An electromagnetic microactuator with two stable positions is presented. The actuator consists of a cantilever beam with two free ends, a torsional beam with two fixed ends, planar coils and permanent magnets. The can...An electromagnetic microactuator with two stable positions is presented. The actuator consists of a cantilever beam with two free ends, a torsional beam with two fixed ends, planar coils and permanent magnets. The cantilever beam has two stable positions due to the use of permanent magnets. With electromagnetic actuation arising from the planar coils, the cantilever beam will switch from one stable position to the other. Mechanical and magnetic analysis are carried out on the actuator, and the device with a size of 2.2 mm × 2.5 mm is fabricated with the UV-LIGA technology. The test results show that a current pulse with an amplitude of 70 mA is needed for actuator＇ s switching between the two stable states, and the switching time is no more than 6 ms. Displacement of the end of cantilever is about 15 μm.展开更多
A novel asymmetric optothermal microactuator was developed.A microactuator of 750μm length wasmachined by an excimer laser micromachining system using single layer material.It had an asymmetricstructure consisting of...A novel asymmetric optothermal microactuator was developed.A microactuator of 750μm length wasmachined by an excimer laser micromachining system using single layer material.It had an asymmetricstructure consisting of two thin expansion arms with different widths.A laser diode(660nm)was em-ployed as the external power source to activate the microactuator.We introduced a charge coupled device(CCD)-combined optical microscope and a computer system to observe and capture the microactuator' sdeflection and vibration.Experiments have been carried out to check the feasibility of deflection,and thedata of deflection have been measured under different laser power as well as under different pulse frequen-cy.The results show that the actuator can practically generate an obvious lateral deflection or vibration,the maximum could be larger than 20μm.Moreover,the deflection status of the microactuator could becontrolled wirelessly or remotely by changing the laser power and its pulse frequency.展开更多
This paper presents a reduced-order model to describe the mechanical behaviour of microbeam-based magnetic devices. The integration for magnetic force is calculated by dividing the microbeam into several segments, and...This paper presents a reduced-order model to describe the mechanical behaviour of microbeam-based magnetic devices. The integration for magnetic force is calculated by dividing the microbeam into several segments, and the nonlinear equation set has been developed based on the magnetic circuit principle. In comparison with previous models, the present macromodel accounts for both the micro-magnetic-core reluctance and the coupling between the beam deflection and magnetic force. This macromodel is validated by comparing with the experimental results available in some papers and finite-element solutions.展开更多
More and more linear servo systems have been used in servo applications. Direct drive technology can greatly increase the bandwidth and the tracking accuracy. A position servo-system based on linear voice-coil motor w...More and more linear servo systems have been used in servo applications. Direct drive technology can greatly increase the bandwidth and the tracking accuracy. A position servo-system based on linear voice-coil motor was designed for one linear oscillation movement application. Besides the conventional position, speed and current control loops, the speed and acceleration feed-forward control of command position signal were also used. The experimental test proved the correctness of the design, and the system can track the given periodic sinusoid position command signal of 15Hz with high accuracy. The linear voice-coil motor is very suitable for short stroke position tracking application with high dynamic response.展开更多
在压电陶瓷等效电学模型的基础上,结合外加驱动信号波形分析了基于惯性-摩擦驱动的球基微驱动器在工作过程中金属球产生逆转现象的原因,建立了金属球的转速及位移模型,采用快速放电回路和加速压电陶瓷放电的方法减小金属球的逆转位移及...在压电陶瓷等效电学模型的基础上,结合外加驱动信号波形分析了基于惯性-摩擦驱动的球基微驱动器在工作过程中金属球产生逆转现象的原因,建立了金属球的转速及位移模型,采用快速放电回路和加速压电陶瓷放电的方法减小金属球的逆转位移及振动;利用压电陶瓷管作为微驱动元件,设计了基于惯性-摩擦驱动的球基微驱动器,并采用不同频率的三角波信号对所设计微驱动器进行试验测试.结果表明:驱动信号频率越高,微驱动器的振动现象越明显;当驱动信号频率接近、等于或大于微驱动元件(压电陶瓷管)的固有放电周期时,金属球出现无规律运动,导致微驱动器失效;根据1 H z低频信号时的试验结果与计算所得结果基本吻合,证明了所建立的逆转理论模型的合理性.展开更多
基金Projece supported by National Natural Science Foundatin ofChina(Grant No .10377009)National High-Technology Researchand Development Program(Grant No .863 -2003AA404140) Science Foundation of National Information Industry Ministry ofChina(Grant No .41308050116)
文摘An electromagnetic microactuator with two stable positions is presented. The actuator consists of a cantilever beam with two free ends, a torsional beam with two fixed ends, planar coils and permanent magnets. The cantilever beam has two stable positions due to the use of permanent magnets. With electromagnetic actuation arising from the planar coils, the cantilever beam will switch from one stable position to the other. Mechanical and magnetic analysis are carried out on the actuator, and the device with a size of 2.2 mm × 2.5 mm is fabricated with the UV-LIGA technology. The test results show that a current pulse with an amplitude of 70 mA is needed for actuator＇ s switching between the two stable states, and the switching time is no more than 6 ms. Displacement of the end of cantilever is about 15 μm.
基金Supported by the National High Technology Research and Development Program of China (No. 2006AA04Z237)the National Natural Science Foundation of China (No. 50775205)
文摘A novel asymmetric optothermal microactuator was developed.A microactuator of 750μm length wasmachined by an excimer laser micromachining system using single layer material.It had an asymmetricstructure consisting of two thin expansion arms with different widths.A laser diode(660nm)was em-ployed as the external power source to activate the microactuator.We introduced a charge coupled device(CCD)-combined optical microscope and a computer system to observe and capture the microactuator' sdeflection and vibration.Experiments have been carried out to check the feasibility of deflection,and thedata of deflection have been measured under different laser power as well as under different pulse frequen-cy.The results show that the actuator can practically generate an obvious lateral deflection or vibration,the maximum could be larger than 20μm.Moreover,the deflection status of the microactuator could becontrolled wirelessly or remotely by changing the laser power and its pulse frequency.
基金supported in part by the National High Technology Research and Development Program of China (Grant No2006AA04z302)
文摘This paper presents a reduced-order model to describe the mechanical behaviour of microbeam-based magnetic devices. The integration for magnetic force is calculated by dividing the microbeam into several segments, and the nonlinear equation set has been developed based on the magnetic circuit principle. In comparison with previous models, the present macromodel accounts for both the micro-magnetic-core reluctance and the coupling between the beam deflection and magnetic force. This macromodel is validated by comparing with the experimental results available in some papers and finite-element solutions.
文摘More and more linear servo systems have been used in servo applications. Direct drive technology can greatly increase the bandwidth and the tracking accuracy. A position servo-system based on linear voice-coil motor was designed for one linear oscillation movement application. Besides the conventional position, speed and current control loops, the speed and acceleration feed-forward control of command position signal were also used. The experimental test proved the correctness of the design, and the system can track the given periodic sinusoid position command signal of 15Hz with high accuracy. The linear voice-coil motor is very suitable for short stroke position tracking application with high dynamic response.
文摘在压电陶瓷等效电学模型的基础上,结合外加驱动信号波形分析了基于惯性-摩擦驱动的球基微驱动器在工作过程中金属球产生逆转现象的原因,建立了金属球的转速及位移模型,采用快速放电回路和加速压电陶瓷放电的方法减小金属球的逆转位移及振动;利用压电陶瓷管作为微驱动元件,设计了基于惯性-摩擦驱动的球基微驱动器,并采用不同频率的三角波信号对所设计微驱动器进行试验测试.结果表明:驱动信号频率越高,微驱动器的振动现象越明显;当驱动信号频率接近、等于或大于微驱动元件(压电陶瓷管)的固有放电周期时,金属球出现无规律运动,导致微驱动器失效;根据1 H z低频信号时的试验结果与计算所得结果基本吻合,证明了所建立的逆转理论模型的合理性.
