As the most precise viscous vacuum gauge,the spinning rotor gauge is widely used in the aerospace,nuclear,semiconductor,and other fields because of its excellent accuracy and chemical inertness.Herein,a metrological-g...As the most precise viscous vacuum gauge,the spinning rotor gauge is widely used in the aerospace,nuclear,semiconductor,and other fields because of its excellent accuracy and chemical inertness.Herein,a metrological-grade spinning rotor vacuum gauge is developed,and its performance is evaluated.It can be used for international comparison of vacuum standards and construction of national vacuum measurement traceability and transmission systems.This paper presents the design of a single-degree-of-freedom permanent magnet-biased rotor suspension system,a high-speed rotary stepper drive system,a rotational angular velocity determination system,a lateral damping system,and a transducer in detail.The change in residual drag is less than 0.49%after 50 minutes of start-up.There is good consistency and linearity in the range of 9.1727×10^(−5)Pa to 1.2081 Pa.展开更多
Interference metrology is a method for achieving high precision detection by phase estimation. The phase sensitivity of a traditional interferometer is subject to the standard quantum limit, while its resolution is co...Interference metrology is a method for achieving high precision detection by phase estimation. The phase sensitivity of a traditional interferometer is subject to the standard quantum limit, while its resolution is constrained by the Rayleigh diffraction limit. The resolution and sensitivity of phase measurement can be enhanced by using quantum metrology. We propose a quantum interference metrology scheme using the entangled squeezed vacuum state, which is obtained using the magic beam splitter, expressed as ｜ψ〉=（｜ξ〉｜0〉＋｜0〉｜ξ〉）/√2＋2/coshr, such as the N00 N state. We derive the phase sensitivity and the resolution of the system with Z detection, project detection, and parity detection. By simulation and analysis, we determine that parity detection is an optimal detection method, which can break through the Rayleigh diffraction limit and the standard quantum limit.展开更多
文摘As the most precise viscous vacuum gauge,the spinning rotor gauge is widely used in the aerospace,nuclear,semiconductor,and other fields because of its excellent accuracy and chemical inertness.Herein,a metrological-grade spinning rotor vacuum gauge is developed,and its performance is evaluated.It can be used for international comparison of vacuum standards and construction of national vacuum measurement traceability and transmission systems.This paper presents the design of a single-degree-of-freedom permanent magnet-biased rotor suspension system,a high-speed rotary stepper drive system,a rotational angular velocity determination system,a lateral damping system,and a transducer in detail.The change in residual drag is less than 0.49%after 50 minutes of start-up.There is good consistency and linearity in the range of 9.1727×10^(−5)Pa to 1.2081 Pa.
文摘Interference metrology is a method for achieving high precision detection by phase estimation. The phase sensitivity of a traditional interferometer is subject to the standard quantum limit, while its resolution is constrained by the Rayleigh diffraction limit. The resolution and sensitivity of phase measurement can be enhanced by using quantum metrology. We propose a quantum interference metrology scheme using the entangled squeezed vacuum state, which is obtained using the magic beam splitter, expressed as ｜ψ〉=（｜ξ〉｜0〉＋｜0〉｜ξ〉）/√2＋2/coshr, such as the N00 N state. We derive the phase sensitivity and the resolution of the system with Z detection, project detection, and parity detection. By simulation and analysis, we determine that parity detection is an optimal detection method, which can break through the Rayleigh diffraction limit and the standard quantum limit.
