductivity parameters on exposure to light with a wavelength of 470 nm were also studied.The study of the photosensitivity kinetics of ZnO–SnO_(2) fflms showed that the fflm with the Zn:Sn ratio equal to 0.5:99.5 has the minimum value of the charge carrier generation time constant.Measurements of the activation energy of the conductivity,potential barrier,and surface potential of ZnO–SnO_(2) fflms showed that these parameters have maxima at ZnO concentrations of 0.5 mol.%and 1 mol.%.Films with 1 mol.%ZnO exhibit high response values when exposed to 5–50 ppm of nitrogen dioxide at operating temperatures of 200℃ and 250℃. 展开更多
关键词 Sol–gel method ZnO–SnO_(2) films gas-sensitive properties surface potential potential barrier conduction activation energy
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