In order to meet the requirements of nondestructive testing of true 3D topography of micro-nano structures,a novel three-dimensional atomic force microscope(3D-AFM)based on flared tip is developed.A high-precision sca...In order to meet the requirements of nondestructive testing of true 3D topography of micro-nano structures,a novel three-dimensional atomic force microscope(3D-AFM)based on flared tip is developed.A high-precision scanning platform is designed to achieve fast servo through moving probe and sample simultaneously,and several combined nanopositioning stages are used to guarantee linearity and orthogonality of displacement.To eliminate the signal deviation caused by AFM-head movement,a traceable optical lever system is designed for cantilever deformation detection.In addition,a method of tailoring the cantilever of commercial probe with flared tip is proposed to reduce the lateral force applied on the tip in measurement.The tailored probe is mounted on the 3D-AFM,and 3D imaging experiments are conducted on different samples by use of adaptive-angle scanning strategy.The results show the roob-mean-square value of the vertical displacement noise(RMS)of the prototype is less than 0.1 nm and the high/width measurement repeatability(peak-to-peak)is less than 2.5 nm.展开更多
Nonlinear distortion introduced by an amplifier when subjected to a multisine excitation decreases the measurement accuracy in many metrological and measurement areas. In this paper, we performed qualitative and quant...Nonlinear distortion introduced by an amplifier when subjected to a multisine excitation decreases the measurement accuracy in many metrological and measurement areas. In this paper, we performed qualitative and quantitative analyses of the nonlinear distortion with the multisine excitations constrained by a constant power spectral density. We present the numerical results with respect to different tone spacings,nonlinear orders, harmonic phases and tone distributions. Moreover, three as-pects of contributions are made to further reveal the distortion mechanism. First, we find that the type Ⅱ components for Schr- oeder-phase multisines distribute uniformly but not all in anti-phase to the type I components for the second order nonlinearity. Second,we simulate the variance of the type I and Ⅱ components and their summation to explain the principle of reducing the type Ⅱ distortion by averaging the results obtained using multiple realizations of random-phase multisines. Third, we observe a special distortion distribution mechanism for the Schroeder-phase multisine excitation The results contribute to a better estima-tion and understanding of the nonlinear distortion.展开更多
基金National Key Research and Development Pragram of China(No.2016YFF0200602)National Natural Science Foundation of China(No.61973233)。
文摘In order to meet the requirements of nondestructive testing of true 3D topography of micro-nano structures,a novel three-dimensional atomic force microscope(3D-AFM)based on flared tip is developed.A high-precision scanning platform is designed to achieve fast servo through moving probe and sample simultaneously,and several combined nanopositioning stages are used to guarantee linearity and orthogonality of displacement.To eliminate the signal deviation caused by AFM-head movement,a traceable optical lever system is designed for cantilever deformation detection.In addition,a method of tailoring the cantilever of commercial probe with flared tip is proposed to reduce the lateral force applied on the tip in measurement.The tailored probe is mounted on the 3D-AFM,and 3D imaging experiments are conducted on different samples by use of adaptive-angle scanning strategy.The results show the roob-mean-square value of the vertical displacement noise(RMS)of the prototype is less than 0.1 nm and the high/width measurement repeatability(peak-to-peak)is less than 2.5 nm.
基金National Natural Science Foundation of China(No.61372041,No.61001034)
文摘Nonlinear distortion introduced by an amplifier when subjected to a multisine excitation decreases the measurement accuracy in many metrological and measurement areas. In this paper, we performed qualitative and quantitative analyses of the nonlinear distortion with the multisine excitations constrained by a constant power spectral density. We present the numerical results with respect to different tone spacings,nonlinear orders, harmonic phases and tone distributions. Moreover, three as-pects of contributions are made to further reveal the distortion mechanism. First, we find that the type Ⅱ components for Schr- oeder-phase multisines distribute uniformly but not all in anti-phase to the type I components for the second order nonlinearity. Second,we simulate the variance of the type I and Ⅱ components and their summation to explain the principle of reducing the type Ⅱ distortion by averaging the results obtained using multiple realizations of random-phase multisines. Third, we observe a special distortion distribution mechanism for the Schroeder-phase multisine excitation The results contribute to a better estima-tion and understanding of the nonlinear distortion.
