采用偏压辅助增强热丝化学气相沉积法(Chemical vapor deposition,CVD),以WC-Co硬质合金为衬底,采用控制沉积参数和添加惰性气体Ar等CVD新工艺,制备性能优良的纳米金刚石薄膜。进一步采用扫描电镜(Scanning electron microscopy,SEM)、...采用偏压辅助增强热丝化学气相沉积法(Chemical vapor deposition,CVD),以WC-Co硬质合金为衬底,采用控制沉积参数和添加惰性气体Ar等CVD新工艺,制备性能优良的纳米金刚石薄膜。进一步采用扫描电镜(Scanning electron microscopy,SEM)、原子力显微镜(Atomic force microscopy,AFM)、拉曼光谱(Raman spectros- copy)、X射线衍射(X-ray diffraction,XRD)和高分辨率透射电镜(High-resolution transmission electron microscopy, HR-TEM)分析了薄膜的纳米效应。研究结果表明:纳米涂层仍然是以金刚石结构为主的多晶体,它晶体颗粒较小(20~80 nm),含有较多的晶界和sp^2结构,涂层表面粗糙度R_a≤50 nm,表面平整光滑,有利于研磨抛光。在此基础上,提出纳米金刚石复合涂层制备新技术,开发研制出各种涂层拉拔模具,在实际生产线上进行了应用,取得了显著的效果。展开更多
基金Project(51005154) supported by the National Natural Science Foundation of ChinaProject(12CG11) supported by the Chenguang Program of Shanghai Municipal Education Commission,ChinaProject(201104271) supported by the China Postdoctoral Science Foundation Special Funded Project