A parallel dynamic passive valveless micropump was designed, which consists of three layers-valve, diaphragm and electromagnetic coil. The valve was wetly etched in a silicon wafer, the diaphragm was a PDMS （polydime...A parallel dynamic passive valveless micropump was designed, which consists of three layers-valve, diaphragm and electromagnetic coil. The valve was wetly etched in a silicon wafer, the diaphragm was a PDMS （polydimethyl siloxane） film spun on a silicon wafer with embedded permanent magnet posts, and the coil was electroplated on a silicon substrate. Under the actuation of the magnetic field generated by coils, the flexible diaphragm could be displaced upwards and downwards. After analyzing magnetic and mechanical characteristic of the flexible membrane and direction-dependence of the nozzle, a micropump was designed. And the relative length （L/d） of the micropump nozzle was taken 4. A 7 × 7 array of permanent magnetic posts was embedded in the PDMS film. Two diaphragms worked in an anti-step mode, which could relieve the liquid shock and increase the discharge of the micropump. The ANSYS and Matlab were adopted to analyze the actuation effect of the coil and the flow characteristic of the micropump. Results show that when actuated under a 0.3 A, 100 Hz current, the displacement of the diaphragm is more than 30 μm, and the discharge of the micropump is about 6 μL/s.展开更多
提出一种基于附壁效应的无阀压电泵,该泵利用附壁射流元件造成吸入过程和排出过程中进出口的流量差,实现流体输送。首先通过动网格技术及数值模拟研究微泵的内部流场和外特性,结果表明该无阀压电泵的容积效率η可以达到0.5以上,高于传...提出一种基于附壁效应的无阀压电泵,该泵利用附壁射流元件造成吸入过程和排出过程中进出口的流量差,实现流体输送。首先通过动网格技术及数值模拟研究微泵的内部流场和外特性,结果表明该无阀压电泵的容积效率η可以达到0.5以上,高于传统扩散/收缩管无阀压电泵。然后讨论了平面锥管长度和两分流直管间凹劈面宽度对微泵性能的影响,平面锥管长度L1必须大于dcot(θ/2),当c2/c1=1时L1/d=9的微泵在零输出压力下流量最大;不同输出压力和c2/c1的微泵流量对比表明凹劈面宽度越宽微泵输出压力性能越佳,但是在低输出压力下微泵随着凹劈面宽度的增加其容积效率降低。最后应用响应面方法对平面锥管长度和凹劈面宽度进行优化,结果表明当输出压力为5 k Pa时,最优的参数选取范围为4≤L1/d≤5,0.75≤c2/c1≤0.85,当L1/d=4.3,c2/c1=0.80时η达到最大,为0.323。其数值模拟为0.317,相差1.89%。展开更多
文摘A parallel dynamic passive valveless micropump was designed, which consists of three layers-valve, diaphragm and electromagnetic coil. The valve was wetly etched in a silicon wafer, the diaphragm was a PDMS （polydimethyl siloxane） film spun on a silicon wafer with embedded permanent magnet posts, and the coil was electroplated on a silicon substrate. Under the actuation of the magnetic field generated by coils, the flexible diaphragm could be displaced upwards and downwards. After analyzing magnetic and mechanical characteristic of the flexible membrane and direction-dependence of the nozzle, a micropump was designed. And the relative length （L/d） of the micropump nozzle was taken 4. A 7 × 7 array of permanent magnetic posts was embedded in the PDMS film. Two diaphragms worked in an anti-step mode, which could relieve the liquid shock and increase the discharge of the micropump. The ANSYS and Matlab were adopted to analyze the actuation effect of the coil and the flow characteristic of the micropump. Results show that when actuated under a 0.3 A, 100 Hz current, the displacement of the diaphragm is more than 30 μm, and the discharge of the micropump is about 6 μL/s.
文摘依据扩散口/喷嘴理论,设计了具有单向整流特性的无阀微泵.采用硅平面工艺、各向异性腐蚀、削角补偿和静电键合等微机械加工工艺技术,制作了平面尺寸为18 mm×13 mm的无阀微泵.经过测试,当扩散口/喷嘴长度为2.5μm、扩散口/喷嘴的窄口宽度为150μm、腐蚀深度为150μm时,微泵的最大泵压达14.8 kPa,最大流量为558μL/m in.
文摘提出一种基于附壁效应的无阀压电泵,该泵利用附壁射流元件造成吸入过程和排出过程中进出口的流量差,实现流体输送。首先通过动网格技术及数值模拟研究微泵的内部流场和外特性,结果表明该无阀压电泵的容积效率η可以达到0.5以上,高于传统扩散/收缩管无阀压电泵。然后讨论了平面锥管长度和两分流直管间凹劈面宽度对微泵性能的影响,平面锥管长度L1必须大于dcot(θ/2),当c2/c1=1时L1/d=9的微泵在零输出压力下流量最大;不同输出压力和c2/c1的微泵流量对比表明凹劈面宽度越宽微泵输出压力性能越佳,但是在低输出压力下微泵随着凹劈面宽度的增加其容积效率降低。最后应用响应面方法对平面锥管长度和凹劈面宽度进行优化,结果表明当输出压力为5 k Pa时,最优的参数选取范围为4≤L1/d≤5,0.75≤c2/c1≤0.85,当L1/d=4.3,c2/c1=0.80时η达到最大,为0.323。其数值模拟为0.317,相差1.89%。
