In the past decade, micro-electromechanical systems （MEMS）-based thermoelectric infrared （IR） sensors have received considerable attention because of the advances in micromachining technology. This paper presents ...In the past decade, micro-electromechanical systems （MEMS）-based thermoelectric infrared （IR） sensors have received considerable attention because of the advances in micromachining technology. This paper presents a review of MEMS-based thermoelectric IR sensors. The first part describes the physics of the device and discusses the figures of merit. The second part discusses the sensing materials, thermal isolation micro- structures, absorber designs, and packaging methods for these sensors and provides examples. Moreover, the status of sensor implementation technology is examined from a historical perspective by presenting findings from the early years to the most recent findings.展开更多
文摘In the past decade, micro-electromechanical systems （MEMS）-based thermoelectric infrared （IR） sensors have received considerable attention because of the advances in micromachining technology. This paper presents a review of MEMS-based thermoelectric IR sensors. The first part describes the physics of the device and discusses the figures of merit. The second part discusses the sensing materials, thermal isolation micro- structures, absorber designs, and packaging methods for these sensors and provides examples. Moreover, the status of sensor implementation technology is examined from a historical perspective by presenting findings from the early years to the most recent findings.
