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Integrated interpretation of dual frequency induced polarization measurement based on wavelet analysis and metal factor methods 被引量:2
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作者 韩世礼 张术根 +2 位作者 柳建新 胡厚继 张文山 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2013年第5期1465-1471,共7页
In mineral exploration, the apparent resistivity and apparent frequency (or apparent polarizability) parameters of induced polarization method are commonly utilized to describe the induced polarization anomaly. When... In mineral exploration, the apparent resistivity and apparent frequency (or apparent polarizability) parameters of induced polarization method are commonly utilized to describe the induced polarization anomaly. When the target geology structure is significantly complicated, these parameters would fail to reflect the nature of the anomaly source, and wrong conclusions may be obtained. A wavelet approach and a metal factor method were used to comprehensively interpret the induced polarization anomaly of complex geologic bodies in the Adi Bladia mine. Db5 wavelet basis was used to conduct two-scale decomposition and reconstruction, which effectively suppress the noise interference of greenschist facies regional metamorphism and magma intrusion, making energy concentrated and boundary problem unobservable. On the basis of that, the ore-induced anomaly was effectively extracted by the metal factor method. 展开更多
关键词 dual frequency induced polarization method wavelet analysis metal factor Arabian-Nubian shield volcanogenic massive sulfide deposit
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DUAL-FREQUENCY IP 被引量:2
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作者 He,Jishan Department of Geology,Central Sough University of Technology,Changsha 410083,China 《中国有色金属学会会刊:英文版》 CSCD 1993年第4期1-10,共10页
The dual-frequency(DF)IP is a new kind of frequency domain IP method.Not only is thedual-frequency current transmitted simultaneously but the electric potential difference due to dualfrequency current is measured sync... The dual-frequency(DF)IP is a new kind of frequency domain IP method.Not only is thedual-frequency current transmitted simultaneously but the electric potential difference due to dualfrequency current is measured synchronously.This paper discusses the principle and charateristicof DF current, DF current can be formed by two rectangular currents which must be coherent orelse false Percent Frequency Effect(PEE)will occur.DF currents with different waveforms areequivalent in the ability of detecting IP anomalies.Unstable current has much less effect of DFIP than on conventional variable frequency method;in fact,there is no need to stabilize currentin DF IP method.There are many differences between harmonic contents of DF current and thatof rectangular wave used in variable frequency method,but theoretical analysis,labaratory mod-eling and field data all show that the anomalies of both DF and variable frequency method are sim-liar in character and close in value.DF IP can match variable frequeney IP and time domain IPin the ability of detecting IP anomaly,furthermore,dual-frequency IP measurements are morerapid,more accurate and more simple in operation. 展开更多
关键词 dual frequency IP PERCENT frequency EFFECT IP ANOMALY
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Frequency Matching Effects on Characteristics of Bulk Plasmas and Sheaths for Dual-Frequency Capacitively Coupled Argon Discharges: One-Dimensional Fluid Simulation 被引量:2
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作者 王帅 徐翔 +1 位作者 宋远红 王友年 《Plasma Science and Technology》 SCIE EI CAS CSCD 2008年第1期57-60,共4页
A one-dimensional fluid model is proposed to simulate the dual-frequency capacitively coupled plasma for Ar discharges. The influences of the low frequency on the plasma density, electron temperature, sheath voltage d... A one-dimensional fluid model is proposed to simulate the dual-frequency capacitively coupled plasma for Ar discharges. The influences of the low frequency on the plasma density, electron temperature, sheath voltage drop, and ion energy distribution at the powered electrode are investigated. The decoupling effect of the two radio-frequency sources on the plasma parameters, especially in the sheath region, is discussed in detail. 展开更多
关键词 capacitively coupled plasmas dual frequency HYDRODYNAMICS SHEATH
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Plasma Uniformity in a Dual Frequency Capacitively Coupled Plasma Reactor Measured by Optical Emission Spectroscopy 被引量:2
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作者 赵国利 徐勇 +3 位作者 尚建平 刘文耀 朱爱民 王友年 《Plasma Science and Technology》 SCIE EI CAS CSCD 2011年第1期61-67,共7页
Local measurement of plasma radial uniformity was performed in a dual frequency capacitively coupled argon plasma (DF-CCP) reactor using an optical probe. The optical probe collects the light emission from a small s... Local measurement of plasma radial uniformity was performed in a dual frequency capacitively coupled argon plasma (DF-CCP) reactor using an optical probe. The optical probe collects the light emission from a small separate volume in plasma, thus enabling to diagnose the plasma uniformity for different experimental parameters. Both the gas pressure and the low- frequency (LF) power have apparent effects on the radial uniformity of argon plasma. With the increase in either pressure or LF power, the emission profiles changed from a bell-shaped to a double-peak distribution. The influence of a fused-silica ring around the electrodes on the plasma uniformity was also studied using the optical probe. Possible reasons that result in nonuniform plasmas in our experiments are discussed. 展开更多
关键词 dual frequency capacitively coupled plasma optical probe plasma uniformity
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Characteristics of dual-frequency capacitively coupled SF_6/O_2 plasma and plasma texturing of multi-crystalline silicon 被引量:2
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作者 徐东升 邹帅 +2 位作者 辛煜 苏晓东 王栩生 《Chinese Physics B》 SCIE EI CAS CSCD 2014年第6期361-369,共9页
Due to it being environmentally friendly, much attention has been paid to the dry plasma texturing technique serving as an alternative candidate for multicrystalline silicon (mc-Si) surface texturing. In this paper,... Due to it being environmentally friendly, much attention has been paid to the dry plasma texturing technique serving as an alternative candidate for multicrystalline silicon (mc-Si) surface texturing. In this paper, capacitively coupled plasma (CCP) driven by a dual frequency (DF) of 40.68 MHz and 13.56 MHz is first used for plasma texturing of mc-Si with SF6/O2 gas mixture. Using a hairpin resonant probe and optical emission techniques, DF-CCP characteristics and their influence on mc-silicon surface plasma texturing are investigated at different flow rate ratios, pressures, and radio-frequency (RF) input powers. Experimental results show that suitable plasma texturing of mc-silicon occurs only in a narrow range of plasma parameters, where electron density ne must be larger than 6.3 x 109 cm-3 and the spectral intensity ratio of the F atom to that of the O atom ([F]/[O]) in the plasma must be between 0.8 and 0.3. Out of this range, no cone-like structure is formed on the mc-silicon surface. In our experiments, the lowest reflectance of about 7.3% for mc-silicon surface texturing is obtained at an [F]/[O] of 0.5 and ne of 6.9 × 109 cm-3. 展开更多
关键词 dual frequency capacitively coupled plasma plasma texturing multi-crystalline silicon electrondensity
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Strong optical feedback in birefringent dual frequency laser 被引量:1
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作者 毛威 张书练 《Chinese Physics B》 SCIE EI CAS CSCD 2006年第2期340-346,共7页
Strong optical feedback in a birefringent dual frequency He-Ne laser with a high reflectivity feedback mirror has been investigated for the first time. The output characteristics of two orthogonally polarized modes ar... Strong optical feedback in a birefringent dual frequency He-Ne laser with a high reflectivity feedback mirror has been investigated for the first time. The output characteristics of two orthogonally polarized modes are demonstrated in two different optical feedback cases: one is for both modes being fed back and the other is for only one of the modes being fed back. Strong mode competition can be observed between the two modes with strong optical feedback, And when one mode's intensity is near its maximum, the other mode is nearly extinguished. When both modes are fed back into the laser cavity, the mode competition is stronger than when only one mode is fed back, The difference in initial intensity between the two orthogonally polarized modes plays an important role in the mode competition, which has been experimentally and theoretically demonstrated. 展开更多
关键词 strong optical feedback intensity modulation dual frequency laser mode competition
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Analytical Expressions of Dual-Frequency Plasma Diagnostic Theory 被引量:3
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作者 程立 时家明 许波 《Plasma Science and Technology》 SCIE EI CAS CSCD 2012年第1期37-39,共3页
Based on the fundamental ideas concerning microwave attenuation in plasma, we obtain a new expression of transmission attenuation of microwaves as a function of the incident wave frequency. And with reasonable hypothe... Based on the fundamental ideas concerning microwave attenuation in plasma, we obtain a new expression of transmission attenuation of microwaves as a function of the incident wave frequency. And with reasonable hypothesis, analytical forms of the electron density and the electron-neutral collision frequency are derived from the equations of the transmission attenuation of microwaves at two near frequencies. This method gives an effective and easy approach to diagnose the unmagnetized plasma. 展开更多
关键词 PLASMA diagnosis dual-frequency ATTENUATION electron density electron-neutral collision frequency
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Difference-frequency ultrasound generation from microbubbles under dual-frequency excitation 被引量:1
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作者 马青玉 邱媛媛 +2 位作者 黄蓓 章东 龚秀芬 《Chinese Physics B》 SCIE EI CAS CSCD 2010年第9期437-442,共6页
The difference-frequency (DF) ultrasound generated by using parametric effect promises to improve detection depth owing to its low attenuation, which is beneficial for deep tissue imaging. With ultrasound contrast a... The difference-frequency (DF) ultrasound generated by using parametric effect promises to improve detection depth owing to its low attenuation, which is beneficial for deep tissue imaging. With ultrasound contrast agents infusion, the harmonic components scattered from the microbubbles, including DF, can be generated due to the nonlinear vibration. A theoretical study on the DF generation from microbubbles under the dual-frequency excitation is proposed in formula based on the solution of the RPNNP equation. The optimisation of the DF generation is discussed associated with the applied acoustic pressure, frequency, and the microbubble size. Experiments are performed to validate the theoretical predictions by using a dual-frequency signal to excite microbubbles. Both the numerical and experimental results demonstrate that the optimised DF ultrasound can be achieved as the difference frequency is close to the resonance frequency of the microbubble and improve the contrast-to-tissue ratio in imaging. 展开更多
关键词 difference-frequency MICROBUBBLE dual-frequency excitation parametric effect
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Optical feedback characteristics in a dual-frequency laser during laser cavity tuning 被引量:2
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作者 刘刚 张书练 +1 位作者 李岩 朱钧 《Chinese Physics B》 SCIE EI CAS CSCD 2005年第10期1984-1989,共6页
The optical feedback characteristics in a Zeeman-birefringence dual-frequency laser are studied during the laser cavity tuning in three different kinds of optical feedback conditions: (i) only //-light is fed back;... The optical feedback characteristics in a Zeeman-birefringence dual-frequency laser are studied during the laser cavity tuning in three different kinds of optical feedback conditions: (i) only //-light is fed back; (ii) only ⊥-light is fed back; (iii) both lights are fed back. A compact displacement sensor is designed using the experimental result that there is a nearly 90 degrees phase delay between the two lights' cosine optical feedback signals when both lights are fed back into the laser cavity. The priority order that the two lights' intensity curves appear can be used for direction discrimination. The resolution of the displacement sensor is at least 79 rim, and the sensor can discriminate the target's moving direction easily. 展开更多
关键词 dual-frequency laser optical feedback SELF-MIXING displacement sensor
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The Performance of Dual-Frequency Polarimetric Scatterometer in Sea Surface Wind Retrieval 被引量:1
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作者 LIU Shubo WEI Enbo +2 位作者 JIN Xu LV Ailing DANG Hongxing 《Journal of Ocean University of China》 SCIE CAS CSCD 2019年第5期1051-1060,共10页
The wind retrieval performance of HY-2 A scanning scatterometer operating at Ku-band in HH and VV polarizations has been well evaluated in the wind speed range of 0–25 m s^-1.In order to obtain more accurate ocean wi... The wind retrieval performance of HY-2 A scanning scatterometer operating at Ku-band in HH and VV polarizations has been well evaluated in the wind speed range of 0–25 m s^-1.In order to obtain more accurate ocean wind field,a potential extension of dual-frequency(C-band and Ku-band)polarimetric measurements is investigated for both low and very high wind speeds,from 5 to 45 m s^-1.Based on the geophysical model functions of C-band and Ku-band,the simulation results show that the polarimetric measurements of Ku-band can improve the wind vector retrieval over the entire scatterometer swath,especially in nadir area,with the wind direction root-mean-square error(RMSE)less than 12?in the wind speed range of 5–25 m s^-1.Furthermore,the results also show that C-band cross-polarization plays a very important role in improving the wind speed retrieval,with the wind speed retrieval accuracy better than 2 m s^-1 for all wind conditions(0–45 m s^-1).For extreme winds,the C-band HH backscatter coefficients modeled by CMOD5.N(H)and the ocean co-polarization ratio model at large incidence are used to retrieve sea surface wind vector.This result reveals that there is a big decrease of wind direction retrieval RMSE for extreme wind fields,and the retrieved result of C-band HH polarization is nearly the same as that of C-band VV polarization for low-to-high wind speed(5–25 m s^-1).Thus,to improve the wind retrieval for all wind conditions,the dual-frequency polarimetric scatterometer with C-band and Ku-band horizontal polarization in inner beam,and C-band horizontal and Ku-band vertical polarization in outer beam,can be used to measure ocean winds.This study will contribute to the wind retrieval with merged satellites data and the future spaceborne scatterometer. 展开更多
关键词 dual-frequency polarimetric SCATTEROMETER WIND VECTOR RETRIEVAL
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NONLINEAR EFFECT OF THE DUALFREQUENCY IP SPECTRUM 被引量:2
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作者 He Jishan Li Daqing Tang Jingtian(Department of Geology,Central South University of Technology,Changsha 410083) 《中国有色金属学会会刊:英文版》 EI CSCD 1995年第4期1-7,共7页
NONLINEAREFFECTOFTHEDUALFREQUENCYIPSPECTRUMHeJishan;LiDaqing;TangJingtian(DepartmentofGeology,CentralSouthUn... NONLINEAREFFECTOFTHEDUALFREQUENCYIPSPECTRUMHeJishan;LiDaqing;TangJingtian(DepartmentofGeology,CentralSouthUniversityofTechnol... 展开更多
关键词 nonlinear effect SPECTRAL CURVES SAWTOOTH FEATURE dualfrequency IP method
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DEFORMATION MEASUREMENT USING DUAL-FREQUENCY PROJECTION GRATING PHASE-SHIFT PROFILOMETRY 被引量:2
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作者 Yanming Chen Yuming He Eryi Hu Hongmao Zhu 《Acta Mechanica Solida Sinica》 SCIE EI 2008年第2期110-115,共6页
2π phase ambiguity problem is very important in phase measurement when a deformed object has a large out of plane displacement. The dual-frequency projection grating phaseshifting profilometry (PSP) can be used to ... 2π phase ambiguity problem is very important in phase measurement when a deformed object has a large out of plane displacement. The dual-frequency projection grating phaseshifting profilometry (PSP) can be used to solve such an issue. In the measurement, two properchosen frequency gratings are utilized to synthesize an equivalent wavelength grating which ensures the computed phase in a principal phase range. Thus, the error caused by the phase unwrapping process with the conventional phase reconstruct algorithm can be eliminated. Finally, experimental result of a specimen with large plastic deformation is given to prove that the proposed method is effective to handle the phase discontinuity. 展开更多
关键词 dual-frequency phase-shift profilometry projection grating phase unwrapping DEFORMATION
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Computation of satellite clock-ephemeris augmentation parameters for dual-frequency multi-constellation satellite-based augmentation system 被引量:3
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作者 CHEN Jie HUANG Zhigang LI Rui 《Journal of Systems Engineering and Electronics》 SCIE EI CSCD 2018年第6期1111-1123,共13页
Dual-frequency multi-constellation(DFMC) satellitebased augmentation system(SBAS) does not broadcast fast correction, which is important in reducing range error in L1-only SBAS.Meanwhile, the integrity bound of a sate... Dual-frequency multi-constellation(DFMC) satellitebased augmentation system(SBAS) does not broadcast fast correction, which is important in reducing range error in L1-only SBAS.Meanwhile, the integrity bound of a satellite at low elevation is so loose that the service availability is decreased near the boundary of the service area. Therefore, the computation of satellite clockephemeris(SCE) augmentation parameters needs improvement.We propose a method introducing SCE prediction to eliminate most of the SCE error resulting from global navigation satellite system GNSS broadcast message. Compared with the signal-inspace(SIS) after applying augmentation parameters broadcast by the wide area augmentation system(WAAS), SIS accuracy after applying augmentation parameters computed by the proposed algorithm is improved and SIS integrity is ensured. With global positioning system(GPS) only, the availability of category-I(CAT-I)with a vertical alert level of 15 m in continental United States is about 90%, while the availability in the other part of the WAAS service area is markedly improved. With measurements made by the stations from the crustal movement observation network of China,users in some part of China can obtain CAT-I(vertical alert limit is 15 m) service with GPS and global navigation satellite system(GLONASS). 展开更多
关键词 dual-frequency multi-constellation(DFMC) satellitebased augmentation system(SBAS) orbit determination integrity
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Effects of secondary electron emission on plasma characteristics in dual-frequency atmospheric pressure helium discharge by fluid modeling
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作者 Yi-Nan Wang Shuai-Xing Li +1 位作者 Yue Liu Li Wang 《Chinese Physics B》 SCIE EI CAS CSCD 2019年第2期346-351,共6页
A one-dimensional(1D) fluid simulation of dual frequency discharge in helium gas at atmospheric pressure is carried out to investigate the role of the secondary electron emission on the surfaces of the electrodes. In ... A one-dimensional(1D) fluid simulation of dual frequency discharge in helium gas at atmospheric pressure is carried out to investigate the role of the secondary electron emission on the surfaces of the electrodes. In the simulation, electrons,ions of He^+ and He_2^+, metastable atoms of He*and metastable molecules of He*_2 are included. It is found that the secondary electron emission coefficient significantly influences plasma density and electric field as well as electron heating mechanisms and ionization rate. The particle densities increase with increasing SEE coefficient from 0 to 0.3 as well as the sheath's electric field and electron source. Moreover, the SEE coefficient also influences the electron heating mechanism and electron power dissipation in the plasma and both of them increase with increasing SEE coefficient within the range from 0 to 0.3 as a result of increasing of electron density. 展开更多
关键词 dual frequency SECONDARY electron emission ATMOSPHERIC pressure DISCHARGE
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Dual-frequency IP over Tanghuping Prospect 被引量:1
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作者 Iraj Vosoughi-Niri 《中国有色金属学会会刊:英文版》 CSCD 2004年第4期829-832,共4页
Gold mineralization in the Tanghuping Prospect was the target of the geophysical exploration. The mineralization shows close relation with geological structures and is accompanied by alteration. Sulfide concentrations... Gold mineralization in the Tanghuping Prospect was the target of the geophysical exploration. The mineralization shows close relation with geological structures and is accompanied by alteration. Sulfide concentrations in the altered zones w ere used to trace the mineralization by Induced Polarization(IP) method. Through laboratory and field measurements of some selected samples of the study area,t heir geophysical properties were studied carefully. After that by numerical calc ulation,a geophysical model was built. Six lines were designed to use dual-fre quency IP sounding in the west of the surveyed area. Gradient,pole-dipole and reverse pole-dipole arrays were used to acquire the data. Interpretation of the processed data shows eight veins that demonstrate diverging and converging phen omena. Therefore east of the surveyed area is considered as most prosperous zone in the study area. 展开更多
关键词 双周激发极化 矿产勘探 电法勘探 数值模拟 地球物理模型
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Improved Double-Probe Technique for Spatially Resolved Diagnosis of Dual-Frequency Capacitive Plasmas 被引量:1
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作者 陆文琪 蒋相站 +6 位作者 刘永新 杨烁 张权治 李小松 徐勇 朱爱民 王友年 《Plasma Science and Technology》 SCIE EI CAS CSCD 2013年第6期511-515,共5页
The conventional double-probe technique was improved with a combination of selfpowering and radio-frequency(RF) choking.RF perturbations in dual-frequency capacitively coupled discharge were effectively eliminated,a... The conventional double-probe technique was improved with a combination of selfpowering and radio-frequency(RF) choking.RF perturbations in dual-frequency capacitively coupled discharge were effectively eliminated,as judged by the disappearance of self-bias on the probes.The improved technique was tested by spatially resolved measurements of the electron temperature and ion density in both the axial and radial directions of a dual-frequency capacitive plasma.The measured data in the axial direction were compared with simulation results,and they were excellently consistent with each other.The measured radial distributions of the ion density and electron temperature were influenced significantly by the lower frequency(LF) power.It was shown that superposition of the lower frequency to the higher frequency(HF) power shifted the maximum ion density from the radial center to the edge region,while the trend for the electron temperature profile was the opposite.The changing feature of the ion density distribution is qualitatively consistent with that of the optical emission intensity reported. 展开更多
关键词 dual-frequency capacitive plasma double probe plasma diagnosis
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Effect of Discharge Parameters on Properties of Diamond-Like Carbon Films Prepared by Dual-Frequency Capacitively Coupled Plasma Source 被引量:1
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作者 杨磊 辛煜 +2 位作者 徐海鹏 虞一青 宁兆元 《Plasma Science and Technology》 SCIE EI CAS CSCD 2010年第1期53-58,共6页
Diamond-like carbon (DLC) films were prepared with CH4-Ar using a capacitively coupled plasma enhanced chemical vapor deposition (CCP-CVD) method driven by dual-frequency of 41 MHz and 13.56 MHz in combination. Du... Diamond-like carbon (DLC) films were prepared with CH4-Ar using a capacitively coupled plasma enhanced chemical vapor deposition (CCP-CVD) method driven by dual-frequency of 41 MHz and 13.56 MHz in combination. Due to a coupling via bulk plasma, the self-bias voltage depended not only on the radiofrequency (RF) power of the corresponding electrode but also on another RF power of the counter electrode. The influence of the discharge parameters on the deposition rate, optical and Raman properties of the deposited films was investigated. The optical band decreased basically with the increase in the input power of both the low frequency and high frequency. Raman measurements show that the deposited films have a maximal sp3 content with an applied negative self-bias voltage of -150 V, while high frequency power causes a continuous increase in the sp3 content. The measurement of atomic force microscope (AFM) shows that the surface of the deposited films under ion-bombardment becomes smoother than those with non-intended self-bias voltage. 展开更多
关键词 dual-frequency capacitively coupled discharge DLC Raman spectroscopy
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Effects of gas pressure on plasma characteristics in dual frequency argon capacitive glow discharges at low pressure by a self-consistent fluid model
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作者 赵璐璐 刘悦 Tagra Samir 《Chinese Physics B》 SCIE EI CAS CSCD 2017年第12期361-370,共10页
A self-consistent fluid model for dual radio frequency argon capacitive glow discharges at low pressure is established. Numerical results are obtained by using a finite difference method to solve the model numerically... A self-consistent fluid model for dual radio frequency argon capacitive glow discharges at low pressure is established. Numerical results are obtained by using a finite difference method to solve the model numerically, and the results are analyzed to study the effect of gas pressure on the plasma characteristics. It shows that when the gas pressure increases from 0.3 Torr (1 Torr=1.33322102 Pa) to 1.5 Torr, the cycle-averaged plasma density and the ionization rate increase; the cycle-averaged ion current densities and ion energy densities on the electrodes electrode increase; the cycle-averaged electron temperature decreases. Also, the instantaneous electron density in the powered sheath region is presented and discussed. The cycle-averaged electric field has a complex behavior with the increasing of gas pressure, and its changes take place mainly in the two sheath regions. The cycle-averaged electron pressure heating, electron ohmic heating, electron heating, and electron energy loss are all influenced by the gas pressure. Two peaks of the electron heating appear in the sheath regions and the two peaks become larger and move to electrodes as the gas pressure increases. 展开更多
关键词 dual frequency gas pressure glow discharge
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Two-Dimensional Simulation of a Dual Frequency Sheath Near an Electrode with a Cylindrical Hole
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作者 戴忠玲 刘传生 王友年 《Plasma Science and Technology》 SCIE EI CAS CSCD 2009年第3期283-289,共7页
The characteristics of a collisional dual frequency (DF) sheath near an electrode with a cylindrical hole are studied by utilizing a two-dimensional model which includes time-dependent fluid equations coupled with t... The characteristics of a collisional dual frequency (DF) sheath near an electrode with a cylindrical hole are studied by utilizing a two-dimensional model which includes time-dependent fluid equations coupled with the Poisson equation and an equivalent-circuit model, The effects of the gas pressure on the two-dimensional profiles of the potential, electric field, ion fluid velocity in a DF sheath are investigated. The simulation results show that the cylindrical hole on the electrode has a significant influence on the DF sheath structure, i.e., the sheath profile tends to wrap around the contour of the hole feature. Moreover, it is shown that the structure of the DF sheath is different from that of a single frequency (SF) sheath because the profile of the DF sheath is modulated by the combination of the high and low frequency sources. In addition the characteristics of the DF sheath are obviously affected by the collisional effects in the DF sheath. 展开更多
关键词 dual frequency sheath TWO-DIMENSIONAL numerical simulation
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Effect of Low-frequency Power on F, CF_2 Relative Density and F/CF_2 Ratio in Fluorocarbon Dual-Frequency Plasmas 被引量:1
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作者 黄宏伟 叶超 +3 位作者 徐轶君 袁圆 施国峰 宁兆元 《Plasma Science and Technology》 SCIE EI CAS CSCD 2010年第5期566-570,共5页
Effect of low-frequency power on F, CF2 relative density and F/CF2 ratio, in C2F6, C4F8 and CHF3 dual-frequency capacitively couple discharge driven by the power of 13.56 MHz/2 MHz, was investigated by using optical e... Effect of low-frequency power on F, CF2 relative density and F/CF2 ratio, in C2F6, C4F8 and CHF3 dual-frequency capacitively couple discharge driven by the power of 13.56 MHz/2 MHz, was investigated by using optical emission spectroscopy. High F, CF2 relative density and high F/CF2 ratio were obtained in a CHF3 plasma. But for C2F6 and C4Fs plasmas, the F, CF2 relative density and F/CF2 ratio all decreased significantly due to the difference in both reactive paths and reactive energy. The increase of LF power caused simultaneous increase of F and CF2 radical relative densities in C4Fs and CHF3 plasmas, but led to increase of F with the decrease in CF2 relative densities in C2F6 plasma due to the increase of lower energy electrons and the decrease of higher energy electrons in electron energy distribution function (EEDF). 展开更多
关键词 fluorocarbon plasma dual-frequency discharge low-k films etching
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