Assessing efficacy of standard impregnation techniques on die-cast aluminum alloys using X-ray micro-CT

Utilizing lightweight Al alloys in various industrial applications requires achieving precise pressure tightness and leak requirements.Vacuum pressure impregnation(VPI)with thermosetting polymers is commonly used to address leakage defects in die-cast Al alloys.In this study,the efficacy of the VPI technique in sealing alloy parts was investigated using a combination of nondestructive micro X-ray computed tomography(micro XCT)and a standard leak test.The results demonstrate that the commonly used water leak test is insufficient for determining the sealing performance.Instead,micro XCT shows distinct advantages by enabling more comprehensive analysis.It reveals the presence of a low atomic number impregnates sealant within casting defects,which has low grey contrast and allows for visualizing primary leakage paths in 3D.The effective atomic number of impregnated resin is 6.75 and that of Al alloy is 13.69 by dual-energy X-ray CT.This research findings will contribute to enhancing the standard VPI process parameters and the properties of impregnating sealants to improve quality assurance for impregnation in industrial metals.

Research on vacuumgripper based on fuzzy control for micromanipulators

This paper presents a vacuum gripper （as an actuator of an intelligent micromanipulator） for micro objects （with a diameter of 100 - 300μm） assembly tasks. The gripper is composed of a vacuum unit and a control unit. The vacuum unit with a proportional valve and a pressure sensor, and the control unit with a PC ＋ MCU two-layered control architecture are designed. The mechanical structure, workflow and major programs of the micro-gripper are presented. This paper discusses the major components of the adhesion force acting on micro objects. Some equations of the operation conditions m three phases of pick, hold and place are derived by mechanics analysis. The pneumatic system＇s pressure loss is inevitable. There are some formulas for calculating the amount of the pressure loss, but parameters in formulas are diffficult to be quantified and evaluated. To control the working pressure accurately, a pressure controller based on fuzzy logic is designed. With MATLAB＇s fuzzy logic toolbox, simulation experiments are performed to validate the performance of the fuzzy PD controller. The gripper is characterized by a steady and reliable performance and a simple structure, and it is suitable for handling micro objects with a sub-millimeter size.

Micro thermal shear stress sensor based on vacuum anodic bonding and bulk-micromachining

This paper describes a micro thermal shear stress sensor with a cavity underneath, based on vacuum anodic bonding and bulk micromachined technology. A Ti/Pt alloy strip, 2μm×100μm, is deposited on the top of a thin silicon nitride diaphragm and functioned as the thermal sensor element. By using vacuum anodic bonding and bulk-si anisotropic wet etching process instead of the sacrificial-layer technique, a cavity, functioned as the adiabatic vacuum chamber, 200μm×200μm×400μm, is placed between the silicon nitride diaphragm and glass （Corning 7740）. This method totally avoid adhesion problem which is a major issue of the sacrificial-layer technique.

Influence of vacuum heat treatment on structure and micro-hardness of electroless Ni-P-SiC composite coating

The electroless Ni-P-SiC composite coatings were prepared and the influence of vacuum heat treatment on its structure and properties was analyzed. The Ni-P-SiC composite coatings were characterized by morphology,structure and micro-hardness. The morphology and structure of the Ni-P-SiC composite coatings were studied by scanning electron microscopy(SEM) and X-ray diffractometry(XRD),respectively. A great deal of particles incorporation and uniform distribution were found in Ni-P-SiC composite coatings. XRD results show a broad peak of nickel and low intensity SiC peaks present on as-deposited condition. Micro-hardness of as-deposited Ni-P-SiC composite coatings is improved greatly,and the best micro-hardness is obtained after heat treatment in a high vacuum at 400 ℃ .

Micro-properties of a type 316 Steel Annealed in Air and Vacuum

Micro-properties of the oxide scale and near-surface zone of a type 316 steel annealed in air and vacuum have been systematically investigated. Microstructures of the specimens have been examined using optical microscopy and scanning and transmission electron microscopy (TEM). Chemical compositions for the oxide scale and near surface zone were also analysed. The results obtained show that the oxide scale developed in vacuum exhibits a distinct structure from that developed in air. Comparing to the vacuum-developed scale, the air-developed scale possesses a more complicated structure and relatively poor adhesion to the matrix. TEM observations reveal a difference in the dislocation density in the vicinity of the free surface, near-surface zone and the core of the specimens examined.

基于微谐振器的圆片级真空封装真空度测试技术

针对微电子机械系统(MEMS)圆片级封装腔体体积小、传统的真空封装测试方法适用性差的情况,研制了一种用于表征圆片级真空封装真空度的器件——MEMS微谐振器。利用此谐振器不仅可以表征圆片级真空封装真空度,也可用于圆片级真空封装漏率的测试。采用MEMS体硅工艺和共晶圆片键合技术实现了微谐振器的圆片级真空封装,利用微谐振器阻尼特性建立了谐振器品质因数与真空度的对应关系,通过设计的激励电路实现了微谐振器品质因数的在片测试,对不同键合腔体真空度下封装的MEMS微谐振器进行测试,测试结果显示该微谐振器在高真空度0.1~8 Pa范围内品质因数与真空度有很好的对应关系。

MEMS电容薄膜真空计微电容检测系统的设计

为了满足空间环境探测对真空测量仪器准确度高、体积小、质量轻、功耗低的应用需求,基于微机电系统(MEMS)的小型化电容薄膜真空计应运而生。针对MEMS电容薄膜真空计微小电容测量需求,设计了一种基于CDC电容数字转换器的微电容检测系统,获得了fF级微电容检测分辨率。采用温度漂移误差自校准技术,解决了测量压力受温度扰动影响的问题。地面样机测试与验证表明,该检测系统具有宽量程、高分辨率和低功耗检测的优点,为MEMS电容薄膜真空计实现空间应用奠定了技术基础。

A Monolithic Integrated CMOS Thermal Vacuum Sensor

The monolithic integrated micro sensor is an important direction in the fields of integrated circuits and micro sensors. In this paper,a monolithic thermal vacuum sensor based on a micro-hotplate （MHP） and operating under constant bias voltage conditions was designed. A new monolithic integrating mode was proposed,in which the dielectric and passiva- tion layers in standard CMOS processes were used as sensor structure layers,gate polysilicon as the sacrificial layer,and the second polysilicon layer as the sensor heating resistor. Then, the fabricating processes were designed and the monolithic thermal vacuum sensor was fabricated with a 0. 6μm mixed signal CMOS process followed by sacrificial layer etching technology. The measurement results show that the fabricated monolithic vacuum sensor can measure the pressure range of 2- 10^5 Pa and the output voltage is adjustable.

Spindt阴极研究进展和面临的问题

基于先进的微纳加工技术制备的Spindt阴极相比于热阴极具有可以瞬时启动、工作电压低、可在常温下工作等优势。尽管Spindt阴极性能优越,但很难实现真正的实用化,归根结底在于Spindt阴极的低可靠性。近几十年来,国内外研究者致力于从结构、材料以及工艺技术方面提高Spindt阴极的场发射特性以及耐用性,除了不断提高Spindt阴极的性能以满足高功率和高频率真空电子器件的需求,也在寻找和探索其它小电流、低能量、高可靠性的应用新领域,以更好地发挥Spindt阴极的优势。文章对Spindt阴极的最新研究进展进行了综述。

氧化硅水平隧穿结电子源及其应用

电子源是真空电子设备的核心部件,片上微型电子源是实现微型化、片上化真空电子器件的关键和基础。氧化硅水平隧穿结电子源是本课题组近几年发展的一种新型片上微型电子源,其具有发射效率高、发射电流密度大、工作电压低、能耐受粗真空和时间响应快等优点,展现出较大的应用潜力。文章将从电子发射微观过程及理论模型、阵列化集成以及在真空电子器件中的应用三个方面系统介绍氧化硅水平隧穿结电子源,并对本课题组在该方向上所做的工作进行梳理与总结。

与硅微器件集成的MEMS皮拉尼计

针对圆片级真空封装现有的检测难、易泄漏等问题,提出一种可与硅微器件工艺兼容、并行加工于同一腔体的皮拉尼(Pirani)计设计与加工方法,用于圆片级真空封装后腔体的真空度检测。采用SOI硅片对皮拉尼计结构进行加工,通过金硅键合方式对器件进行圆片级封装,同时采用硅通孔(TSV)的纵向电极引出方式,改善气密封装问题。测试结果表明,皮拉尼计电阻在线性区间的温度系数为1.58Ω/℃,检测敏感区间约为1~100 Pa,灵敏度达到61.67Ω/ln(Pa)。提出的皮拉尼计可与硅微器件并行加工,为圆片级真空封装腔体的真空度在片测试提供了一种简单可行的方案。

某雷达大功率固态发射机的结构与散热设计

介绍了某雷达大功率固态发射机的结构布局及散热设计,并给出了关键部件的焊接及加工工艺方法。根据功放组件、供电电源及微波合成波导的热耗大小及分布形式,确定了整机液冷散热的热控方式,并进行了散热仿真分析。首先,基于热平衡方程计算得到单独模块散热所需的冷却液流量,并据此对冷板结构进行优化设计;然后,将各自冷板等效为独立的二端口流阻器件,在Flomaster中建立整个热控系统的一维流体分配模型,得到分流板的关键结构设计变量;最后,通过FloEFD软件并结合工程实际对整机进行散热仿真分析,得到发射机各器件及组合的表面温度分布云图。结果表明,功放组件芯片的最高温度及温度一致性均满足使用要求,从而验证了整机结构和散热方案的可行性。

太赫兹真空器件中超深金属慢波结构的微加工技术

太赫兹真空电子器件物理结构尺寸变化随着波长的减小而减小,对微小结构的尺寸精度与表面粗糙度要求也大大增加。随着器件频率进入到太赫兹频段,慢波结构的深度达到几十微米或者百微米量级,加工的难点主要有:材料为金属,结构超深,表面粗糙度要求达到几十纳米量级,微电铸后金属含氧量极小,结构密度大不漏气,经得起后续近千摄氏度的高温处理工艺等。文章介绍了太赫兹频段下器件慢波结构的加工方式,着重讨论利用深反应离子刻蚀(DRIE)技术和紫外−光刻、电铸(UV-LIGA)技术加工超深金属慢波结构的技术和和特点,并介绍了本实验室利用UV-LIGA加工折叠波导的研究进展。

铺层方式对VIHPS制备的GO-CF混杂增强复合材料弯曲性能的影响

本文首先采用真空浸渗热压工艺(VIHPS)制备了不同铺层方式的氧化石墨烯-碳纤维(GO-CF)混杂增强复合材料,并对该材料进行三点弯曲试验,再通过扫描电子显微镜(SEM)表征其微观断口形貌。然后使用Digmat软件的FE模块建立微-纳跨尺度的代表性体积单元(RVE)模型,将该模型导入ANSYS Workbench软件中进行三点弯曲仿真模拟。复合材料三点弯曲试验结果表明,随着沿试样宽度方向(Y向)纤维铺层的增加,复合材料的弯曲强度从433.2 MPa降低至12.7 MPa,弯曲模量从13.8 GPa降低至0.2 GPa,它们分别降低了97.07%和98.55%。最后通过对比试验与仿真结果发现,两种结果的变化趋势基本一致,且仿真结果与试验结果接近。复合材料在弯曲变形过程中,受到拉伸和压缩的共同作用,其中导致复合材料失效的方式主要包括基体开裂、界面脱粘和纤维断裂。

真空状态不同爆轰工艺下铜钢复合材料界面组织和性能研究

【目的】对热交换领域、电力领域中铜基复合材料在应用过程中出现的高温变形、界面金属间化合物、产品性能不稳定等难点问题进行研究。【方法】在真空状态中,采用不同爆轰工艺对TU1紫铜和Q345R钢进行爆炸复合试验,并对复合材料的金相组织和力学性能进行测试和分析。【结果】由试验结果可知,随着爆轰速度的增大,界面波纹深度也会随之增加。复合材料(Z向)分离强度的平均值为483 MPa、界面剪切强度的平均值为238 MPa、显微硬度的最大值为196 HV,即距界面位置越远,越趋近于本体材料。当爆轰速度为2200 m/s时,断口处出现铜侧粘连现象。【结论】复合材料的各项性能指标均优于组成该复合材料的本体金属,界面处均呈正弦波状结合形态。从界面向本体金属方向来看,晶粒组织呈现出多样化晶体转变的特征。通过进一步对结合界面进行分析,发现该界面未出现氧化物/氮化物等有害物质。

增压式真空预压固结淤泥质软土的试验研究

为进一步研究增压式真空预压对软土固结效果的影响,分别进行常规真空预压、通气和注气式真空预压固结淤泥质软土的室内模型试验,对比分析了3种处理方式后软土沉降量、含水率、抗剪强度、土颗粒形态、孔隙结构等宏微观特征差异。结果表明:相较于常规真空预压,通气和注气式真空预压土样沉降量分别增大了5.6%和12.3%;土体骨架颗粒大小更加均匀且排列密实,颗粒接触形式由点接触向面接触过渡,孔隙直径和数量也明显减小;增压式真空预压可以显著增大深部土样抗剪强度,使土体强度更加均匀,其中以注气式真空预压加固软土效果最好,土体抗剪强度增大了11.2 kPa。研究成果有助于揭示增压式真空预压对软土固结效果的影响机制。

Research and development of VUV optical coatings for micro mirror applications

This paper deals with vacuum UV optical coatings for micro mirror applications. High reflecting low-stress optical coatings have been developed for the next-generation of micro mechanical mirrors. The optimized metal systems are applicable in the VUV spectral region and can be integrated in the technology of MOEMS, such as spatial light modulators (SLM) and micro scanning mirrors.

STUDY ON COMPOSITION, MICROSTRUCTURE AND HARDNESS OF DLC FILMS BY VCAD

DLC super-hard films have been deposited on the substrates of single crystalline Si, pure Ti and stainless steel 18-8 by a method of vacuum cathode arc deposition (VCAD). The composition, microstructure and micro-hardness of the films have been studied in this paper. The results indicate that hardness of the DLC films is different on the different substrates. Hardness of the films increases with decreasing in surface roughness of the films. The maximum value of micro-hardness belongs to the DLC films deposited under the hydrogen pressure of 0.35Pa and the negative bias of 100V.

负压封闭引流联合持续微氧渗透技术在新生儿胸骨切口深部感染中的应用

目的探讨负压封闭引流联合持续微氧渗透技术在新生儿先心病术后胸骨切口深部感染护理中的安全性及有效性。方法对13例发生胸骨切口深部感染的先心病术后新生儿,在伤口彻底清创和静脉抗生素治疗的基础上,使用负压封闭引流联合持续微氧渗透技术,采用专科护士为主导的医护一体化模式,对患儿伤口进行精细化管理。结果13例手术结束至诊断胸骨切口深部感染的时间为5~17(8.73±3.84)d;使用负压封闭引流联合持续微氧渗透治疗6~18(11.92±3.48)d;手术至完全愈合16~40(25.35±7.41)d。1例大动脉转位患儿行Switch术后第20天心脏骤停死亡;其余12例患儿予负压封闭引流联合持续微氧渗透技术辅助治疗后伤口愈合良好,住院时间24~64(44.62±13.51)d。出院后门诊或微信随访,没有因伤口相关问题再次入院。结论采用负压封闭引流联合持续微氧渗透技术处理伤口安全有效,能促进胸骨切口深部感染伤口快速愈合。

微型化真空泵技术

微型化真空泵对于微机电系统和真空微电子器件的真空封装极具意义。本文从工作原理和工艺实现方面,分析了常见传统真空泵实现微型化的可行性,介绍了膜片泵、射流/扩散泵、努森泵和离子泵的微型化进展,并总结了当前存在的技术障碍。结果表明,目前热点研究的微型化真空泵已经可以构建从大气状态至高真空的真空系统。虽然真空泵微型化后,其性能和工作稳定性相对传统宏观真空泵有较大降低,但具有低功耗、可集成优势,对便携式系统和高真空微系统十分必要。